基于栅控横向PNP双极晶体管的氢氛围中辐照损伤机制

为了研究氢气与辐射感生产物之间的作用关系,以栅控横向PNP双极晶体管为研究对象,分别开展了氢气氛围中浸泡后的辐照实验和辐照后氢气氛围中退火实验,结果表明:氢气进入双极晶体管后会使其辐照损伤增强,并且未浸泡器件辐照后在氢气中退火也会使晶体管辐射损伤增强.基于栅扫描法分离的辐射感生产物结果表明,氢气进入晶体管会使得界面陷阱增多,氧化物陷阱电荷减少,主要原因是氢气进入氧化层会与辐射产生的氧化物陷阱电荷发生反应,产生氢离子,从而使界面陷阱增多.基于该反应机理,建立了包含氢气反应和氢离子产生机制的低剂量率辐照损伤增强效应数值模型,模型仿真得到的界面陷阱及氧化物陷阱电荷面密度数量级和变化趋势均与实验结果一致,进一步验证了氢气在双极器件中辐照反应机理的正确性,为双极器件辐照损伤机制研究和在氢氛围中浸泡作为低剂量率辐射损伤增强效应加速评估方法的建立提供了参考和理论支撑.     

超深亚微米互补金属氧化物半导体器件的剂量率效应

对0.18 μm互补金属氧化物半导体(CMOS)工艺的N型金属氧化物半导体场效应晶体管(NMOSFET)及静态随机存储器(SRAM)开展了不同剂量率下的电离总剂量辐照试验研究. 结果表明: 在相同累积剂量, SRAM的低剂量率辐照损伤要略大于高剂量率辐照的损伤, 并且低剂量率辐照损伤要远大于高剂量率辐照加与低剂量率辐照时间相同的室温退火后的损伤. 虽然NMOSFET 低剂量率辐照损伤略小于高剂量率辐照损伤, 但室温退火后, 高剂量率辐照损伤同样要远小于低剂量率辐照损伤. 研究结果表明0.18 μm CMOS工艺器件的辐射损伤不是时间相关效应. 利用数值模拟的方法提出了解释CMOS器件剂量率效应的理论模型.     

p型金属氧化物半导体场效应晶体管低剂量率辐射损伤增强效应模型研究

对一种非加固4007电路中p型金属氧化物半导体场效应晶体管(PMOSFET)在不同剂量率条件下的电离辐射损伤效应及高剂量率辐照后的退火效应进行了研究. 通过测量不同剂量率条件下PMOSFET的亚阈I-V特性曲线,得到阈值电压漂移量随累积剂量、退火时间的变化关系. 实验发现,此种型号的PMOSFET具有低剂量率辐射损伤增强效应. 通过描述H⁺在氧化层中的输运过程,解释了界面态的形成原因,初步探讨了非加固4007电路中PMOSFET低剂量率辐射损伤增强效应模型. 关键词： p型金属氧化物半导体场效应晶体管 60Co γ射线')" href="#">⁶⁰Co γ射线 电离辐射损伤 低剂量率辐射损伤增强效应     

不同剂量率下锗硅异质结双极晶体管电离损伤效应研究

对于相同制作工艺的NPN锗硅异质结双极晶体管(SiGe HBT), 在不同辐照剂量率下进行⁶⁰Co γ射线的辐照效应与退火特性的研究. 测量结果表明, 两种辐照剂量率下, 随着辐照总剂量增加, 晶体管基极电流增大, 共发射极电流放大倍数降低, 且器件的辐照损伤、性能退化与辐照剂量率相关, 低剂量率下辐照损伤较高剂量率严重. 在经过与低剂量率辐照等时的退火后, 高剂量率下的辐照损伤仍较低剂量率下的损伤低, 即待测SiGeHBT具有明显的低剂量率损伤增强效应(ELDRS). 本文对相关的物理机理进行了探讨分析. 关键词： 锗硅异质结双极晶体管 低剂量率辐照损伤增强 辐照效应     

NMOS器件不同剂量率γ射线辐射响应的理论预估

介绍了利用线性响应理论预估CC4007-NMOS器件在剂量率01，23，44和91rad(Si)/s下的辐射损伤情况，理论预估值和试验结果符合得比较好.利用线性响应理论预估了CC4007-NMOS器件从低剂量率到高剂量率环境下的辐射损伤及25℃长时间退火情况，结果表明，在相同偏压下，高剂量率辐照加室温退火所引起的阈值电压漂移量在误差容许的范围内等于低剂量率辐照的漂移量，两者总的时间相同.利用线性响应理论预估CC4007-NMOS器件在不同剂量率辐照下的失效剂量.     

双极集成电路低剂量率辐射损伤增强效应的高温辐照加速实验

选择了四种典型双极集成电路,在两种不同剂量率下,开展了不同温度的高温辐照加速实验,测量了典型双极集成电路的辐射敏感参数在不同高温辐照下的变化规律。实验结果表明:高温辐照能够给出空间低剂量率辐射损伤增强效应的保守估计,且存在最佳辐照温度,最佳辐照温度随总剂量的增加向低温区漂移,随剂量率的增大向高温区漂移,在相同剂量率和总剂量下,输入级为NPN晶体管的双极集成电路比输入级为PNP晶体管的最佳辐照温度低。     

栅控横向PNP双极晶体管基极电流峰值展宽效应及电荷分离研究

为了对双极器件在电离辐射环境下的损伤机理及加固技术进行深入的研究,对设计制作的不同工艺类型的栅控横向PNP双极晶体管进行了60Co-γ低剂量率辐照试验.结果表明:1)栅控双极晶体管的辐射特性具有很强的工艺相关性,钝化层的存在对于双极晶体管的辐射响应具有很大影响,有钝化层的器件在电离辐射环境中会产生更多的界面态,其抗辐射能力大大减弱;2)针对国产栅控横向PNP晶体管在低剂量率辐照时会发生峰值电流展宽效应,文中对展宽效应潜在机理进行了分析,并针对展宽效应提出了新的分离方法.这不但对设计抗辐射加固器件提供了依据,而且为进一步深入研究双极器件的低剂量率辐射损伤增强效应提供了强有力工具.     

硅双极器件及电路电离总剂量辐照损伤研究

针对硅双极器件及其构成的双极集成电路有着如低剂量率辐照损伤增强效应等不同于其他类型电路的特殊的辐照响应问题, 分析了空间辐射电离总剂量环境及铝屏蔽作用, 双极晶体管及电路总剂量辐照损伤机理, 低剂量率辐照损伤增强效应、规律和电参数变化。通过选取几种典型的双极晶体管和电路进行地面辐照模拟试验和测试, 证明了双极器件及电路的关键参数受辐照影响较大, 特别是对低剂量率辐照损伤增强效应敏感, 低剂量率辐照损伤增强因子基本都大于1.5, 不同双极器件和电路的低剂量率辐照损伤增强效应有着明显的不同, 与器件类型、加工工艺(如氧化层厚度)等密切相关。     

不同发射极面积npn晶体管高低剂量率辐射损伤特性

影响npn晶体管辐射损伤的因素有很多,如晶体管工艺、剂量率以及辐照偏置等.主要研究了三种发射极面积的国产npn晶体管在高低剂量率下的辐射损伤特性,分析了发射极尺寸对辐射损伤的影响.研究结果表明,国产npn晶体管具有低剂量率损伤增强效应,且发现当小电流注入下晶体管的辐射损伤会表现得愈加显著.比较三种发射极尺寸的晶体管辐照响应发现,发射极周长面积比P/A越大时晶体管归一化过剩基极电流ΔI_B/I_B0也越大.详细阐述了npn晶体管辐射损伤机制,从发射极尺寸和晶体管工作电压角度对npn晶体管的加固保证方法进行了探索. 关键词： 发射极面积 国产npn晶体管 剂量率 辐射损伤     

Si_3N_4钝化层对横向PNP双极晶体管电离辐射损伤的影响机理

航天器中电子器件在轨服役期间,会遭受到空间带电粒子及各种射线的辐射环境的显著影响,易于造成电离辐射损伤.本文采用60Coγ射线辐照源,针对有/无Si_3N_4钝化层结构的横向PNP型(LPNP)双极晶体管,开展了电离辐射损伤效应及机理研究.利用KEITHLEY 4200-SCS半导体参数测试仪测试了LPNP晶体管电性能参数(包括Gummel特性曲线和电流增益等).采用深能级瞬态谱分析仪(DLTS),对辐照前后有/无Si_3N_4钝化层结构的LPNP晶体管的电离缺陷进行测试.研究结果表明,在相同吸收剂量条件下,与无Si_3N_4钝化层的晶体管相比,具有Si_3N_4钝化层的LPNP晶体管基极电流退化程度大,并且随吸收剂量的增加,电流增益退化更为显著.通过DLTS分析表明,与无Si_3N_4钝化层的晶体管相比,有Si_3N_4钝化层的晶体管辐射诱导的界面态能级位置更接近于禁带中心.这是由于制备Si_3N_4钝化层时引入了大量的氢所导致,而氢的存在会促使辐射诱导的界面态能级位置更接近于禁带中心,复合率增大,从而加剧了晶体管性能的退化.     

Total ionizing dose effects of domestic Si Ge HBTs under different dose rates

The total ionizing radiation(TID) response of commercial NPN silicon germanium hetero-junction bipolar transistors(Si Ge HBTs) produced domestically are investigated under dose rates of 800 m Gy(Si)/s and 1.3 m Gy(Si)/s with a Co-60 gamma irradiation source. The changes of transistor parameters such as Gummel characteristics, and excess base current before and after irradiation, are examined. The results of the experiments show that for the KT1151, the radiation damage is slightly different under the different dose rates after prolonged annealing, and shows a time dependent effect(TDE). For the KT9041, however, the degradations of low dose rate irradiation is higher than for the high dose rate, demonstrating that there is a potential enhanced low dose rate sensitivity(ELDRS) effect for the KT9041. The possible underlying physical mechanisms of the different dose rates responses induced by the gamma rays are discussed.     

ELDRS and dose-rate dependence of vertical NPN transistor

The enhanced low-dose-rate sensitivity (ELDRS) and dose-rate dependence of vertical NPN transistors are investigated in this article.The results show that the vertical NPN transistors exhibit more degradation at low dose rate,and that this degradation is attributed to the increase on base current.The oxide trapped positive charge near the SiO2-Si interface and interface traps at the interface can contribute to the increase on base current and the two-stage hydrogen mechanism associated with space charge effect can well explain the experimental results.     

ELDRS and dose-rate dependence of vertical NPN transistor

The enhanced low-dose-rate sensitivity (ELDRS) and dose-rate dependence of vertical NPN transistors are investigated in this article. The results show that the vertical NPN transistors exhibit more degradation at low dose rate, and that this degradation is attributed to the increase on base current. The oxide trapped positive charge near the SiO₂-Si interface and interface traps at the interface can contribute to the increase on base current and the two-stage hydrogen mechanism associated with space charge effect can well explain the experimental results.     

Estimation of enhanced low dose rate sensitivity mechanisms using temperature switching irradiation on gate-controlled lateral PNP transistor

The mechanisms occurring when the switched temperature technique is applied, as an accelerated enhanced low dose rate sensitivity(ELDRS) test technique, are investigated in terms of a specially designed gate-controlled lateral PNP transistor(GLPNP) that used to extract the interface traps(Nit) and oxide trapped charges(Not). Electrical characteristics in GLPNP transistors induced by ~(60)Co gamma irradiation are measured in situ as a function of total dose, showing that generation of Nit in the oxide is the primary cause of base current variations for the GLPNP. Based on the analysis of the variations of Nit and Not, with switching the temperature, the properties of accelerated protons release and suppressed protons loss play critical roles in determining the increased Nit formation leading to the base current degradation with dose accumulation. Simultaneously the hydrogen cracking mechanisms responsible for additional protons release are related to the neutralization of Not extending enhanced Nit buildup. In this study the switched temperature irradiation has been employed to conservatively estimate the ELDRS of GLPNP, which provides us with a new insight into the test technique for ELDRS.     

Effects of orientation of substrate on the enhanced low-dose-rate sensitivity (ELDRS) in NPN transistors

The radiation effects and annealing characteristics of two types of domestic NPN bipolar junction transistors, fabricated with different orientations, were investigated under different dose-rate irradiation. The experimental results show that both types of the NPN transistors exhibit remarkable Enhanced Low-Dose-Rate Sensitivity (ELDRS). After irradiation at high or low dose rate, the excess base current of NPN transistors obviously increased, and the current gain would degrade rapidly. Moreover, the decrease of collector current was also observed. The NPN transistor with (111) orientation was more sensitive to ionizing radiation than that with (100) orientation. The underlying mechanisms of various experimental phenomena are discussed in detail in this paper.     

金属-氧化物-半导体场效应管辐射效应模型研究

基于氧化层陷阱电荷以及界面陷阱电荷的产生动力学以及辐射应力损伤的微观机理,推导出了金属-氧化物-半导体场效应管(MOSFET)中辐射应力引起的氧化层陷阱电荷、界面陷阱电荷导致的阈值电压漂移量与辐射剂量之间定量关系的模型. 根据模型可以得到:低剂量情况下,氧化层陷阱电荷与界面陷阱电荷导致的阈值电压漂移量与辐射剂量成正比;高剂量情况下,氧化层陷阱电荷导致的阈值电压漂移量发生饱和, 其峰值与辐射剂量无关,界面陷阱电荷导致的阈值电压漂移量与辐射剂量呈指数关系. 另外,模型还表明氧化层陷阱电荷与界面陷阱电荷在不同的辐射剂量点开始产生饱和现象, 其中界面陷阱电荷先于氧化层陷阱电荷产生饱和现象.最后,用实验验证了该模型的正确性. 该模型可以较为准确地预测辐射应力作用下MOSFET的退化情况.     

Effect of bias condition on heavy ion radiation in bipolar junction transistors

The characteristic degradations in a silicon NPN bipolar junction transistor(BJT) of 3DG142 type are examined under irradiation with 40-MeV chlorine(Cl) ions under forward,grounded,and reverse bias conditions,respectively.Different electrical parameters are in-situ measured during the exposure under each bias condition.From the experimental data,a larger variation of base current(I B) is observed after irradiation at a given value of base-emitter voltage(V BE),while the collector current is slightly affected by irradiation at a given V BE.The gain degradation is affected mostly by the behaviour of the base current.From the experimental data,the variation of current gain in the case of forward bias is much smaller than that in the other conditions.Moreover,for 3DG142 BJT,the current gain degradation in the case of reverse bias is more severe than that in the grounded case at low fluence,while at high fluence,the gain degradation in the reverse bias case becomes smaller than that in the grounded case.