离子引出收集的沉积与溅射研究

研究离子引发收集过程中的沉积和溅射特性,给出了离子沉积和溅射的数理模型,其中重点分析了结合能、捕获概率和溅射系数这几个参数的物理意义和计算公式,给出了收集板总收集量和损失量.并且用计算机模拟了收集板的收集,给出不同的离子入射能量下入射离子元素沉积厚度和不同元素靶对各入射离子溅射特性的影响.得出以下的结论:随着离子沉积在收集板表面涂层厚度的增加溅射率也增加;离子的引出电压不是越高越好;轻质量离子的总收集率比较小;入射离子沉积和溅射特性和收集板靶原子质量有关,质量轻的金属材料作收集板,有利于提高离子的收集率. 关键词： 溅射 捕获概率 溅射概率

Sediment and sputtering during ion collection

This thesis focuses on sediment and sputtering during ion collection, presented a mathematical Physics model for ion sediment and sputtering. The important points lie in binding energy, trapping probability and sputter coefficient, those physics and formulas, provide the number of deposited and lost particles. Simulated the collector, difference projectile energy, projectile ion element sediment coverage and different elements target influence the sputtering characteristic. The conclusion is:The more coverage, the more sputter coefficient; The ion collection voltage isn't higher, better; Lighter ion, deposited probability smaller; Ion deposition and sputtering characteristic have something with target quality, light material is better to improving the collect probability.