| 激光等离子体光源软X射线反射率计 |
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| 引用本文： | 陈波,尼启良,曹继红.激光等离子体光源软X射线反射率计[J].光谱学与光谱分析,2005,25(3):453-455. |
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| 作者姓名： | 陈波 尼启良 曹继红 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,应用光学国家重点实验室,吉林,长春,130022 |
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| 基金项目： | 国家自然科学基金 (60 2 2 30 0 3)，中国科学院创新基金项目资助 |
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| 摘 要： | 介绍了所研制的激光等离子体光源软X射线反射率计 ,该反射率计由激光等离子体光源、掠入射光栅单色仪、样品室、真空系统、样品台、光电探测系统和计算机控制系统组成 ,工作波段 8～ 30nm ,测量样品的最大尺寸为 130mm× 12 0mm× 12 0mm(长×宽×高 ) ,可以利用这台反射率计对软X射线波段光栅、滤光片和多层膜反射镜等光学元件进行测量和评估。为检验反射率计的性能指标 ,利用该反射率计对本室研制的软X射线多层膜反射镜的反射率进行了测量 ,测量结果与理论计算结果符合较好 ,反射率测量重复性为± 0. 6 %。
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| 关 键 词： | 反射率 光栅 多层膜反射镜 激光等离子体 光电探测系统 光源 波段 软X射线 入射光 理论计算 |
| 文章编号： | 1000-0593(2005)03-0453-03 |
| 修稿时间： | 2003年8月8日 |
Soft X-Ray Reflectometer with Laser Produced Plasma Source |
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| CHEN Bo,NI Qi-liang,CAO Ji-hong.Soft X-Ray Reflectometer with Laser Produced Plasma Source[J].Spectroscopy and Spectral Analysis,2005,25(3):453-455. |
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| Authors: | CHEN Bo NI Qi-liang CAO Ji-hong |
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| Institution: | State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China. |
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| Abstract: | A soft X-ray reflectometor with laser-produced plasma source developed in the authorial lab is presented for the measurements of efficiencies of gratings, transmission of filter and reflectance of multilayer coatings. The reflectometer is composed of a soft X-ray laser-produced plasma source, a grazing incidence monochromator with a constant deviation angle, a vacuum chamber, a sample table, a photo-electronic unit and a computer controlling unit. The working wavelength is from 8 to 30 nm and the maximum sample size is 130 mm long by 120 mm wide by 120 mm high. In order to test the performances of the reflectometer, the reflectivity of multilayer coatings was obtained by using this device. The measured results agree well with the theoretical calculation. The reproducibility of measured reflectance is +/-0.6%. |
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| Keywords: | Soft X-ray Laser-produced plasma source Reflectometer |
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