1310 nm高功率超辐射发光二极管的制备及性能研究

为优化1 310 nm超辐射发光二极管输出性能,提高器件输出功率,针对J型波导结构的1 310 nm超辐射发光二极管的波导结构参数及器件散热能力进行研究。结果表明波导刻蚀深度、弯曲角度和绝缘层厚度是影响器件实现高功率输出的重要因素。基于研究结果对超辐射发光二极管器件结构及工艺进行优化,制备出脊宽5μm、弯曲角度8°、刻蚀深度1.7μm、绝缘层厚300 nm的J型超辐射发光二极管。该器件在室温及500 mA连续注入电流条件下,直波导长度1.5 mm时实现10 nm宽的输出光谱,输出功率达到42.2 mW。     

GaAlAs/GaAs非均匀阱宽多量子阱超辐射发光管材料制备及表征

超辐射发光二极管(SLD)具有不同于半导体激光器和普通发光二极管的优异性能。为了制备高功率半导体超辐射发光管,并且得到比较大的光谱宽度、大的单程增益和抑制电流饱和,我们研究设计了具有850nm辐射波长的GaAlAs/GaAs非均匀阱宽多量子阱超辐射发光二极管结构,采用分子束外延(MBE)方法进行了材料制备。同时利用X射线双晶衍射,变温(10～300K)光致发光(PL)等方法检测分析了外延薄膜的结构和光电特性。在光致发光谱线中我们得到了发射波长850nm的谱峰,谱峰范围跨跃800～880nm,双晶回摆曲线结果显示了设计的结构得到实现。在注入电流140mA时,器件输出光谱的半峰全宽可以达到26nm,室温下连续输出功率达到6mW。     

制备工艺对掺杂NaYF4:Er3+,Yb3+发光纳米晶的聚合物光波导放大器性能的影响

制备了NaYF₄：Er³⁺,Yb³⁺纳米晶,表征了纳米晶的形貌,通过物理掺杂的方式将纳米粒子掺杂到SU-8中作为光波导放大器的芯层材料,优化了波导放大器的尺寸,利用旋涂、刻蚀等工艺,在二氧化硅衬底上制备了光波导放大器。实验中用光漂白法和湿法刻蚀两种方法制备光波导放大器,分别给出了两种方法制备的器件的结构、工艺流程、光场模拟结果,并对两种方法制备的器件的放大特性进行了测试。测试结果表明,当980 nm波长的泵浦光功率为241 mW且1 550 nm波长的信号光功率为0.1 mW时,使用湿法刻蚀法制备的放大器得到2.7 dB的相对增益。当980 nm波长的泵浦光功率为235 mW且1 550 nm波长的信号光功率为0.1 mW时,使用光漂白法制备的放大器得到4.5 dB的相对增益。根据以上测试结果,分析了两种工艺对器件性能的影响。     

980nm锥形半导体激光器刻蚀工艺

为了解决半导体激光器传统刻蚀工艺中侧壁陡直度差和器件难以重复制作的问题,利用湿法腐蚀与干法刻蚀相结合的刻蚀手段,对980nm锥形半导体激光器刻蚀工艺进行优化.通过对台面粗糙度与刻蚀速度的研究,确定湿法腐蚀液和浓度配比的差异.并分析电感耦合等离子刻蚀对脊波导与腔破坏凹槽表面形貌的影响.研究结果表明,选择配比为NH_3·H_2O∶H_2O_2∶H_2O=1∶1∶50的腐蚀液进行湿法腐蚀,刻蚀速率约为7nm/s,速率容易控制.且样品表面具有较好的粗糙度和均匀性,利用电感耦合等离子刻蚀得到的脊波导与腔破坏凹槽侧壁陡直度良好,没有出现横向钻蚀的情况.     

GaAIAs／GaAs非均匀阱宽多量子阱超辐射发光管材料制备及表征

超辐射发光二极管（SLD）具有不同于半导体激光器和普通发光二极管的优异性能。为了制备高功率半导体超辐射发光管，并且得到比较大的光谱宽度、大的单程增益和抑制电流饱和，我们研究设计了具有850nm辐射波长的GaAlAs／GaAs非均匀阱宽多量子阱超辐射发光二极管结构，采用分子束外延（MBE）方法进行了材料制备。同时利用X射线双晶衍射，变温（10～300K）光致发光（PL）等方法检测分析了外延薄膜的结构和光电特性。在光致发光谱线中我们得到了发射波长850nm的谱峰，谱峰范围跨跃800～880nm，双晶回摆曲线结果显示了设计的结构得到实现。在注入电流140mA时，器件输出光谱的半峰全宽可以达到26nm，室温下连续输出功率达到6mw。     

1550nm高功率基横模半导体激光器及温度特性

通过引入渐变Al组分和脊型波导的设计,制备了1550 nm高功率AlGaInAs/InP基横模半导体激光器,室温连续工作模式下器件的斜率效率达到0.35 mW/mA,在500 mA的工作电流下,输出功率为138 mW,垂直和水平方向的远场发散角分别为32.9°和11.1°,证明器件具有良好的基横模输出特性。同时,建立高阶模截止条件温度模型,研究了器件在不同温度下功率-电流（P-I）曲线中kink效应与远场发散角steering效应的产生原因,阐述了温度对基横模和高阶模增益的影响机制。通过比较不同腔长器件发生kink效应的电流大小,证明长腔长结构可以有效防止kink效应的发生。     

AlGaAs短波长超辐射集成光源

设计了一种新型半导体集成光源－－ＡｌＧａＡｓ短波长超辐射集成光源。器件为单量子阱、增益导引的氧化物条形结构，采用直接耦合方式将超辐射发光与光放器集成在一起，在脉冲条件下获得了输出功率为５７ｍＷ的超辐射，谱线宽度ＦＷＨＭ为２０ｎｍ，放大器的增益为２１ｄＢ。     

高功率905 nm InGaAs隧道结串联叠层半导体激光器

设计出了隧道结串联叠层半导体激光器结构,采用分子束外延进行激光器材料的外延生长,材料经过光刻、腐蚀、欧姆接触、解理、腔面镀高反射/减反射膜、焊装等工艺,制作成条宽200 m、腔长800 m 的半导体激光器。两隧道结激光器在脉冲宽度100 ns,重复频率10 kHz,30 A工作电流下输出功率达到80 W,峰值发射波长为905.6 nm,器件的阈值电流为0.8 A,水平和垂直方向的发散角分别为7.8和25。     

980nm半导体激光器n型波导结构优化

为了提高980nm半导体激光器的输出功率并获得较小的远场发散角,在非对称波导结构的基础上设计了n型波导结构,即在n型波导中引入高折射率的内波导层。采用理论计算和SimLastip软件模拟对常规非对称波导结构和内波导结构进行了研究。利用分子束外延系统生长980nm内波导结构的外延材料,并制作了激光器。对于条宽为100μm、腔长为1000μm的器件,阈值电流为97mA,斜率效率为1.01W/A;当注入电流为500mA时,远场发散角为29°(垂直向)×8°(水平向),与模拟结果相符。理论计算和实验结果表明:较之于常规非对称波导结构,内波导结构可有效降低光场限制因子,提高输出功率,减小远场发散角。     

808nm大功率分布反馈激光器列阵研制

为提高大功率半导体激光器的泵浦效率,必须降低半导体激光器输出波长随温度的漂移系数。采用MOCVD外延技术、纳米压印和干法刻蚀附加湿法腐蚀等工艺制备了大功率分布反馈激光器列阵。激光器列阵的腔长为1 mm, 25℃时中心波长为808 nm,通过测试不同热沉温度下的P-V-I曲线和光谱图,表明当脉冲工作电流为148 A时,激光器列阵的输出功率可以达到100 W,斜率效率为0.9 W/A,光谱的FWHM为0.5 nm,边模抑制比可以达到40 dB,出射波长随温度的漂移系数为0.056 nm/℃,单列阵波长锁定范围可达50℃,总锁定范围100℃。另外还分析了腔面镀膜对波长锁定效果的影响。     

High power 1.5 μm integrated superluminescent light source with tilted ridge waveguide

In order to further suppress the F–P lasing and increase the superluminescent power, the tilted ridge waveguide was introduced to the integrated superluminescent device [monolithic integration of the superluminescent diode (SLD) with semiconductor optical amplifier (SOA)[. By this means, high power 1.5 m integrated superluminescent light source has been fabricated without anti-reflection (AR) coating. The F–P oscillations between the two cleaved facets were suppressed successfully compared with the device without ridge waveguide. More than 200 mW peak pulsed power was obtained under quasi-CW condition (0.1 ms pulse width, 10% duty cycle) by co-operation of the two integrated sections. The spectral FWHM is 25 nm.     

Short-wavelength InAlGaAs/AlGaAs quantum dot superluminescent diodes

This paper reports the fabrication of J-shaped bent-waveguide superluminescent diodes utilizing an InAlGaAs/AlGaAs quantum dot active region. The emission spectrum of the device is centred at 884 nm with a full width at half maximum of 37 nm and an output power of 18 mW. By incorporating an Al composition into the quantum dot active region, short-wavelength superluminescent diode devices can be obtained. An intersection was found for the light power-injection current curves measured from the straight-waveguide facet and the bent-waveguide facet, respectively. The result is attributed to the conjunct effects of the gain and the additional loss of the bent waveguide. A numerical simulation is performed to verify the qualitative explanation. It is shown that bent waveguide loss is an important factor that affects the output power of J-shaped superluminescent diode devices.     

Ultrawide-bandwidth, superluminescent light-emitting diodes using InAs quantum dots of tuned height

An ultrawide-bandwidth, superluminescent light-emitting diode (SLED) utilizing multiple layers of dots of tuned height is reported. Due to thermal effect, the superluminescent phenomenon is observed only under pulse-mode operation. The device exhibits a 3 dB bandwidth of 190 nm with central wavelength of 1020 nm under continuous-wave (cw) conditions. The maximum corresponding output power achieved in this device under cw and pulsed operation conditions are 0.54 mW and 17 mW, respectively.     

AlGaInAs/InP coupled-circular microlasers

AlGaInAs/InP coupled-circular microlasers with radius of 10- and 2-μm width middle bus waveguide are fabricated by photolithography and inductively coupled plasma etching techniques. Room-temperature continuous-wave single-mode operation is realized with an output power of 0.17 mW and a side-mode suppression ratio of 23 dB at 45 mA. A longitudinal mode interval of 11 nm is obtained from the lasing spectra, and mode Q factor of 6.2×10 3 is estimated from 3-dB width of a minor peak near the threshold current. The mode characteristics are simulated by finite-difference time-domain technique for coupled- circular resonators. The results show that, in addition to the coupled modes, high-radial-order whispering gallery modes with travelling wave behaviors can also have high Q factors in the coupled-circular resonators with a middle bus waveguide.     

Realization of extremely broadband quantum-dot superluminescent light-emitting diodes by rapid thermal-annealing process

The first demonstration, to our knowledge, of the creation of ultrabroadband superluminescent light-emitting diodes using multiple quantum-dot layer structure by rapid thermal-annealing process is reported. The device exhibits a 3 dB emission bandwidth of 146 nm centered at 984 nm with cw output power as high as 15 mW at room temperature corresponding to an extremely small coherence length of 6.6 microm.     

InAs/GaAs submonolayer quantum dot superluminescent diode emitting around 970 nm

According to the InAs/GaAs submonolayer quantum dot active region, we demonstrate a bent-waveguide superluminescent diode emitting at a wavelength of around 970 nm. At a pulsed injection current of 0.5 A, the device exhibits an output power of 24 mW and an emission spectrum centred at 971 nm with a full width at half maximum of 16 nm.     

InAs/GaAs submonolayer quantum-dot superluminescent diodes with active multimode interferometer configuration

With a chirped InAs/GaAs SML-QD (quantum dot) structure serving as the active region, the superluminescent diodes emitting at wavelength of around 970nm are fabricated. By using an active multimode interferometer configuration, these devices exhibit high continue-wave output powers from the narrow ridge waveguides. At continue-wave injection current of 800mA, an output power of 18.5mW, and the single Gaussian-like emission spectrum centered at 972nm with a full width at half maximum of 18nm are obtained.     

Highly efficient, low-threshold monolithic distributed-Bragg-reflector channel waveguide laser in Al2O3:Yb3+

We report the fabrication and performance of a highly efficient, monolithic distributed-Bragg-reflector channel waveguide laser in ytterbium-doped aluminum oxide. The 1?cm long device was fabricated on a standard thermally oxidized silicon substrate and was optically pumped with a 976?nm laser diode. Single-longitudinal-mode and single-polarization operation was achieved at a wavelength of 1021.2?nm. Continuous-wave output powers of up to 47?mW and a launched pump power threshold of 10?mW resulted in a slope efficiency of 67%.