1064 nm纳秒脉冲激光诱导硅表面微结构研究

利用Nd:YAG纳秒激光(波长为1064 nm)在不同气氛(空气、N₂,真空)中对单晶硅进行累积脉冲辐照,研究了表面微结构的演化情况.在激光辐照的初始阶段,与532和355 nm纳秒脉冲激光在硅表面诱导出波纹结构不同,1064 nm脉冲激光诱导出了微孔结构和折断线结构,并且硅的晶面取向不同,相应的折断线结构也不同.对于Si(111)面,两条折线交角为120°或60°,形成网状;而对于Si(100)面,两条折断线正交,从而将表面分成了15—20 μm的矩形块.结果表明,微孔结构的生长过程主要与相爆炸有关,而折断线的形成主要是热应力作用的结果.不同气氛对微结构形成的影响表明,刻蚀率和生长率与微结构的形成有密切的关系. 关键词： 纳秒激光 硅的微结构 相爆炸 热应力     

纳秒激光单脉冲烧蚀硅表面的超快成像研究

利用ICCD可以在纳秒时间尺度下成像的特点,以飞秒准连续激光产生的超短脉冲光为探测光,对纳秒激光单脉冲烧蚀硅靶表面的演化过程进行动态监测。在能量密度为50J／cm^2时,捕获了纳秒单脉冲激光烧蚀硅靶面过程中等离子体演化的时间分辨图像。图像表明,纳秒激光烧蚀硅靶产生的等离子体开始时密度大,膨胀速度快,当纳秒激光脉冲过后,等离子体不再产生,并且其膨胀速度不再增加,直至完全消失。     

用于宽带啁啾脉冲光参量放大系统精确同步的新方法

基于非共线光参量放大,以波长800 nm飞秒激光的倍频光为抽运光,以激光二极管640 nm连续波激光为信号光,产生了与800 nm飞秒激光精确同步的无直流本底的1064 nm脉冲光。实验结果显示该1064 nm的光脉冲在脉冲能量和空间光束质量上均可作为1064 nm波长脉冲放大器的种子光。仅通过一级简单紧凑的非共线参量放大就可实现光周期量级的光参量啁啾脉冲放大系统的抽运激光和种子光的精确同步。     

纳秒激光烧蚀铝材料的二维数值模拟

为了探索纳秒脉冲强激光与材料的相互作用机理,建立了二维数值模型,利用有限差分法对纳秒激光脉冲烧蚀金属铝的温度场进行了数值模拟.通过对比不同脉宽、光斑和能量下激光引起的温度场随时间的演化,发现脉冲的前期温度升高比后期快.等温图显示中心温度升高最快,烧蚀轮廓与激光束形状相似,烧蚀深度达1—5 μm.脉宽越长,烧蚀越窄和越深,光斑越大,烧蚀越宽和越浅.数值研究表明,1)激光的脉冲形状、脉宽和功率密度直接影响烧蚀的形状和深度,2)激光功率密度在10⁹ W/cm²量级烧蚀     

皮秒双脉冲LA-LIBS对合金样品的微损元素分析

研究了基于一台皮秒Nd∶YAG激光器实现合金样品的双脉冲激光剥离-激光诱导击穿光谱(LA-LIBS)微损元素分析。实验采用低能量的532 nm二倍频激光烧蚀并剥离出微量样品,然后采用较高能量的延时1064 nm激光对剥离出的样品进行二次激发,以增强等离子体中的原子辐射强度和提高光谱检测灵敏度。实验分别研究了烧蚀激光脉冲和二次激发光脉冲的能量对信号强度的影响。在烧蚀激光脉冲能量为10 μJ,二次激发光脉冲能量为2.5 mJ的条件下,LA-LIBS中Cu Ⅰ 324.75 nm原子谱线的强度与单脉冲LIBS相比改善了86倍,激光烧蚀坑洞的直径小于10 μm。研究表明：基于一台皮秒Nd∶YAG激光器,采用双脉冲LA-LIBS技术可以较好地实现对固体样品的微损元素分析。该技术在贵重样品分析和高空间分辨的二维元素显微分析中具有一定的应用价值。     

多脉冲飞秒激光对锗材料的烧蚀效应

 开展了脉宽为40 fs的不同数量激光脉冲对锗材料的烧蚀效应实验,采用扫描电镜、激光共聚焦显微镜等方法对不同数量的飞秒激光脉冲作用下锗材料表面烧蚀区进行了检测,并对作用后材料烧蚀形貌演化规律进行了分析,初步分析了锗材料烧蚀区周围形成的不同环区的形貌特征及成因,对各环区烧蚀形貌特征随激光作用脉冲数的增加而产生的形貌演化过程进行了观测。并给出单脉冲飞秒激光对锗材料的烧蚀阈值为1.2 J·cm^-2,采用激光共聚焦显微镜测得该阈值条件下单个飞秒激光脉冲对锗材料的烧蚀深度约为150 nm。     

飞秒激光诱导锗等离子体辐射光谱特性

由于飞秒激光脉冲宽度小于靶材电子—晶格热弛豫时间,飞秒激光烧蚀靶材过程以及诱导击穿产生的等离子体膨胀动力学过程与纳秒激光作用过程不同,因此研究飞秒激光诱导等离子体发射光谱特性对于研究飞秒激光烧蚀机制以及飞秒激光诱导等离子体的膨胀动力学过程非常重要。Ge材料是一种常用的中远红外探测器以及光学元器件材料,对中心波长为800 nm,脉宽为50 fs的激光脉冲烧蚀空气中Ge靶材产生的等离子体发射光谱强度的时间和空间演化规律研究,并探讨了飞秒激光脉冲能量对等离子体发射光谱强度的影响规律。实验结果表明在等离子体羽膨胀初期,飞秒激光诱导Ge等离子体发射光谱主要由线状光谱和连续光谱构成,在200 ns时间内连续光谱强度逐渐减弱,线状光谱开始占主导地位。通过探测Ge等离子体的时间分辨发射光谱,随着等离子体的快速膨胀,等离子体发射光谱强度随着时间的增加呈现先增加后下降变化,在335 ns达到最大。通过探测Ge等离子体的空间分辨发射光谱,随着距离Ge靶材表面的位置增加,等离子体发射光谱强度随远离Ge靶材表面距离增加呈现先增加后下降变化,在0.8 mm位置达到最大。由于存在等离子体自吸收机制,等离子体发射光谱...     

偏振态对飞秒激光加工石英玻璃表面质量的影响

为研究线偏振和圆偏振对飞秒激光烧蚀加工石英玻璃表面质量的影响,开展不同扫描速度的线烧蚀试验和不同线重叠率的面烧蚀试验。研究了线、圆偏振光对烧蚀线宽度的影响,利用光学显微镜和环境扫描电子显微镜观察烧蚀形貌,并使用三维表面轮廓仪进行烧蚀面粗糙度分析。结果表明:线偏振光烧蚀线宽度大于圆偏振光,且激光功率越大,线宽差异越明显;当线重叠率在65%~90%时,线偏振光烧蚀表面粗糙度随重叠率增大而增大,在重叠率为65%时达到1.33μm;线轮廓算术平均偏差随重叠率增大先减小后增大,并在重叠率为80%时达到较小值1.05μm;当重叠率不到80%时,线偏振光烧蚀面线轮廓算术平均偏差比圆偏振光小;重叠率为90%时,其线轮廓算术平均偏差反而比圆偏振光大。     

飞秒激光脉冲序列烧蚀硅的孔型质量研究

为了改善高能流密度飞秒激光的烧蚀质量,使用法布里珀罗腔产生子脉冲间隔在1～3 500 ps内连续可调的飞秒激光脉冲序列,系统探究了单个飞秒高斯脉冲与不同脉冲间隔的脉冲序列在硅上烧蚀的孔型质量。实验结果显示,子脉冲间隔在50～100 ps范围内时,孔边缘的冠状重熔物大大减少,其厚度仅为单个飞秒高斯脉冲的40%,周围基底几乎没有粘连的粉尘或热损伤痕迹,孔型品质因子数值从单个飞秒脉冲的0.52提升至0.89。本文报道的飞秒激光脉冲序列,基于后续子脉冲与喷出物的二次烧蚀原理,子脉冲间隔在50～100 ps范围内时,后续子脉冲能够最大程度的雾化喷出物,从而减少冠状重熔物与高温粉尘污染损伤,烧蚀质量得到改善。     

脉冲激光沉积动力学研究进展

脉冲激光沉积技术是现代常用的先进薄膜材料制备技术之一.文章在简要介绍脉冲激光沉积技术及其进展的基础上,较全面地介绍了脉冲激光沉积动力学的基本物理图像和动力学构架,深入地探讨了激光烧蚀靶材过程、等离子体膨胀过程和薄膜沉积过程的动力学规律,阐述了我国学者在脉冲激光沉积动力学研究方面的贡献,例如包括脉冲激光沉积三个工艺过程自洽的统一模型,等离子体膨胀的冲击波模型,基于局域能量动量守恒定律的新等离子体演化动力学模型,包括热源项、蒸发项、等离子体屏蔽效应和动态物性参数的烧蚀热传导模型,考虑电子碰撞效应和能带结构变化的修正双温模型,能统一描写从纳秒级到飞秒级脉冲激光烧蚀规律的统一双温模型等.     

Soda-lime glass microlens arrays fabricated by laser: Comparison between a nanosecond and a femtosecond IR pulsed laser

We present the manufacturing of microlens arrays on soda-lime glass substrates by using two different IR pulsed lasers: a nanosecond Nd:YVO₄ laser (1064 nm) and a femtosecond laser based on Ytterbium crystal technology (1030 nm). In both cases, the fabrication technique consists of the combination of a direct-write laser process, followed by a post-thermal treatment assisted by a CO₂ laser. Through the analysis of the morphological characteristics of the generated microlenses, the different physical mechanisms involved in the glass ablation process with a nanosecond and a femtosecond laser are studied. In addition, by analyzing the optical features of the microlenses, a better result in terms of the homogeneity and quality of the spot focuses are observed for those microlenses fabricated with the Nd:YVO₄ nanosecond laser. Microlens arrays with a diameter of 80 and 90 µm were fabricated.     

Nanosecond and femtosecond UV laser ablation of polymers: Influence of molecular weight

We examine the nanosecond and femtosecond UV laser ablation of poly(methyl methacrylate) (PMMA) as a function of molecular weight (M_w). For laser ablation with nanosecond laser pulses, at the excimer wavelengths 248 nm and 193 nm, we show that high temperatures develop; yet the dynamics of material ejection differs depending on polymer M_w. The results on the nanosecond ablation of polymers are accounted within the framework of bulk photothermal model and the results of molecular dynamics simulations. Turning next to the 248 nm ablation with 500 fs laser pulses, the ablation threshold and etching rates are also found to be dependent on polymer M_w. In addition, ablation results in morphological changes of the remaining substrate. Plausible mechanisms are advanced.     

Removal of doped poly(methylmetacrylate) from tungsten and titanium substrates by femto- and nanosecond laser cleaning

The influence of different laser pulse lengths on the removal of a polymer layer from metal substrates was investigated. As model systems, doped poly(methylmetacrylate) (PMMA) on titanium and tungsten substrates were selected.The ablation threshold and irradiation spot morphology of titanium and tungsten were compared for femtosecond (fs) and nanosecond (ns) laser irradiation and different pulse numbers. Nanosecond laser treatment resulted in a non-homogeneous surface morphology for both titanium and tungsten substrates. Femtosecond irradiation of tungsten revealed a homogeneous ablation spot with little changes in the surface morphology. For titanium, the formation of columnar structures within the irradiation spot was observed.Two different dopant concentrations were used for PMMA to achieve an equal linear absorption coefficient for the femto- and nanosecond laser wavelengths of 790 and 1064 nm. The best results were achieved for the removal of doped PMMA by femtosecond laser irradiation, where only a minimal modification of the metal surface was detected. In the case of nanosecond laser exposure, a pronounced change of the structure was observed, suggesting that damage-free cleaning of the selected metal may only be possible using femtosecond laser pulses. Different experimental parameters, such as laser fluence, pulse repetition rate and sample speed were also investigated to optimize the cleaning quality of doped PMMA from tungsten substrates with femtosecond laser pulses.     

Early stage expansion and time-resolved spectral emission of laser-induced plasma from polymer

In the nanosecond laser ablation regime, absorption of laser energy by the plasma during its early stage expansion critically influences the properties of the plasma and thus its interaction with ambient air. These influences can significantly alter spectral emission of the plasma. For organic samples especially, recombination of the plasma with the ambient air leads to interfering emissions with respect to emissions due to native species evaporated from the sample. Distinguishing interfering emissions due to ambient air represents a critical issue for the application of laser-induced breakdown spectroscopy (LIBS) to the analysis of organic materials. In this paper, we report observations of early stage expansion and interaction with ambient air of the plasma induced on a typical organic sample (nylon) using time-resolved shadowgraph. We compare, in the nanosecond ablation regime, plasmas induced by infrared (IR) laser pulses (1064 nm) and ultraviolet (UV) laser pulses (266 nm). Nanosecond ablation is compared with femtosecond ablation where the post-ablation interaction is absent. Subsequent to the early stage expansion, we observe for each studied ablation regime, spectral emission from CN, a typical radical for organic and biological samples. Time-resolved LIBS allows identifying emissions from native molecular species and those due to recombination with ambient air through their different time evolution behaviors.     

Effect of Surface Plasma on Nanosecond Laser Ablation

For the first time, the effect of target surface plasma on nanosecond laser ablation is studied. Surface plasma was generated by a high-power cw fiber laser beam incident on an iron target. A comparison of laser ablation by nanosecond Nd:YAG laser pulses (1064 nm, 5 ns) was performed upon exposure to the cw laser and during its short-term (5 ms) turn off. It was found that the emission intensity twofold increases in the presence of surface plasma. The temperature and electron density of the laser plume induced by the nanosecond laser also increased.     

High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers

This paper reports the micromachining of fused quartz and Pyrex glass by laser-induced plasma-assisted ablation (LIPAA) using a conventional nanosecond laser at wavelengths 266 nm, 532 nm, and 1064 nm, respectively. High-quality surface structuring can be achieved at each of these wavelengths. The micrograting formed has periods of 14 7m at 266 nm, 20 7m at 532 nm, and 30 7m at 1064 nm, respectively. The ablation rate using a 266 nm laser is much larger than that at longer wavelengths. The ablation thresholds of laser fluence are 0.7 J/cm² for 266 nm, 1.5 J/cm² for 532 nm and 3.7 J/cm² for 1064 nm, respectively. The 532 nm and 1064 nm lasers enable hole drilling in 0.5 and 2.0-mm thick fused quartz and Pyrex glass substrates of about 0.7-0.8 mm in diameter. However, the less destructive through channel can be only formed in Pyrex glass by using a 532 nm laser.     

Nanosecond and femtosecond ablation of La0.6Ca0.4CoO3: a comparison between plume dynamics and composition of the films

Thin films of La_0.6Ca_0.4CoO₃ were grown by pulsed laser ablation with nanosecond and femtosecond pulses. The films deposited with femtosecond pulses (248 nm, 500 fs pulse duration) exhibit a higher surface roughness and deficiency in the cobalt content compared to the films deposited with nanosecond pulses (248 nm, 20 ns pulse duration). The origin of these pronounced differences between the films grown by ns and fs ablation has been studied in detail by time-resolved optical emission spectroscopy and imaging. The plumes generated by nanosecond and femtosecond ablation were analyzed in vacuum and in a background pressure of 60 Pa of oxygen. The ns-induced plume in vacuum exhibits a spherical shape, while for femtosecond ablation the plume is more elongated along the expansion direction, but with similar velocities for ns and fs laser ablation. In the case of ablation in the background gas similar velocities of the plume species are observed for fs and ns laser ablation. The different film compositions are therefore not related to different kinetic energies and different distributions of various species in the plasma plume which has been identified as the origin of the deficiency of species for other materials.     

All fiber supercontinuum light source using photonic crystal fibers pumped by nanosecond fiber laser pulses

A novel compact supercontinuum (SC) source using the single mode photonic crystal fibers (PCF) pumped with an all fiber MOPA fiber laser is demonstrated experimentally. A bandwidth of 700 nm is achieved by operating the pumping fiber laser at a wavelength of 1064 nm, pulse duration of 10 ns, repetition rate of 50 kHz and peak power of 1 kW. The SC generation is initiated through modulation instability (MI) which breakups the nanosecond pump pulses into picosecond or femtosecond pulses, and further broadened through nonlinear effects of PCF.     

Experimental studies and thermal modelling of 1064- and 532-nm Nd:YVO4 micro-laser ablation of polyimide

Experiments and thermal modelling of polyimide ablation using the fundamental 1064-nm emission from a 20-kHz nanosecond diode-pumped solid-state Nd:YVO₄ micro-laser are described and compared with findings for the 532-nm doubled output. For exposures restricted to short pulse trains, it is found that micron-scale-size ablation features can be defined with this laser, even though polyimide films have weak absorption at 1064 nm and relatively weak absorption at 532 nm. There is evidence at both wavelengths of an incubation effect, driven by thermal modification of the polymer and, with long-term exposure at 1064 nm, Raman micro-spectroscopy reveals a progressive growth of predominantly amorphous carbon in the ablation site. Calculations of the temperature rise produced in the polymer by exposure to a high-repetition-rate pulse train are described that aid an understanding of the thermal aspects of the interaction at the two wavelengths. PACS 42.55.Xi; 44.10.+i; 52.38.Mf     

长短脉冲间自同步的光探针

一、引言 在六路激光系统中,我们采用从主激光输出中分出一部分进行喇曼频率变换和脉冲压缩,获得了最短脉宽为25ps的630nm的光,用此喇曼光我们进行了等离子体的阴影、纹影、干涉和磁场的测量,得到了一系列有用的信息。我们将此喇曼光用BBO晶体倍频,进一