薄膜体声波谐振器的力敏特性研究

薄膜体声波谐振器(FBAR)力传感器作为一种新型的谐振式传感器,力敏特性是其设计原理。以FBAR微加速度计为例研究了工作在纵波模式,采用具有纤锌矿结构的AlN作为压电薄膜的FBAR,施加应力载荷后,其弹性常数改变导致FBAR谐振频率偏移的力敏特性。首先,采用有限元(FEA)静力学仿真,得到惯性力载荷作用下集成在硅微悬臂梁上的压电薄膜的应力分布;选取最大应力值作为载荷,基于第一性原理计算纤锌矿AlN的弹性系数与应力的关系式,预测惯性力载荷作用下AlN弹性系数的最大变化量。其次,采用谐响应分析,对比空载和不同惯性力载荷作用下FBAR微加速度计的谐振频率和偏移特性,预测FBAR微加速度计的加速度-谐振频率偏移特性。最后仿真分析得到:惯性力载荷作用下,FBAR微加速度计的谐振频率向高频偏移,灵敏度约为数kHz/g;其加速度增量-谐振频率偏移特性曲线具有良好的线性度。     

薄膜体声波谐振器的力敏特性研究（英文）

薄膜体声波谐振器(FBAR)力传感器作为一种新型的谐振式传感器,力敏特性是其设计原理。以FBAR微加速度计为例研究了工作在纵波模式,采用具有纤锌矿结构的AlN作为压电薄膜的FBAR,施加应力载荷后,其弹性常数改变导致FBAR谐振频率偏移的力敏特性。首先,采用有限元(FEA)静力学仿真,得到惯性力载荷作用下集成在硅微悬臂梁上的压电薄膜的应力分布;选取最大应力值作为载荷,基于第一性原理计算纤锌矿AlN的弹性系数与应力的关系式,预测惯性力载荷作用下AlN弹性系数的最大变化量。其次,采用谐响应分析,对比空载和不同惯性力载荷作用下FBAR微加速度计的谐振频率和偏移特性,预测FBAR微加速度计的加速度-谐振频率偏移特性。最后仿真分析得到:惯性力载荷作用下,FBAR微加速度计的谐振频率向高频偏移,灵敏度约为数kHz/g;其加速度增量-谐振频率偏移特性曲线具有良好的线性度。     

SAW谐振器谐振频率微秒级快速检测方法

针对高速旋转环境下的谐振式声表面波(SAW)传感器信号快速检测,提出基于回波损耗测量原理的SAW谐振器谐振频率微妙级快速检测方法.对SAW谐振器进行线性扫频激励的过程中,将反射信号经功率检波与比较器转换为数字脉冲信号,使用计时器实时计算脉冲信号中心对应频率快速求得SAW传感器谐振频率.在8000 r/min转速范围内对...     

石英音叉温度频率特性的温度传感器（英）

提出了一种基于石英晶体温度频率特性的石英音叉微谐振式温度传感器。通过理论分析的方法对传感器进行设计,并采用有限元仿真对传感器的结构参数进行优化。采用光刻和蚀刻微加工技术制造石英音叉谐振器,对石英音叉温度传感器样机的频率温度特性进行实验研究。实验结果表明:石英音叉温度传感器的标准谐振频率为36.545 kHz,灵敏度为-1.9 Hz/℃,在-20到100 ℃的温度范围内,其非线性误差小于0.18%,迟滞为0.02%,与理论研究相吻合。该传感器具有高精度、高灵敏度、低功耗和低成本的特点,为高性能温度测量提供较好的解决方案。     

石英音叉温度频率特性的温度传感器（英文）

提出了一种基于石英晶体温度频率特性的石英音叉微谐振式温度传感器。通过理论分析的方法对传感器进行设计,并采用有限元仿真对传感器的结构参数进行优化。采用光刻和蚀刻微加工技术制造石英音叉谐振器,对石英音叉温度传感器样机的频率温度特性进行实验研究。实验结果表明:石英音叉温度传感器的标准谐振频率为36.545kHz,灵敏度为-1.9Hz/℃,在-20到100℃的温度范围内,其非线性误差小于0.18%,迟滞为0.02%,与理论研究相吻合。该传感器具有高精度、高灵敏度、低功耗和低成本的特点,为高性能温度测量提供较好的解决方案。     

ZnO薄膜硅微压电矢量水听器

提出了一种基于ZnO压电薄膜的硅微压电矢量水听器,其核心部件是利用微电子机械系统(MEMS)技术制作的悬臂梁结构压电加速度计。由近似解析和有限元分析,得出加速度计的灵敏度和谐振频率,并在此基础上对其进行了优化设计。研制了MEMS压电加速度计,并装配后构成MEMS矢量水听器。测试结果表明:加速度灵敏度在20~1,200 Hz范围内约为0.83 mV/(m/s2)。经过液柱法测量,在1 kHz时,MEMS矢量水听器等效声压灵敏度为-229.5 dB (ref.1V/μPa),比同类型压阻式MEMS矢量水听器的灵敏度高17 dB以上。      

用于矢量水听器的低频高灵敏度层合梁加速度传感器

压电加速度传感器是同振型矢量水听器的核心部件。为了满足低频高灵敏度矢量水听器的应用需求,提出并研究一种具有层合梁结构的低频高灵敏度加速度传感器。结合弹性力学和压电方程推导层合梁加速度传感器的加速度灵敏度解析解表达式,通过有限元仿真对层合梁加速度传感器尺寸进行优化,给出优化后的尺寸范围。从优化的尺寸范围中选取两种不同尺寸进行加速度传感器振动特性的仿真分析及实物制作(其中压电材料为PZT-5)与性能测试。仿真与测试结果均表明,相比已有的同尺寸金属梁加速度传感器,层合梁加速度传感器可以有效降低谐振频率并提升加速度灵敏度。当压电层厚度为0.5 mm时,加速度灵敏度最大提升3.9 dB,谐振频率下降23%。测试结果与理论分析相符。      

石墨烯谐振式力学量传感器研究进展

传统谐振式传感器的谐振敏感元件大多采用金属、石英晶体、硅等材料制成,但随着谐振式传感器朝着小型化、微型化、实用化的趋势发展,不但要求新型谐振子材料可进行微纳加工,还对其灵敏度和精度提出了更高的要求.石墨烯这种新型二维纳米材料,因具有出色的力学、电学、光学、热学特性,在谐振传感领域有着巨大的应用潜力和研究价值,因此基于石墨烯材料的力学量传感器有望在小型化、高性能和环境适应性等多方面超越硅基力学量传感器.本文针对石墨烯谐振式力学量传感器,介绍了石墨烯材料的基本性质、制备与转移方法,阐述了谐振式传感器的工作原理与应用特点,进而分析了关于石墨烯谐振特性优化与谐振器制备的理论与实验研究;在此基础上,重点总结了石墨烯谐振器在压力、加速度、质量等传感器领域的研究进展,梳理了石墨烯谐振式力学量传感器在薄膜转移、结构制备与激振/拾振等方面的技术问题,同时也明确了石墨烯在谐振传感领域的研究价值和发展潜力.     

基于柔性铰链的光纤光栅二维加速度 传感器的优化设计

为实现对待测表面两个方向的振动监测,基于圆形柔性铰链设计了一种布拉格光栅双向加速度传感器.首先,推导出该传感器的谐振频率及灵敏度的理论公式,然后基于圆形铰链刚度的理论公式,推导并验证了铰链的刚度经验公式.通过MATLAB对传感器的数学模型进行优化设计,得到在满足工作要求时,传感器灵敏度达到最大时的尺寸参数.激振实验结果表明,该传感器的谐振频率约为368Hz,灵敏度约为107.3pm/g,横向抗干扰度为4.8%,谐振频率和灵敏度理论值与实际值的误差分别为-4.2%和7.0%.     

采用DDS的近场扫描光学显微镜探针-样品的纳米距离检测

近场扫描光学显微术中, 近场距离的检测和控制是需要解决的核心技术之一. 本文研究了基于DDS驱动的压电传感器, 在一个压电陶瓷片上, 电极被分成相同的两部分, 分别用于振动驱动和振幅检测. 近场扫描的光纤探针固定于此压电陶瓷片上. 振动驱动信号采用DDS, 在样品的远场时, 可以通过频率扫描得到误差在0.006 Hz以内的压电陶瓷片谐振频率驱动信号, 而当光纤探针处于样品的近场距离之内时, 压电陶瓷片的谐振频率偏离驱动信号频率, 振幅明显减小, 从而检测出近场距离. 高精度振动驱动源DDS和高灵敏度压电传感器的采用提高了检测灵敏度和工作稳定性.     

Piezoelectric surface excitation and detection of GHz-sound waves using planar structures: Hertzian- and H-slot resonators

We report on experiments with two new kinds of microwave resonators for piezoelectric surface excitation of GHz-sound waves. These resonators consist of planar metal structures simply made by photolithography and especially suitable for the higher frequency range where the usual reentrant cavities can be applied no more due to mechanical fabrication difficulties. Moreover, by choosing an appropriate resonator geometry, an electric excitation field with preferred orientation can be generated which allows to enhance or to supress wanted sound modes simply by turning the crystal relative to the excitation structure into an optimum orientation.Supported by Deutsche Forschungsgemeinschaft     

Investigations of thickness-shear mode elastic constant and damping of shunted piezoelectric materials with a coupling resonator

Shear-mode piezoelectric materials have been widely used to shunt the damping of vibrations where utilizing surface or interface shear stresses. The thick-shear mode(TSM) elastic constant and the mechanical loss factor can change correspondingly when piezoelectric materials are shunted to different electrical circuits. This phenomenon makes it possible to control the performance of a shear-mode piezoelectric damping system through designing the shunt circuit. However, due to the difficulties in directly measuring the TSM elastic constant and the mechanical loss factor of piezoelectric materials, the relationships between those parameters and the shunt circuits have rarely been investigated. In this paper, a coupling TSM electro–mechanical resonant system is proposed to indirectly measure the variations of the TSM elastic constant and the mechanical loss factor of piezoelectric materials. The main idea is to transform the variations of the TSM elastic constant and the mechanical loss factor into the changes of the easily observed resonant frequency and electrical quality factor of the coupling electro–mechanical resonator. Based on this model, the formular relationships are set up theoretically with Mason equivalent circuit method and they are validated with finite element(FE) analyses. Finally, a prototype of the coupling electro–mechanical resonator is fabricated with two shear-mode PZT5 A plates to investigate the TSM elastic constants and the mechanical loss factors of different circuit-shunted cases of the piezoelectric plate. Both the resonant frequency shifts and the bandwidth changes observed in experiments are in good consistence with the theoretical and FE analyses under the same shunt conditions. The proposed coupling resonator and the obtained relationships are validated with but not limited to PZT5 A.     

空气耦合超声检测复合材料研究综述

复合材料普遍具有高比强度、高比刚度、高模量、耐腐蚀等优异性能,广泛应用于飞机机翼、导弹外壳、航空发动机壳体等部位。制造和服役过程中各类缺陷影响复合材料的力学性能和服役性能,必须采用有效的方法准确检测和评估复合材料中各类缺陷。空气耦合式超声检测具有完全非接触、非侵入、无损伤和无需耦合剂的特点,能够很好地运用于复合材料的在线和在位检测。该文就近年来空气耦合超声检测技术的研究现状进行了系统综述,简明扼要地分析和介绍了当前空气耦合超声检测的研究热点及进展,重点介绍了1-3型压电复合材料换能器、信号处理技术、相控聚焦式空气耦合超声检测、超声在复合材料的传播特性及其与缺陷交互作用的研究现状,探讨了空气耦合超声无损检测技术与仪器的发展方向,总结了目前空气耦合超声检测的研究热点问题,最后展望了空气耦合超声检测的发展趋势和应用前景。     

Effective elastic properties of piezoelectric composites with radially polarized cylinders

Effective elastic properties of piezoelectric composites containing an infinitely long, radially polarized cylinder embedded in an isotropic non-piezoelectric matrix are theoretically investigated under an external strain field. Analytical solutions of elastic displacement and electric potentials are exactly derived, and the effective elastic responses are formulated in the dilute limit. Meanwhile, a vanishing piezoelectric response mechanism is revealed in the piezoelectric composite containing radially polarized cylinders. Furthermore, it is shown that the effective elastic properties can be enhanced (or reduced) due to the increase of the piezoelectric (or dielectric) constants of the cylinders.     

Electric impedance and amplitude-frequency response of a one-dimensional ultrasonic liquid-filled resonator with flat piezoelectric plates

The impedance method is used to determine the electric impedance of a resonator. The amplitude-frequency response of a one-dimensional liquid-filled ultrasonic resonator is calculated by directly solving the wave equations and piezoelectric effect equations under the corresponding boundary conditions. An analysis of the amplitude-frequency response shows that the simple analytical expression obtained from the aforementioned solution is in good agreement with experimental data. An anomalous variation of the electric current in the radiating piezoelectric plate versus the excitation frequency is theoretically revealed near the high-Q resonance peaks. This effect is confirmed experimentally. It gives rise to errors in the measured absorption coefficient and multiply broadens the resonance peaks when the measurements are performed near the resonance frequencies of the piezoelectric plates.     

Elastic properties of spherically anisotropic piezoelectric composites

Effective elastic properties of spherically anisotropic piezoelectric composites, whose spherically anisotropic piezo-electric inclusions are embedded in an infinite non-piezoelectric matrix, are theoretically investigated. Analytical solutions for the elastic displacements and the electric potentials under a uniform external strain are derived exactly. Taking into account of the coupling effects of elasticity, permittivity and piezoelectricity, the formula is derived for estimating the effective elastic properties based on the average field theory in the dilute limit. An elastic response mechanism is revealed, in which the effective elastic properties increase as inclusion piezoelectric properties increase and inclusion dielectric properties decrease. Moreover, a piezoelectric response mechanism, of which the effective piezoelectric response vanishes due to the symmetry of spherically anisotropic composite, is also disclosed.     

Study on the electromechanical coupling coefficient of Rayleigh-type surface acoustic waves in semi-infinite piezoelectrics/non-piezoelectrics superlattices

The electromechanical coupling coefficient of Rayleigh-type surface acoustic waves in semi-infinite piezoelectrics/non-piezoelectrics superlattices is investigated by the transfer matrix method. Research results show the high electromechanical coupling coefficient can be obtained in these systems. The optimization design of it is also discussed fully. It is significantly influenced by electrical boundary conditions on interfaces, thickness ratios of piezoelectric and non-piezoelectric layers, and material parameters (such as velocities of pure longitudinal and transversal bulk waves in non-piezoelectric layers). In order to obtain higher electromechanical coupling coefficient, shorted interfaces, non-piezoelectric materials with large velocities of longitudinal and transversal bulk waves, and proper thickness ratios should be chosen.     

The determination of electrical parameters of quartz crystal resonators with the consideration of dissipation

Recently, as the dissipation of quartz crystal through material viscosity is being considered in vibrations of piezoelectric plates, we have the opportunity to obtain electrical parameters from vibration solutions of a crystal plate representing an ideal resonator. Since the solutions are readily available with complex elastic constants from Mindlin plate equations for thickness-shear vibrations, the calculation of resistance and other parameters related to both mechanical deformation and electrical potential is straightforward. We start with the first-order Mindlin plate equations of a piezoelectric plate for the thickness-shear vibration analysis of a simple resonator model. The electrical parameters are derived with emphasis on the resistance that is related to the imaginary part of complex elastic constants, or the viscosity. All the electrical parameters are frequency dependent, enabling the study of the frequency behavior of crystal resonators with a direct formulation. Through the full consideration of complications like partial electrodes and supporting structures, we should be able obtain electrical parameters for practical applications in resonator design.     

一维压电Fibonacci类准周期声子晶体传输特性

基于传输矩阵法研究了一维压电Fibonacci类准周期声子晶体的传输特性, 比较了一维Fibonacci序列压电准周期声子晶体与非压电准周期声子晶体以及压电周期性声子晶体的透射性. 计算结果表明:弹性波通过一维准周期结构压电声子晶体时与周期性声子晶体一样会有带隙的出现, 且发现具有压电性的Fibonacci序列准周期声子晶体禁带宽度发生了展宽. 进一步讨论了入射角度对固定频率下声子透射系数的影响,结果表明一维压电Fibonacci序列准周期结构声子透射性依赖于入射角度的选取.     

Wave propagation in non-homogeneous magneto-electro-elastic hollow cylinders

A dynamic solution is presented for the propagation of harmonic waves in imhomogeneous (functionally graded) magneto-electro-elastic hollow cylinders composed of piezoelectric BaTiO₃ and magnetostrictive CoFe₂O₄. The materials properties are assumed to vary in the direction of the thickness according to a known variation law. The Legendre orthogonal polynomial series expansion approach is employed to determine the wave propagating characteristics in the hollow cylinders. The dispersion curves of the imhomogeneous piezoelectric-piezomagnetic hollow cylinder and the corresponding non-piezoelectric and non-piezomagnetic hollow cylinders are calculated to show the influence of the piezoelectricity and piezomagnetism. Electric potential and magnetic potential distributions are obtained to illustrate the different influences of the piezoelectricity and piezomagnetism and the different influences of the piezoelectric effect and piezomagnetic effect on longitudinal modes and torsional modes. For the radial polarizing piezoelectric-piezomagnetic hollow cylinder, the piezoelectric effect and piezomagnetic effect take mostly on the longitudinal mode. Finally, a hollow cylinder at different ratio of radius to thickness is calculated to show the influence of the ratio on the piezoelectric effect and piezomagnetic effect.