| 菲涅耳微透镜列阵衍射效率的测试与分析 |
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| 引用本文： | 王植恒,陈英,杜春雷.菲涅耳微透镜列阵衍射效率的测试与分析[J].光学学报,1998,18(1):41-48. |
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| 作者姓名： | 王植恒 陈英 杜春雷 |
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| 作者单位： | 四川大学物理系，中国科学院成都分院光电研究所 |
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| 基金项目： | 中国科学院光电所微细加工光学技术国家重点实验室资助 |
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| 摘 要： | 归纳了目前二元位相型菲涅耳微透镜列阵衍射效率测试中所用各种衍射效率的不同定义，提出规范定义的建议。并设计了测量衍射效率的系统，方法简单易行，适于测试具有微小单元尺寸的菲涅耳微透镜列阵的衍射效率。
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| 关 键 词： | 菲涅耳微透镜列阵，衍射效率，CCD探测器 |
| 收稿时间： | 1996/10/5 |
Measurement and Analysis of Diffraction Efficiency of Fresnel Microlens Arrays |
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| Abstract: | The various definitions of diffraction efficiency of binary microlens arrays are sumd up according to the practical measurement method in the reported papers, and the suggestionsd for the standard definition and the corresponding measurement method are presented. The measurement system of diffraction efficiency suggested in this paper is easy to operate and can be used to measure the diffraction efficiency of the Fresnel microlens arrays. |
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| Keywords: | Fresnel microlens arrays diffraction efficiency CCD detector |
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