微纳米加工技术在纳米物理与器件研究中的应用

物质在纳米尺度下可能呈现出与体材料不同的物理特件，这正是纳米科技发展的基础之一。要想探索在纳米尺度下材料物埋性质的变化规律及可能的应用领域，离不开相应的技术手段，微纳米加工技术作为当今高技术发展的重要技术领域之一，是实现功能人工纳米结构与器件微纳米化的基础。本文根据几个不同的应用领域，介绍了微纳米加工技术在纳米物理与器件研究领域的应用。     

拓扑量子材料光电探测器研究进展

物质拓扑态的发现是近年来凝聚态物理和材料科学的重大突破。由于存在不同于常规半导体的特殊拓扑量子态(如狄拉克费米子、外尔费米子、马约拉纳费米子等),拓扑量子材料通常能表现出一些新颖的物理特性(如量子反常霍尔效应、三维量子霍尔效应、零带隙的拓扑态、超高的载流子迁移率等),因而在低能耗电子器件和宽光谱光电探测器件领域具有重要的研究价值。本文综述了拓扑量子材料的特性与制备方法以及在光电探测领域的发展现状,重点讨论了拓扑绝缘体与拓扑半金属宽光谱光电探测器的器件结构与性能,同时也对拓扑量子材料在光电探测器领域的发展前景进行了展望。     

Properties and perspectives of ultrawide bandgap Ga2O3 in optoelectronic applications

Gallium oxide (Ga₂O₃) is an ultrawide bandgap semiconducting material that has been developed for many advanced technology and engineering applications and has potential uses in power devices, optoelectronics and sensing applications because of its high-quality material properties and availability of economically intrinsic substrates. Understanding the properties and applications of Ga₂O₃ aids in expanding its usage into new fields. This review summarises the crystal structure, polymorphism, thermal properties and optical and optoelectronic device applications of Ga₂O₃. As a wide bandgap semiconductor, this material has elicited new research interests on the basis of fundamental technologies, leading to various types of applications, including those in the optoelectronic field, such as light-emitting diodes and solar cells. Ga₂O₃ devices consume less power and have relatively low production cost, making them suitable for mass production. Issues, such as low thermal conductivity and anisotropic crystals in Ga₂O₃ structures, have been discussed; and suggestions, such as the doping method, have been provided to improve the electrical and optical properties of Ga₂O₃. The potential, challenges and progress of Ga₂O₃, particularly as an emerging material for high-power and deep-ultraviolet optoelectronic devices, are also reviewed and presented.     

ZnO一维纳米线及其异质结构的外延生长

一维纳米结构因其优异的光、电特性，在纳米电子学，光电子学器件等方面有重要的应用价值而倍受关注．在一维半导体纳米材料中，ZnO因激子束缚能大（60meV），可在室温获得高效的紫外发光而成为近年来继GaN材料后的又一研究热点．外延生长一维纳米结构ZnO及其量子阱材料除因量子尺寸效应更适宜做室温紫外发光、激光材料与器件外，还因界面和量子限制效应而具有许多新奇的光、电、和力学特性，可应用于纳米光电子学器件，传感器及存储器件，纳米尺度共振隧道结型器件和场效应晶体管的研制和开发．文章着重介绍了目前ZnO一维纳米结构制备，一维ZnO纳米异质结构和一维ZnO／Zn1-xMgxO多量子阱结构的外延生长和研究进展．     

Recent advances in two-dimensional layered and non-layered materials hybrid heterostructures

With the development of Moore's law, the future trend of devices will inevitably be shrinking and integration to further achieve size reduction. The emergence of new two-dimensional non-layered materials (2DNLMs) not only enriches the 2D material family to meet future development, but also stimulates the global enthusiasm for basic research and application technologies in the 2D field. Van der Waals (vdW) heterostructures, in which two-dimensional layered materials (2DLMs) are physically stacked layer by layer, can also occur between 2DLMs and 2DNLMs hybrid heterostructures, providing an alternative platform for nanoelectronics and optoelectronic applications. Here, we outline the recent developments of 2DLMs/2DNLMs hybrid heterostructures, with particular emphasis on major advances in synthetic methods and applications. And the categories and crystal structures of 2DLMs and 2DNLMs are also shown. We highlight some promising applications of the heterostructures in electronics, optoelectronics, and catalysis. Finally, we provide conclusions and future prospects in the 2D materials field.     

Organic materials in future integrated optoelectronic circuits

During the last two decades, lithium niobate has been extensively studied for applications in integrated optical circuits. However, it is difficult to integrate lithium niobate optical devices with semiconductor electronic devices because the materials are incompatible. In recent years, semiconductor materials have been emerging as the main contenders in applications; these materials have the advantage of allowing both optical and electronic devices to be integrated. Further, the semiconductor technology has advanced rapidly, allowing us to engineer device parameters very precisely. In semiconductor optoelectronic devices, that is, bulk and quantum well structures, electroabsorption has mainly been used for amplitude modulation of light. The electrorefraction effect is the most useful for devices employing phase-modulation techniques, but this effect cannot be effectively utilized in semiconductors since the strongest electrorefraction effect is near the absorption edge of the material. Recently, organic materials have been shown to have electro-optic coefficients equal to or larger than that of lithium niobate. There are major advantages of organic materials: (1) the organics can be deposited on semiconductor substrates, and therefore both electronic and optical circuits can be integrated; (2) in organic materials the electrorefraction can be effectively utilized to obtain both amplitude and phase modulation; (3) the organic material composition can be adjusted to satisfy some device requirements. In this paper, a comparison of these material systems are made in terms of device applications.     

Quantum wells for femtosecond optoelectronics applications

The ultrafast nonlinear optical properties of quantum well excitons have been studied extensively in recent years. Quantum well excitons, which are sharp and well-resolved at room temperature, are well suited to optoelectronics applications, having large electroabsorption response. In this review, we discuss experiments which use simultaneously the nonlinear optical response of the quantum well exciton and the electroabsorption response in order to characterize electrical signals in the femtosecond time scale. In addition, we discuss intrinsic speed limitations in excitonic optoelectronics and extensions to one- and two-dimensional spatiotemporal field mapping.     

Photodetecting and light-emitting devices based on two-dimensional materials

Two-dimensional(2D) materials, e.g., graphene, transition metal dichalcogenides(TMDs), and black phosphorus(BP), have demonstrated fascinating electrical and optical characteristics and exhibited great potential in optoelectronic applications. High-performance and multifunctional devices were achieved by employing diverse designs, such as hybrid systems with nanostructured materials, bulk semiconductors and organics, forming 2D heterostructures. In this review,we mainly discuss the recent progress of 2D materials in high-responsive photodetectors, light-emitting devices and single photon emitters. Hybrid systems and van der Waals heterostructure-based devices are emphasized, which exhibit great potential in state-of-the-art applications.     

限域量子态调控研究

电子、激子和声子等量子态在固体中的行为早已被人们所熟知. 然而，当体系的尺寸只有纳米量级的时候，已有的固体理论常常不能适用，需要新的低维物理理论的建立. 我们系统研究了低维体系限域量子态（包括电子、激子和声子）的行为对环境、应力、压力及光的响应和性质的调控. 较早认识到低维体系之显著的表面-体积比对量子态性质调控之有效性，系统地揭示了低维体系的一系列由表面和应力决定的新颖性质，证明了低维体系的表面和应力效应同量子限域效应同等重要. 本文概况了如下五个方面的结果：（1）一种使用应力效应调控电子能带结构的方法和（2）一种使用表面效应调控电子能带结构的方法（这两个方法都可将低维体系能带从间接能隙调控至直接能隙能带结构）；（3）一种低维体系表面掺杂方法，该方法将在低维体系掺杂中取代传统方法；（4）量子点表面诱导的光致异构现象；（5）基于表面自催化半导体低维结构的形成机理. 希望我们的研究工作有助于促进低维体系在光电子、纳电子、环境、能源、生物和医学等领域的应用.     

提高Si基材料高效率发光途径的探索

近来人们对发展硅基光电子学作出了很大的努力。众所周知,如同晶体管是微电子学的核心器件一样,发光器件将是光电子学的关键部件。然而由于硅属间接带隙材料,发光效率比直接带隙的ＧａＡｓ等化合物材料低三个多量级,因此如何在硅基材料系实现高效率发光,已成为发展硅基光电子学的重要课题,它吸收着国际上众多科学、工程家们的巨大兴趣。能带工程的应用可能将提供一条有望的途径。本文总结评述了近几年来在ＳｉＧｅ量子阱能带工程,Ｅｒ３＋离子注入发光中心掺杂工程、直接带隙β—ＦｅＳｉ２材料工程以及热电子跃迁发光带内子能级工程中所取得的重要进展。本文同时对其未来的发展提出了若干设想与展望。     

Cavity optomechanics: Manipulating photons and phonons towards the single-photon strong coupling

Cavity optomechanical systems provide powerful platforms to manipulate photons and phonons, open potential applications for modern optical communications and precise measurements. With the refrigeration and ground-state cooling technologies, studies of cavity optomechanics are making significant progress towards the quantum regime including nonclassical state preparation, quantum state tomography, quantum information processing, and future quantum internet. With further research, it is found that abundant physical phenomena and important applications in both classical and quantum regimes appeal as they have a strong optomechanical nonlinearity, which essentially depends on the single-photon optomechanical coupling strength. Thus, engineering the optomechanical interactions and improving the single-photon optomechanical coupling strength become very important subjects. In this article, we first review several mechanisms,theoretically proposed for enhancing optomechanical coupling. Then, we review the experimental progresses on enhancing optomechanical coupling by optimizing its structure and fabrication process. Finally, we review how to use novel structures and materials to enhance the optomechanical coupling strength. The manipulations of the photons and phonons at the level of strong optomechanical coupling are also summarized.     

磁性斯格明子的研究现状和展望

磁性斯格明子是具有拓扑保护性质的纳米尺度涡旋磁结构.斯格明子主要存在于非中心对称的手性磁性材料以及界面镜面对称性破缺的磁性薄膜材料中.因具有实空间的非平庸拓扑性,磁性斯格明子展现出丰富新奇的物理学特性,例如拓扑霍尔效应,新兴电磁动力学等,为研究拓扑自旋电子学提供了新的平台.另一方面,由于其具有尺寸小,高稳定性和易操控的特性,磁性斯格明子在未来高密度,低能耗,非易失性计算和存储器件中也具有潜在应用.现阶段的研究已经初步发现一系列磁斯格明子材料,并证明能够通过电流操控室温下稳定的磁性斯格明子,但是室温下单个斯格明子的精确产生、湮灭以及探测在实验上仍具有挑战性.本文阐述了磁性斯格明子的基础理论以及动力学研究现状,并对现有的斯格明子材料和斯格明子的产生,湮灭以及探测方法进行了总结,最后还对未来磁性斯格明子的物理理论研究以及应用发展中的挑战和机遇进行了讨论.     

Recent progress on integrating two-dimensional materials with ferroelectrics for memory devices and photodetectors

Two-dimensional(2D) materials, such as graphene and Mo S2 related transition metal dichalcogenides(TMDC), have attracted much attention for their potential applications. Ferroelectrics, one of the special and traditional dielectric materials,possess a spontaneous electric polarization that can be reversed by the application of an external electric field. In recent years, a new type of device, combining 2D materials with ferroelectrics, has been fabricated. Many novel devices have been fabricated, such as low power consumption memory devices, highly sensitive photo-transistors, etc. using this technique of hybrid systems incorporating ferroelectrics and 2D materials. This paper reviews two types of devices based on field effect transistor(FET) structures with ferroelectric gate dielectric construction(termed Fe FET). One type of device is for logic applications, such as a graphene and TMDC Fe FET for fabricating memory units. Another device is for optoelectric applications, such as high performance phototransistors using a graphene p-n junction. Finally, we discuss the prospects for future applications of 2D material Fe FET.     

Recent Advances of Light Propagation in Surface Plasmon Enhanced Quantum Dot Devices

Surface plasmons are of particular interest recently as their performance is approaching the enhancement of light emission efficiencies, after synthesized close to the vicinity of solid state materials, i.e., semiconductor structure. As other scientific works have been proposed to improve the light-emitting efficiency, such as the use of resonant cavities, photon recycling, and thin-light emitting layers with periodic surface texturing, surface plasmon possesses a promising way to the light enhancement, due to the energy coupling effect between the emitted photons from the semiconductor and the metallic nanoparticles fabricated by nanotechnology. The usual pathway of plasmon enhanced light emitting devices is the use of Ag/Au nanoparticles coating the surface of semiconductor quantum dot (QD) or quantum well (QW) structures. However, apart from efforts to extract as much light as possible from single-driven surface plasmon-QD/QW, it is possible to enhance the light emission rate with double optical-excitations. This approach is based on the quantum interference between the external lasers and the localized quantum light, and promised to stimulate the development of plasmon-enhanced optical sensors. In this review, we describe the quantum properties of light propagation in hybrid nanoparticle and semiconductor materials, i.e., quantum dot or nanomechanical resonator coupled to Ag/Au nanoparticles, driven by two optical fields. Distinct with single excitation, plasmon-assisted complex driven by two optical fields, exhibit specific quantum interference characteristics that can be used as sensitive all-optical devices, such as the slow light switch, nonlinear optical Kerr modulator, and ultra-sensitive mass sensing. We summarize the recent advances of light propagation in surface plasmon-enhanced quantum dot devices, driven by two optical fields, which would stimulate the development of novel optical materials, deeper theoretical insights, innovative new devices, and plasmonic applications with potential for significant technological and societal impact.     

Guided mode lasing in ZnO nanorod structures

Quasi-two-dimensional arrays of nearly parallel hexagonal ZnO nanorods and a three-dimensional cylindrical microstructure consisting of ZnO nanorods have been grown by low pressure chemical vapor deposition (CVD) and carbothermal evaporation technologies, respectively. The technology ensures high optical quality of the produced nanostructures so as to act as a gain medium for stimulated emission in the ultraviolet spectral region in combination with high quality factor laser resonators. Multiple sharp lasing peaks were realized from the produced structures under nanosecond pulse optical excitation. The lasing peaks display successive onset and saturation with increasing excitation power density in accordance with the lasing behavior of guided modes in ZnO nanorods. The produced structures are expected to find applications in integrated nanoscale optoelectronics, photonics, and sensor technologies.     

应用于单分子测序的纳米微结构器件

基因测序技术是现代最为重要的生物医学研究手段之一,单分子测序技术作为最新一代测序技术被广泛研究,并形成了微纳制造、光电子、微流控和分子生物学等多学科的交叉探索和多种技术创新的有机结合.文章系统总结了应用于单分子测序的纳米微结构器件的原理和功能,重点阐述了零模波导器件和纳米孔器件在单分子测序中的作用以及制备工艺,从器件的角度提出了单分子测序技术所面临的挑战.     

Band gap engineering of atomically thin two-dimensional semiconductors

Atomically thin two-dimensional(2D) layered materials have potential applications in nanoelectronics, nanophotonics, and integrated optoelectronics. Band gap engineering of these 2D semiconductors is critical for their broad applications in high-performance integrated devices, such as broad-band photodetectors, multi-color light emitting diodes(LEDs), and high-efficiency photovoltaic devices. In this review, we will summarize the recent progress on the controlled growth of composition modulated atomically thin 2D semiconductor alloys with band gaps tuned in a wide range, as well as their induced applications in broadly tunable optoelectronic components. The band gap engineered 2D semiconductors could open up an exciting opportunity for probing their fundamental physical properties in 2D systems and may find diverse applications in functional electronic/optoelectronic devices.     

A review on quantum well structures in photonic devices for enhanced speed and span of the transmission network

Quantum well devices feature heterostructures of very thin epitaxial layers of group III-V and II-VI semiconductor materials. Quantum well devices are integrated monolithically with various optoelectronics devices to provide photonic integrated circuits. The representative structure could be realized with GaAs wells with GaAlAs barriers for wavelengths around 0.9 μm and InGaAsP are used for longer wavelengths. Together with quantum well, superlattice structure is another popular design for InGaAs Avalanche Photo Diode (APD). Quantum well structures find their applications in improved lasers, superlattice for photodiodes, modulators and switches. Consequences of quantum well theory are available today in terms of quantum wires and quantum dots. Upon the application of the normal electric field to quantum well structures, exciton pairs becomes more and more confined and the sharp exciton absorption peaks are observed. The effect is termed as “Quantum Confined Stark Effect”. The electro-absorption effect is approximately 50 times larger in multiple quantum well structures than it is in bulk semiconductors. Another electro-absorption effect known as “Franz Keldysh Effect” has been employed in monolithic waveguide detector. These effects lead to electro-absorption lasers (EAL) as well as electro-absorption laser modulators (EML).     

Electronic and optical properties of single-layered silicon sheets

The electronic and optical properties of a number of single-layered silicon sheets are investigated using density functional calculations. The energy bands of silicon sheets are found to possess direct gaps and thus facilitate the material’s potential applications in optoelectronics. Bridging one-dimensional silicon chains and three-dimensional bulk silicon, two-dimensional single-layered silicon sheets present unique dimension and orientation dependencies of band structures and imaginary dielectric functions, which offer tunable band gaps and peaks in the dielectric functions associated with symmetry breaking and quantum confinement. Our study is expected to facilitate the understanding of general low-dimensional materials and their applications.     

半导体微结构物理效应及其应用讲座第三讲半导体的激子效应及其在光电子器件中的应用

人们对半导体中的电子空穴对在库仑互作用下形成的激子态及其有关的物理性质进行了深入研究.激子效应对半导体中的光吸收、发光、激射和光学非线性作用等物理过程具有重要影响,并在半导体光电子器件的研究和开发中得到了重要的应用.与半导体体材料相比,在量子化的低维电子结构中,激子的束缚能要大得多,激子效应增强,而且在较高温度或在电场作用下更稳定.这对制作利用激子效应的光电子器件非常有利.近年来量子阱、量子点等低维结构研究获得飞速的进展,已大大促进了激子效应在新型半导体光源和半导体非线性光电子器件领域的应用.