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1.
偏压对空心阴极放电等离子体溅射制备氮化碳薄膜的影响   总被引:1,自引:0,他引:1  
利用空心阴极放电等离子体源在Si(100)单晶衬底上沉积了氮化碳薄膜.薄膜的表面形貌表明所得的薄膜非常的均匀光滑,用X光电子能谱、拉曼和红外吸收光谱对薄膜的结构、成分和化学键等进行了研究.在拉曼光谱中可以看到典型的G,D和C=N键的峰.当偏压为250V时.薄膜拉曼光谱中的D峰完全消失,此时薄膜的N/C比达到了0.81.通过对薄膜的XPS分析也表明薄膜中C—C,sp^2 CN和sp^3 CN键的组分也发生了明显的变化.当偏压为250V时薄膜的sp^3 CN相的含量达到了最大值为40%,同时氮含量也达到了最大值.实验结果给出了直接的证据:薄膜的结构模式可以通过改变偏压来得到控制.  相似文献   

2.
椭偏法表征四面体非晶碳薄膜的化学键结构   总被引:2,自引:0,他引:2  
李晓伟  周毅  孙丽丽  汪爱英 《光学学报》2012,32(10):1031005-312
采用自主研制的双弯曲磁过滤阴极真空电弧(FCVA)技术,在不同衬底负偏压下制备了四面体非晶碳(ta-C)薄膜。通过分光光度计和椭偏(SE)联用技术精确测量了薄膜厚度,重点采用椭偏法对不同偏压下制备的ta-C薄膜sp3 C键和sp2 C键结构进行了拟合表征,并与X射线光电子能谱(XPS)和拉曼光谱的实验结果相对比,分析了非晶碳结构的椭偏拟合新方法可靠性。结果表明,在-100V偏压时薄膜厚度最小,为33.9nm;随着偏压的增加,薄膜中的sp2 C含量增加,sp3 C含量减小,光学带隙下降。对比结果发现,椭偏法作为一种无损、简易、快速的表征方法,可用于ta-C薄膜中sp2 C键和sp3 C键含量的准确测定,且在采用玻璃碳代表纯sp2 C的光学常数及拟合波长选取250~1700nm时的椭偏拟合条件下,拟合数值最佳。  相似文献   

3.
张颖  何智兵  闫建成  李萍  唐永建 《物理学报》2011,60(6):66803-066803
采用辉光放电聚合技术,在不同工作压强条件下制备了掺硅的辉光放电聚合物(Si-GDP)薄膜.并采用傅里叶变换红外吸收光谱和X射线光电子能谱(XPS)对Si-GDP薄膜进行了表征,分析了压强变化对其内部结构及成分的影响.利用紫外—可见光谱对Si-GDP薄膜的光学带隙进行了分析.结果表明:Si-GDP薄膜中Si元素主要以Si—C,Si—H,Si—O,Si—CH3的键合形式存在;随着工作压强的增大,薄膜中Si—C键相对含量先减小后增加;从Si-GDP薄膜的XPS分析可以发现,C—C与C C含 关键词: 硅掺杂辉光放电聚合物薄膜 工作压强 傅里叶变换红外吸收光谱 X射线光电子能谱  相似文献   

4.
以CF4,CH4和N2为源气体,利用射频等离子体增强化学气相沉积法,在不同功率下制备了含氮氟化类金刚石膜.用俄歇电子能谱、拉曼光谱、X射线光电子能谱和傅里叶变换红外光谱对薄膜的电子结构和化学键进行了表征,并结合高斯分峰拟合方法分析了薄膜中sp2,sp3结构比率.结果表明,制备的薄膜属于类金刚石结构,不同沉积功率下,薄膜内的sp2/sp3值在2.0—9.0之间,随着沉积功率的增加薄膜内sp2的相对含量增加.膜内主要有C—Fx(x=1,2),C—C,CC和CN等化学键.沉积功率增加,C—C基团增加,膜内F的浓度降低,C—F基团减少,薄膜的关联加强,稳定性提高.  相似文献   

5.
CN薄膜结构特性的研究   总被引:1,自引:0,他引:1       下载免费PDF全文
利用离化团束(ICB)方法在Si(111)衬底上生长了CN薄膜。X光衍射(XRD)分析表明薄膜呈β-C3N4晶态结构,X射线光电子能谱(XPS)测定薄膜含N量为20%,并且观察到C1s和N1s芯能级谱中存在双峰。红外吸收光谱呈现C—N和C≡N的吸收峰。高能反射式电子衍射(RHEED)也证实薄膜中存在晶态物质。薄膜的努氏显微硬度值达到6200kgf·mm-2关键词:  相似文献   

6.
利用微波电子回旋共振(MW ECR)等离子体增强非平衡磁控溅射法制备了碳氮化硅(SiCN)薄膜。研究结果表明:硅靶溅射功率和氮气流量对薄膜化学结构、光学、力学等性能有很大影响。傅里叶变换红外光谱(FT IR)和X射线光电子能谱(XPS)表征显示,随着硅靶溅射功率由150W增加到350W,薄膜中C Si N键含量由14.3%增加到43.6%; 氮气流量的增大(2~15sccm)易于形成更多的sp2C=N键和sp1C≡N键。在改变硅靶溅射功率和氮气流量的条件下,薄膜光学带隙最大值分别达到2.1eV和2.8eV。  相似文献   

7.
利用电子回旋共振(ECR)微波等离子体辅助化学气相沉积技术、工作气氛为丙酮,在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜.在工艺研究中,对等离子体中氧的存在及其作用进行了分析.原子力显微镜分析表明,薄膜的表面粗糙度小于10nm,晶粒 尺寸约为100nm.拉曼光谱和中红吸收谱研究发现,薄膜具有强烈的荧光效应,含有sp1,sp2,sp3杂化C—C,sp3杂化CH3,羰基CO、含氧多元 环以及—COOH基等.利用纳米力学探针以 及近红区红外透射谱分析了薄膜的力学及光学性能,结果表明,薄膜的显微硬度接近4 关键词: 类金刚石薄膜 ECR微波等离子体 丙酮气氛 红外光谱  相似文献   

8.
郭栋  蔡锴  李龙土  桂治轮 《物理学报》2001,50(12):2413-2417
在对不同有机溶剂分子结构分析的基础上,选取甲醇、DMF(N,N-二甲基甲酰胺)和乙腈溶液为碳源,以脉冲直流电源电解有机溶液的方法在Si片上制得了含氢类金刚石薄膜(DLC薄膜),并研究了退火对薄膜结构的影响.通过X射线光电子能谱(XPS),喇曼(Raman)和红外(IR)光谱对薄膜的结构进行了分析表征.XPS表明薄膜的主要成分为C,喇曼光谱显示所得薄膜为典型DLC薄膜.喇曼和红外光谱还表明,膜中含有大量H并且主要键合于sp3碳处.随着退火的进行薄膜中的H被去除.随温度升高薄膜电阻率的下 关键词: 类金刚石薄膜 退火  相似文献   

9.
选用体积分数为99.999 9%的H2及反式-2-丁烯(T2B)为工作气体,利用低压等离子体增强化学气相沉积法制备了a-C;H薄膜.利用傅里叶变换红外光谱仪和X射线光电子能谱对薄膜化学键和电子结构进行分析,并结合高斯分峰拟合分析了薄膜中sp3/sp2杂化键比值和sp3C杂化键分数.结果表明:薄膜中氢含量较高,主要以sp3C-H形式存在;工作气压越高,制备的薄膜中C=C键含量越少,薄膜中sp3/sp2杂化键比值和sp3C杂化键分数增加,薄膜稳定性提高.应用UV-VIS光谱仪,获得了波长在400~1 000 nm范围内薄膜的光吸收特性,结果显示:a-C:H薄膜透过率可达98%.光学常数公式计算得到工作压强为4~14 Pa时光学带隙在2.66~2.76之间,并均随着工作气压的升高而增大.结果表明,随工作气压的升高,薄膜内sp3键减小,从而促使透过率、光学带隙增大.  相似文献   

10.
利用直流磁控溅射制得非晶态氮化碳膜,然后在高温下、常压N气氛中进行热处理,利用DTA,XRD和Auger研究晶化前后氮化碳成分、结构以及键态的变化.实验结果表明:在1186℃附近出现了晶化现象,高温晶化处理可以促进无定形氮化碳向晶态转变,在XRD图谱上出现α-C3N4衍射峰.Auger实验结果表明膜中出现富C,Si,N的区域.  相似文献   

11.
Cyclic competition game models, particularly the “rock–paper–scissors” model, play important roles in exploring the problem of multi-species coexistence in spatially ecological systems. We propose an extended “rock–paper–scissors” game to model cyclic interactions among five species, and find that two of the five can coexistent when biodiversity disappears, which is different from the “rock–paper–scissors” game. As the number of fingers is five, we named the new model the “fingers” game, where the thumb, forefinger, middle finger, ring finger, and little finger cyclically dominate their subsequent species and are dominated by their former species. We investigate the “fingers” model in two ways: direct simulations and nonlinear partial differential equations. An important finding is that the number of species in a cyclic competition game has an influence on the emergence of biodiversity. To be specific, the “rock–paper–scissors” model is in favor of maintaining biodiversity in comparison with the “fingers” model when the variables (population size, reproduction rate, selection rate, and migration rate) are the same. It is also shown that the mobility and reproduction rate can promote or jeopardize biodiversity.  相似文献   

12.
The differences of the pitch and duration of Chinese syllables between Putonghua (PTH) and Taiwan Mandarin (TM) were studied. The speech materials to be used are not only isolated syllables, but also sentences. The results reveal that: For the isolated syllables, T1 and T2 in TM are influenced by Minnan dialect, therefore their pitch are lower than those in PTH. T3 is fall-rise in PTH, while it is fall in TM. Moreover, the syllable duration sequence for different tone is T3〉T2〉T1〉T4 in PTH, while it is T1〉T2〉T3〉T4 in TM. For the syllables in sentences, T2 is mid-rise in PTH, while it is mid-level in TM. And the T3 is longer than T4 but shorter than T1 or T2 in PTH, while it is the shortest in TM. Furthermore the effects of prosodic phrase boundary on duration for different tones are almost the same in PTH, but the lengthening part of T1 or T2 is longer than that of T3 or T4 in TM.  相似文献   

13.
Downstep in pitch contour of Chinese Putonghua is examined using subtly designed sentences by controlling tone combinations. The results show both automatic and nonautomatic downstep phenomena exist in Chinese. In non-automatic downstep, low tones compress downwards the pitch range of the following syllables. and the main influence of downstep is on topline. Low tone not only lower the topline behind it, but also raise the high tones before it, the effects are compatible with each other. In automatic downstep, the topline of pitch contour in intonational phrase is presented as a linear downtrend, but it differs among speakers due to the effect of personal stress practice. In comparison with downstep phenomenon in other tone or non-tone languages, the downstep ratio in Chinese is not constant, and the domain of downstep is not limited within the adjacent tones.  相似文献   

14.
It is shown that SU(2) QCD admits an dual Abelian-Higgs phase, with a Higgs vacuum of a type-Ⅱ superconductor. This is done by using a connection decomposition for the gluon field and the random-direction approximation. Using a bag picture with soft wall, we presented a calculational procedure for the glueball energy based on the recent proof for wall-vortices [Nucl. Phys. B 741(2006)1].  相似文献   

15.
A multi-conjugate adaptive optics (MCAO) can offer a possibility of widening field of view (FOV) characterized by the isoplanatic angle, and the choose of conjugate height becomes a basic problem for MCAO, which influences the size of iosplanatic angle. Considering the application of lidar, the isoplanatic angle's expressions of two deformable mirrors (DMs) MCAO for uplink and downlink are deduced. The effects of conjugate heights for dual-conjugate AO are thoughtfully discussed, and the isoplanatic angles are further analyzed. The results show that the isopanatic angle varies with the conjugate height and reaches the maximum as the conjugate height is at the optimal altitude. Moreover, the optimal conjugate height changes with the propagation distance.  相似文献   

16.
Due to the limit of response speed of the present single-photon detector, the code rate is still too low to come into practical use for the present quantum key distribution (QKD) system.A new idea is put up to design a quick single-photon detector.This quick single-photon detector is composed of a multi-port optic-fiber splitter and many avalanche photo diodes (APDs).Au of the ports with APDs work on the time division and cooperate with a logic discriminating and deciding unit driven by the clock signal.The operation frequency lies on the number N of ports, and can reach N times of the conventional single-photon detector.The single-photon prompt detection can come true for high repetition-rate pulses.The applying of this detector will largely raise the code rate of the QKD, and boost the commercial use.  相似文献   

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19.
Based on the research in Ref. [5][Materials Science and Engineering, 1989; A122: 57 63], an improved model of heat source is set up, the different modes of Lamb wave in an isotropic sample generated by a chopped electron beam at frequency f are obtained with integral transform and normal function expansion method, and the output signal of PZT coupled at the back surface of the sample is found out. The generation mechanism of SEAM (Scanning Electron Acoustic Microscopy) signal is discussed. It shows that the SEAM is a near field imaging technique with high spatial resolution and its best lateral spatial resolution is about 2√2α (α is the radius of the focused electron beam). Some of experimental results of SEAM images are presented in the paper and it shows that the spatial resolution of SEAM is better than 0.5 μm and smaller than the thermal diffusion length of the sample. Therefore the character of near field imaging in SEAM is also proved experimentally.  相似文献   

20.
Transmission spectra of coupled cavity structures (CCSs) in two-dimensional (2D) photonic crystals (PCs) are investigated using a coupled mode theory, and an optical filter based on CCS is proposed. The performance of the filter is investigated using finite-difference time-domain (FDTD) method, and the results show that within a very short coupling distance of about 3λ, where λ is the wavelength of signal in vacuum, the incident signals with different frequencies are separated into different channels with a contrast ratio of 20 dB. The advantages of this kind of filter are small size and easily tunable operation frequencies.  相似文献   

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