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研究离子引发收集过程中的沉积和溅射特性,给出了离子沉积和溅射的数理模型,其中重点分析了结合能、捕获概率和溅射系数这几个参数的物理意义和计算公式,给出了收集板总收集量和损失量.并且用计算机模拟了收集板的收集,给出不同的离子入射能量下入射离子元素沉积厚度和不同元素靶对各入射离子溅射特性的影响.得出以下的结论:随着离子沉积在收集板表面涂层厚度的增加溅射率也增加;离子的引出电压不是越高越好;轻质量离子的总收集率比较小;入射离子沉积和溅射特性和收集板靶原子质量有关,质量轻的金属材料作收集板,有利于提高离子的收集率.
关键词:
溅射
捕获概率
溅射概率 相似文献
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We study the discrete Painlevé equations associated to the affine Weyl group which can be obtained by the implementation of a special limits of -associated equations. This study is motivated by the existence of two -associated discrete both having a double ternary dependence in their coefficients and which have not been related before. We show here that two equations correspond to two different limits of a -associated discrete Painlevé equation. Applying the same limiting procedures to other -associated equations we obtained several -related equations most of which have not been previously derived. 相似文献
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研究了Er1.0P5O14铒非晶玻璃的红外量子剪裁现象. 从吸收谱和激发光谱的计算比较中肯定了Er1.0P5O14非晶 玻璃的1537.0 nm红外荧光为多光子量子剪裁荧光. 从Er1.0P5O14非晶玻璃的可见和红外荧光发射光谱中发现激发2H11/2, 4G11/2和4G9/2能级所导致的4I13/2→4I15/2量子剪裁红外荧光很强;基于自发辐射速率、无辐射弛豫速率和能量传递速率等参数的计算,对其量子剪裁机理进行了分析.发现起源于基态的强下转换能量传递{2H11/2→4I9/2,4I15/2→4I13/2},{4G11/2→4I13/2, 4I15/2→2H11/2},{4G9/2→4F7/2,4I15/2→4I13/2}和{4G9/2→4I13/2, 4I15/2→2H11/2}是导致Er1.0P5O14非晶玻璃具有强的三光子和四光子量子剪裁红外荧光的原因.研究结果对改善太阳能电池效率有一定意义. 相似文献
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An attempt is made to synthesize Nd2Co14C compound by mechanical alloying Nd16Co76B8−xCx (0x8) alloys and subsequent annealing. Phase formation and magnetic properties of Nd2Fe14B-type Nd16Co76B8−xCx alloys and their hydrides are investigated. The Nd2Co14(B,C) phase with Nd2Fe14B-type structure is formed for Nd16Co76B8−xCx (0x7) alloys, while NdCo7Cδ phase with TbCu7-type structure is observed in Nd16Co76C8 alloy. The lattice parameter c of the Nd2Co14(B,C) phase decreases with increasing the carbon content. A limit volume of the unit cell to form the Nd2Fe14B-type structure is estimated to be 0.870 nm3. The spin-reorientation temperature TSR increases with increasing the carbon content, due to an enhancement of magnetocrystalline anisotropy caused by carbon substitution for boron. After hydrogenation, the lattice expansion is observed for Nd16Co76B8−xCx (0x7) alloys. The spin-reorientation temperature of Nd16Co76B8−xCxHy (0x7) is much lower than that of the host alloys. Some structural and magnetic properties of hypothetic Nd2Co14C and Nd2Co14CHy compounds are estimated by extrapolation. 相似文献
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