高功率、高效率808nm半导体激光器阵列

通过设计高效率808 nm非对称宽波导外延结构,减少P型波导层和包层的自由载流子光吸收,实现腔内光吸收损耗为0.63 cm~(-1).制备的808 nm半导体激光器阵列在室温25?C下,实现驱动电流135 A,工作电压1.76 V,连续输出功率大于150 W,斜率效率高达1.25 W/A,中心波长809.3 nm,器件最高电光转换效率为65.5%,这是目前国内报道的808 nm半导体激光器阵列的最高电光转换效率,达到国际同类器件最好水平.     

980nm半导体激光器n型波导结构优化

为了提高980nm半导体激光器的输出功率并获得较小的远场发散角,在非对称波导结构的基础上设计了n型波导结构,即在n型波导中引入高折射率的内波导层。采用理论计算和SimLastip软件模拟对常规非对称波导结构和内波导结构进行了研究。利用分子束外延系统生长980nm内波导结构的外延材料,并制作了激光器。对于条宽为100μm、腔长为1000μm的器件,阈值电流为97mA,斜率效率为1.01W/A;当注入电流为500mA时,远场发散角为29°(垂直向)×8°(水平向),与模拟结果相符。理论计算和实验结果表明:较之于常规非对称波导结构,内波导结构可有效降低光场限制因子,提高输出功率,减小远场发散角。     

2μm InGaAsSb/AlGaAsSb双波导半导体激光器的结构设计

为了提高2μm InGaAsSb/AlGaAsSb半导体激光器的最大输出功率,减小远场垂直发散角并实现单模稳定输出,在非对称波导结构的基础上设计了具有双波导结构的2μm InGaAsSb/AlGaAsSb半导体激光器.同时,利用相关的物理模型及SimLastip程序语言构建了InGaAsSb/AlGaAsSb Macro文件,利用SimLastip软件对具有不同结构的2μm InGaAsSb/AlGaAsSb半导体激光器进行了数值模拟分析.研究结果表明,双波导结构可以将半导体激光器的有源区限制因子由0.019 2减小至0.011 3,器件的最大输出功率提高了1.7倍,远场垂直发散角由57°减小到48°,器件性能得到了改善.     

905 nm多有源区半导体激光器芯片结构优化设计

905 nm多有源区激光器主要用作车载激光雷达的信号源。为了进一步降低激光器的阈值电流、提高斜率效率,对激光器芯片结构进行优化。在非对称大光腔波导外延结构的三有源区激光器中引入隔离沟道结构,通过控制隔离沟道的刻蚀深度和间距来抑制电流的横向扩散效应,提升器件性能。所制备的腔长为1 mm、电极宽度为110μm、沟道刻蚀深度为7.0μm,间距为125μm的三有源区器件,能够将阈值电流降低到0.64 A,得到3.58 W/A的斜率效率,并在0.1%电流脉冲占空比的工作条件下获得134 W的峰值功率。     

大功率780 nm半导体激光器的设计与制备

设计并制备了一款780 nm半导体激光器,并进行了外腔反馈锁模研究。利用金属有机化学气相沉积技术制备了激光器外延层,采用GaAsP/GaInP作为量子阱/波导层有源区,限制层采用低折射率AlGaInP材料。采用超高真空解理钝化技术,在激光器腔面蒸镀无定形ZnSe钝化层。未钝化器件在输出功率2.5 W时发生腔面灾变损伤（COD）,钝化后器件未发生COD现象,电流在10 A时输出功率10.1 W,电光转换效率54%。体布拉格光栅（VBG）外腔锁定前后,器件的光谱半峰全宽分别为2.6 nm和0.06 nm,VBG变温调控波长范围约230 pm。     

12 W高功率高可靠性915 nm半导体激光器设计与制作

本文设计并制作了一种高效率、高可靠性的915 nm半导体激光器。半导体激光器是光纤激光器的关键部件,为了最大限度地提高器件的电光转换效率,在设计上采用双非对称大光腔波导结构,同时对量子阱结构、波导结构、掺杂以及器件结构进行了系统优化。器件模拟表明,在25℃环境温度下,器件的最高电光转换效率达到67%。采用金属有机气相沉积(MOCVD)法进行材料生长,随后制备了发光区域宽度为95μm、腔长为4.8 mm的激光芯片。测试表明,封装后器件的效率以及其它参数指标达到国际先进水平,在室温下阈值电流为1 A,斜率效率为1.18 W/A,最高电光转换效率达66.5%,输出功率12 W时,电光转换效率达到64.3%,测试结果与器件理论模拟高度吻合。经过约6 000 h的寿命加速测试,器件功率没有出现衰减,表明制作的高功率915 nm激光芯片具有很高的可靠性。     

外延叠层多有源区激光器的结构优化设计

基于分离的非对称大光腔结构,对激射波长为905nm的外延叠层三有源区大功率脉冲半导体激光器的外延结构进行优化设计。通过优化近场光场模式、自由载流子吸收损耗、相邻发光区之间距离以及掺杂浓度分布等关键参数,提高了器件的脉冲峰值功率,降低了内损耗和远场垂直发散角。研制的1mm腔长、100μm条宽的三有源区大功率半导体激光器,经由150ns脉宽和6.67kHz重复频率的脉冲测试,在34.5A脉冲电流强度驱动下实现了122W的脉冲峰值功率输出。器件的斜率效率为3.54 W/A,单个发光区实现了折合91.75%的内量子效率和2.05cm-1的内损耗,水平方向和垂直方向上的半峰全宽远场发散角分别为7.8°和27.6°。     

隧道再生四有源区大功率半导体激光器

利用隧道再生原理实现半导体激光器在低注入电流下的高光功率输出。通过传输矩阵法对隧道再生四有源区光耦合半导体激光器的模式特性进行了理论分析,指出器件的激射模式应为TE3,且存在最优的内限制层厚度。利用金属有机物化学气相沉积(MOCVD)外延法生长了内限制层厚度分别为0.3μm、0.5μm和0.7μm的器件。内限制层厚度等于0.5μm的器件的P-I特性最好,腔面未镀膜时,在2 A的注入电流下其光输出功率大于5 W,P/I斜率达2.74 W/A。结果表明,为了得到尽可能高的光输出功率,需要合理地设计隧道再生多有源区激光器的内限制层厚度。     

大功率780 nm单管连续输出16 W和巴条连续输出180 W半导体激光器

设计并制备了780 nm大功率半导体激光器的单管和巴条。采用金属有机化学气相沉积技术制备的外延结构,分别使用GaAsP和GaInP作为量子阱和波导层,限制层是具有高带隙的AlGaInP材料。量子阱与波导层带隙0.15 eV,波导层与限制层带隙0.28 eV,抑制了载流子泄露。1.55μm厚非对称大光学腔波导结构抑制快轴高阶模,同时缓解腔面损伤问题。为进一步提高腔面损伤阈值,利用超高真空解理和钝化技术,在腔面上沉积了非晶ZnSe钝化层。条宽150μm、腔长4 mm的单管器件,在电流为15 A时,输出连续功率16.3 W未出现COD现象,斜率效率达到1.27 W/A,电光转换效率为58%,慢轴发散角9.9°,光谱半高宽为1.81 nm。填充因子为40%的厘米巴条,在192 A下实现连续输出功率180 W,电光转换效率为50.7%,光谱宽度仅为2.2 nm。     

低暗电流InGaAs-MSM光电探测器

MSM(金属-半导体-金属)型光电探测器的较低寄生电容和高带宽的特点使得其应用广泛,可用于空间通信、遥感等多方面,但暗电流偏大仍是制约其发展的重要因素.为此,本文研制了100×100μm2面积的InGaAs-MSM光电探测器,通过设计InAlGaAs/InGaAs短周期超晶格和InAlAs肖特基势垒增强结构,将器件暗电流密度降至0.6pA/μm2(5V偏置),改善了目前同类器件的信噪比.对器件光电参数进行了表征:3dB带宽6.8GHz,上升沿58.8ps,1550nm波段响应度0.55A/W,光吸收区域外量子效率88%.分析了短周期超晶格和肖特基势垒增强层对暗电流的抑制机理.     

GaAs基高功率半导体激光器单管耦合研究

设计了一种高亮度、高功率半导体激光器单管耦合输出模块, 采用波长为975nm的10W的GaAs基半导体激光器, 将半导体激光器输出光束耦合进数值孔径0.18、纤芯直径105μm的光纤中, 获得10A电流下的输出功率为9.37W, 耦合效率为94.3%, 亮度为1.64MW/(cm²·str)。     

Watt-level Pr^3+:YLF deep red laser pumped by a fiber-coupled blue LD module or a single-emitter blue LD

A power-scaled laser operation of Pr:YLi F4(YLF)crystal at 720.9 nm pumped by a 443.6 nm laser diode(LD)module was demonstrated.The 20 W module was used to pump the Pr:YLF crystal,and a maximum output power of 3.03 W with slope efficiency of 30.04%was obtained.In addition,a 5 W blue LD was also used to pump the Pr:YLF laser,and a maximum output power of 0.72 W was obtained at room temperature.The output power was limited by the wavelength mismatch between the single-emitter LD and the absorption peak of the crystal.     

808 nm高占空比大功率半导体激光器阵列

 采用渐变折射率分别限制单量子阱宽波导结构,通过降低非辐射复合、有源层载流子泄露、散射和吸收损耗来提高出射效率和降低激光阈值电流,从而提高半导体激光器阵列的输出功率;同时使P面具有更高的粒子掺杂数密度,优化N面合金条件,降低半导体激光器的串联电阻,降低焦耳热,提高了半导体激光器阵列的转换效率。利用金属有机化学气相淀积技术生长GaInAsP/InGaP/AlGaAs渐变折射率分别限制单量子阱宽波导结构激光器材料,利用该材料制成半导体激光线阵列在20%高占空比的输入电流下,半导体激光器的输出峰值功率达到189.64 W(180 A),斜率效率为1.1 W/A,中心波长为805.0 nm,阈值电流为7.6 A,电光转换效率最高可达55.4%;在1%占空比的输入电流下,阵列的输出峰值功率可达324.9 W(300 A),斜率效率为1.11 W/A,阈值电流为7.8 A,电光转化效率最高达55.6%,中心波长为804.5 nm。     

Efficient continuous-wave eye-safe region signal output from intra-cavity singly resonant optical parametric oscillator

We report an efficient continuous-wave (CW) tunable intra-cavity singly resonant optical parametric oscillator based on the multi-period periodically poled lithium niobate and using a laser diode (LD) end-pumped CW 1064 nm Nd:YVO₄ laser as the pump source. A highly efficiency CW operation is realized through a careful cavity design for mode matching and thermal stability. The signal tuning range is 1401-1500 nm obtained by varying the domain period. The maximum output power of 2.2 W at 1500 nm is obtained with a 17.1 W 808 nm LD power and the corresponding conversion efficiency is 12.9%.     

A High Conversion Efficiency Q-Switched Intracavity Nd:YVO_4/KTA Optical Parametric Oscillator under Direct Diode Pumping at 880nm

We report a high conversion efficiency Q-switched Nd:YVO_4/KTiOAsO_4(KTA) intracavity optical parametric oscillator(IOPO) operating near 3.5 um based on direct 880 nm laser diode(LD) pumping. A maximum average idler output power of 2.6 W with a pulse width of about 7.9 ns is achieved under an absorbed LD power of 45.4 W at a pulse repetition rate(PRR) of 10 kHz. The maximum optical-optical conversion efficiency from LD power to OPO mid-infrared(MIR) output of 6.74% is achieved. To our knowledge, this is the highest conversion efficiency for a KTA-IOPO by exploiting a Q-switched laser as the parent fundamental pump source. The beam quality factors M~2 of the MIR beam at the full output power with a PRR of 10 kHz are within 2.12 in both the horizontal and vertical directions, indicating a near Gaussian mode.     

Efficient Nd:YVO_4 laser in-band pumped by wavelength-locked 913.9-nm laser diode and Q-switch operation

An efficient 1064-nm Nd:YVO_4laser in-band pumped by a wavelength-locked laser diode(LD) at 913.9 nm was demonstrated. The maximum continuous wave(CW) output power of 23.4 W at 1064 nm was realized with the incident pump power of 40 W, corresponding to a total optical-to-optical efficiency of 58.5%. This is to the best of our knowledge the highest total optical-to-optical efficiency and output power of Nd:YVO_4laser in-band pumped by a 913.9-nm laser diode.The Q-switched operation of this laser was also investigated. Through a contrast experiment of pumping at 808 nm, the experimental results showed that an Nd:YVO_4laser in-band pumped by a wavelength-locked LD at 913.9 nm had excellent pulse stability and beam quality for high repetition rate Q-switching operation.     

High efficient diode-pumped Tm:YAP laser at room temperature

A high efficient diode-pumped Tm:YAP laser is reported. The maximum output power at 1981 nm is 5.2 W and the slope efficiency is 30%. Unpolarized absorption near 800 nm and unpolarized fluorescence spectra near 1800 nm pumped by laser diode (LD) are measured. In addition, the relationship between operation temperature and output power is discussed.     

LD泵浦高功率高斜效率Nd:YVO4声光调Q激光器

 报道了采用激光二极管(LD)端面泵浦Nd:YVO₄双端键合晶体高平均功率高斜效率1 064 nm声光调Q激光器。通过对大功率泵浦情况下激光晶体热透镜效应进行分析和估算,优化了模式匹配及热稳腔结构参数,实现了稳定的高功率高斜效率准连续脉冲激光输出。在泵浦功率46.8 W、最高重复频率50 kHz下,获得最大平均输出功率17.6 W,光-光转换效率为37.6%,斜效率达70.1%,脉冲宽度51.3 ns;在最低重复频率10 kHz下,获得最大单脉冲能量0.91 mJ,峰值功率为46.2 kW,脉冲宽度为19.8 ns。     

5.1-ps passively mode-locked Nd:Gd0.42Y0.58VO4 laser with a LT-GaAs absorber

We propose a diode end-pumped passively mode-locked Nd: Gd0.42 Y0.58 VO4 (Nd: GdYVO4) laser at 1064nm using a GaAs absorber grown at low temperature as the output coupler.Stable continuous-wave (CW) mode locking with a 5.1-ps pulse duration at a repetition rate of 113MHz is obtained.The maximum average output power is 2.29W at the incident pump power of 12W with the slope efficiency of about 24.8%.     

激光二极管抽运的Nd:YVO_4连续自拉曼1175nm激光器

报道了采用激光二极管端面抽运的Nd:YVO4晶体连续自拉曼激光器的实验研究.通过对晶体掺杂浓度及晶体结构的选择优化,减轻自拉曼晶体的热效应,实现了结构紧凑的1175 nm连续自拉曼激光器的高效运转.最终以两端键合的复合Nd:YVO4晶体作为自拉曼介质,在25.5 W的抽运功率下,获得了最高3.4 W的1175 nm连续拉曼光输出,光光转换效率为13.3%,拉曼阈值低至2.21 W,斜效率为14.6%.