合肥国家同步辐射实验室同步辐射光刻研究

同步辐射光刻技术是Ｘ射线光刻技术的重要发展，适用于深亚微米乃至纳米级图形的 超微细加工，特别是ＬＩＧＡ技术的出现大大拓展了同步辐射光刻的应用领域．使它不仅适合于超大规模 集成电路等平面微结构的加工，也适合于具有复杂构造的三维立体结构和器件的制作．文章简要介绍了 ＮＳＲＬ光刻光束线和实验站概况及研究工作进展．     

同步辐射光源

同步辐射光源同步辐射是由高能电子作曲线运动时沿切线方向辐射出的电磁波，它强度高、稳定性好，且光谱连续，可调、波长范围宽，成为极受青睐的新兴光源。近３０年来，同步辐射光源经历了３个发展阶段，第一代为建于７０年代的较低能量的正负电子对撞机，这种同步辐射只...     

同步辐射讲座第四讲同步辐射光50年

自1946年Blewett首次观察到同步辐射光至今已经55年，文章回顾了同步辐射光源的发展历史，着重介绍了同步辐射光源的性质，并简要介绍了同步辐射在生命科学、材料科学、原子分子科学、地球科学和环境科学以及工业等领域中的应用。     

国家同步辐射实验室同步辐射光电子能谱站的新进展

简要地阐述了同步辐射的优越性，介绍了国家同步辐射实验室光电子能谱站与光束线的设备，综述了国内主要用主站工作人员在金属／半导体界面等方面所开展的工作和一些结果。     

合肥国家同步辐射光源

光，或者更普遍地说电磁辐射，是人类观察和研究自然界所不可缺少的工具．同步辐射这种具有许多优异特性的电磁辐射更不例外，虽然发现的时间不长，却已广泛应用于许多科学和技术领域，推动了科学技术的长足进步．我国于１９７８年开始筹建自己的同步辐射光源──合肥国家同步辐射光源．它由一台 ８００ＭｅＶ电子储存环和一台 ２００ＭｅＶ直线加速器注入器组成．它于 １９８４年 １１ 月动工，１９８９年 ４月建成出光，１９９１年６月调试结果，其主要性能指标已达到国际先进水平．本文重点介绍合肥国家同步辐射光源，同时还阐述同步辐射和同步辐射光源的一些基本问题．     

同步辐射的相干模式

在分析了光源相干相体积的基础上，重点研讨了第三代同步辐射中波荡器（ｕｎｄｕｌａｔｏｒ）辐射的相干模式，能谱亮度，相干光子通量等，这对提高光束线相干能量的传输效率和软Ｘ光相干学束线的设计具有重要意义。     

同步辐射及其应用

与经典偶极辐射作对比，本文讨论同步辐射的特性及同步辐射在科学技术领域以及工业，医学等方面的一些主要应用。     

同步辐射全反射XRF实验

本文叙述了同步辐射全反射X射线荧光分析的实验装置和方法，给出了几种标准物质TXRF实验的检出限，我们已在细胞元素谱、体液和水样方面作了一些研究。并对实验结果进行了讨论。     

新一代同步辐射光源及其应用

扼要地介绍了同步辐射的历史和现状，以及在我国建设新一代同步辐射光源的必要性，设计中的上海同步辐射装置（ＳＳＲＦ）在其建成时将具有世界一流的光源性能，和一批覆盖面广，兼顾基础研究，应用研究和产业发展及具有世界先进水平的光束线和实验站。     

氧化镓的同步辐射研究

 利用金刚石对顶砧（DAC）高压装置产生高压，使用体积比为16∶3∶1的甲醇、乙醇和水混合液作为传压介质，通过原位高压同步辐射技术对氧化镓的高压行为进行了研究（0～42.5 GPa）。实验发现在室温下13.3 GPa压力附近，单斜结构的氧化镓发生了结构相变，变成三角结构。相变后镓离子由原来同时位于由氧离子围成的四面体和八面体的中心位置变成只位于八面体的中心位置。卸压后的X射线衍射谱表明，氧化镓又恢复为单斜结构，该相变为可逆相变。     

Early stages of decomposition in Al alloys investigated by X‐ray absorption

We demonstrate the sensitivity of X‐ray absorption fine‐structure (XAFS) measurements to the earliest stages of decomposition in Al alloys, i.e. just a few minutes after quenching. XAFS is one of the few applicable experimental approaches to this regime. Three different AlCu(Mg) samples were investigated by XAFS at the Cu K edge. Significant changes of the XAFS can be detected in the course of the decomposition in these alloys during the first 15 minutes. Actually, these changes correspond to relaxations of the nearest neighbours towards the absorbing Cu atoms. The Fourier transformation of the XAFS spectra thus leads to a pseudo radial distribution function which reflects this relaxation. In addition, XAFS measurements of the S‐phase of AlCuMg are used to decide in favour of the Perlitz and Westgren model for the S‐phase. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

A new cell for X-ray absorption spectroscopy study under high pressure

X-ray absorption fine structure (XAFS) spectroscopy is a powerful technique for the investigation of the local environment around selected atoms in condensed matter. XAFS under pressure is an important method for the synchrotron source. We design a cell for a high pressure XAFS experiment. Sintered boron carbide is used as the anvils of this high pressure cell in order to obtain a full XAFS spectrum free from diffraction peaks. In addition, a hydraulic pump was adopted to make in-suit pressure modulation. High quality XAFS spectra of ZrH2 under high pressure (up to 13 Gpa) were obtained by this cell.     

Characteristics of a tapered undulator for the X‐ray absorption fine‐structure technique at PLS‐II

An in‐vacuum undulator (IVU) with a tapered configuration was installed in the 8C nanoprobe/XAFS beamlime (BL8C) of the Pohang Light Source in Korea for hard X‐ray nanoprobe and X‐ray absorption fine‐structure (XAFS) experiments. It has been operated in planar mode for the nanoprobe experiments, while gap‐scan and tapered modes have been used alternatively for XAFS experiments. To examine the features of the BL8C IVU for XAFS experiments, spectral distributions were obtained theoretically and experimentally as functions of the gap and gap taper. Beam profiles at a cross section of the X‐ray beam were acquired using a slit to visualize the intensity distributions which depend on the gap, degree of tapering and harmonic energies. To demonstrate the effect of tapering around the lower limit of the third‐harmonic energy, V K‐edge XAFS spectra were obtained in each mode. Owing to the large X‐ray intensity variation around this energy, XAFS spectra of the planar and gap‐scan modes show considerable spectral distortions in comparison with the tapered mode. This indicates that the tapered mode, owing to the smooth X‐ray intensity profile at the expense of the highest and most stable intensity, can be an alternative for XAFS experiments where the gap‐scan mode gives a considerable intensity variation; it is also suitable for quick‐XAFS scanning.     

A new cell for X-ray absorption spectroscopy study under high pressure

X-ray absorption fine structure （XAFS） spectroscopy is a powerful technique for the investigation of the local environment around selected atoms in condensed matter. XAFS under pressure is an important method for the synchrotron source. We design a cell for a high pressure XAFS experiment. Sintered boron carbide is used as the anvils of this high pressure cell in order to obtain a full XAFS spectrum free from diffraction peaks. In addition, a hydraulic pump was adopted to make in-suit pressure modulation. High quality XAFS spectra of ZrH2 under high pressure （up to 13 GPa） were obtained by this cell.     

Influence of near-edge processes in the elemental analysis using X-ray emission-based techniques

The near-edge processes, such as X-ray absorption fine structure (XAFS) and resonant Raman scattering (RRS), are not incorporated in the available theoretical attenuation coefficients, which are known to be reliable at energies away from the shell/subshell ionization thresholds of the attenuator element. Theoretical coefficients are generally used to estimate matrix corrections in routine quantitative elemental analysis based on various X-ray emission techniques. A tabulation of characteristic X-ray energies across the periodic table is provided where those X-rays are expected to alter the attenuation coefficients due to XAFS from a particular shell/subshell of the attenuator element. The influence of XAFS to the attenuation coefficient depends upon the atomic environment and the photoelectron wave vector, i.e., difference in energies of incident X-ray and the shell/subshell ionization threshold of the attenuator element. Further, the XAFS at a shell/subshell will significantly alter the total attenuation coefficient if the jump ratio at that shell/subshell is large, e.g., the K shell, L₃ subshell and M₅ subshell. The tabulations can be considered as guidelines so as to know what can be expected due to XAFS in typical photon-induced X-ray emission spectrometry.     

Advances in theoretical and experimental XAFS studies of thermodynamic properties,anharmonic effects and structural determination of fcc crystals

Thermodynamic properties, anharmonic effects and structural determination of fcc crystals have been studied based on the theoretical and experimental Debye–Waller factors presented in terms of cumulant expansion up to the third order, thermal expansion coefficient, X-ray absorption fine structure (XAFS) spectra and their Fourier transform magnitudes. The advances in these studies are performed by the further development of the anharmonic correlated Einstein model primary only for approximating three first XAFS cumulants into the method using that all the considered theoretical and experimental XAFS parameters have been provided based on only the calculated and measured second cumulants. The obtained cumulants describe the anharmonic effects in XAFS contributing to the accurate structural determination. Numerical results for Cu are found to be in good agreement with the experimental values extracted by using the present advanced method and with those obtained by the other measurements.     

Fifteenth International Conference on X-ray Absorption Fine Structure

The 15th International Conference on X-ray Absorption Fine Structure (XAFS15) was held at the Pullman Beijing West Wanda Hotel in Beijing, China, on July 22–28, 2012. The conference was chaired by Ziyu Wu (Chinese Academy of Sciences). In conjunction with XAFS15, the workshop “XAFS theory and nano particles” was held July 18–20, 2012, in Chiba, Japan, and chaired by T. Fujikawa.     

miXAFS: a program for X‐ray absorption fine‐structure data analysis

A new program called miXAFS for the analysis of X‐ray absorption fine‐structure (XAFS) data is presented. miXAFS can analyze the XAFS functions simultaneously for all measured X‐ray absorption edges of the constituent elements in a sample under the constraints for the structural parameters over the edges. The program provides a surface plot of the R‐factor as a function of two structural parameters, which is useful to validate the optimized structural parameters. The structural parameters can be obtained from the XAFS data in a few steps using the setting file and batch process. The program, which is coded in MATLAB and freely available, runs on Macintosh and Windows operating systems. It has a graphical user interface and loads experimental data and XAFS functions in a variety of ASCII data formats.     

Development of dispersive XAFS system for analysis of time‐resolved spatial distribution of electrode reaction

Apparatus for a technique based on the dispersive optics of X‐ray absorption fine structure (XAFS) has been developed at beamline BL‐5 of the Synchrotron Radiation Center of Ritsumeikan University. The vertical axis of the cross section of the synchrotron light is used to disperse the X‐ray energy using a cylindrical polychromator and the horizontal axis is used for the spatially resolved analysis with a pixel array detector. The vertically dispersive XAFS (VDXAFS) instrument was designed to analyze the dynamic changeover of the inhomogeneous electrode reaction of secondary batteries. The line‐shaped X‐ray beam is transmitted through the electrode sample, and then the dispersed transmitted X‐rays are detected by a two‐dimensional detector. An array of XAFS spectra in the linear footprint of the transmitted X‐ray on the sample is obtained with the time resolution of the repetition frequency of the detector. Sequential measurements of the space‐resolved XAFS data are possible with the VDXAFS instrument. The time and spatial resolutions of the VDXAFS instrument depend on the flux density of the available X‐ray beam and the size of the light source, and they were estimated as 1 s and 100 µm, respectively. The electrode reaction of the LiFePO₄ lithium ion battery was analyzed during the constant current charging process and during the charging process after potential jumping.     

Suppression of Bragg reflection glitches of a single‐crystal diamond anvil cell by a polycapillary half‐lens in high‐pressure XAFS spectroscopy

In combination with a single‐crystal diamond anvil cell (DAC), a polycapillary half‐lens (PHL) re‐focusing optics has been used to perform high‐pressure extended X‐ray absorption fine‐structure measurements. It is found that a large divergent X‐ray beam induced by the PHL leads the Bragg glitches from single‐crystal diamond to be broadened significantly and the intensity of the glitches to be reduced strongly so that most of the DAC glitches are efficiently suppressed. The remaining glitches can be easily removed by rotating the DAC by a few degrees with respect to the X‐ray beam. Accurate X‐ray absorption fine‐structure (XAFS) spectra of polycrystalline Ge powder with a glitch‐free energy range from ?200 to 800 eV relative to the Ge absorption edge are obtained using this method at high pressures up to 23.7 GPa, demonstrating the capability of PHL optics in eliminating the DAC glitches for high‐pressure XAFS experiments. This approach brings new possibilities to perform XAFS measurements using a DAC up to ultrahigh pressures.