Growth of Silicon Nanowires by Heating Si substrate

Amorphous silicon nanowires were prepared by heating an Si substrate at high temperatures using an Ni (or Au) catalyst.The nanowires have a diameter of 10-40nm and a length of up to several tens of micrometres.Unlike the well-known vapour-liquid-solid mechanism,a solid-liquid-solid mechanism appeared to control the nanowire growth.The heating process had a strong influence on the growth of silicon nanowires.It was found that ambient gas was necessary to grow nanowires.This method can be used to prepare other kinds of nanowires.     

多孔硅结构与发光机理的非线性光学研究

最近的研究中,采用1.06μm超短脉冲光激发,在多孔硅表面观察到了有效的红外多光子激发的荧光发射.研究表明,这是一个增强的三阶非线性光学过程.本文利用其三阶非线性特性对具有强可见光发射的多孔硅结构进行了研究,结果显示晶体硅的各向异性特征在多孔硅中几乎被保留;此外,较强的激光激发导致的红外上转换荧光信号衰减过程被归结为与多孔硅表面氢的脱附有关.     

多孔硅的光学非线性效应

自从1990年英国皇家信号与雷达研究所的Canham发现了多孔硅的可见光发射现象以后[1],在国际上掀起了一股多孔硅发光研究的热潮.继光致发光以后,有好几个研究组已观察到多孔硅的固态电致发光[2],这是向多孔硅在光电子器件的应用方向迈出的一大步.对于多孔硅的发光机理,虽然多数人倾向于认为这是一种量子线或量子点结构的限制效应,但也有一些与之相矛盾的实验结果,以致提出了一些其他的可能机理,如 SiH2或Si6O2H5聚合物,a-St,应变和杂质的作用等.所以要最终确定多孔硅的发光究竟是否是一种量子限制效应,还有待于提供进一步的实验事实. 另一…     

制备多孔硅的一种新方法

自从Canham观察到多孔硅(PS)的可见光致发光后,由于其可望成为可与Ⅲ—Ⅴ族半导体材料相媲美的新型光电子材料而引起了科学界极大的兴趣.目前,制备多孔硅一般都采用电化学腐蚀方法.     

一种新型SOI结构——SiGe-OI材料研究进展

SOI(silicononinsulator ,绝缘层上的硅 )技术和SiGe(silicongermanium ,锗硅 )技术都是微电子领域的前沿技术 .SiGe-OI(SiGe -on -insulator ,绝缘层上的锗硅 )新型材料是最近几年来才出现的一种新型SOI材料 ,它同时具备了SOI技术和SiGe技术的优势 ,因而成为当前微电子研究领域的最前沿课题之一 .文章结合中国科学院上海微系统与信息技术研究所的工作 ,综述了SiGe-OI材料研究情况和应用前景 ,详细介绍了其主要的制备方法 ,最后报道了作者在SiGe -OI材料研究上的一些实验结果 .     

分子动力学模拟研究熔态硅的局部结构

采用Tersoff势,修正试用不同的粒子间相互作用距离R,S的取值,进行了液态硅的分子动力学模拟.模拟的结果表明,修正Tersoff势下得到的径向分布函数能与X射线衍射、中子散射实验相一致.模拟得到在液态硅中,Si的配位数为6.9,键长为0.254nm.分子动力学模拟表明,液态硅中Si原子间联接成一种网络状结构,但大多数Si原子与其近邻Si原子仍保持近似于正四面体的局部构型.键角概率分布出现两个峰值~57°和~102°.通过键序参量分析,得到在液态硅近邻结构中,正四面体构型约占82%,键取向波动方差为5. 关键词：     

掺铒硅多孔化后的光致发光特性

采用一种新的方法制备掺Er多孔硅.首先通过分子束外延法生长Er,O共掺的硅外延层,然后通过常规的电化学阳极腐蚀法将外延层制备成掺Er离子的纳米硅柱结构.由于实现了Er离子在多孔硅中沿深度方向的均匀分布,得到峰宽仅6nm的Er3+本征发光.同时,由于铒与氧共掺于硅柱内部,多孔硅不再需要通过高温后处理引入氧来实现铒的光学激活.实验还对多孔化前后,Er3+的发光强度作出直观的比较,讨论多孔硅可见光及红外光区域的发光对Er3+红外发射的影响. 关键词：     

硅基光源的研究进展

随着人们对大容量、高速和低成本的信息传播的要求越来越迫切, 近年来硅基光电子学得以蓬勃发展, 但硅基光源一直没有得到真正的解决, 成为制约硅基光电子学发展的瓶颈. 硅的间接带隙本质给高效硅基光源的实现带来很大困难, 实用化的硅基激光是半导体科学家长期奋斗的目标. 本文分别介绍了硅基发光材料、硅基发光二极管和硅基激光的研究进展, 最后总结了目前各种硅基光源面临的问题和未来的发展方向.     

电致发光成像技术在硅太阳能电池隐性缺陷检测中的应用

论述了一种利用硅太阳能电池在一定偏压下的电致发光(Electroluminescence,EL)成像来检测硅太阳能电池隐性缺陷的方法.硅太阳能电池的EL波长范围为850～1 200 nm.正向偏压下的EL光强反映了少数载流子的浓度及其扩散长度,而反向偏压下的EL区和发光强度对应于电池的缺陷区域和缺陷密度.用硅CCD相机...     

多孔硅的光致发光和红外吸收光谱研究

用电化学腐蚀法制备出多孔硅系列样品.室温下具有明亮可见的光致发光.增大电解电流或延长腐蚀时间,发光光谱明显地“蓝移”;提高样品测量温度,发光光谱也明显地“蓝移”。红外吸收光谱表明多孔硅中除了硅丝骨架以外,还含有H、F及O等元素,随着腐蚀时间的增加,F和O原子的相对含量增加.实验结果表明,多孔硅在可见光区的发光现象是一种量子尺寸效应.     

Effect of tin-doped indium oxide film as capping layer on the agglomeration of copper film and the appearance of copper silicide

In this work, the effect of tin-doped indium oxide (ITO) film as capping layer on the agglomeration of copper film and the appearance of copper silicide was studied. Both samples of Cu 100 nm/ITO 10 nm/Si and ITO 20 nm/Cu 100 nm/ITO 10 nm/Si were prepared by sputtering deposition. After annealing in a rapid thermal annealing (RTA) furnace at various temperatures for 5 min in vacuum, the samples were characterized by four probe measurement for sheet resistance, X-ray diffraction (XRD) analysis for phase identification, scanning electron microscopy (SEM) for surface morphology and transmission electron microscopy (TEM) for microstructure.The results show that the sample with ITO capping layer is a good diffusion barrier between copper and silicon at least up to 750 °C, which is 100 °C higher than that of the sample without ITO capping layer. The failure temperature of the sample with ITO capping layer is about 800 °C, which is 100 °C higher than that of the sample without ITO capping layer. The ITO capping layer on Cu/ITO/Si can obstacle the agglomeration of copper film and the appearance of Cu₃Si phase.     

Study of silicon implanted with zinc and oxygen ions via Rutherford backscattering spectroscopy

The structural features and dopant profiles of a Si surface layer implanted with Zn⁺ and O⁺ ions are studied via Rutherford backscattering spectroscopy based on the analysis of He²⁺-ion spectra with the use of the channeling technique. The doping-impurity redistribution is analyzed upon the formation of zinc-oxide nanoparticles. The sample surface morphology is examined by means of atomic-force microscopy and scanning electron microscopy under secondary-electron emission conditions. X-ray phase analysis of the implanted layers is carried out.     

Electroluminescence with micro-watt output from ultra-small sized Si quantum dots/amorphous SiO2 multilayers prepared by laser crystallization method

We report the fabrication of Si quantum dots (QDs)/SiO₂ multilayers by using KrF excimer laser (248 nm) crystallization of amorphous Si/SiO₂ multilayered structures on ITO coated glass substrates. Raman spectra and transmission electron microscopy demonstrate the formation of Si QDs and the size can be controlled as small as 1.8 nm. After laser crystallization, Al electrode is evaporated to obtain light emitting devices and the room temperature electroluminescence (EL) can be detected with applying the DC voltage above 8 V on the top gate electrode. The luminescent intensity increases with increasing the applied voltage and the micro-watt light output is achieved. The EL behaviors for samples with different Si dot sizes are studied and it is found that the corresponding external quantum efficiency is significantly enhanced in sample with ultra-small sized Si QDs.     

Fabrication and Characterization of Si Nanocrystals Synthesized by Electron Beam Evaporation of Si and SiO2 Mixture

Silicon nanocrystals synthesized by electron beam （e-beam） evaporation of Si and SiO2 mixture are studied. Rutherford backscattering spectrometry of the as-deposited Si-rich silicon dioxide or oxide （SRO） thin film shows that after evaporation, the Si and SiO2 concentration is well kept, indicating that the e-beam evaporation is suitable for evaporating mixtures of Si and SiO2. The SRO thin films are annealed at different temperatures for two hours to synthesize silicon nanoerystals. For the sample annealed at 1050℃, silicon nanoerystals with different sizes and the mean diameter of 4.5 nm are evidently observed by high resolution transmission electron microscopy （HRTEM）. Then the Raman scattering and photoluminescence spectra arising from silicon nanocrystals are further confirmed the above results.     

Ultrathin amorphous Ni-Ti film as diffusion barrier for Cu interconnection

5-nm-thick amorphous Ni-Ti films deposited on Si by magnetron sputtering, annealed at various temperatures in high vacuum, have been studied as diffusion barriers for Cu interconnection using X-ray diffraction, atomic force microscopy and four-probe methods. Although no Cu silicide peaks are found from X-ray diffraction patterns of the samples annealed up to 750 °C, it is found that the sheet resistance of Cu/Ni-Ti/Si decreases with the increase of annealing temperature and then slightly increases when the annealing temperature is higher than 700 °C. Root mean square roughness of Cu/Ni-Ti/Si increases with the increase of annealing temperature and many island-like grains present on the surface of the 750 °C annealed sample, which is ascribed to dewetting and agglomeration.     

Enhancement of saturation magnetization in Cr-ion implanted silicon by high temperature annealing

Magnetic properties and microstructure of Cr-implanted Si have been investigated by alternating gradient magnetometer (AGM), superconducting quantum interference device (SQUID) magnetometer, and transmission electron microscopy (TEM). p-Type (1 0 0) Si wafers were implanted at 200 keV at room temperature with a dosage of 1 × 10¹⁶ cm⁻² Cr ions and then annealed at 600-900 °C for 5 min. The effect of annealing on the structure and magnetic properties of Cr-implanted Si is studied. The as-implanted sample shows a square M-H loop at low temperature. Magnetic signal becomes weaker after short time annealing of the as-implanted sample at 600 °C, 700 °C, and 800 °C. However, the 900 °C annealed sample exhibits large saturation magnetization at room temperature. TEM images reveal that the implanting process caused amorphization of Si, while annealing at 900 °C led to partial recovery of the crystal. The enhancement of saturation magnetization can be explained by the redistribution and accumulation of Cr atoms in the vacancy-rich region of Si during annealing.     

Lateral force microscopy in low normal force limit

We have studied frictional force between SiN tip and Si surface by using lateral force microscopy. The cantilever we have used has very low stiffness of 0.006 N/m, and the normal force acting on the surface was much lower than the attractive force such as van der Waals force. In this low normal force limit, it was found that the frictional force did not depend on the normal force. We suggest a calibration method to estimate the attractive force from the lateral force data in this limit. The estimated attractive force between Si sample and SiN tip with radius of 10 nm was 0.4 nN in flat region and 0.65 nN at the corner of a rectangular hole.     

GaAs/SiO_2超晶格的制备和Raman光谱研究

我们采用射频磁控溅射方法在 p- Si衬底上成功地制备出四周期的非晶 Ga As/Si O2超晶格 ,并取得其高分辨率电镜像。以 80 0℃快速退火方法使超晶格中非晶的 Ga As层局部晶化 ,利用 Raman散射谱研究了其结构变化。     

Interaction of iron atoms with the silicon surface coated with a native oxide layer

The solid-phase epitaxy of iron silicide on the Si(111) surface coated with a native oxide layer is studied by high-resolution photoelectron spectroscopy using synchrotron radiation and by atomic force microscopy. The iron deposition dose changes up to 1 nm, and the annealing temperature changes up to 500°C. At room temperature, the native oxide layer is shown to be impermeable to Fe atoms and an iron film grows on the sample surface. An increase in the annealing temperature to ～100°C results in a change in the film morphology, increasing its heterogeneity. As the annealing temperature increases to ～250°C, Fe and Si atoms diffuse through the oxide layer and undergo a solid-phase reaction. As a result, stable iron monosilicide ?-FeSi forms.     

Ferromagnetic resonance and magnetic force microscopy evidence for above room temperature ferromagnetism in Mn doped Si made by a solid state sintering process

Silicon doped with manganese made by a solid state sintering process starting with nanoparticles of Si and MnO is shown to be ferromagnetic above room temperature. The evidence for ferromagnetism is obtained from ferromagnetic resonance and magnetic force microscopy measurements. The magnetic force microscopy measurements show that the ferromagnetic resonance occurs in nanosized regions in the sample as has been suggested by Dietl. Raman and electric force microscopy measurements also suggest that then material is doped inhomogenously.