应用于光刻领域中的固态紫外激光源的制作

以半导体侧泵钇铝石榴石激光器为泵浦源,采用腔内泵浦两块三硼酸铯晶体,产生满足高功率与高光束质量要求的三倍频355 nm紫外激光.通过使用法拉第旋转器谐振腔优化设计与热效应补偿提高输出光的光束质量,并且使用体光栅作为输出镜,在实现线宽窄化同时保持准相位匹配的高效性能.该光刻用紫外激光源成功地替代准分子激光器,使用在一套大面积亚纳米级投影式光刻系统上,工作时紫外光输出功率为4.37 W,光束质量因子为2.27.     

二极管泵浦Nd:YAG棒双通放大器技术

二极管泵浦NdYAG棒双通放大器采用两个峰值功率6.5 kW激光泵浦模块作为泵浦源.每个激光泵浦模块由81个二极管激光器组成,NdYAG棒直径为6 mm,Nd掺杂质量分数1%.在两个封装方式和结构一致的激光泵浦模块之间采用光学像传递和插入90°石英旋转片进行退偏补偿.在重复频率400 Hz,谐振腔输出单脉冲能量6 mJ时,双通输出400 mJ,激光器光-光转换效率为12.3%,光束质量4.6,脉宽15 ns.     

长波段半导体激光泵浦光纤激光器实现2 kW功率输出

半导体激光（LD）泵浦的高功率光纤激光器具有效率高、体积小、重量轻、稳定性好等优点,在工业加工等诸多领域都有着广泛的应用。为了提高泵浦光吸收率,传统光纤激光器常用915 nm和976 nm波段的LD作为激光的泵浦源。在该类LD泵浦的光纤激光器中,由于量子亏损和泵浦吸收系数相对较高,光纤激光器的热致模式不稳定（TMI）阈值相对较低。为了提高量子效率和潜在的TMI阈值,提出采用大于1 010 nm波段的LD直接泵浦光纤激光器,产生高量子效率激光。搭建了振荡放大一体化的全光纤激光器,采用总泵浦功率为2.56 kW的1 010 nm波段LD泵浦,首次获得输出功率2.05 kW、光束质量M2约1.7的激光。后续将通过进一步增大泵浦功率、优化光纤特性以实现更高功率、更优光束质量的光纤激光输出。     

Cr~(2+):ZnSe全固态中红外激光器

建立了一种高质量、高效率全固态中红外激光系统,并对激光输出的效率、光束质量等指标进行了测试。首先,以二极管激光器为泵浦源,Tm~(3+):YAP晶体为增益介质,搭建了输出波长为1.97μm的近红外激光器。然后,以Tm~(3+):YAP激光器为泵浦源,自行开发研制的Cr~(2+):ZnSe单晶为增益介质,搭建了全固态中红外激光器。最后,测试了全固态中红外激光器的光束质量及激光器出光效率,并对谐振腔光效率的理论输出值与实际的激光器出光参数进行了对比。实验结果表明:此全固态中红外激光器的光光转换效率为17.2%,斜率效率为20%,在最高输出能量为3 W时的光束质量(M~2)在x和y方向分别为1.7和1.73,光束基本为圆形的高斯光斑。     

高效全固化263nm紫外激光脉冲的产生

运用半导体泵浦的Nd:YLF调Q倍频激光器输出的527nm波长激光和BBO晶体直接进行了外腔谐波倍频的实验研究.采用较小的基波光束尺寸和长聚焦相结合的方法实现了高效全固化263nm紫外激光脉冲的大功率输出.基波功率为6.0W时,紫外263nm激光输出780mW,转换效率达13%,实验中还发现紫外输出光束质量很好.     

单端泵浦光纤放大器获得4 kW单模窄谱激光输出

窄谱光纤激光器在光束合成等领域有着广泛的应用,然而模式不稳定效应的出现严重限制着窄谱光纤激光器的功率提升。提出并验证了采用新型981 nm稳波长泵浦方案,能够应用于窄谱激光放大并提升模式不稳定效应阈值,通过采用单端后向泵浦结构,将单模窄谱光纤放大器功率提至4 kW以上。实验中采用白噪声相位调制展宽单频激光作为窄谱种子,主放大级分别采用稳波长976 nm和981 nm两种泵浦源单端后向泵浦。在采用976 nm泵浦源泵浦时,窄谱激光最高放大至3.4 kW,出现典型的模式不稳定效应特征,功率提升受到限制。在采用981 nm泵浦源泵浦时,窄谱激光最高放大至4.05 kW,且并未出现模式不稳定效应,输出光束质量M2因子为1.3,进一步功率提升仅受限于泵浦功率。通过优化激光器设计、结合双向泵浦结构,有望实现更高功率的窄谱光纤激光输出。     

基于多层石墨烯可饱和吸收体的被动调Q Ho∶YAG激光器

报道了2μm被动调Q的Ho∶YAG激光器,该激光器采用Tm~(3+)光纤激光器作为泵浦源,使用多层石墨烯作为可饱和吸收体。在连续波激光输出模式下,当泵浦功率为4.2 W时,获得了750 mW激光输出,输出激光中心波长为2.09μm,斜率效率为29.6%。在连续波激光器谐振腔中插入多层石墨烯可饱和吸收体并调整谐振腔,获得了脉冲激光输出。当泵浦功率为4.2 W时,获得最小脉冲宽度3.1μs、重复频率66.6 kHz的脉冲激光输出,其最大平均输出功率为170 mW,斜率效率为12.6%,光束质量因子M_x~2=1.15,M_y~2=1.12。     

二极管激光侧泵浦单横模100Hz电光调Q激光器

介绍了二极管激光侧泵浦单横模１００Ｈｚ电光调Ｑ激光器的实验结果。泵浦源为一个线阵准连续１００Ｗ二极管激光器，激光工作介质为ＮｄＹＡＧ薄梯形板条，板条与泵浦源间用柱透镜耦合，ＫＤ＊Ｐ电光晶体调Ｑ。在１００Ｈｚ重复频率下，获得单脉冲能量２．３７ｍＪ，脉宽小于７ｎｓ，光束质量因子Ｍ２＝１．１的１．０６μｍ激光，光－光效率为８．５％，斜效率为１８．７％。     

窄线宽1064 nm光纤激光泵浦高效率中红外3.8μm MgO:PPLN光参量振荡器

采用放大1064 nm掺镱光纤激光器作为泵浦源,实现了中红外3.8μm MgO:PPLN光参量振荡(OPO)激光输出。在泵浦源中,采用分布式反馈激光器(DFB)作为种子源来实现光纤激光窄线宽的调制,实现线宽2.5 nm到0.1 nm的压缩,最大平均输出功率可达40 W。进一步对不同泵浦线宽条件下中红外3.8μm MgO:PPLN OPO激光进行研究,最终在泵浦功率为18.1 W、线宽为0.1 nm、重频为1 MHz、脉宽为2 ns时,获得了最高平均输出功率为2.06 W的3822.5 nm激光输出,光-光转换效率为11.38%,光束质量为M2=2.34,提高了窄线宽泵浦对中红外MgO:PPLN OPO激光输出效率。     

用于种子注入的微型二极管泵浦激光器

设计了一种用于种子注入的微型二极管泵浦激光器,并从LD泵浦固体激光器优化设计原则出发,对种子激光器的增益介质、耦合系统、谐振腔进行了优化设计.实验研究表明,该激光器运转稳定,输出光束质量高,光束发散角小,输出功率可达80 mW,可满足种子激光的要求.     

基于透射型体布拉格光栅的两通道2.5kW光谱组束输出

体光栅光谱组束是获得高功率激光输出的一种有效途径.在有限的可用带宽内,光谱通道间隔影响着组束光束数目以及最终的高功率组束输出.采用耦合波理论,建立了一个两通道高功率光谱组束模型.通过优化体光栅光谱通道间隔,可放宽对组束子束线宽和功率的限制,组束功率可大幅提升而光谱密度并无显著下降.基于此,实验上获得了2.5 kW组束输出,绝对效率超过85%,通道间隔5 nm,光谱密度为0.51kW/nm.组束功率1 kW时,组束输出能保持好的光束质量;组束功率1.5kW时光束质量恶化较明显,通过分析发现,组束光束质量的恶化主要受限于体光栅的色散及高功率下体光栅复杂的热畸变.     

Refractive-index gratings written by near-ultraviolet radiation

This is the first report, to our knowledge, of refractive-index grating side writing in 10 mol.% GeO(2)-doped fiber by the near-UV light of a cw Ar(+) laser (333-364 nm). An induced-index magnitude as large as 1.9 x 10(-4) at 1.7x10(5) W/cm(2) UV power density has been achieved. The observed gratings have exhibited the same temperature stability as gratings written by a KrF excimer laser (248 nm).     

光热折变体光栅变波长读出特性及稳定性研究

光热折变体光栅是在光敏玻璃材料中利用光热折变效应记录的折射率型体全息光栅,具有波长和角度选择性好、衍射效率高、热稳定性好和抗损伤阈值高等特点,在激光器技术领域中具有独特的优势。在自行制备的光敏玻璃材料中,用325nm波长的紫外光曝光记录透射型体全息光栅,基于变波长读出的原理设计实验,对热显影后的光热折变体光栅在532nm波长的激光照射下的衍射读出特性以及其在恒定光功率密度的激光照射下的稳定性进行了实验研究。研究结果表明,热显影后的光热折变体光栅在激光辐照下具有光致饱和效应。根据实验结果定量计算出了光热折变体光栅的选择角和描述光致饱和效应的特征时间常数。     

High-power ultraviolet 278 nm laser from fourth-harmonic generation of a Nd:YAG laser in CsB3O5

We demonstrate a high-power UV 278 nm laser by fourth-harmonic generation (FHG) of a 1112 nm Nd:YAG laser in a nonlinear optical (NLO) crystal CsB3O5 (CBO) for the first time, to our best knowledge. A 30 W level diode-pumped Q-switched Nd:YAG laser at 1112 nm with beam quality factor M2=1.2 was used as the fundamental light source at a pulse width of 500 ns. With an LiB3O5 crystal, the 1112 nm laser was first frequency-doubled to 556 nm with an average output power of 13.5 W. It was then frequency doubled again in a CBO crystal to obtain the FHG output at 278 nm. The maximum average output power of the 278 nm laser is up to 1.5 W. The results demonstrated that CBO crystal is a promising NLO material for UV high-power lasers below 300 nm.     

A narrow linewidth continuous wave Ho:YAP laser with a volume Bragg grating

We report a diode-pumped CW Ho:YAP laser at room temperature with a volume Bragg grating (VBG) instead of the conventional mirror. The Ho:YAP laser operated at 2117.9 nm, with output power 8.1 W. The optical-to-optical conversion efficiency is 51.9% and slope efficiency is 61.1%. Also, a stable output and a narrow line width less than 0.3 nm FWHM are achieved. This is the first time to report a Ho:YAP laser with a volume Bragg grating.     

高功率半导体激光器倍频实现紫外光输出

采用中心波长780 nm、线宽0.13 nm的体布拉格光栅外腔半导体激光作为基频光,基于Ⅰ类相位匹配的三硼酸锂晶体(LBO),获得了中心波长为390 nm的倍频光输出,输出功率30 μW,转换效率0.01%,为高功率紫外光束的实现提供了新的技术路线。     

半导体泵浦铷蒸气激光器国内首次出光北大核心CSCD

采用体光栅对商用线阵半导体激光器进行线宽压缩,得到线宽0.1nm、中心波长780.2nm、最高连续输出功率80W的泵浦激光输出。为了降低热效应,通过外加斩波器将泵浦光转化为脉冲模式,脉宽440μs,占空比为1∶5。采用长度为5mm的铷金属饱和蒸气作为增益介质,并在常温下充入33kPa乙烷和47kPa氦气,进行了出光实验。在泵浦峰值功率35.4W,铷吸收池温度120℃时,得到峰值功率600mW的795nm铷激光输出,斜率效率为1.7%。     

Second-harmonic generation of 405-nm light using periodically poled KTiOPO4 pumped by external-cavity laser diode with double grating feedback

A frequency-doubled laser diode system for generation of blue–UV light is described. The system is based on an external-cavity high-power laser diode with double feedback from the zeroth and the first orders of a diffraction grating. Light at 405 nm is generated in a single-pass configuration using periodically poled KTiOPO₄. We show that the double grating feedback improves the second harmonic conversion efficiency by several orders of magnitude as compared to the freely running laser. The conversion efficiency may be improved further such that higher second-harmonic powers may be generated.     

Holographic grating recorded by He–Ne laser operating at 632.8 nm in polymer film containing push–pull azo dye

Holographic gratings were optically recorded by two beams from a He–Ne laser operating at 632.8 nm in poly (methyl methacrylate) (PMMA) film containing push–pull azo dye. The holographic characteristics of the recorded gratings were dependent on the polarization direction of the recording beams and the relationship between the diffractive signals and the power density of recording beams was investigated. The formation of holographic gratings accompanied by 532 nm (double-frequency of Nd:YAG laser) irradiation was studied in detail. It was found that the effect of 532 nm laser to the holographic grating lay in two aspects. The acceleration effect of 532 nm laser to the formation of holographic grating is predominant when the power density of 532 nm laser is low. While at relatively high power density of 532 nm laser, the erasure is the main factor to the holographic grating. Moreover, the holographic grating was probed by 532 nm laser at low power density and the dependence of the first order diffractive signal on the recording beam power density was also presented.