菲涅耳微透镜行列阵衍射效率的测试与分析

归纲了目前二元位相型菲涅耳微透镜列阵衍射效率测试中所用各种衍射效率的不同定义，提出规范定义的建议。并设计了测量衍射效率的系统，方法简单易行，适于测试具有微小单元尺寸的菲涅耳微透镜列阵的衍射效率。     

衍射微透镜列阵在Shack-Hartmann波前传感器中的应用

菲涅耳衍射微透镜列阵是目前广泛应用的衍射光学元件之一,它是基于衍射原理,由计算机设计,并通过微细加工技术制作成的.本文介绍了8相位台阶菲涅耳衍射微透镜列阵的制作方法,并描述了一个用16×16微透镜列阵形成的小型 Shack-Hartmann 波前传感实验系统,用该系统可对入射波前进行测量和重建.     

线宽误差对菲涅耳透镜衍射效率的影响

基于标量衍射理论,首先得出存在线宽误差情况下4阶菲涅耳透镜衍射效率的解析式;并以 4阶、8阶和16阶菲涅耳透镜为例,进行计算机模拟计算并系统分析线宽误差对菲涅耳透镜衍射效率的影响。通过实验测量16阶菲涅耳透镜的线宽误差,分析其对16阶菲涅耳透镜衍射效率的影响。模拟计算结果对多阶菲涅耳透镜的制作提供重要的理论指导。     

激光直接光刻制作微透镜列阵的方法研究

介绍了利用激光直接光刻制作８相位台阶菲涅尔衍射微透镜列阵的工艺方法，并对元件的衍射效率及光刻过程中的制作误差进行了分析，透镜列阵在小形Ｓｈａｃｋ－Ｈａｒｔｍａｎｎ波前传感器中得到了应用。     

消色差谐衍射微透镜列阵的应用研究

本文研究菲涅耳谐衍射透镜的特性和工作条件,分析二元谐衍射透镜的衍射效率及制作要求,设计并研制了用于萨克-哈特曼波前传感器的双波长共焦谐衍射微透镜列阵,得到了良好的应用效果.     

表面反射对菲涅耳透镜的影响

使用薄膜沉积法制作16阶菲涅耳透镜,用它代替常规的光学透镜可实现系统的轻量化,小型化,并增加系统设计的自由度,在标量衍射理论的基础上,应用菲涅耳公式和傅里叶变换分析SiO2薄膜和基底的表面反射对菲涅耳透镜－1级衍射效率的影响,结果表明表面反射对菲涅耳透镜的成像质量影响较大,可以通过蒸镀增透膜来减小这种影响。     

菲涅耳透镜的制作及性能分析(对准误差的影响)

我们使用薄膜沉积法制作16阶菲涅耳透镜,其衍射效率接近87%.用它代替常规的光学透镜可实现系统的轻量化、小型化、增加系统设计的自由度.在标量衍射理论的基础上,应用菲涅耳公式和傅里叶变换分析SiO₂薄膜和基底的表面反射、对准误差以及入射角对16阶菲涅耳透镜衍射效率的影响.     

大数值孔径衍射透镜的优化设计方法

本文针对大数值孔径衍射透镜工艺制作难的问题,以菲涅耳衍射透镜为例,研究了相位匹配原理并提出了一种优化设计二元大数值孔径衍射透镜的方法。在菲涅耳衍射透镜原理的基础上,确定了优化设计多相位台阶衍射透镜的结构参数,并给出了一个设计实例,最后对结果元件的衍射效率进行了分析与讨论。     

高衍射效率闪耀全息透镜

提出一种制作位相全息透镜－闪耀全息透镜新设计，利用它可使位相全息透镜的位相分布类似位相菲涅耳透镜，其衍射效率理论值可达９５％以上，但其制作过程要比位相菲涅耳透镜容易，文中给出了原理分析和实验验证，初步结果是令人满意的。     

小F数衍射微透镜阵列光学性能研究

本文基于小光点扫描,在国内首次提出了一种测试小F数衍射微透镜阵列光学性能的方法.利用光通信用半导体激光器和探测器建立了一套测试系统,并对所研制的大阵列,小单元尺寸的多相位菲涅耳衍射微透镜阵列的衍射效率和点扩散函数进行了测试.结果表明,衍射微透镜实际衍射光斑比理论衍射受限光斑扩展不大,8相位和16相位石英微透镜的衍射效率分别高达80.2%和87.5%,说明本实验室对多相位的设计理论和制作工艺已基本掌握,满足应用的要求.     

紫外衍射微透镜阵列的设计与制备

为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。     

Monolithic integration technique for microlens arrays with infrared focal plane arrays

Based on scalar diffraction theory, 8-phase-level 256×290 element diffractive microlens arrays with lenslet dimension of 50×33 μm² have been fabricated on the back side of PtSi infrared focal plane arrays. The design and fabrication process are discussed. The measurement results indicate that the imaging quality has been greatly improved and the ratio of the signal-to-noise of the infrared focal plane array integration with microlens array is increased by a factor of 2.5.     

Photoresist reflow method of microlens production Part I: Background and experiments

We present a two part study of melted microlens arrays. This first part concentrates on the production and measurement of microlens arrays while the second part examines attempts to model the microlens profiles. In this paper we first review some of the fabrication techniques used over the past twenty years to produce lens arrays. Some applications of microlens arrays are then discussed. Particular emphasis is placed on the photoresist reflow method of microlens production that was suggested by Popovic et al., as this was the method used to produce the microlens examined in this study. Lenses produced using this method can have large deviations from the spherical case, i.e. the profile that would be expected from a simple minimisation of the surface energy. These deviations have not been explained to date in the literature, however a number of possible causes for this deviation are given in this paper.Therefore the fundamental questions we wish to explore here are: (1) Why physically do dips occur? and (2) Can the resulting surface profile be predicted? Any model developed to quantitatively estimate the optical effects of surface shape will depend on the physical assumptions made regarding the surface formation mechanism. However as we shall indicate at this point only an informed guess regarding the relative importance of a number of possible mechanisms can be made.     

High-resolution beam steering using microlens arrays

Imaging or beam-steering systems employing a periodic array of microlenses or micromirrors suffer from diffraction problems resulting from the destructive interference of the beam segments produced by the array. Simple formulas are derived for beam steering with segmented apertures that do not suffer from diffraction problems because of the introduction of a moving linear phase shifter such as a prescan lens before the periodic structure. The technique substantially increases the resolution of imaging systems that employ microlens arrays or micromirror arrays. Theoretical, numerical, and experimental results demonstrating the high-resolution imaging concept using microlens arrays are presented.     

Fabrication of Refractive Microlens Array with no Dead Area

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高质量光刻胶微小透镜阵列的制作

本文对光刻胶熔融法制作微小透镜阵列的机理进行了进一步深入的理论和实验研究,特别是提出和研究了非球面表面的形成问题。对微小透镜,特别是非球面形成过程的参数控制,例如对光刻胶小圆柱的高度、熔融光刻胶和基片的接触角的控制进行了较详细的讨论。我们制出了具有较好性能的微小透镜列阵,并给出了测量结果以及实物和成象照片。最后,给出了一种建议采用的实时控制高质量微小透镜列阵形成的装置方案。     

Fabrication of PDMS microlens array by digital maskless grayscale lithography and replica molding technique

This paper presents a facile and effective method to fabricate microlens array in polydimethylsiloxane (PDMS). The microlens array model is fabricated in photoresist via digital maskless grayscale lithography technique and the replica molding technique is used to fabricate PDMS microlens array. A convex PDMS microlens array with rectangular aperture and concave PDMS microlens array with hexagonal aperture are fabricated. The morphological characteristics of the microlens arrays are measured by microscope and 3D profiler. The results indicate that the profiles of the PDMS microlens arrays are clear and distinct. This method provides a simple and low-cost approach to prepare large area, concave or convex with arbitrary shape microlens array, which has potential application in many optoelectronic devices.     

Rigorous electromagnetic analysis of dual-closed-surface microlens arrays

In this paper, we investigated the focal performance of the dual-closed-surface microlens arrays (DCSMAs) based on rigorous electromagnetic theory and boundary element method (BEM) in the case of TE polarization. The DCSMAs are designed with different substrate thickness and different distance between microlenses. DCSMAs designed according to different wavelengths are surveyed. The DCSMAs with different incident angles are also studied. Several focusing performance measures, such as the focal spot size, the focal position on the preset focal plane, the diffraction efficiency and the normalized transmitted power, are presented. Numerical results indicate the DCSMAs with different parameters can implement focusing beams and the focal performance of DCSMAs is easily influenced by the substrate thickness and the incident wavelength. Furthermore, the optimal thickness for the maximal diffraction efficiency of the DCSMAs is given. It is expected that the DCSMAs may be used as a parallel processing device in micro-optics systems.     

飞秒激光和酸刻蚀方法制作凹面微透镜阵列

基于飞秒激光光刻技术和氢氟酸对光学玻璃的刻蚀,在K9光学玻璃表面制作了凹面微透镜阵列,并且可以以此为模板实现凸微透镜阵列的大量复制.用相位对比显微镜和扫描电子显微镜分析了微透镜阵列的表面轮廓,测试了微透镜阵列的光学衍射特征.该方法简单、透镜参量可控,制作的微透镜阵列能够用于分光、光束匀化、并行光刻等强激光领域.