Elucidating surface properties of dry-etched ZnO using H2/CH4 and H2/CH4/Ar plasma

This paper reports a study of reactive ion etching (RIE) of n-ZnO in H₂/CH₄ and H₂/CH₄/Ar gas mixtures. Variables in the experiment were gas flow ratios, radio-frequency (rf) plasma power, and total pressure. Structural and electrical parameters of the etched surfaces and films were determined. Both the highest surface roughness and highest etching rate of ZnO films were obtained with a maximum rf power of 300 W, but at different gas flow ratios and working pressures. These results were expected because increasing the rf power increased the bond-breaking efficiency of ZnO. The highest degree of surface roughness was a result of pure physical etching by H₂ gas without mixed CH₄ gas. The highest etching rate was obtained from physical etching of H₂/Ar species associated with chemical reaction of CH₄ species. Additionally, the H₂/CH₄/Ar plasma treatment drastically decreased the specific contact and sheet resistance of the ZnO films. These results indicated that etching the ZnO film had roughened the surface and reduced its resistivity to ohmic contact, supporting the application of a roughened transparent contact layer (TCL) in light-emitting diodes (LEDs).     

Experimental study of carbon particle charging at shock-wave pyrolysis of C3O2

The temporal variation in electron and ion concentrations have been measured in shock-heated mixtures of Ar + (0-2)% C₃O₂ in the 2000-3600 K temperature and 15-30 bar pressure range. Experiments in pure argon proved that the observed free electrons and ions originate from inherent impurities of sodium. The equilibrium concentrations of free charges in argon were established during (1-3) × 10⁻⁵ s and varied from 4 × 10¹¹ cm⁻³ at T₅ = 2500 K to 5 × 10¹² cm⁻³ at 3500 K. In the reactive mixtures, containing C₃O₂, the time profiles of electron and ion concentrations showed a more complicate behavior—a fast rise to a maximum followed by a gradual decay. The maximum ion concentrations were much higher and electron concentrations were much lower than in similar conditions in argon. The extent of the subsequent decay of electron concentration increased proportionally to the square of the C₃O₂ concentration. In the mixture with 2% C₃O₂ the final electron concentration was about 100 times less than in pure argon. The characteristic decay time of free charges varied from 400 to 40 μs and decreased proportionally to the square root of the charge concentration. The data analysis is based on the assumption that the observed redistribution of electron and ion concentrations is caused by charging of the carbon particles formed during pyrolysis of C₃O₂. The kinetics of particle charging and the final distribution of charges were evaluated by the analysis of electron and ion fluxes to the particles in accordance with the electric potentials of charged particles and corresponding sodium ionization. A predominance of negatively charged particles, caused by the high electron mobility, resulted in their much higher concentration than the concentration of free electrons.     

Emission properties of laser ablation of SnO2: Sb transparent conducting film and KTiOPO4 crystal

Optical emission spectra of Nd:YAG laser ablation of KTiOPO₄ (KTP) crystal and SnO₂:Sb transparent conducting thin film were recorded and analyzed in vacuum and in air. The integral intensities of spectral lines from laser-ablated KTP crystal were obtained as functions of distance from the target surface and laser power density in vacuum and in air. The ambient gas effects on pulsed laser ablation of target were discussed. We also performed laser ablation of SnO₂:Sb transparent conducting thin film in air and the electron temperature and full-width at half-maximum (FWHM) of atomic and ionic spectral lines in the plasma were quantified using Boltzmann plot method and Lorentzian fit, respectively. Integral intensities of atomic and ionic Sn spectral lines were also obtained as functions of distance from the target surface and laser irradiance. The intensity ratio of ionic and atomic Sn spectral lines as a function of laser power density was got which gives some information about the variation of ionization ratio with laser irradiance in the plasma produced by high-power laser.     

等离子体增强化学气相沉积中对尘埃颗粒诊断

采用SiH4,C2H4和Ar在射频容性耦合柱状放电室中产生了尘埃颗粒,利用发射光谱测得射频尘埃等离子体放电室中的一些基本碎片的发射光谱,并给出了这些碎片的光发射强度随着实验条件变化的曲线。随着功率和气压的增加,碎片的光发射强度逐步增加,尤其是随功率增加得更快,这说明功率对硅烷和乙烯的离解作用明显。随着硅烷和乙烯流量的增加,碎片的光发射强度随之下降。利用朗缪尔探针的实验结果得出尘埃密度的变化趋势,给出了尘埃密度随射频功率变化的曲线,其结果与硅烷和乙烯的离解变化趋势基本吻合。     

不同初始温度下H2/O2混合物等离子体的演化

本文对不同初始温度下,H₂/O₂混合物等离子体中主要粒子随时间发展的演化规律进行了数值模拟,得到了放电后等离子体中主要带电粒子和中性粒子密度随时间的变化规律.计算结果表明,H₂/O₂混合物等离子体中主要活性粒子密度随时间的增加减小,化学反应达到平衡所需的时间随初始温度升高逐渐减少.     

Refractive index dispersion in thin ZnGa2O4 films

We have studied refractive index dispersion in thin ZnGa₂O₄ films obtained by high-frequency RF ion plasma sputtering. We have established that the spectral dependence of the refractive index in the visible region of the spectrum is mainly determined by transitions from the band including 2p states of the oxygen and 3d states of the zinc, forming the highest occupied level of the valance band, to the bottom of the conduction band formed by the 4s4p states of the zinc. For the studied films, we have determined the parameters of the single-oscillator approximation, the dispersion energy, the chemical bond ionicity, and the coordination number.     

Sol-gel preparation and characterization of CoFe2O4-SiO2 nanocomposites

Magnetic nanocomposites formed by cobalt ferrite particles dispersed in a silica matrix were prepared by a sol-gel process. The effects of the thermal treatment temperature and the salt concentration on the structural and magnetic properties of the composites were investigated. By controlling these parameters, CoFe₂O₄/SiO₂ nanocomposites with different crystallite size and magnetic properties were obtained. By increasing the annealing temperature and salt concentration, composites with a progressive increase in the coercive field and of the density of magnetization were produced. In particular, a nanocomposite, with a Fe/Si molar concentration of 21%, obtained by drying the gel at 150 °C and further annealing at 800 °C, has a coercivity of 2000 Oe, which is more than twice higher than the coercivity of bulk cobalt ferrite.     

磁控溅射法合成纳米β-FeSi2/a-Si多层结构

β-FeSi₂作为一种环境友好的半导体材料，颗粒化及非晶化正在成为提高其应用性能和改善薄膜质量、膜基界面失配度的有效途径.利用射频磁控溅射法在单晶Si基体上沉积Fe/Si多层膜，合成纳米β-FeSi₂/Si多层结构.通过透射电子显微镜、高分辨电子显微术等分析手段，研究了多层结构和制备工艺之间的相互关系.研究结果表明，采用磁控溅射Fe/Si多层膜的方法，不需要退火就可以直接沉积得到β-FeSi₂相小颗粒.β-FeSi₂相 关键词： 2')" href="#">β-FeSi₂ 磁控溅射 透射电子显微镜 半导体薄膜     

Columnar-grown porous films of lithium manganese oxide spinel (LiMn2O4) prepared by ultrasonic spray deposition

Using LiNO₃ and Mn(Ac)₂ as raw materials, ultrasonic spray deposition (USD) technique was used to fabricate LiMn₂O₄ films on platinum substrate at different substrate temperatures from 310 to 390 °C. The prepared thick films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Electrochemical performance of the USD-derived films was also evaluated with LiMn₂O₄/Li cells. It is found that all of the LiMn₂O₄ films are porous and composed of orderly oriented columnar particles. The substrate temperature affects the fine microstructure of the columnar particles. The film prepared at 360 °C substrate temperature give rise to best electrochemical behavior.     

A study of modified Fe3O4 nanoparticles for the synthesis of ionic ferrofluids

XRD and XPS analyses revealed that a Fe(NO₃)₃·9H₂O layer formed outside γ-Fe₂O₃ particles when Fe₃O₄ nanoparticles were treated with ferric nitrate. The particle density differed for untreated and treated particles and was not uniform for the latter. The specific saturation magnetization of both treated and untreated particles was used to estimate the thickness of the Fe(NO₃)₃·9H₂O layer and the average density of the treated particles. The density of the treated particles was used to calculate the density of ferrofluids of different particle volume fractions. These values are in agreement with measured results. Therefore, the particle volume fraction can be designed to synthesize acid ionic ferrofluids based on Fe₃O₄ nanoparticles using Massart's method.     

Optical emission spectroscopic studies on laser ablated TiO2 plasma

Optical emission spectroscopic investigations of the plasma produced during Nd:YAG laser ablation of sintered TiO₂ targets, in oxygen and argon gas environments are reported. The spatial variations of electron temperature (T_e) and electron number density (N_e) are studied. The effect of oxygen/argon pressure on electron temperature (T_e) and electron number density (N_e) is presented. The kinematics of the emitted particles and expansion of plume edge are discussed. Spatio-temporal variations of various species in TiO₂ plasma were recorded and corresponding velocities were calculated. The effect of oxygen pressure on intensity of neutral/ion species and their corresponding velocities is also reported.     

Synthesis and characterization of spherical core-shell particles SiO2@AgEu(MoO4)2

Submicron spherical SiO₂ particles have been coated with AgEu(MoO₄)₂ phosphor layers by a sol-gel process, followed by surface reaction at high temperature, to get core/shell structured SiO₂@AgEu(MoO₄)₂ particles. X-ray diffraction (XRD), Fourier-transformed infrared spectroscopy (FT-IR), field emission scanning electron microscopy (FE-SEM), and transmission electron microscopy (TEM) were used to characterize the structure and morphology of the resulted core-shell phosphors. The luminescent properties of the core-shell structured phosphors have also been measured at room temperature, and their photoluminescence (PL) spectra are similar to the pure AgEu(MoO₄)₂ phosphor prepared by the same sol-gel method exhibiting red emission.     

原子力显微镜与x射线光电子能谱对LiBq4/ITO和LiBq4/CuPc/ITO的表面分析

利用原子力显微镜对8-羟基喹啉硼化锂(LiBq₄)/铟锡氧化物和8-羟基喹啉硼化锂/酞菁铜(CuPc)/铟锡氧化物表面分别进行了扫描，显示了LiBq₄在不同衬底上的形貌差异，并进一步利用样品表面的x射线光电子能谱图验证了这一差异.实验表明，CuPc层的加入改善了LiBq₄的成膜质量，并将这种改善归因于分子构型与电子亲和势的不同. 关键词： 原子力显微镜 x射线光电子能谱 电子亲和势     

Synthesis and properties of Au-Fe3O4 and Ag-Fe3O4 heterodimeric nanoparticles

Monodisperse Au-Fe 3 O 4 heterodimeric nanoparticles (NPs) were prepared by injecting precursors into a hot reaction solution.The size of Au and Fe 3 O 4 particles can be controlled by changing the injection temperature.UV-Vis spectra show that the surface plasma resonance band of Au-Fe 3 O 4 heterodimeric NPs was evidently red-shifted compared with the resonance band of Au NPs of similar size.The as-prepared heterodimeric Au-Fe 3 O 4 NPs exhibited superparamagnetic properties at room temperature.The Ag-Fe 3 O 4 heterodimeric NPs were also prepared by this synthetic method simply using AgNO 3 as precursor instead of HAuCl 4.It is indicated that the reported method can be readily extended to the synthesis of other noble metal conjugated heterodimeric NPs.     

使用发射光谱对感应耦合CF4/CH4等离子体中C2基团形成机理的研究

利用强度标定的发射光谱法，研究了感应耦合CF4₄/CH4₄等离 子体中空间基团的 相对密度随宏观条件（射频输入功率、气压和流量比）的变化情况. 研究表明：在所研究的 碳氟/碳氢混合气体放电等离子体中除了具有丰富的CF，CF2₂，CH，H和F等活 性基团外 ，还同时存在着C2₂基团，其相对密度随着放电功率的提高而增加；随着气压 的上升呈 现倒“U”型的变化. C2₂随流量比R（R=［CH4 _{关键词： 发射光谱 感应耦合等离子体 2}基团')" href="#">C2₂基团     

Electron energy-loss spectroscopy of LiMn2O4, LiMn1.6Ti0.4O4 and LiMn1.5Ni0.5O4

The dielectric properties of LiMn₂O₄, LiMn_1.6Ti_0.4O₄ and LiMn_1.5Ni_0.5O₄ powders, synthesized by sol-gel method, were determined by analyzing the low-loss region of the electron energy-loss spectroscopy (EELS) spectrum in a transmission electron microscope. From these data, the optical joint density of states (OJDS) was obtained by Kramers-Kronig analysis. Since maxima observed in the OJDS spectra are assigned to interband transitions above the Fermi level, these spectra can be interpreted on the basis of calculated density of states (DOS), carried out with the CASTEP code. Experimental and theoretical results are in good agreement.     

Study of ion bombardment effect for Alq3 films

This paper investigated the blue shift of photoluminescence and the changes of surface morphology of Alq₃ films by ionic argon plasma bombardment. Plasma with different conditions was applied to bombard thin Alq₃ films, modifying both the physical and chemical properties of the films. After characterizing Alq₃ films treated with different RF power by XPS, PL and AFM, we proposed the mechanisms to explain the absence of PL blue shift and chemical shift after the films were exposed in the air for more than 3 h. Experimental results showed that molecular structure damages would affect the bandgap of Alq₃, leading to the blue shift effect. XPS results also showed that binding energy shifts are caused by enriched oxygen covalent bonds formed inside the films after plasma treatment. Also, surface roughness improves as RF power is increased.     

On the power-law behavior of the AC conductivity of the mixed crystal (NH4)3H(SO4)1.42(SeO4)0.58

A power law used to describe the AC conductivity from 299 to 393 K of the mixed crystal (NH₄)₃H(SO₄)_1.42(SeO₄)_0.58 led to fractional exponent values ranging from 1.08 to 0.91, depending on structural changes induced on temperature variation [B. Louati, M. Gargouri, K. Guidara and T. Mhiri, J. Phys. Chem. Solids 66 (2005) 762]. In the present note, we suggest that the fractional law exhibits features of lattice relaxation. Despite the structural changes, the parameters of the power law are mutually interconnected to yield a temperature independent phenomenon. Such behavior is probably of general validity and characterizes the universal fractional dispersion of the AC conductivity, as it was also observed in glasses of different composition.     

Luminescence characterization and electron beam induced chemical changes on the surface of ZnAl2O4:Mn nanocrystalline phosphor

Luminescence characteristics and surface chemical changes of nanocrystalline Mn²⁺ doped ZnAl₂O₄ powder phosphors are presented. Stable green cathodoluminescence (CL) or photoluminescence (PL) with a maximum at ∼512 nm was observed when the powders were irradiated with a beam of high energy electrons or a monochromatic xenon lamp at room temperature. This green emission can be attributed to the ⁴T₁ → ⁶A₁ transitions of the Mn²⁺ ion. Deconvoluted CL spectra resulted in two additional emission peaks at 539 and 573 nm that may be attributed to vibronic sideband and Mn⁴⁺ emission, respectively. The luminescence decay of the Mn²⁺ 512 nm emission under 457 nm excitation is single exponential with a lifetime of 5.20 ± 0.11 ms. Chemical changes on the surface of the ZnAl₂O₄:Mn²⁺ phosphor during prolonged electron beam exposure were monitored using Auger electron spectroscopy. The X-ray photoelectron spectroscopy (XPS) was used to determine the chemical composition of the possible compounds formed on the surface as a result of the prolonged electron beam exposure. The XPS data suggest that the thermodynamically stable Al₂O₃ layer was formed on the surface and is possibly contributing to the CL stability of ZnAl₂O₄:Mn phosphor.     

Synthesis of high tap density Li3V2(PO4)3 cathode materials using mixed lithium precursors

High tap density Li₃V₂(PO₄)₃ cathode materials were synthesized using mixed LiF and LiNO₃ as lithium precursors, LiNO₃ was used as the sintering agent. Rietveld refinement results show that no impurities phases are detected in products. Particle size distribution and tap density measurement results show that particle size and tap density of products can be increased by the addition of LiNO₃. Electrochemical characterization results show that electrochemical performance of products is declined with the increase in contents of LiNO₃ in the lithium precursors. Only a small amount of LiNO₃ added in the lithium precursors (mole ratio of LiNO₃ to LiF is 1:9) can increase the tap density and also retain the good performance of products. Scanning electron microscopy (SEM) images indicate that the samples prepared by mixed lithium precursors present particles agglomerate, and the particle size increased with increase in contents of LiNO₃. Large amount of LiNO₃ added in the lithium precursors induces the particles to become spheric and smooth, which worsens the performance. The particles obtained with the mole ratio of LiNO₃ to LiF in 1:9 show a flake-like shape with a high specific surface area, which leads to good electrochemical performance.