状态方程实验用铜多台阶靶制备工艺

 采用单点金刚石切削技术,通过合理的刀具设计、夹具设计及工艺过程设计,确定了加工工艺参数,完成了厚度几μm至几十μm的无氧铜多台阶靶的制备。通过触针式轮廓仪,台阶仪,白光干涉仪对表面轮廓及粗糙度进行了测量。结果表明：通过单点金刚石切削技术加工成形的铜多台阶靶,各台阶表面均方根粗糙度小于50 nm,工件表面轮廓平直,台阶垂直度较好。采用阿基米德原理对材料密度进行测量,加工成形后密度为(8.945±0.074) g/cm3,接近材料理论密度。     

冲击波实验用铝楔形靶加工技术

采用单点金刚石车削技术制备加工铝楔形靶,发现金刚石车削加工楔形靶实际轮廓为圆锥面。通过Veeco NT1100白光干涉仪对表面轮廓及粗糙度进行了测量,结果表明平面部分表面粗糙度小于50 nm,最大峰谷值小于100 nm,斜面部分表面粗糙度小于200 nm。分析认为斜面部分粗糙度测量数值较大是由刀具工作角度变化导致的,而测量轮廓线非圆锥体母线又导致粗糙度测量结果大于实际值。     

光学非球曲面器件的超精密磨削加工技术研究

为磨削加工出高精度、高质量的光学非球曲面器件。详尽分析了砂轮的安装及半径等误差对零件加工精度的影响。设计研制出了一套非球曲面磨削系统 ,并用它进行了实验研究。实验结果表明 :要获得高精度的非球曲面器件 ,只有当金刚石砂轮的平均磨粒尺寸低于 10 μm ,并在采用较高的砂轮线速度和较小的进给量的情况下 ,才能实现光学非球曲面的超精密磨削加工 ,经过各种磨削参数的优化选择 ,其非球曲面最终的零件轮廓精度为 0 4 μm ,表面粗糙度Ra优于 0 0 1μm。     

非球面碳化硅反射镜的加工与检测

为了获得高精度非球面碳化硅(SiC)反射镜,对非球面碳化硅反射镜基底以及改性后碳化硅反射镜表面的加工与检测技术进行了研究。介绍了非球面计算机控制光学表面成型（CCOS）技术及FSGJ-2非球面数控加工设备。采用轮廓检测法和零位补偿干涉检测法分别对碳化硅反射镜研磨和抛光阶段的面形精度进行了检测,并采用零位补偿干涉检测法及表面粗糙度测量仪对最终加工完毕的碳化硅反射镜的面形精度和表面粗糙度进行检测。测量结果表明：各项技术指标均满足设计要求,其中非球面碳化硅(SiC)反射镜实际使用口径内的面形精度（RMS值）为0.016λ(λ=0.6328μm）,表面粗糙度（RMS值）为0.85nm。     

金刚石刀具nm级表面轮廓质量多参数集成测量方法

为有效解决金刚石刀具表面轮廓质量评价指标分散、无法进行全面系统测量的难题,基于原子力显微镜和超精密回转轴系,提出了实现前后刀面粗糙度、刃口锋利度和刃口微豁三个关键指标的集成测量方法。根据金刚石刀具表面轮廓质量的测量要求,以原子力显微镜扫描系统、气浮隔振平台、二维移动平台以及精密回转轴系为基础构建测量系统,精确测量了金刚石刀具刃口附近的表面微观形貌;采用基于MATLAB开发的专用测量软件对原始数据进行处理,得到金刚石刀具前后刀面粗糙度值、刃口锋利度值和刃口微豁范围;并对测量误差进行了分析,提出了控制要求。通过上述自主开发的测量仪器,可以高效、完整地描述金刚石刀具表面轮廓质量,能够实现nm级粗糙度、亚μm级锋利度以及μm级微豁的准确测量。     

黑腔芯轴平台微细电火花加工技术

采用电火花成型加工技术,在黑腔芯轴侧表面加工平台。采用白光干涉仪对平台表面轮廓及粗糙度测量,结果表明:平面部分表面粗糙度小于0.5μm,最大峰谷高度小于15μm。通过奥林巴斯测力显微镜对平台尺寸测量,结果表明:平台的轴向尺寸加工精度可控制在±10μm,同一电极加工的平台尺寸一致性可控制在±2μm。分析了电极损耗对零件形状精度的影响规律以及平台表面粗糙度的影响因素,并通过负极性加工去除电极损耗对平台尺寸精度的影响。     

倾斜表面的纳秒激光抛光研究

考察倾斜表面纳秒激光抛光后的表面形貌演化规律及表面倾斜程度对抛光效果的影响规律，可以为增材制造中的自由曲面激光抛光提供参考。采用纳秒激光对不垂直于光轴的粗糙平面进行激光抛光，并采用激光共聚焦显微镜对激光抛光后的表面形貌进行测试分析。结果表明：表面倾斜30°时，抛光后的表面在距离起始点4 mm附近存在表面轮廓波动异常增大的现象，表面粗糙度值增大到15.80μm；倾斜角度增大到45°时，表面轮廓波动异常增大的位置变化到2 mm附近；倾斜角度为60°时，未发生表面轮廓波动异常增大现象。表面轮廓波动异常增大现象反映了激光抛光从过熔型抛光到浅熔型抛光的过渡过程；自由曲面的激光抛光工艺需要根据抛光区域的倾斜程度和表面粗糙度选定合适激光功率密度和离焦量，从而实现良好的激光抛光质量。     

光学材料微缺陷引起的损伤机理及后处理

采用时域有限差分方法（FDTD）进行元件表面微结构电磁场分布的数值模拟；同时实验分析了化学湿法刻蚀对光学元件表面面形及粗糙度、激光损伤阈值等的影响。     

中长波红外双波段自由曲面棱镜

为解决传统双波段红外成像系统构型复杂的问题,提出了一种将自由曲面棱镜引入双波段成像系统的一体式构型。基于设计中约束追迹光线角度的低灵敏度优化方法,实现了F数为1、焦距为20 mm、视场角为21.8°×16.4°的双波段（3.7～4.8μm和8.0～12.0μm）红外光学系统。在20 lp/mm空间频率处,系统中波红外波段和长波红外波段内所有视场的调制传递函数（MTF）分别高于0.79和0.67。经公差分析可知,该自由曲面棱镜的制造可采用单点车削机床实现。同时,完成了长波红外自由曲面棱镜的试制。     

非接触式可见光-近红外光谱法快速预测天然高分子材料表面粗糙度的研究

利用触针式轮廓法测量了天然高分子材料木材的表面粗糙度,并对可见光-近红外光谱与实测表面粗糙度参数之间的相关性进行研究,探讨了非接触式光谱法快速预测天然高分子材料表面粗糙度的可行性。结果表明：（1）样品三个切面的可见光-近红外光谱（400～2 500 nm）均可预测样品表面粗糙度,实测值与预测值相关系数可达0.92,其中利用样品横切面光谱所建的模型效果最好;（2）在分段光谱400～780 nm,780～1 100 nm,1 100～2 500 nm,780～2 500 nm,400～2 500 nm范围内,所建模型表面粗糙度参数的实测值与预测值相关系数可达0.80以上,显著相关,其中400～2 500 nm区域所建模型效果最好;（3）光谱预处理并不能提高模型预测效果,建议利用可见光-近红外光谱预测天然高分子材料表面粗糙度时采用原始光谱数据。     

相移干涉法测量ICF微球内表面粗糙度

 通过分析光线通过微球壳层后各界面的相位分布,讨论了相移干涉法测量微球内表面粗糙度的基本原理,研究了微球上部壳层对内表面粗糙度测量的影响,得到了聚苯乙烯,聚a甲基苯乙烯微球的内表面形貌特征图像,测量数据与原子力显微镜测量数据在同一量级。以微球壳层对超光滑碳化硅及单晶硅片表面形貌的调制作用为研究对象,讨论了微球的外表面粗糙度以及微球壁厚对内表面粗糙度测量结果的影响,确定了相移干涉法测量微球内表面粗糙度的不确定度,实验结果表明：对于表面粗糙度小于30 nm、厚度小于9 mm的微球,测量不确定度小于0.4 nm。     

The surface inhomogeneity of ion-exchange membranes by SEM and AFM data

The surface structure (morphology and roughness) of different types of ion-exchange membranes is investigated via scanning electron microscopy and atomic-force microscopy. It is established that the distribution of ion-exchange regions on the surface of heterogeneous membranes exhibits a complex stochastic character; the sizes of these regions are 5–30 μm. The sizes of irregularities on the surface of homogeneous membranes do not exceed 1 μm. After the samples are subjected to conditioning and the effect of current and temperature, the sizes and portions of the conducting regions of the surface thereof become larger than those of commercial samples by 10–20%. The dependence of the surface microrelief on the membrane type and external factors (chemical conditioning, current, and temperature) is revealed for the first time. The minimum roughness factor corresponds to the surfaces of artificially homogenized and commercial samples of heterogeneous membranes, and the maximum quantities f _r are obtained for membranes with pronounced surface reliefs after current and temperature effects.     

在线测量表面粗糙度的共光路激光外差干涉仪

一种新型的、用于在线测量表面粗糙度的激光外差干涉仪已研制完成。该仪器体积小（２５ｃｍ×２０ｃｍ×１０ｃｍ）、抗外界环境干扰能力强。仪器以稳频半导体激光器作为光源。共光路设计,使测量光和参考光沿同一路径入射到被测表面上。计大数和测小数周期相结合的外差信号处理方法,实现了大的动态测量范围和很高的测量分辩率。同时还采用了全反射临界角法进行自动聚焦。该仪器的纵向和横向分辨率分别为０．３９ｎｍ和０．７３μｍ;自动聚焦范围为±０．５ｍｍ,在焦点±２５μｍ范围内,聚焦精度为１μｍ;８０分钟内整机稳定性：３σ＝１．９５ｎｍ。     

Mechanisms of fracture of the free surface of shock-compressed metals

The mechanisms of the ejection of aluminum and copper microparticles from the free surfaces of these metals have been studied under conditions of the escape of a moderate-intensity shock wave from a sample. The free surfaces of samples contained 0.7–0.9 mm deep artificial wells and protrusions simulating (on a greater scale of 10: 1) the natural surface roughness retained upon mechanical processing. The pressure in a shock-wave pulse at the base of a protrusion was controlled within P = 5–20 GPa (i.e., below the melting region), and the variable duration of pressure pulses was 0.02, 0.2, and 1 μs. Analysis of the free surfaces of postloaded samples showed that, for certain loading and roughness parameters, the ejection of metal from vertices of protruding ridges or pyramids (as a result of the longitudinal fracture) was about ten times greater than the amount of metal ejected in the form of cumulative jets from wells. The amount of ejected metal and the size distribution of metal microparticles were quantitatively characterized using “soft collecting targets” and by measuring mass losses of samples upon fracture.     

Localization factor: a new parameter for the quantitative characterization of surface structure with atomic force microscopy (AFM)

In this work we present the possible application of a new parameter called localization factor for the quantitative characterization of surface structures with atomic force microscopy (AFM). For this purpose contact mode AFM images were taken from technologically different polycrystalline gold thin films and were evaluated according to the following parameters: surface roughness (R(a), R(RMS)), roughness factor (f(r)) and localization factor. The localization factor was compared with the other surface parameters. We demonstrate that this new parameter can be used to identically characterize these gold thin film surfaces with contact mode AFM in the 1-1000 μm(2) scan range. The mathematical background and possible application fields of the localization factor are also discussed in our paper.     

Observation of increase in Raman intensity of surface phonon polaritons on rough surfaces of ZnTe

An increase in Raman intensity of surface phonon polaritons has been observed in free-standing thin slabs (thickness ～ 7 μm) of single- crystal ZnTe with rough surfaces by a conventional Raman-scattering technique at room temperature. The samples with various root-mean- square roughness heights have been prepared by making use of final polishing powders with different mean-grit sizes, and the surface roughness has been confirmed by measuring the intensities of the diffuse scattering of the laser light. The increase of the Raman intensity is proportional to the mean-square height of the surface roughness, and the shift of the dispersion relation is also proportional to it. The frequency shift is explained by a perturbation theory of the surface-roughness-induced scattering.     

Anisotropic surface effects in Au and Cu monocrystals

Electroreflectance spectra at normal incidence of (100) and (110) faces of gold and copper monocrystals are given, in the spectral range from 0.22–0.7 μm. The fractional change in reflectance is different with (110) faces when light is polarized parallel to the [001] direction and parallel to the [$\text{1}\text{10}$] direction while no anisotropy is seen on (100) faces. This shows that electroreflectance is a powerful tool to investigate metal surfaces where the optical electrons are sensitive to the distribution of the surface atoms.     

Roughness and surface potential in physisorption

The surface potential due to physical adsorption of xenon on iron, copper and sodium films has been investigated as a function of annealing temperature using the diode method. As iron and copper films are annealed, the surface potential falls to low values. On sodium films the surface potential is always zero despite finite uptakes of xenon. The falling surface potentials on iron and copper may be due to contamination, changes in the crystal plane exposure of the film, a rise in the metallic work function, or variations in the roughness of the surface. Surface roughness appears to be the vital factor, smoother films giving lower surface potentials because they lack the electric field enhancement which occurs on rough surfaces.     

Modification of three dimensional topography of the machined KDP crystal surface using wavelet analysis method

The wavelet analysis method has been extensively employed to analyze the surface structures and evaluate the surface roughness. In this work, however, the wavelet analysis method was introduced to decompose and reconstruct the sampled surface profile signals in the cutting direction that achieved by SPDT (single point diamond turning) operation, and the surface profile signals in tool feeding direction were reconstructed with the approximate harmonic functions directly. And moreover, the orthogonal design method, i.e. the combination design of general rotary method, was resorted to model the variations of the independent frequency and amplitude of different simulated harmonic signals in the cutting and tool feeding directions. As expected resultantly, a novel 3D surface topography modeling solution was established, which aims to predict and modify the finished KDP (potassium dihydrogen phosphate or KH₂PO₄) crystal surfaces. The validation tests were carried out finally under different cutting conditions, and the collected average surface roughness in any case was compared with the corresponding value as predicted. The results indicated the experimental data were well consistent with the predictions, and only an average relative error of 11.4% occurred in predicting the average surface roughness.