| 用于矢量水听器的低频高灵敏度层合梁加速度传感器 |
| |
| 引用本文： | 涂馨予,李俊宝,刘晓迪.用于矢量水听器的低频高灵敏度层合梁加速度传感器[J].声学学报,2021,46(4):623-632. |
| |
| 作者姓名： | 涂馨予 李俊宝 刘晓迪 |
| |
| 作者单位： | 1. 中国科学院声学研究所 北京 100190; |
| |
| 基金项目： | 国家自然科学基金项目(11804366)资助 |
| |
| 摘 要： | 压电加速度传感器是同振型矢量水听器的核心部件。为了满足低频高灵敏度矢量水听器的应用需求,提出并研究一种具有层合梁结构的低频高灵敏度加速度传感器。结合弹性力学和压电方程推导层合梁加速度传感器的加速度灵敏度解析解表达式,通过有限元仿真对层合梁加速度传感器尺寸进行优化,给出优化后的尺寸范围。从优化的尺寸范围中选取两种不同尺寸进行加速度传感器振动特性的仿真分析及实物制作(其中压电材料为PZT-5)与性能测试。仿真与测试结果均表明,相比已有的同尺寸金属梁加速度传感器,层合梁加速度传感器可以有效降低谐振频率并提升加速度灵敏度。当压电层厚度为0.5 mm时,加速度灵敏度最大提升3.9 dB,谐振频率下降23%。测试结果与理论分析相符。
|
| 关 键 词： | 矢量水听器 声学换能器 加速度传感器 层合梁结构 |
| 收稿时间： | 2019-06-20 |
Low-frequency and high-sensitivity laminated beam-based acceleration sensors for vector hydrophones |
| |
| Affiliation: | 1. Institute of Acoustics, Chinese Academy of Sciences, Beijing, 100190;2. University of Chinese Academy of Sciences, Beijing, 100049;3. Beiging Engineering Technology Research Center of Ocean Acoustic Equipment, Beijing, 100190 |
| |
| Abstract: | The piezoelectric acceleration sensor is the core part of an acoustic vector hydrophone.In order to meet the application requirement of the low-frequency and high-sensitivity vector hydrophone,an acceleration sensor with the Laminated Beam(LB) structure is proposed.The analytic expression of acceleration sensitivity of the LB-based acceleration sensor is derived according to the elastic mechanics and piezoelectric equations.The size of LB-based acceleration sensor is optimized by finite element simulations and the resulting size-range is presented.Then two LB-based acceleration sensors with different sizes are chosen for the vibration characteristic analysis,physical production with the PZT-5 piezoelectric ceramic material,and performance test.Both the simulations and the test results show that LB-based acceleration sensor effectively reduces the resonance frequency and promotes sensitivity,compared with the same-size Metal Beam(MB)-based acceleration sensor.In terms of the PZT-5 piezoelectric ceramic material with 0.5 mm thickness,there are an improvement of 3.9 dB for the acceleration sensitivity and a decrease of 23% for the resonance frequency.In sum,the actual test results are coincident with the theoretical analysis results. |
| |
| Keywords: | |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《声学学报》浏览原始摘要信息 |
|
点击此处可从《声学学报》下载全文 |
|
