菲涅耳微透镜列阵衍射效率的测试与分析

归纳了目前二元位相型菲涅耳微透镜列阵衍射效率测试中所用各种衍射效率的不同定义，提出规范定义的建议。并设计了测量衍射效率的系统，方法简单易行，适于测试具有微小单元尺寸的菲涅耳微透镜列阵的衍射效率。     

菲涅耳微透镜行列阵衍射效率的测试与分析

归纲了目前二元位相型菲涅耳微透镜列阵衍射效率测试中所用各种衍射效率的不同定义，提出规范定义的建议。并设计了测量衍射效率的系统，方法简单易行，适于测试具有微小单元尺寸的菲涅耳微透镜列阵的衍射效率。     

衍射微透镜列阵在Shack-Hartmann波前传感器中的应用

菲涅耳衍射微透镜列阵是目前广泛应用的衍射光学元件之一,它是基于衍射原理,由计算机设计,并通过微细加工技术制作成的.本文介绍了8相位台阶菲涅耳衍射微透镜列阵的制作方法,并描述了一个用16×16微透镜列阵形成的小型 Shack-Hartmann 波前传感实验系统,用该系统可对入射波前进行测量和重建.     

激光直接光刻制作微透镜列阵的方法研究

介绍了利用激光直接光刻制作８相位台阶菲涅尔衍射微透镜列阵的工艺方法，并对元件的衍射效率及光刻过程中的制作误差进行了分析，透镜列阵在小形Ｓｈａｃｋ－Ｈａｒｔｍａｎｎ波前传感器中得到了应用。     

消色差谐衍射微透镜列阵的应用研究

本文研究菲涅耳谐衍射透镜的特性和工作条件,分析二元谐衍射透镜的衍射效率及制作要求,设计并研制了用于萨克-哈特曼波前传感器的双波长共焦谐衍射微透镜列阵,得到了良好的应用效果.     

亚波长衍射微透镜色散的数值分析

采用旋转体时域有限差分法对亚波长衍射微透镜进行数值分析，给出了在微透镜焦平面上的电场强度分布和从近场到远场的电场强度分布. 研究了亚波长衍射微透镜的色散，给出了入射波长不同于设计波长的色散曲线，数值分析结果表明了亚波长衍射微透镜的负向色散特性，而且随着波长的减小焦距增加得更快. 关键词： 亚波长衍射微透镜 色散 时域有限差分法     

利用消衍射透镜列阵及光谱色散平滑实现焦斑均匀辐照

提出将空间域的透镜列阵法和时间域的光谱色散平滑法结合起来实现靶面的均匀辐照. 消衍射型透镜列阵能获得边缘陡峭且顶部较平坦的准近场焦斑，光谱色散平滑则能有效地抹平焦斑内部由多光束干涉引起的细密条纹. 数值结果显示，通过该方案能获得均匀性较好的焦斑. 进一步分析了光谱色散平滑单元中位相调制和光栅的参数对辐照均匀性的影响，发现参数的选取要在焦斑均匀性和能量利用率之间取得合理平衡，以在整体上获得最佳的均匀辐照效果. 关键词： 光谱色散平滑 透镜列阵 衍射 多光束干涉     

小F数衍射微透镜阵列光学性能研究

本文基于小光点扫描,在国内首次提出了一种测试小F数衍射微透镜阵列光学性能的方法.利用光通信用半导体激光器和探测器建立了一套测试系统,并对所研制的大阵列,小单元尺寸的多相位菲涅耳衍射微透镜阵列的衍射效率和点扩散函数进行了测试.结果表明,衍射微透镜实际衍射光斑比理论衍射受限光斑扩展不大,8相位和16相位石英微透镜的衍射效率分别高达80.2%和87.5%,说明本实验室对多相位的设计理论和制作工艺已基本掌握,满足应用的要求.     

折射型微透镜列阵的光刻热熔法研究

研究了制作折射型微透镜列阵的一种新方法光刻胶热熔成形法，获得了２０×２０的折射型微透镜列阵，单元微透镜相对口径为Ｆ／２，单元透镜直径为９０μｍ，中心间隔１００μｍ，透镜的波像差小于１．３波长。本文详细阐述了光刻热熔法的基本原理及微透镜设计方法，并讨论了工艺参数对微透镜列阵质量的影响。     

菲涅耳型衍射光学元件的研究

本文在衍射理论基础上,深入分析了菲涅耳型衍射光学元件的特性,针对连续及二元浮雕结构,建立了位相深度因子(M),波长匹配系数(α)与衍射效率的关系式,对影响衍射效率的因素进行了讨论.研究了设计与工艺的匹配问题,建立了数值孔径,最小特征尺寸与衍射效率的关系,为不同波段衍射光学元件的应用,及设计和评价衍射光学元件提供了有效的理论方法.本文最后举例分析了用于白光波前传感器中的小数值孔径微透镜列阵的性能,并对衍射效率及传递函数两个综合指标进行了测量.     

Design, Fabrication, and Integration Technology of Large-Scale Microlens Array for Infrared Charge Coupled Device Application

Infrared charge coupled device (IRCCD) integration with microlens array is an effective method for improving the detecting sensitivity of IRCCD sensors. In this paper, we present the diffractive microlens array (MLA), which is manufactured by the submicron photolithography technology and magnetically enhanced reactive ion etching (MERIE) on infrared quartz substrate. The integration procedure between microlens array and PtSi Schottky-barrier IRCCD chip is introduced in detail. The optical response of IRCCD sensor with microlens array is tested and the average response increases 0.23 in the spectral range of 1.25.0 m. The measuring results show that the large-scale diffractive microlens array is able to improve the detecting sensitivity of IRCCD and that the integration technology mentioned is available.     

Technique for Monolithic Fabrication of Microlens Arrays Integrated with Infrared CCD

Based on scalar diffraction theory, 8-phase-level 256×256 elements diffractive microlens array with element dimension of 50×33 μm2 have been fabricated on the back-side of PtSi(3～5 μm) infrared CCD. The measurement results indicated that the ratio of the signal-to-noise of the infrared CCD with microlens was increased by a factor of 2.8.     

Technique for Monolithic Fabrication of Microlens Arrays Integrated with Infrared CCD

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Diffractive Microlens Array Monolithic Integration with PtSi Focal Plane array

Diffractive microlens arrays can completely collect the light at the focal plane and concentrate it into a smaller spot size on the detector plane, the photodetector area can be substantially reduced. Increased gamma radiation hardening and noise reduction result from the decrease in photodetector sensitive area. The diffractive microlens arrays have been designed by considering the correlative optical and processing parameters for PtSi focal plane array. They have been fabricated on the backside of PtSi focal plane array chip by successive photolithography and Ar⁺ ion-beam-etching technique. The alignment of microlens array with PtSi focal plane array was completed by a backside aligner with IR light source. The practical processes and fabrication method are discussed. The performance parameters of PtSi FPA with diffractive microlens array are presented.     

紫外衍射微透镜阵列的设计与制备

为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。     

Monolithic integration technique for microlens arrays with infrared focal plane arrays

Based on scalar diffraction theory, 8-phase-level 256×290 element diffractive microlens arrays with lenslet dimension of 50×33 μm² have been fabricated on the back side of PtSi infrared focal plane arrays. The design and fabrication process are discussed. The measurement results indicate that the imaging quality has been greatly improved and the ratio of the signal-to-noise of the infrared focal plane array integration with microlens array is increased by a factor of 2.5.