| 偏振态对飞秒激光加工石英玻璃表面质量的影响 |
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| 引用本文： | 吴东江,姚龙元,马广义,郭东明.偏振态对飞秒激光加工石英玻璃表面质量的影响[J].强激光与粒子束,2014,26(2):021006-43. |
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| 作者姓名： | 吴东江 姚龙元 马广义 郭东明 |
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| 作者单位： | 1.精密与特种加工教育部重点实验室大连理工大学, 辽宁 大连 1 1 6024 |
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| 基金项目： | 国家自然科学基金项目(51175061); 中央高校基本科研业务费专项资金项目(DUT12ZD(G)01) |
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| 摘 要： | 为研究线偏振和圆偏振对飞秒激光烧蚀加工石英玻璃表面质量的影响,开展不同扫描速度的线烧蚀试验和不同线重叠率的面烧蚀试验。研究了线、圆偏振光对烧蚀线宽度的影响,利用光学显微镜和环境扫描电子显微镜观察烧蚀形貌,并使用三维表面轮廓仪进行烧蚀面粗糙度分析。结果表明:线偏振光烧蚀线宽度大于圆偏振光,且激光功率越大,线宽差异越明显;当线重叠率在65%~90%时,线偏振光烧蚀表面粗糙度随重叠率增大而增大,在重叠率为65%时达到1.33μm;线轮廓算术平均偏差随重叠率增大先减小后增大,并在重叠率为80%时达到较小值1.05μm;当重叠率不到80%时,线偏振光烧蚀面线轮廓算术平均偏差比圆偏振光小;重叠率为90%时,其线轮廓算术平均偏差反而比圆偏振光大。
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| 关 键 词： | 飞秒激光 偏振态 烧蚀形貌 线重叠率 表面粗糙度 |
| 收稿时间： | 2013-07-02; |
Influence of polarization state on surface quality of femtosecond laser ablation quartz glass |
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| Wu Dongjiang,Yao Longyuan,Ma Guangyi,Guo Dongming.Influence of polarization state on surface quality of femtosecond laser ablation quartz glass[J].High Power Laser and Particle Beams,2014,26(2):021006-43. |
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| Authors: | Wu Dongjiang Yao Longyuan Ma Guangyi Guo Dongming |
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| Affiliation: | 1.Key Laboratory of Precision and Non-traditional Machining Technology Dalian University of Technology,Ministry of Education,Dalian 116024,China |
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| Abstract: | In order to investigate the influences on ablation quality of quartz glass by the linearly and circularly polarized femtosecond lasers, the line ablation experiments of different scanning velocity and the surface ablation experiments of different line overlap rate were conducted. The influences of linearly and circularly polarized lasers on ablation line width were researched. In addition, the ablation line and surface morphology were observed using ESEM and optical microscope, respectively. Besides, the surface roughness was analyzed using the 3D surface profiler. The results show that the line width of linearly polarized laser is greater than that of circularly polarized laser, and the greater the laser power, the line width difference becomes more remarkable. What’s more, when the line overlap rate is in the range of 65%-90%, the surface roughness of linearly polarized laser increases with the increasing of overlap rate, and it reaches 1.33 μm when the overlap is 65%. But the arithmetical mean deviation of line contour decreases firstly and then increases with the increasing of overlap rate, and it reaches to a minimum of 1.05 μm when overlap rate is 80%. When the overlap rate is not more than 80%, the arithmetical mean deviation of line ablation surface by the linearly polarized laser is lower than that of circularly polarized laser, and when the overlap rate is 90%, it is higher than that of circularly polarized laser. |
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| Keywords: | polarization state ablation morphology line overlap rate surface roughness |
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