太赫兹波发射晶体的亚波长微棱锥增透结构的设计与实验研究

光学整流方法产生太赫兹(THz)辐射常用的非线性发射晶体在THz波段都具有较高的折射率, 使得很大一部分THz波由于晶体表面的菲涅尔反射而无法有效耦合输出. 本文报道了GaP晶体THz波发射器输出表面上亚波长微棱锥增透结构的设计和实验研究. 利用有效介质模型在理论上验证了亚波长光栅结构的增透效果, 并进一步设计了适用于不同频段的增透结构的参数. 实验中, 通过微机械加工手段在GaP晶体输出端面刻划了多种亚波长微棱锥结构, 验证了其增透效果及参数对增透频带的关系. 理论与实验的符合证明该设计思想也可用于其他THz波发射晶体. 关键词： THz波 光学整流 亚波长微棱锥增透结构 微加工     

亚波长结构对10.6 μm的抗反射表面的研制

运用等效媒质理论对亚波长结构的抗反射表面进行了分析,设计出了一种抗反射表面结构,并利用二元光学制作工艺技术,对这种表面进行了实验制备。测试结果表明,这种表面结构就像单层抗反射膜一样,具有很好的增透效果,表面结构的等效折射率相当于镀层材料折射率,而刻蚀深度则相当于镀层的四分之一波长的厚度。     

亚波长金属光栅结构的制备与矢量衍射理论分析

利用纳米压印结合溅射和反应离子刻蚀工艺制备了周期为1μm、占空比为0.2的亚波长金属光栅,利用紫外-可见-近红外光谱仪测量了光栅的0级反射光谱。在严格耦合波分析的基础上,把光栅区域电磁场的空间谐波通过勒让德多项式展开,使用多项式展开的谱分析法求解常微分方程,计算了该亚波长金属光栅的反射光谱及磁场分布。实验测量结果同矢量衍射理论计算结果都显示,该光栅在近红外、中红外波段具有表面等离子体共振现象。数值计算结果还表明,对于此类亚波长金属光栅,当光栅的深宽比增加时,其反射光谱中会出现更多的反射谷。     

锗衬底表面圆柱形仿生蛾眼抗反射微结构的研制EI北大核心CSCD

采用严格耦合波分析方法研究了长波红外波段锗基底的圆柱形周期阵列仿生蛾眼抗反射微结构的衍射特性,并进行理论分析和模拟仿真验证。重点分析了周期、深度、占空比和整体面型轮廓等参数对微结构抗反射特性的影响,得出具有较好抗反射效果的结构组合参数。采用二元曝光技术和反应离子刻蚀技术在锗基底上制备该亚波长周期微结构。通过热场发射扫描电子显微镜对微结构表面形貌进行表征,并应用红外成像光谱仪在长波红外波段分别对双面抛光锗片、单面微结构和双面微结构进行测试对比,结果显示在8~12μm范围内双面微结构的反射率小于8%,基本达到设计要求。     

锗衬底表面圆柱形仿生蛾眼抗反射微结构的研制

采用严格耦合波分析方法研究了长波红外波段锗基底的圆柱形周期阵列仿生蛾眼抗反射微结构的衍射特性,并进行理论分析和模拟仿真验证。重点分析了周期、深度、占空比和整体面型轮廓等参数对微结构抗反射特性的影响,得出具有较好抗反射效果的结构组合参数。采用二元曝光技术和反应离子刻蚀技术在锗基底上制备该亚波长周期微结构。通过热场发射扫描电子显微镜对微结构表面形貌进行表征,并应用红外成像光谱仪在长波红外波段分别对双面抛光锗片、单面微结构和双面微结构进行测试对比,结果显示在8~12μm范围内双面微结构的反射率小于8%,基本达到设计要求。     

二氧化硅亚波长纳米微结构的增透特性

对亚波长纳米微结构-非紧密堆积多晶胶体晶体光学薄膜的增透特性进行了研究。采用浸渍-提拉法在玻璃表面组装了亚波长纳米微结构,并利用等效介质理论分析其光学性质,理论和实验符合。研究表明实验制备的纳米微结构具有优异的增透性质,通过控制组装条件可以控制膜层厚度实现高增透效率从可见光到近红外的有效调谐,且微结构在玻璃基底上的等效折射率接近1.22,透射率最大能提高约7%,达到99.8%的增透效果。     

ZnS衬底上GeC/GaP增透保护膜系的制备及红外光学性质

把GeC/GaP双层膜用作ZnS衬底的长波红外(8~11.5μm波段)增透保护膜系。采用射频磁控溅射法,以高纯Ar为工作气体、单晶GaP圆片为靶制备了GaP薄膜;用射频磁控反应溅射法在高纯Ar和CH4的混合气体中,以单晶Ge圆片为靶制备了GeC薄膜。分别用柯西(Cauchy)公式和乌尔巴赫(Urbach)公式表示折射率和吸收系数,对薄膜的红外透射率曲线进行最小二乘法拟合,得到了它们的厚度及折射率、吸收系数等光学常数。GaP膜的折射率与块体材料的相近,在波长10μm处约为2.9;GeC膜的折射率较小,在波长10μm处约为1.78。用所得到的薄膜折射率,通过计算机膜系自动设计软件在ZnS衬底上设计并制备出了GeC/GaP双层增透保护膜系,当GaP膜厚较大时,由于吸收增大膜系增透效果较差;当GaP膜厚较小时,膜系有较好的增透效果。     

锥形轮廓亚波长二维表面浮雕结构的矢量衍射特性

本文利用严格耦合波理论对多台阶逼近锥形轮廓的亚波长二维表面浮雕结构进行了计算分析.从本文的计算结果来看,采用多台阶来逐步逼近锥形轮廓的亚波长零级二维表面浮雕结构具有在宽波段、大视角上能够实现抗反射,并且对光波的偏振态下不敏感的特性.从而使得该结构为薄膜光学在材料的选择方面提供了极大的选择自由度.     

亚波长介质光栅的制作误差分析

利用严格耦合波理论（RCWA）分析了方向误差和面形误差对亚波长光栅衍射效率的影响. 通过分析发现,方向误差和图案边缘钝化对光栅的衍射效率影响不大,而刻蚀过程中由于侧壁倾斜而产生的面形误差对光栅的衍射效率影响非常大.在制作亚波长光栅时,可以通过选取合理的刻蚀系统或增大占空比的方法来避免基底型误差的出现.该结论对于制作亚波长光栅具有重要的指导作用.同时根据得出的结论,选用专门用于硅深刻蚀的等离子体辅助刻蚀系统制作出了红外30 μm亚波长抗反射光栅,检测结果显示,光栅沟槽侧壁陡峭且透过率和设计值吻合得比较好.     

化学气相沉积法制备的石墨烯晶畴的氢气刻蚀

利用化学气相沉积法在抛光铜衬底上制备出六角形石墨烯晶畴, 并且在高温条件下对石墨烯晶畴进行氢气刻蚀, 利用光学显微镜和扫描电子显微镜对石墨烯晶畴进行观测, 发现高温条件下石墨烯晶畴表面能够被氢气刻蚀出网络状和线状结构的刻蚀条纹. 通过电子背散射衍射测试证明了刻蚀条纹的形态、密度与铜衬底的晶向有密切关系. 通过对比实验证明了石墨烯表面上的刻蚀条纹是由于石墨烯和铜衬底的热膨胀系数不同, 在降温过程中, 石墨烯表面形成了褶皱, 褶皱在高温氢气气氛下发生氢化反应形成的. 对转移到二氧化硅衬底的石墨烯晶畴进行原子力显微镜测试, 测试结果表明刻蚀条纹的形貌、密度与石墨烯表面褶皱的形貌、密度十分相似. 进一步证明了刻蚀条纹是由于褶皱结构被氢气刻蚀引起的. 实验结果表明, 即使在六角形石墨烯晶畴表面也存在褶皱和点缺陷. 本文提供了一种便捷的方法来观察铜衬底上石墨烯褶皱的分布与形态; 同时, 为进一步提高化学气相沉积法制备石墨烯的质量提供了更多参考.     

二维微纳米结构表面反射特性的时域有限差分法模拟研究

亚波长微纳米结构表面具有优良的抗反射特性,本文以硅基太阳能电池响应光谱的300~1 200 nm为应用基础,利用时域有限差分法计算了表面面形、结构参量的占空比、高度和周期以及光波入射角等对二维微纳米结构表面反射特性的影响,并结合等效介质理论进行了进一步理论分析,结果表明:等截面光栅结构的反射率较大,结构参量影响也较小;锥形渐变截面光栅结构的抗反射性能较好,且反射率随着占空比、结构高度的增大而显著下降;同时,光波在光栅法线的±40°范围内入射时,反射率均较小.通过对亚波长微纳米光栅结构的反射特性的模拟和分析,为抗反射表面的设计和制作提供了基础.     

Antireflective cerium and samarium oxide coatings for silicon photoelectric devices

We report the optical transmission spectrum of cerium and samarium oxide films, and the use of these materials as antireflective coatings on silicon photoelectronic transucers. It is shown that the oxide films exhibit high transmission in the 400–1200 nm spectral region and make it possible to reduce the reflection coefficient from the silicon surface to 1.2–1.9%, and the integrated reflection coefficient for radiation in the range 400–1000 nm may be reduced to 8–9 %. It is shown that an antireflective coating of cerium or samarium oxide increases the short circuit photocurrent from silicon photoelectric devices by more than 40%.Samarsk State University. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 9, pp. 20–24, September, 1994.     

CdS/ZnS core–shell nanoparticles in arachidic acid LB films

Core–shell CdS/ZnS nanoparticles in arachidic acid film were prepared through a novel Langmuir–Blodgett (LB) approach. Post-deposition treatment of the precursor LB multilayers of cadmium arachidate with H₂S gas followed by intercalation of Zn²⁺ ions and further sulfidation result in the formation of CdS/ZnS nanoparticles in the LB film. The formation of these nanoparticles and resulting changes in layered structures were studied by FTIR and X-ray reflection measurements. The optical properties were studied using UV–vis absorption and photoluminescence spectroscopy. A red-shift in the absorption spectrum and enhancement of CdS excitonic emission together with reduction of surface states emission suggest that after the intercalation step, a thin layer of ZnS surrounds the CdS nanoparticles, thus forming a core–shell structure. Subsequent to the second sulfidation, a further red-shift in absorption suggests the formation of a thicker ZnS coating on CdS. Electron diffraction of CdS nanoparticles coated with thicker ZnS showed the diffraction patterns of only ZnS, as expected for core–shell structures.     

Fabrication of highly ordered CuInSe2 films with hollow nanocones for anti-reflection

Highly ordered CuInSe₂ films with hollow nanocones were fabricated by electron beam evaporation and nanospheres lithograph. From the AFM analyses, polystyrene nanospheres with diameter of 220 nm are assembled regularly on glass substrates. After reaction ion etching under different powers and residues removal, different and new surface morphologies of substrates have been obtained, such as smooth nanocones and hollow nanocones. The diffuse reflection spectra demonstrate that films on the substrates with periodic nanopatterned structure have less reflection over wavelengths ranged from 200 nm to 2500 nm due to light trapping. Especially, reflection for hollow nanocone arrays has the larger suppression value than nanocone-patterned films, which proves that surface pattern of hollow nanocones has better anti-reflection effect. Furthermore, while hollow depth increases from 6 nm to 9 nm, its optical antireflective effect becomes remarkable. These results could yield new options for solar-cell design with higher energy conversion efficiency.     

Antireflection properties of germanium–carbon coating on zinc supplied substrate

In this research, germanium–carbon coatings were deposited on ZnS and glass substrates by a RF plasma enhanced chemical vapor deposition method using GeH₄ and CH₄ as precursors. ZnS/Ge_1?xC_x double-layer antireflection coating with optical thickness of one quarter wavelength was designed. The samples were characterized by fourier transform infrared spectroscopy, X-ray diffraction (XRD), field emission scanning electron microscopy and nanoindentation. The coatings exhibited a structure free of pores with a very good adhesion to substrate. Based on the XRD patterns, no diffraction peak was found, so all the coatings mainly had an amorphous structure. The infrared (IR) transmittance spectrum show that the maximum IR transmittance in the band of 1030–1330 cm^?1 was about 84.6%, which is higher than ZnS substrate by 10%. In addition, the reflection of ZnS substrate is about 25%. This system has reduced the reflection from the substrate by 15%.     

微球透镜对亚波长表面结构的显微成像研究

为了研究微球透镜对亚波长物体的成像特性,利用直径为3.4μm的二氧化硅微球透镜对刻录蓝光光碟的亚波长表面结构进行了显微成像实验,观察了不同排列方式和液体浸没深度下微球透镜的成像特性。实验结果表明:微球透镜在不同浸没深度下对亚波长表面结构具有放大作用,放大率为1.2~1.8倍,并且通过微球透镜的密排列,可以获得更大的视场;浸没液体深度增大时,图像的放大率减小,视场增大。基于时域有限差分的电场仿真表明,微球透镜可以将光场汇聚成半高全宽为260nm,纵向可持续几个微米的高强度光区域,引起强的背景散射,从而获得普通光学显微镜不能分辨的亚波长表面结构图像。     

Transmission enhanced optical lenses with self-organized antireflective subwavelength structures for the UV range

We present transmission increased fused silica lenses produced by using self-organized antireflective structures for which we developed an efficient manufacturing process. The spectral transmission measured over the whole lens aperture shows a significant transmission enhancement of up to 3.5% in the UV range. Local measurements on the lens's surface reveal a strongly reduced reflection of below 0.1% for 300 nm wavelength, which is homogeneous over the whole lens. Further, the lenses show a broadband spectral antireflection behavior. For 600 nm wavelength the reflection was measured at about 1%.     

复合法布里-珀罗共振声学结构实现亚波长超声聚焦的研究

提出一种多通道的声学结构,实现超声平面波的亚波长聚焦。该声学结构由整数倍长度的亚波长孔径组成,所有的通道同时产生法布里一珀罗共振,含有亚波长信息的倏逝波与结构中的透射共振模式耦合放大,实现亚波长聚焦;进一步在结构表面添加凹槽,延拓结构表面的周期性,可提高特定频率处的透射增益和亚波长聚焦分辨率。研究结果表明该结构能够在宽频带实现亚波长聚焦,增加传输增益。该结构在医学超声成像以及治疗具有潜在的应用价值。