小型激光等离子体软X线－真空紫外辐射的研究

设计了一种小型激光等离子体软Ｘ线－真空紫外光源。该光源辐射强度高、波段覆盖宽、光谱连续平滑，其重复性、稳定性均优于±４．５％。适合在非同步辐射的一般实验室中使用。在亚微米光刻、软Ｘ射线显微术、真空紫外光谱学、薄膜光学常数测试等研究及应用技术领域具有广泛的实用价值。本文探讨了光源的辐射机制，给出了较理想的光谱测试结果。     

激光等离子体光源软X射线反射率计

介绍了所研制的激光等离子体光源软X射线反射率计,该反射率计由激光等离子体光源、掠入射光栅单色仪、样品室、真空系统、样品台、光电探测系统和计算机控制系统组成,工作波段8～30 nm,测量样品的最大尺寸为130 mm×120 mm×120 mm(长×宽×高),可以利用这台反射率计对软X射线波段光栅、滤光片和多层膜反射镜等光学元件进行测量和评估。为检验反射率计的性能指标,利用该反射率计对本室研制的软X射线多层膜反射镜的反射率进行了测量,测量结果与理论计算结果符合较好,反射率测量重复性为±0.6%。     

大气遥感远紫外光谱仪绝对光谱辐照度响应度定标方法研究

主要针对可应用于空间高层大气遥感的远紫外光谱仪的光谱辐照度响应度定标方法进行研究。针对远紫外波段光谱测试标准装置少,实验系统所需真空度高,实验稳定性难以维持,传统漫反射板和积分球辐亮度定标方法在远紫外波段局限性大、难以利用等特点,研究了适用于远紫外光谱仪器的光谱辐照度绝对辐射定标方法,搭建了相应的真空实验系统,以一台远紫外光谱仪原理样机为对象对研究方法进行了实验验证。实验系统以标准氘灯、真空紫外单色仪和准直系统组成照射系统,将出射准直光辐照度用标准探测器进行标定,三者共同组成了标准光谱辐照度光源;利用该光源照射原理样机并读出相应信号,最终获得光谱辐照度响应度,从而实现了利用标准探测器进行照度传递的远紫外光谱仪器绝对光谱辐射定标,有效的进行了仪器定标。该方法定标不确定度约为7.7%,对远紫外波段空间高层大气遥感光谱仪的地面辐射定标研究具有重要意义。     

大气/真空环境紫外臭氧垂直探测仪光谱辐照度定标研究

为进一步提高紫外臭氧垂直探测仪(SBUS)在轨探测及数据反演精度,提出了SBUS地面定标的一系列改进方案,其中为实现地面定标与在轨工作环境一致的全波段真空辐射定标是改进的第一项。通过构建SBUS大气/真空光谱辐照度响应度比对测试装置,实测了两种环境下SBUS整机对同一光源的光谱辐照度响应。结果显示,在250～300nm波段,真空/大气相对偏差约0.8%;在300～400nm波段,真空/大气比对结果随波长变化,最大偏差略高于15%。而仪器250～400nm波段定标环境引入的单项不确定度,真空定标比以往大气定标减小了1.8%。理论分析及实验验证后发现SBUS反射元件Al+MgF2膜层在真空/大气下光谱反射率会发生变化,从而证实了SBUS在真空环境下定标的必要性。     

Fe靶激光等离子体25～60nm波段光谱实验研究

以McPHERSON247型掠入射软X射线 真空紫外单色仪配合5900Magnum通道电子倍增器,测量了Fe靶在高真空环境下的纳秒激光等离子体25～60nm波段的EUV光谱,单色仪理论光谱分辨率Δλ≤0.038nm,波长扫描间隔0.1nm。在上述波段内测得了FeVI及FeV的强发射线丛,认证出14根强谱线。     

星载遥感仪器太阳漫透射板紫外辐照特性

空间遥感仪器的漫透射板受太阳真空紫外辐照而导致的半球透射率变化将影响仪器在轨辐射定标结果。分析了太阳紫外辐射光谱特点及漫透射板在轨工作的紫外辐照剂量,利用标准氘灯作为光源模拟太阳115~200nm的紫外光谱,在特定距离下对紫外熔石英漫透射板进行了辐照实验。太阳等效紫外辐照48h后,熔石英漫透射板半球透射率在250~1000nm波段产生了不同程度的衰减,其中,紫外波段半球透射率衰减程度略高,250nm处衰减约为3%,近红外波段衰减程度略低,1000nm处衰减约为1%,对漫透射板进行清洗后,半球透射率基本恢复到最初状态。实验结果初步表明,漫透射板表层污染是引起半球透射率衰减的主要因素,该结果将对空间遥感仪器太阳漫透射板防护、在轨定标与衰减修正具有重要意义。     

气体靶激光等离子体软X-射线源实验研究

介绍了一种无碎屑、高亮度、高工作频率的气体靶激光等离子体软X 射线源。其喷气阀门由压电陶瓷驱动 ,工作频率可达到 40 0Hz。与金属靶激光等离子体软X 射线源相比 ,此光源无碎屑。与喷嘴由电磁阀控制的气体靶激光等离子体软X 射线源相比 ,它有较高的工作频率。一工作在模拟模式的通道电子倍增器被用于探测来自光源的软X 射线辐射 ,其输出信号经过一电荷灵敏前置放大器进一步放大变成电压脉冲信号 ,脉冲幅度与输入电荷灵敏前置放大器的电量成正比。实验测得CO2 ,Xe和Kr在 8～ 2 2nm软X 射线投影光刻常用波段的光谱辐射特性。CO2 光谱包括类锂和类铍离子跃迁形成的线谱 ,Xe光谱是多电荷氙离子 4d 5f,4d 4f,4d 6p和 4d 5p跃迁所形成的光谱。Kr气体靶光谱包括类铜离子、类镍离子、类钴离子和类铁离子跃迁形成的线谱和连续谱。     

光谱学 激光光谱学

O433．54 2005042493 Fe靶激光等离子体25～60 nm波段光谱实验研究=Ex- perimental research on the spectra of iron-target laser-pro- duced plasma in the 25～60 nm band[刊,中]／张大威(中科院长春光机所,吉林,长春(130033)),齐立红…／／光学技术,-2005,31(1),-14-16 以McPHERSON 247型掠入射软X射线-真空紫外单色仪配合5900 Magnum通道电子倍增器,测量了Fe靶     

多方位/多波段地球临边紫外成像仪辐射特性研究

针对多方位/多波段临边紫外成像仪的结构特点及辐射定标的难点,提出了一种分割仪器视场定标再整合定标数据的方式。通过比较仪器全视场与分割视场照明条件下探测器相同像素点输出值的大小,得出各视场之间的相互影响量基本在仪器自身的测量重复性误差1%之内,从而证明了分割视场定标方式的可行性。对临边紫外成像仪分割视场定标结果显示,紫外290、310、355nm三个波段的合成标准不确定度分别为3.93%、3.90%、3.84%,符合目前遥感仪器紫外波段辐射定标不确定度3%~5%的范围。临边紫外成像仪分割视场定标方式的成功实施为解决超大视场以及更加复杂的遥感仪器辐射定标提供了新的指导。     

用卤钨灯对激光诱导击穿光谱探测系统进行绝对效率标定（英文）

基于辐射度学理论搭建了用于激光诱导击穿光谱探测系统的绝对效率标定装置.用卤钨灯配备紫外玻璃滤光片和熔融石英漫射片作为标定的标准光源,标定了配备Czerny-Turner型紫外波段光谱仪的激光诱导等离子体光谱探测系统.测得了系统在310~385nm波长范围内的绝对光谱响应,不确定度小于7%(在标准偏差为2的条件下).绝对效率标定可为激光诱导击穿光谱探测系统硬件评估提供一种手段.     

Physical and chemical modifications of PET surface using a laser-plasma EUV source

Extreme ultraviolet (EUV) radiation is the electromagnetic radiation ranging from vacuum ultraviolet to soft X-rays. A single EUV photon carries enough energy to ionize any atom or molecule. The penetration depth of the radiation in any material is very short, ranging from tens to hundreds nanometers. Intense EUV pulses can remove material from the surface or modify its morphology or/and chemical structure. In this work, the radiation from a laser-plasma EUV source based on a double-stream gas-puff target was used for surface modification of polyethylene terephthalate (PET). The PET samples were irradiated with the EUV pulses emitted from krypton plasma and focused with a gold-plated ellipsoidal collector. The spectrum of the focused radiation covered the wavelength range from 9 to 70 nm. The PET samples were irradiated for 1 s–2 min at a 10-Hz repetition rate. Surface morphology of polymer samples after irradiation was investigated using a scanning electron microscope. Changes in chemical surface structure of the irradiated samples were investigated using an X-ray photoelectron spectroscopy. Different kinds of surface microstructures were obtained depending on the EUV fluence in a single pulse and the total EUV fluence. XPS measurements also revealed a modification of the chemical structure.     

Testing technology of vacuum ultraviolet spectral radiance北大核心CSCD

The spectral radiance of vacuum ultraviolet (UV) target is of crucial significance to plenty of researches including deep space exploration and spacecraft damage test. Two types of test systems and methods for vacuum UV light sources were studied. Through the research of test method for vacuum UV spectral radiance, a corresponding test system was developed, which included vacuum UV standard light source, optical imaging system, light splitting module, vacuum UV detector module, vacuum chamber and data processing system. According to the direct measurement method and the comparative method, the spectral radiance of deuterium lamps was tested and analyzed, the influencing factors and the relative index error of vacuum UV spectral radiance were discussed, and the accurate measurement of vacuum UV spectral radiance in the five wavelength ranges of 121.2 nm, 135.6 nm, 160 nm, 180 nm, 200 nm at 0.01 μW/cm2·nm·sr~1 μW/ cm2·nm·sr was realized. The repeatability of the measurement is 0.001 34, which shows that the proposed test system can realize the test of vacuum UV signal. © 2022 Editorial office of Journal of Applied Optics. All rights reserved.     

紫外真空紫外傅里叶变换光谱仪

研制了新型的由分束耦合器、“猫眼”后向反射光学系统、稳频激光辅助采样系统和光电探测器等组成的紫外真空紫外傅里叶变换光谱仪 ,光谱测量范围为 170nm～ 6 0 0nm ,30 0nm处分辨率高于 1.5× 10 5。光谱仪结构紧凑 ,可精确探测紫外真空紫外波段物质的发射及吸收光谱 ,尤其适合与同步辐射源对接完成相关的光谱分析。     

紫外双光栅光谱仪结构设计与波长精度分析

为了满足太阳光谱在170～380 nm波段的精确观测需求,设计了波长重复性精度优于±0.02 nm的紫外双光栅光谱仪。波长扫描机构是双光栅光谱仪的关键组件,根据凹面光栅色散原理,将光学设计指标转换为波长扫描机构设计的输入参数,分析了影响光谱仪波长重复性精度的误差源。根据分析结果得知,丝杠的重复定位误差是影响波长重复性的主要误差源。选用重复定位精度为±2μm的丝杠设计了波长扫描机构,并对光谱仪整机进行了设计。以汞灯光源对光谱仪的波长重复性指标进行了验证实验。实验结果表明,设计的光谱仪波长重复性介于-0.005～+0.007 nm之间,满足波长重复性优于±0.02 nm的指标要求。     

Soft X-ray emissions by high-current vacuum discharges

Soft X-ray emissions by Z-pinch discharge between vacuum spark electrodes are examined. Mainly aluminum and molybdenum were utilized to generate soft X-rays, and emissions resulted for pulse currents of about 150 kA. These emissions increased as the discharge current increased. A large X-ray intensity was obtained when a spherical anode and a conical cathode were used. A stable spot plasma was produced for an electrode separation distance of 2 mm. For molybdenum, the X-ray emission of the 0.52-nm line and continuous X-rays of 0.65-1.2 nm were observed. The X-ray continuum was assumed to be a recombination continuum. For aluminum alloy containing magnesium, the 0.62-, 0.66-, 0.72-, 0.78-, and 0.92-nm lines were observed. The experimental results indicate that vacuum spark is a potential exposure source for X-ray lithography     

Ultraviolet emission properties of ZnO film with zinc deficiency by SS CVD

A-b axis orientation ZnO film on silicon (1 0 0) substrate has been prepared by a single source chemical vapor deposition technique. X-ray photoelectron spectroscopy results revealed that the film was very close to stoichiometry but with a small amount of zinc deficiency. Temperature-dependent (10-300 K) ultraviolet photoluminescence of the film was presented. Comparing the photon energy separation of the several groups in the near band edge ultraviolet luminescence bands, as well as the variation of the relative intensities and the shift of the luminescence lines at different temperatures, free-, bound-exciton and its assisted phonon emission were observed, which corresponded to the mechanism of the ultraviolet emission properties. A strong ultraviolet emission resulting from the recombination of free-exciton was observed at 300 K photoluminescence spectrum examined in atmosphere environment. Contrasted to the relatively weak ultraviolet emission of the film in vacuum, atmosphere environment was found to be an important contribution to the strong ultraviolet emission of the film.     

New scheme for positron accumulation in ultrahigh vacuum

A new positron accumulation scheme compatible with ultrahigh vacuum conditions has been developed, which is realized by preparing a high density electron plasma as high as approximately 10(11) cm(-3) and an ion cloud as energy absorbers. The present accumulation rate normalized by the intensity of 22Na positron source is (3.6+/-0.3)x10(2)e(+)/s/mCi, which is more than one and a half orders of magnitude higher than other ultrahigh vacuum compatible schemes so far reported.     

激光等离子体软X射线光源光谱强度测量方法

提出了一种新的探测和测量激光等离子体软X射线源光谱强度的方法。该方法使用通道电子倍增器和定标过的硅光电二极管为探测器 ,前者是非标准探测器 ,后者为标准探测器。应用电荷灵敏前置放大器测量探测器产生的电量 ,并以高分辨率的光谱仪为分光元件 ,在已知光栅效率、通道电子倍增器增益、硅光电二极管能量响应的条件下 ,给出了计算激光等离子体软X射线源在某一波长光谱强度的公式