激光等离子体软X射线光源光谱强度测量方法

提出了一种新的探测和测量激光等离子体软X射线源光谱强度的方法。该方法使用通道电子倍增器和定标过的硅光电二极管为探测器 ,前者是非标准探测器 ,后者为标准探测器。应用电荷灵敏前置放大器测量探测器产生的电量 ,并以高分辨率的光谱仪为分光元件 ,在已知光栅效率、通道电子倍增器增益、硅光电二极管能量响应的条件下 ,给出了计算激光等离子体软X射线源在某一波长光谱强度的公式     

软X射线-真空紫外波段光谱光源研究

介绍长春光学精密机械与物理研究所进行的软X射线-真空紫外波段光谱光源研究工作。研制成功的壁稳氩弧光源光谱辐射稳定性和重复性达±0.3%,可作标准辐射源,用于真空紫外波段仪器光谱强度绝对辐射定标。研制成功的潘宁(Penning)光源、双等离子体光源和空心阴极光源,可以覆盖从十几个nm至几十nm波段范围,光谱辐射稳定性和重复性达±1.0%,提供不同工作气体在该波段的原子和离子线谱,用于光谱仪器的波长定标。所研制的激光等离子体光源,尤其是近期研制成功的无污染微液滴喷射靶激光等离子体光源,可以提供较高亮度的软X射线辐射,13.0 nm处激光-软X射线转换效率达0.75%／2π·sr／2%带宽,适合于光刻和该波段辐射计量研究。     

无碎屑激光等离子体软X射线源的研究及应用前景

分析了常规金属靶激光等离子体源产生固体碎屑的原因及其对软Ｘ射线光学元件的危害，介绍了近年来发展起来的无碎屑激光等离子体软Ｘ射线源，归纳了无碎屑激光等离子体软Ｘ射线源的几种形式和特点，并且描述了这种新型光源在软Ｘ射线显微术及光刻术中的应用．     

铜到钼的类钠离子能级结构及软X射线光谱理论计算

本文采用Hartree-Fock自洽场方法,从理论上计算了铜到钼的类钠离子1s~22s~22p~6nl(n=3～6,l=O～5)各能级能量。给出了有可能实现软X射线激光的跃迁(5g—4f,5f—4d,6g—4f,6f—4d)的光谱性质:跃迁波长、振子强度,并和实验值进行了比较,跃迁波长的相对误差不超过千分之二。从计算结果可知,Se的6f—4d跃迁,Br的6g—4f跃迁,Zr的5f—4l跃迁,Nb的5g—4f跃迁都已进入水窗波段。     

类锂钙和钾离子X射线激光的实验研究

探索进入“水窗”波段以寻求X射线激光在近期的科学技术应用,是当前实验室X射光线激研究的一个重要目标.采用复合泵浦方案,我们曾用较低的驱动激光功率首次实现了类锂硅离子5f—3d(8.884nm),5d—3p(8.728nm)跃迁软X射线激光,并第一次发现了类锂硅离子的6f—3d(7.583nm)和6d—3p(7.464nm)新的X射线激光跃迁.最近,我们进一步完成了线聚焦激光辐照CaF_2和KCl平板靶的实验,探索了沿类锂离子等电子数序,将软X射线激光推进至更短波长的现实可能性,实现了类锂钙和类锂钾4f—3d跃迁的软X射线激光,波长分别为5.77nm和6.47nm,增益系数分别达到4.3cm~(-1)和1.6cm~(-1).同时也观察到了类氢氟Hα(8.09 nm)的增益,增益系数为1.4cm~(-1).实验结果进一步显示了复合泵浦类锂离子方案在实现更短波长X射线激光方面的潜力.     

类锂-AI~(+10)离子4f-3d跃迁的软X射线ASE增益实验

在六路激光等离子体装置上已成功地进行了复合泵浦机制的软X射线自发发射放大(ASE)的演示实验.利用自制的针孔透射光栅谱仪,巳观测到激光产生的线状等离子体中,类理-Al~(+10)离子的4f-3d跃迁(154.7(?))的ASE增益放大.测量了一组不同长度线状等离子体的类锂-Al~(+10)离子4f-3跃迁线沿轴线发射的时间积分谱线强度.结果表明,该谱线发射强度随等离子体长度呈指数式增长,相应的增益系数为3.7±0.9cm~(-1),其最大增益长度积约为2.7.     

冷冻靶激光等离子体软X射线源

报道了以固态ＣＯ２作为靶材的一种新型激光等离子体软Ｘ射线源，与常规金属靶激光等离子体软Ｘ射线源相比，它是一种低污染的光源，深入研究正在进行中。     

类锂硅离子软X射线激光的空间特性

本文报道类锂硅离子软X射线激光的空间分布特性,研究表明软X射线激光的最佳增益在离靶面约300μm的中等等离子体密度区,而临近靶面的高密度区增益则较小.     

纯热传导冷却产生软X射线激光

本文通过n_e=1×10~(19)cm~(-3)的热等离子体,在纯热传导冷却机制下的计算,得到了等离子体温度的时空变化,并运用碰撞-辐射模型计算了在这种条件下,类锂铝离子4f-3d,5f-3d跃迁的增益系数,计算表明:只要有合适的初始条件,用纯热传导冷却机制,也能产生软X射线激光增益.     

半圆柱壳槽靶的激光等离子体软X射线光谱发射特点的研究

通常对一种半圆柱壳槽靶与平面靶激光等离子体软X射线光谱空间分布特点和流体动力学行为的比较,证实这种槽形靶可以有效地提高槽区内等离子体温度,从而增强该区域内的软X＇射线光谱发射.     

Influence of Kr doping on neon soft X-rays emission in fast miniature plasma focus device

An investigation on the possibility of enhancement of soft X-ray (SXR) (900–1600 eV) emission from a fast miniature plasma focus (FMPF) device of 235 J (at 14 kV) storage energy through doping of operating gas was performed. Neon (Ne), the operating gaseous medium, was doped with krypton (Kr) in different volumetric ratios at various operating pressures ranging from 2 to 14 mbar. The 1% Kr doping increased the average optimum SXR emission efficiency from 0.47% to 0.6% without enhancing the hard X-ray (HXR) (>1600 eV) emission. The Kr doping influenced the major pinching characteristics such as focusing efficiency and time to pinch with consequential effect on X-ray emissions. Synchronous operation of the 4 pseudo-spark gap (PSG) switches was mandatory for efficient discharge current delivery to the electrodes. A drastic improvement in the pinching efficiency was obtained with replacement of old and worn out PSG switches with the new ones. Optical imaging of current sheath dynamics was performed using gated ICCD camera to verify the normal operation of the device after the PSGs replacement. A numerical simulation analysis on the 2 cm long stainless steel tapered anode, used in this study, was done to predict the maximum SXR emission efficiency and the peak operating gas pressure. An analysis on the amount of SXR fluence generated at the source position and the proportion of it reaching the target position is also reported.     

软X射线投影光刻技术及其发展

软X射线投影光刻的研究近年来取得了突破性进展，所采用的新型光学系统由于无污染激光等离子光源及分辨率大视场投影光刻系统组成，该技术多采用无应力光学装调工艺、深亚纳米级的镜面加工和多层膜制备技术及低缺陷反射式掩摸技术，该技术还采用表面成像光刻胶技术并涉及到精密扫描机构等技术，本文介绍了这一技术的发展历史，关键技术以及研究进展。     

The Spectrum of Ne-Like Ar and the 4d-4p Transition of Kr7+ at 45 nm in Capillary Discharge Experiment

Capillary discharge soft X-ray laser, which is always called “table-top soft X-ray laser,” is one of the effective methods for miniaturization. The method is deemed to have experimental facility with practicable value. With capillary discharge mechanism, Ne-like Ar at 46.9 nm soft X-ray laser has been obtained, and the experimental results and the analyses are reported in this paper. Experimentally, a current pulse with the amplitude of 20 kA was used to excite three different gases: Ar, Kr, and N₂. The signals were detected by an X-ray diode (XRD), and the emission spectra were monitored with a Rowland spectrograph. The J = 0–1 line and one 3d-3p transition of Ne-like Ar were detected, with wavelengths of 46.9 nm and 48.5 nm, respectively. Adjusting the pure Ar to the appropriate pressure, the authors found that the J = 0–1 line gains amplification, while 3d-3p does not. When the Ar pressure was 26 Pa, the J = 0–1 line completely dominated the spectrum. N₂ and Kr were used as the materials of capillary discharge respectively. The spike signal was obtained by XRD, then the spectrum was detected by Rowland spectrograph, and the spectrum of Kr⁷⁺ was found.     

等离子体密度对放电等离子体极紫外光源影响研究

等离子体状态是决定极紫外光源功率和转换效率的最重要因素之一,理论和实验研究上Xe气流量对放电等离子体极紫外光源辐射谱和等离子体状态的影响,对于优化光源工作条件具有重要的意义。理论上,采用碰撞-辐射模型,模拟了非局部热力学平衡条件下,不同电离度的离子丰度分布随电子温度和离子密度的变化。推导了Xe8+~Xe11+离子4d-5p跃迁谱线强度随电子温度的变化趋势。实验上,采用毛细管放电机制,利用罗兰圆谱仪测量和分析了不同等离子体密度条件下,放电等离子体极紫外光谱的变化,分析了Xe气流量对等离子体状态的影响。理论和实验结果表明： 相同的电流条件下,等离子体箍缩时的平均电子温度随着Xe气流量的增加而降低。对于4d-5p跃迁,低电离度离子与高电离度离子谱线强度的比值随着温度的增加而减少。电流28 kA、Xe气流量0.4 sccm(cm3·min-1)时,等离子体Z 箍缩平均电子温度位于29 eV附近。Xe气流量增加时,受离子密度和最佳电子温度的影响,实现Xe10+离子4d-5p跃迁13.5 nm(2%带宽)辐射谱线强度最优化的Xe气流量位于0.3~0.4 sccm之间。     

铜、硒离子的类钠伴线发射

利用高分辩的高次衍射线方法,本文系统地分析了铜、硒激光等离子体的软x射线光谱及它与原子序数的关系,得到了比文献[1][2]更为精确、可靠的类钠离子软x射线波长和发射规律.     

Narrow band X-ray emission in the water-window spectral region from a laser heated gold copper mix-<Emphasis Type="Italic">Z</Emphasis> plasma

A laser plasma X-ray source of narrow spectral range in the water-window region, is reported using a 50–50 (atomic fraction) mixture of gold-copper mix-Z planar target. Plasma was produced using the second harmonic beam of an Nd:glass laser focused to an intensity ～10¹³ W/cm² on the target. The spectrum of the plasma radiation transmitted through a free-standing 0.4 μm aluminium/0.9 μm vanadium X-ray filter foil was measured to lie in the narrow-band of 24–26 Å. This provides a debris-free X-ray dose of 2–3 mJ/sr which can be used for single shot X-ray imaging of live biological samples.     

激光等离子体脉冲软X光标定源

 利用神光Ⅱ上激光与等离子体相互作用得到的软X光，建立了基于多层镜的四通道软X光单色器系统。研究了光源的性能，测量了光源强度、单色器系统稳定性、相应通道的一致性。研究表明，采用多层镜作为脉冲光源的分光元件，可以得到具有较好单色性的强脉冲软X 光标定源。光源的光子能量为253 eV和820 eV，两能道的光源强度分别为1.8×10¹⁹ photon/(s·cm²)和3.2×10¹⁹ photon/(s·cm²)。在该标定源上可以实现XRD、平面镜、多层镜、透射光栅和滤片的标定。