13.56 MHz/2 MHz柱状感性耦合等离子体参数的对比研究

通过Langmuir双探针和发射光谱诊断方法,对比研究了驱动频率为13.56 MHz和2 MHz柱状感性耦合等离子体中电子密度和电子温度的径向分布规律.结果表明:在高频和低频放电中,输入功率的增加对等离子体参数产生了不同的影响,高频放电中主要提升了电子密度,低频放电中则主要提升了电子温度.固定气压为10 Pa,分别由高频和低频驱动时,电子密度的径向分布均为"凸型".而电子温度的分布差异比较明显,高频驱动时,电子温度在腔室中心较为平坦,在边缘略有上升;低频驱动时,电子温度随径向距离的增加而逐渐下降.为了进一步分析造成这种差异的原因,在相同放电条件下采集了氩等离子体的发射光谱图,利用分支比法计算了亚稳态粒子的数密度,发现电子温度的径向分布始终与亚稳态粒子的径向分布相反.继续升高气压到100 Pa,发现不论高频还是低频放电,电子密度的径向分布均从"凸型"转变为"马鞍形",较低气压时电子密度的均匀性有了一定的提升,但低频的均匀性更好.     

Measurements of plasma parameters in capacitively coupled radio frequency plasma from discharge characteristics: Correlation with optical emission spectroscopy

Plasma parameters from the discharge characteristics of a 13.56 MHz capacitively coupled radio frequency Ar plasma are evaluated on the basis of homogeneous discharge model for wide range of operating pressure. The homogeneous discharge model of capacitively coupled radio frequency discharge is modified to take into account the nonlinear plasma series resonance effect. The effect of drift velocity of the electron due to change in radio frequency electric field and operating pressure is also considered. Considerable dependent of plasma parameters on the drift velocity of the electron as well as on the plasma series resonance effect are observed in low pressure. An irregular variation of calculated plasma density with operating pressure is observed, which is reconfirmed with optical emission spectroscopy.     

Thermal and induced flow characteristics of radio frequency surface dielectric barrier discharge plasma actuation at atmospheric pressure

Thermal and induced flow velocity characteristics of radio frequency(RF) surface dielectric barrier discharge(SDBD)plasma actuation are experimentally investigated in this paper. The spatial and temporal distributions of the dielectric surface temperature are measured with the infrared thermography at atmospheric pressure. In the spanwise direction, the highest dielectric surface temperature is acquired at the center of the high voltage electrode, while it reduces gradually along the chordwise direction. The maximum temperature of the dielectric surface raises rapidly once discharge begins.After several seconds(typically 100 s), the temperature reaches equilibrium among the actuator's surface, plasma, and surrounding air. The maximum dielectric surface temperature is higher than that powered by an AC power supply in dozens of k Hz. Influences of the duty cycle and the input frequency on the thermal characteristics are analyzed. When the duty cycle increases, the maximum dielectric surface temperature increases linearly. However, the maximum dielectric surface temperature increases nonlinearly when the input frequency varies from 0.47 MHz to 1.61 MHz. The induced flow velocity of the RF SDBD actuator is 0.25 m/s.     

60MHz电容耦合等离子体中电子能量分布函数特性研究

甚高频(频率大于30 MHz)耦合放电源由于能产生大面积高密度的等离子体而受到了人们的广泛关注. 采用电流、电压探针以及朗缪尔探针诊断技术对60MHz射频激发产生的容性耦合等离子体的放电特性及电子行为进行了研究. 实验结果表明,等离子体的等效电阻/电容随着射频输入功率的增加而减小/增加;等离子体中电子行为不仅依赖于射频输入功率,还与放电气压密切相关;放电气压的增加导致电子能量概率分布函数(EEPF)从双温Maxwellian分布向Druyvesteyn分布转变,而且转变气压远低于文献所报道的数值,这主要是由于在60MHz容性耦合等离子体中电子反弹共振加热效率大为降低. 关键词： 甚高频容性耦合等离子体 朗缪尔探针诊断 电子加热模式     

Independent UHF plasma source and possibility of filling open magnetic trap

A stationary UHF plasma source, its characteristics and possibility of filling open magnetic trap with plasma injected from it have been described. Plasma is created in the source at frequency of 2400 MHz (supplied power is up to 150 W) in the electron cyclotron resonance (ECR) regime under working gas pressure 10^–5–10^–2 Torr. By changing discharge conditions one can change the injected plasma density from 10⁹ to 10¹² cm^–3, at the temperatureT _e=2–10 eV. The possibility of efficient plasma injection from the source into the open magnetic trap of various configurations is shown experimentally. Plasma characteristics in the trap are presented under various experimental conditions. It is established that plasma parameters can be easily changed in the trap.     

Characteristics of a dual‐radio‐frequency cylindrical inductively coupled plasma

The plasma parameters such as electron density, effective electron temperature, plasma potential, and uniformity are investigated in a new dual‐frequency cylindrical inductively coupled plasma (ICP) source operating at two frequencies (2 and 13.56 MHz) and two antennas (a two‐turn high‐frequency antenna and a six‐turn low‐frequency (LF) antenna). It is found that the electron density increases with 2 MHz power, whereas the electron temperature and plasma potential decrease with 2 MHz power at a fixed 13.56 MHz power. Moreover, the plasma uniformity can be improved by adjusting the LF power. These results indicate that a dual‐frequency synergistic discharge in a cylindrical ICP can produce a high‐density, low‐potential, low‐effective‐electron‐temperature, and uniform plasma.     

N_2-H_2容性耦合等离子体电非对称效应的particle-in-cell/Monte Carlo模拟

H_2-N_2混合气体电容性耦合射频放电在有机低介电系数材料刻蚀中具潜在研究意义.采用paxticle-incell/Monte Carlo模型模拟了双频(13.56 MHz/27.12 MHz)电压源分别接在结构对称的两个电极上的H_2-N_2容性耦合等离子体特征,研究了其电非对称效应.模拟结果表明,通过调节两谐波间的相位角θ,可以改变其电场、等离子体密度、离子流密度的轴向分布及离子轰击电极的能量分布.当相位角θ为0°时,低频电极(晶片)附近主要离子(H_3~+)的密度最小,离子(H_3~+,H_2~+,H~+)轰击低频电极的流密度及平均能量最高;当θ从0°变化90°时,低频电极的自偏压从-103V到106V近似线性增加,轰击电极的离子流密度变化约±18%,H~+离子轰击低频电极的最大能量约减小2.5倍,轰击电极的平均能量约变化2倍,表明氢离子能量和离子流几乎能独立控制.     

Discharge characteristics in plasma display cell at high frequency

We present the experimental and simulation studies of the glow discharge plasma in a macroscopic AC plasma display panel cell operating at a high frequency. We find that at high frequencies the plasma from the previous pulse has a significant influence on the discharge properties. The xenon excitation efficiency is larger than that at low frequencies.The discharge mode and efficiency at high frequencies have been discussed in this paper.     

Thermal ionization instability of an air discharge plasma in a microwave field

Results are presented from experimental studies of the initial stage of an air discharge initiated in a linearly polarized quasi-optical microwave beam. The discharge was excited at an air pressure at which the electron-neutral collision frequency in the discharge plasma was considerably higher than the circular frequency of the electromagnetic field and at a microwave field amplitude close to the threshold field for air breakdown. The experiments revealed relatively bright plasma channels stretched along the microwave electric field. The development rate of these channels and their characteristic transverse dimensions are estimated. A comparison of the experimental data and theoretical estimates indicates that the channels observed arise due to the onset of thermal ionization instability in the microwave discharge plasma.     

气压对于低气压双频容性耦合Ar/O2 等离子体放电特性影响的研究

 研究了气压对双射频氩氧混合等离子体电子温度和电子密度的影响。在13.56MHz低频功率和94.92MHz高频功率固定为60W和氩氧气体比为1:9的情况下，利用发射光谱法分析了气压不同时氩氧混合等离子体的放电光谱中的特征谱线的变化规律。使用一维质点网格法(PIC-MC)静电模型计算了电子温度和电子密度。结果表明：电子温度随着气压的增加先降低后升高，与实验结果趋势相吻合；电子密度随着气压的增加先增大后减小。     

Target plasma formation by UHF power

The properties of plasma injected into an open magnetic trap of uniform field from an independent UHF source have been investigated. Plasma is created in the UHF source at the frequency of 2400 MHz (power input 150 W) in the electron cyclotron resonance (ECR) regime at the pressure of neutral argon (10⁻⁵−10⁻²) torr. It is established that a rather quiescent target plasma with controlled density within the range of (2 × 10⁸−2 × 10¹²) cm⁻³ and temperature 2–3eV is accumulated in the trap. It turned out that plasma lifetime in the trap is determined by a classical mechanism of particle escape at the expense of collisions, at fixed value of magnetic field in the trap it practically is not changed with the variation of neutral gas pressure and reaches the value ≈ 4×10⁻³ s at the magnetic field strength in the trap equal 1600 Oe.     

甚高频电容耦合氢等离子体特性研究

采用高H₂稀释的SiH₄等离子体放电, 特别是甚高频等离子体增强化学气相沉积技术是当前高速制备优质微晶硅薄膜的主流方法. 尽管在实验上取得了很大的突破, 但其沉积机理一直是研究的热点和难点. 本文通过建立二维时变的轴对称模型,在75 MHz放电频率下, 对与微晶硅沉积非常相关的甚高频电容耦合氢等离子体放电进行了数值模拟, 研究了沉积参数对等离子体特性的影响, 并与光发射谱(OES)在线监测结果进行了比较. 结果表明: 电子浓度 n_e在等离子体体层中间区域最大, 而电子温度 T_e及H_α与H_β的数密度在体层和鞘层界面附近取极大值; 当气压从1 Torr (1 Torr=133.322 Pa)增大至5 Torr时, 等离子体电势单调降低, 在体层中间区域 n_e先快速增大然后逐渐减小, T_e先下降后趋于稳定; 随着放电功率从30 W增大到70 W, 电子浓度 n_e及H_α与H_β的数密度均线性增大, 而电子温度 T_e基本保持不变; OES在线分析结果与模拟结果符合得很好.     

高通鸟笼线圈激发螺旋波等离子体特性研究

研制了高通鸟笼线圈,使用氩气作为工质气体对射频天线的工作性能进行了初步评估。利用COMSOL5.4模拟出了鸟笼天线在13.56MHz的工作频率下,电场和磁场呈线性极化分布。对鸟笼线圈进行了电路结构解剖,推导出了其谐振频率计算公式。利用热耦合红外测温仪测试了正常工作状态下的鸟笼线圈外表温度明显低于传统射频天线,电容器最高温度仅65.8°。使用光谱仪对螺旋波等离子体放电光谱特性进行诊断。通过朗缪尔探针诊断了不同压强和磁场强度下螺旋波等离子体密度,在1.0Pa、600Gs、射频功率700W条件下等离子体密度达到1.62×10¹⁸m^-3。诊断了正向功率和反向功率对应的等离子体密度,其与磁滞现象变化趋势雷同。测试了螺旋波等离子体的径向密度分布,其在轴心处密度达到最高。探究了无磁场条件下等离子体特性,其密度值不会发生大幅度跃迁,纵向磁场是引发螺旋波等离子体放电的关键因素,低压条件下有利于得到更低的电子温度,最低达到2.67eV。表明鸟笼线圈低热耗、高馈入的特性使其在激发大体积的高密度螺旋波等离子体方面具有明显优势,可以投入到下一阶段氢气螺旋波等离子体的激...     

Two-dimensional modeling of a micro-cell plasma in Xe driven byhigh frequency

Two-dimensional simulation of a micro-cell plasma driven by high frequency at 13.56 MHz is described in Xe. The minimum sustaining voltage (V_s)_min in an ideal infinite parallel plates at high frequency is first discussed as a function of both pd and fd (f the applied frequency, d the electrode distance, and p the gas pressure). As decreasing d,(V_s)_min increases at fixed f, while (V_s)_min decreases with increasing fd at fixed pd in a high frequency discharge under the condition of a spatial ion trapping. A capability for maintaining a micro-cell plasma is investigated under fd<υ(d_e)/π for different two-dimensional geometry of the micro cell (υ(d_e) is the effective drift velocity of electrons). The influence of the secondary electron from the electrode becomes important for the maintenance of a microcell plasma and emission efficiency. A powered ring electrode and ground plate system realizes the micro-cell plasma with high density at 13.56 MHz     

Electrode surface erosion in a high-frequency discharge plasma

The surface erosion of electrodes made of different materials in the plasma of a high-frequency discharge, which is used for pumping ion lasers at a frequency of 10 MHz, is investigated. It is found that the erosion is due to blistering. The effect of the electrode temperature and material, as well as of the gas type, on the erosion evolution under typical operating conditions of a gas discharge tube is studied. The concentration of blistering products (dust particles) in the discharge is estimated in the framework of geometrical optics. Ways to prevent blistering in the discharge under such conditions are suggested.     

等离子体刻蚀工艺的物理基础

介绍了等离子体刻蚀工艺背景以及有关等离子体刻蚀机理的研究进展，综述了等离子体刻蚀机理的研究方法，着重阐述了电容耦合放电和电感耦合放电等离子体物理特性，特别是双频电容耦合放电等离子体和等离子体鞘层研究中的关键问题。     

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma

A one-dimensional self-consistent calculation model of capacitively coupled plasma(CCP) discharge and electromagnetic wave propagation is developed to solve the plasma characteristics and electromagnetic wave transmission attenuation.Numerical simulation results show that the peak electron number density of argon is about 12 times higher than that of helium, and that the electron number density increases with the augment of pressure, radio frequency(RF) power, and RF frequency. However, the electron number density first increases and then decreases as the discharge gap increases. The transmission attenuation of electromagnetic wave in argon discharge plasma is 8.5-d B higher than that of helium. At the same time, the transmission attenuation increases with the augment of the RF power and RF frequency, but it does not increase or decrease monotonically with the increase of gas pressure and discharge gap. The electromagnetic wave absorption frequency band of the argon discharge plasma under the optimal parameters in this paper can reach the Ku band. It is concluded that the argon CCP discharge under the optimal discharge parameters has great potential applications in plasma stealth.     

Diagnostics of an inductively coupled plasma in oxygen

Spatial time-integrated and space-time resolved profiles of excited atoms of oxygen were measured by optical emission spectroscopy for inductively coupled plasma (ICP) in oxygen. The discharge was sustained by a single turn coil supplied by 13.56 MHz RF generator delivering 100 and 200 W of power. The spatial emission profiles give the anatomy of the discharge required in order to understand the basic kinetics of ICP. Two types of nonuniformities are observed, azimuthal anisotropy and radial nonuniformity, both caused by spatially dependent energy supply to the electrons. Our experimental results show that oxygen is much more affected by azimuthal anisotropy and radial nonuniformity than argon. It is due to a different role of metastable atoms in kinetics of excitation, whereby stepwise excitation in oxygen is less probable than in argon. Optical emission data are supplemented by Langmuir probe measurements of electron densities and plasma potentials. Electrons gain energy from the time varying fields close to the coil, and the energy is not redistributed along the radius before it is dissipated in excitation, thus the observations are not consistent with the nonlocal theory predictions for the range of pressures, geometry, and power covered in this paper     

Aerodynamic actuation characteristics of radio-frequency discharge plasma and control of supersonic flow

In this paper, aerodynamic actuation characteristics of radio-frequency(RF) discharge plasma are studied and a method is proposed for shock wave control based on RF discharge. Under the static condition, a RF diffuse glow discharge can be observed; under the supersonic inflow, the plasma is blown downstream but remains continuous and stable.Time-resolved schlieren is used for flow field visualization. It is found that RF discharge not only leads to continuous energy deposition on the electrode surface but also induces a compression wave. Under the supersonic inflow condition, a weak oblique shock wave is induced by discharge. Experimental results of the shock wave control indicate that the applied actuation can disperse the bottom structure of the ramp-induced oblique shock wave, which is also observed in the extracted shock wave structure after image processing. More importantly, this control effect can be maintained steadily due to the continuous high-frequency(MHz) discharge. Finally, correlations for schlieren images and numerical simulations are employed to further explore the flow control mechanism. It is observed that the vortex in the boundary layer increases after the application of actuation, meaning that the boundary layer in the downstream of the actuation position is thickened. This is equivalent to covering a layer of low-density smooth wall around the compression corner and on the ramp surface, thereby weakening the compressibility at the compression corner. Our results demonstrate the ability of RF plasma aerodynamic actuation to control the supersonic airflow.     

Study on measurement of dispersive characteristics of higher order mode Lamb waves

The dispersive characteristics of higher order mode Lamb waves (HOMLW) excited by interdigital transducers (IDT) are measured and analyzed, which are necessary for designing micro-sensor in ultrahigh frequency (UHF). A measurement system is set up, in which dispersive characteristics of HOMLW are obtained by the method of transform between frequency and time domains. The characteristics of amplitude-frequency and phase-frequency of Lamb wave are auto-measured by the system. By IFFT, the pulse response of the IDT device was obtained. Different modes were separated in time domain and dispersive curve of each mode is calculated by FFT. The best mode is chosen to design the micro-sensor in UHF. The phase velocity of HOMLW is greater than the surface wave (SAW) velocity and an oscillator in higher frequency can be made, so the absolute sensitivity of micro-sensor can be increased. In this paper, the dispersive characteristics of HOMLW excited by an IDT in a 127.86 degrees rotated Y-cut, X propagating lithium niobate plate is analyzed. An oscillator using a(13) mode is made, the phase velocity of which is measured about 19,652 m/s when h/lambda=0.94 (h=plate thickness, lambda=wavelength).