不锈钢材料及TiN镀膜处理后PSD测试实验研究

PSD性能是评价电子储存环真空室材料及材料表面处理优劣的一个重要指标. 对一约1.5m长不锈钢管道真空室进行了镀TiN薄膜处理, 并在合肥光源机器研究用光束线(MSB)的PSD实验站上对该真空室在镀TiN薄膜处理前后分别进行了PSD性能测试实验研究. 测试研究结果表明, 镀TiN薄膜处理对于减小不锈钢材料PSD有非常明显的作用.     

不锈钢材料及TiN镀膜处理后PSD测试实验研究

PSD性能是评价电子储存环真空室材料及材料表面处理优劣的一个重要指标.对一约1.5m长不锈钢管道真空室进行了镀TiN薄膜处理,并在合肥光源机器研究用光束线(MSB)的PSD实验站上对该真空室在镀TiN薄膜处理前后分别进行了PSD性能测试实验研究.测试研究结果表明,TiN薄膜处理对于减小不锈钢材料PSD有非常明显的作用.     

真空室材料二次电子产额特性研究

设计了针对加速器真空室材料样品的二次电子产额测试装置.对测试装置的设计及测试过程进行了详细介绍,并给出了常见真空室材料的二次电子产额测试结果以及不锈钢材料在经过镀TiN薄膜处理前后的测试对比结果,分析了影响二次电子产额的一些因素,为真空室的表面处理提供了依据.     

真空室材料二次电子产额特性研究

设计了针对加速器真空室材料样品的二次电子产额测试装置. 对测试装置的设计及测试过程进行了详细介绍, 并给出了常见真空室材料的二次电子产额测试结果以及不锈钢材料在经过镀~TiN~薄膜处理前后的测试对比结果, 分析了影响二次电子产额的一些因素, 为真空室的表面处理提供了依据.     

灵敏度控制思想在主动膜系设计中的快速实现算法

 基于斜入射薄膜制备实践中镀膜误差对光谱性能的严重退化影响的认识,提出了一种基于灵敏度控制思想的主动膜系设计方法。在深入分析了镀膜中膜层结构参数误差的分布规律的基础上,运用膜系光谱系数关于膜层参数的导数计算的解析模型,建立了膜系灵敏度的定量计算模型和快速实现算法。以一45°入射高精度消偏振增透膜的设计实验为例,探讨了灵敏度控制思想在膜系设计中的可行性、快速性和有效性。结果表明,这一新型设计方法不会显著增加程序时间消耗,能获得具有良好可镀制性能的薄膜,对于正入射和宽角度入射膜同样适用,而且可以避免昂贵的失败试镀和采样,有助于缩短新薄膜的生产周期,特别是对于高精度斜入射薄膜的重复性制备具有重要意义。     

射频溅射沉积硅薄膜实验

本文描述采用射频溅射法在GH39不锈钢基体上沉积硅薄膜的实验。对直接溅射沉积硅薄膜的工艺进行了实验研究,并对硅膜进行了SIMS分析。用称重法测出无定形硅膜的最大厚度可达400—500nm,为HL-1装置等离子体边界层物理实验制作了所需的无定形硅膜收集探针。     

光学膜层激光损伤阈值均匀性的实验研究

 镀制了多种氧化物介质薄膜。用R-on-1方法测定了膜层的激光损伤阈值。引入数据处理方法，对测试数据进行分析。结果表明，基片清洗后，若放置一段时间再镀膜，则会影响到镀膜后膜层损伤阈值的均匀性，但对损伤阈值自身大小没有影响。测试激光参数对阈值均匀性也有一定影响。     

Ti-Zr-V吸气剂薄膜在管道的制备与真空性能研究

利用直流磁控溅射方法在单晶硅片和内径为22 mm、长度分别为500 mm和1500 mm的银铜管道内壁镀制了Ti-Zr-V非蒸散型吸气剂薄膜,并对镀膜管道的极限真空进行了测量。结果显示:在180 ℃下激活24 h后,镀制了Ti-Zr-V薄膜真空管道的极限真空度可以达到9.2×10?10 Pa。在关闭测试系统和离子泵的阀门后,系统仅依靠Ti-Zr-V薄膜的吸气依然能够维持在9×10?9 Pa很长时间。利用测试粒子蒙特卡罗法对薄膜的抽速和容量进行了分析和测量,结果显示,Ti-Zr-V薄膜对CO的初始粘附系数最大可以达到0.3,容量可以达到1.2个分子层。     

大型天文望远镜主镜镀膜技术

采取主镜镜面向上真空蒸镀制备方式,开展了大型天文望远镜主镜铝加介质保护反射膜技术研究。结合ZZS3200型镀膜设备真空室几何配置,对传统膜厚分布计算物理模型进行了修正,分别分析了铝膜与介质膜层膜厚均匀性。结果表明:理论分析与实验数据一致,直径2.4 m范围内膜厚不均匀性约5.5%。通过优化工艺,成功制备出1.8 m平面镜薄膜元件,在350~1 800 nm波段范围内,膜层平均反射率88.6%,通过了环境稳定性测验。     

基于离子束溅射大口径光学元件平坦化层均匀性研究

针对大口径光学元件溅射沉积膜厚不均匀的问题,采用离子束溅射平坦化层来改善光学元件表面粗糙度.利用膜厚检测仪测出光学元件沉积面上的中心区域以及各边缘区域的膜厚值,计算离子束在光学元件中心与边缘驻留时间比,并通过MATLAB拟合驻留时间分布规律,根据所得的数据进行逐级修正.实验结果表明,当驻留时间比优化为-26.6%时,可以实现在直径300～600mm大口径的光学元件上均匀镀膜,以熔石英表面上镀硅膜为例,溅射沉积6h,表面膜厚为212.4±0.3nm,薄膜均匀性达到0.4%.     

内表面栅极等离子体源离子注入TiN薄膜及其特性研究

阐述了栅极增强等离子体源离子注入（GEPSII）方法的基本思想.利用GEPSII方法在45号钢 基底上生成了金黄色氮化钛（TiN_x）膜.对不同条件下的TiN膜做电化学腐蚀，X PS，AES， XRD等分析.电化学腐蚀实验显示TiN薄膜改善了45号钢的耐腐蚀性能5—10倍，且在高气压下 效果更好.结构分析显示TiN膜含有TiO₂，TiN成分，主要沿（111）和（200）晶 向生长，深度分析显示膜的厚度只有二十几纳米，膜质地均匀且在基底有一定的嵌入深度. 关键词： 腐蚀 等离子体源离子注入 薄膜 氮化钛     

Properties of TiN coating on 45# steel for inner surface modification by grid-enhanced plasma source ion implantation method

Using a new inner surface modification method named GEPSII (grid-enhanced plasma source ion implantation), which is designed for inner surface modification of tubular work pieces, we successfully produced polycrystalline TiN coating on 0.45% C steel (45^# steel) samples. Compared with the uncoated 45^# steel sample, the electrochemical corrosion test on the coated 45^# steel samples presents evident improvement in their corrosion resistance. Two implanted voltages, direct current (－2kV) and pulsed negative voltage (－10kV), are applied on the substrates. It is shown that the direct current implantation is more effective than the pulsed implantation in the surface corrosion resistance. AES depth profile shows that coating thickness is about tens of nanometres. The preferred orientations expressed by peaks at (111) and (200) can be seen clearly in XRD patterns.     

Structural properties of TiN films grown on stainless steel substrates by a reactive radio-frequency sputtering technique at low temperature

TiN thin films were grown on stainless steel substrates by using the reactive radio-frequency magnetron-sputtering technique at relatively low temperature (200°C) using Ti and N₂. The deposition rate of the TiN film increased linearly with increasing applied radio-frequency power, and it decreased with increasing partial-pressure ratio of the N₂ gas to the Ar gas. Scanning electron microscopy (SEM) showed that the surfaces of the TiN films had very smooth morphologies. The TiN thin film had good stoichiometry for a partial-pressure ratio of 0.05. The stoichiometry of the TiN films and the interface qualities of the TiN/stainless steel heterostructures were investigated by Auger electron spectroscopy (AES) measurements. Auger depth profiles indicated that the compositions of the as-grown films consisted of titanium and nitrogen uniformly distributed throughout the films and that the films exhibited smooth interfaces. The interface quality of the TiN films to the stainless steel substrates were improved by annealing. These results indicate that annealed TiN thin films grown on stainless steel substrates hold promise for potential applications in advanced ceramic devices.     

Thermal conductivity of PVD TiAlN films using pulsed photothermal reflectance technique

In the present work, we have measured thermal-conductivity of industrial thin film TiAlN with a thickness of around 3 μm. These films are used in machining industry for cutting tools in order to increase their service life. A series of TiAlN coating with a different Al/Ti atomic ratio were deposited on Fe-304 stainless steel (AISI304) substrate by a lateral rotating cathode arc process. The samples were then coated with a 0.8 μm gold layer on top by magnetron sputtering. We present the thermal-conductivity measurement of these samples using pulsed photothermal reflectance (PPR) technique at room temperature. The thermal conductivity of the pure TiN coating is about 11.9 W/mK. A significant decrease in thermal conductivity was found with increasing Al/Ti atomic ratio. A minimum thermal conductivity of about 4.63 W/mK was obtained at the Al/Ti atomic ratio of around 0.72.     

Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating

Thin films of titanium nitride (TiN) were deposited on stainless steel substrates by a modified deposition technique, double-layered shielded arc ion plating with vicarious circular holes (DL-SAIP). The results show that the TiN film with the distance of 10 mm between the double-layered shield plates had the least droplets. The deposition rate of the films prepared with the new technique was more homogeneous than that of all the other shielded arc ion plating. The film/substrate adhesion and microhardness values of the TiN films were higher than 40 N and 18 GPa, respectively. Thus such TiN thin films can be expected in applications.     

The influence of compressive stress applied by hard coatings on the power loss of grain oriented electrical steel sheet

To reduce the core loss of electrical steel the vacuum arc ion plating technique has been used to deposit titanium nitride (TiN) layers on highly grain oriented electrical steel sheets. The layer thickness, the stresses of layers and coated sheets and the achieved reduction in core losses have been measured as functions of coating duration and applied bias voltage. Well adhered layers with high compressive stress up to 6.8 GPa have been produced. With increasing bias voltage the layer thickness decreases and the intrinsic stress of the layers increase. A further increase of bias voltage leads to a drop in stress due to thermal relaxation. In general, the tensile stress of the coated sheets rises with increasing layer thickness while the core loss of the coated material decreases with increasing tensile stress of the steel sheet and increasing bias voltage. The highest reduction of core loss has been found to be 28% (from P_1.7=0.86 W/kg for commercially coated HGO electrical steel sheet with glass film to 0.62 W/kg for TiN coated material) and is due to the reduction of excess loss only.     

Corrosion-wear monitoring of TiN coated AISI 316 stainless steel by electrochemical noise measurements

A modified electrochemical noise (EN) technique has been applied to monitor corrosion-wear of TiN coated AISI 316 stainless steel sliding against corundum in 0.5 M H₂SO₄. Experimental results show that the EN technique can sensitively detect potential and current variations during a corrosion-wear process. Corrosion-wear mechanisms of TiN coatings depend on their substrate properties. When the substrate is passive, such as AISI 316 stainless steel, the potential and current variations reflect the properties of coatings. Depassivation and repassivation alternately take place on the tribo-activated wear area during the steady-state phase.     

Rugged distal tips for CO2 laser medicine

Low-loss and rugged distal tips for CO₂ laser have been proposed and fabricated based on a commercially available stainless steel (St) pipe. A method of smoothening the inner surface of the St pipe with a rough inner surface is put forward. Fabrication parameters, transmission properties, and mechanical strength of the cyclic olefin polymer-coated silver hollow St distal tip are experimentally discussed.     

Development and evaluation of electroless Ag-PTFE composite coatings with anti-microbial and anti-corrosion properties

Electroless Ag-polytetrafluoroethylene (PTFE) composite coatings were prepared on stainless steel sheets. The existence and distribution of PTFE in the coatings were analysed with an energy dispersive X-ray microanalysis (EDX). The contact angle values and surface energies of the Ag-PTFE coatings, silver coating, stainless steel, titanium and E. coli Rosetta were measured. The experimental results showed that stainless steel surfaces coated with Ag-PTFE reduced E. coli attachment by 94-98%, compared with silver coating, stainless steel or titanium surfaces. The anti-bacterial mechanism of the Ag-PTFE composite coatings was explained with the extended Derjaguin-Landau-Verwey-Overbeek (DLVO) theory. The anticorrosion properties of the Ag-PTFE composite coatings in 0.9% NaCl solution were studied. The results showed that the corrosion resistance of the Ag-PTFE composite coatings was superior to that of stainless steel 316L.