激光促进多孔硅内表面氧化与光致发光的退化

本文对刚制备的以及分别经以下三种情况:1.样品在1大气压的氧气中经激光(Ar~+激光器的48.80nm线,功率密度为1.77W/cm~2)连续照射1小时;2.样品在1大气压的氧气中在没有激光照射的情况下保持1小时;3.样品在1.3×10~2Pa真空度下用激光连续照射1小时处理后的多孔硅在室温下进行了光致发光谱和傅里叶变换红外吸收测量,研究了处理前后光谱的变化。实验发现经第一种情况处理后光致发光峰位蓝移了约0.1eV,发光强度衰减了二十几倍,相应的其红外光谱中与氧有关的吸收峰强度大幅度增长,而经第二,三两种情况处理后它们的光致发光及红外吸收谱则无大的变化。研究表明在氧气中激光辐照能大大加速多孔硅内表面的氧化。我们认为很可能是多孔硅内表面的氧化作用使光致发光峰位蓝移,由氧化作用产生的非辐射复合中心导致光致发光效率的下降。     

多孔硅的制备条件对其光致发光特性的影响

不同的实验条件下制备的多孔硅的光致发光(PL)特性是不同的,这是许多研究产生分歧的主要原因。对比分析了阳极氧化电流密度、阳极氧化时间、溶液浓度以及自然氧化时间对多孔硅光致发光光谱的影响。认为在一定的范围内,多孔硅的发光峰位会随电流密度的增大而蓝移,要获得较强的发光,需要选择合适的电流密度;随着腐蚀时间的延长,多孔硅的发光峰位也发生蓝移。当HF酸的浓度较小时,峰位随浓度的增大表现为向低能移动;而当HF酸的浓度较大时,峰位随浓度的增大则表现为移向高能。多孔硅在空气中自然氧化,其发光峰位发生蓝移,而发射强度随放置时间的延长而降低。并用量子限制模型和发光中心模型对实验结果进行解释。     

CdS纳米颗粒填充的自支撑多孔硅光致发光特性

为了研究CdS纳米颗粒填充的自支撑多孔硅的光致发光特性,选用电阻率为0.01~0.02Ω·cm的P型硅片,先采用二步阳极氧化法制备自支撑多孔硅,再利用电泳法将CdS纳米颗粒填充入该自支撑多孔硅中.采用扫描电子显微镜、X射线能谱分析、X射线衍射分析、光致发光谱分析对所制备样品的形貌、相结构、组份及发光性能进行研究.实验结果表明:自支撑多孔硅内部成功填充了CdS纳米颗粒,该CdS纳米颗粒衍射峰为(210);CdS纳米颗粒填充的自支撑多孔硅光致发光峰峰位发生红移,且从570nm转移到740nm;电泳时间直接影响CdS纳米颗粒的填充量,导致相关的发光峰强度及发光峰位明显不同.     

铜掺杂多孔硅的光致荧光猝灭

采用浸泡镀敷的方法在多孔硅表面形成了一铜镀层,通过对掺铜前后多孔硅的光致发光(PL)谱和傅里叶变换红外(FTIR)吸收光谱的研究,讨论了铜在多孔硅表面的吸附对其光致发光的影响。实验表明,掺铜对多孔硅的光致发光具有明显的猝灭效应,并使多孔硅的发光峰位蓝移。由于多孔硅表面铜的吸附使硅-氢键明显减少,而铜原子和硅的悬挂键成键会形成新的非辐射复合中心,从而使多孔硅的光致发光强度衰减。且浸泡溶液的浓度越高,这种猝灭效应越明显。而多孔硅发光峰位的蓝移,则是由于在发生金属淀积的同时伴随着多孔硅表面Si的氧化过程(纳米Si氧化为SiO2)的缘故。     

Rh6G/氧化多孔硅复合膜的荧光光谱

为了发展性能良好的固体染料激光器,多孔介质中镶嵌激光染料是一种可行的途径。将氧化多孔硅作为基质材料,通过浸泡的方式将激光染料Rh6G嵌入其中,形成Rh6G/氧化多孔硅复合膜,对比研究了Rh6G在无水乙醇、多孔硅、多孔氧化硅中的荧光特性。结果表明,经高温氧化后,氧化多孔硅透明度提高,其荧光强度明显变弱,在复合膜中已检测不到其荧光行为。相比于在无水乙醇溶液中,在氧化多孔硅中Rh6G发射光谱的半峰全宽有所展宽,峰值波长略有红移,对称性大为提高,具有类似单体发光特性,这种现象与纳米孔对Rh6G的聚集程度的限制有关。     

一种制备稳定高效光致发光氧化多孔硅的新方法

对比研究了经20%的硝酸、浓硫酸,以及半导体工业中用于氧化清洗单晶硅表面的SC-1(1:1:5,体积比,NH4OH/H2O2/H2O,也称RCA-1)和SC-2(1:1:6的HCl/H2O2/H2O,也称RCA-2)氧化液氧化的多孔硅表面组成以及光致发光性质的差异。发现SC-1氧化液能在几十秒的时间内将多孔硅表面的Si-Hx(x=1～3)氧化掉,形成稳定的氧化层,得到具有较强的光致发光性能的氧化多孔硅。而硝酸、浓硫酸和SC-2液在相同温度下处理10min的多孔硅表面的(O)xSi-Hy振动峰仍很明显,前两者处理后的多孔硅发光强度很弱,SC-1处理后的样品虽然发光较强,但不稳定。结合SC-1的组成和多孔硅表面Si-Hx的性质,对反应结果进行了解释。将SC-1和SC-2结合使用,所得的氧化多孔硅具有强的且稳定的光致发光特性。     

一种新型阳极氧化多孔硅技术

在适当条件下氧化多孔硅是提高多孔硅发光强度的良好途径,提出了一种新型阳极氧化方法,并探讨了该方法所涉及的阳极氧化条件。采用含CH3CSNH2的HF酸水溶液作为氧化剂对初始多孔硅进行了湿法阳极氧化,发现氧化使多孔硅光致发光性质得到极大改善,进而研究了氧化电流、氧化温度、氧化时间等一系列因素对氧化多孔硅光致发光强度的影响,并给出了合理解释。实验发现,在1mA,10min,60℃的氧化条件下,采用阳极氧化技术使多孔硅发光强度增强了18倍。     

多孔硅表面缺陷光子晶体的传感模型及特性

提出了多孔硅表面缺陷光子晶体结构,引入多孔硅敏感层及吸收介质层形成表面缺陷腔,利用多孔硅高效的承载机制,将其作为待测样本的传感区域;由于吸收介质Zn S对谐振波长的吸收,可在反射光谱中获得与谐振波长对应的缺陷峰。以多孔硅的厚度为被优化变量,利用反向传播神经网络进行结构参数优化获得多孔硅的厚度最优值。由Goos-H?nchen位移建立待测样本浓度与缺陷峰波长的关系模型,进而对该结构进行传感特性分析。结果表明,优化结构参数后,缺陷峰对应的反射率由31.23%下降到0.00129%,其Q值可达1537.37。在传感特性研究中,每1%质量分数的灵敏度为2.5 nm。该表面缺陷光子晶体传感结构可为样本浓度、组分等信息的监测提供一定的理论参考。     

大气中长期存放与长时间热氧化后多孔硅光致发光峰能量的会聚

改变阳极氧化的工艺条件,制备出光致发光峰能量位于1.4—2.0eV范围内的大量多孔硅样品,其中45块样品在大气中存放一年,102块样品在200℃下热氧化(累计达200小时).在上述两种情况下,光致发光峰能量在氧化后都会聚到1.70—1.75eV能量范围.假设在充分氧化的多孔硅中包裹纳米硅的氧化层中,存在发光能量处于～1.70—1.75eV的发光中心,上述实验结果可以用量子限制/发光中心模型解释. 关键词：     

激光诱导多孔硅晶格畸变的Raman光谱和光致发光谱研究

研究了掺钛水热法制备多孔硅的Raman光谱和光致发光谱.实验发现,当激光功率较低时,多孔硅的Raman光谱在略低于520cm^-1附近表现为一锐的单峰,和晶体硅的Raman光谱类似.随激光功率增大,该单峰向低波数移动,Raman和光致发光峰的强度与激光强度的一次方成正比.当激光功率增大到一定值时,该单峰分裂成两个Raman峰,光致发光谱的强度突然增大,与激光强度之间不再满足一次方的关系,位于低波数一侧的Raman峰随激光功率增大进一步向低波数移动.多孔硅Raman光谱随激光功率的变化是 关键词： 多孔硅 Raman光谱 光致发光     

Multiparametric sensor based on DBR porous silicon for detection of ethanol gas

We are here concerned with fabrication possibility of multiparametric gas sensor based on porous silicon. In order to use the porous silicon as a gas sensor, we made the DBR (distributed Bragg reflector) porous silicon onto silicon wafer and monitored the change of three parameters during exposure of DBR porous silicon to ethanol gas. The sensing parameters were the shift of reflectance peak, the PL (photoluminescence) intensity, and the electrical conductance. As a result, the spectra of reflectance and PL shifted toward longer wavelength. The electrical conductivity increases rapidly. After removing the gas, all sensing parameters return exactly to the initial value.     

Effects of selenium treatment on composition and photoluminescence properties of porous silicon

In this work, an ultrasonically enhanced anodic electrochemical etching is developed to fabricate light-emitting porous silicon material. Porous silicon layer is fabricated in n-type (1 0 0) oriented silicon using HF solution and treated in selenious acid to increase the photoluminescence intensity. It is found that the increase of photoluminescence intensity after selenious acid treatment is higher in the intact zones and lower in the detached zones of ultrasonic excitation. The photoluminescence appears as a non-monotonous function of time exposure of selenious acid treatment. Surface chemical composition analysis by X-ray photoelectron spectroscopy shows formation of Si-Se_x and Si-Se_x-O_y on the surface of porous silicon treated with the selenious acid.     

Improvement of photoluminescence and electrical properties of porous silicon layer treated with lanthanum

The influence of surface treatment of porous silicon (PS) in lanthanum (La) containing solution during different times on its photoluminescence and electrical properties has been investigated. For this purpose, chemical composition, structural, vibrational, photoluminescence and electrical characteristics of the porous silicon layer with and without lanthanum were examined using X-ray diffractometry (XRD), energy dispersive X-ray (EDX) spectroscopy, Fourier transmission infrared (FTIR) spectroscopy, photoluminescence (PL) spectroscopy and current–voltage (I–V) measurements. The results indicate that porous silicon layers treated with lanthanum exhibit an enhancement of photoluminescence intensity and show an improvement current intensity compared to untreated porous silicon layer.     

n型多孔硅光致发光研究

对在无光照条件下,电化学阳极腐蚀方法制备的n型多孔硅进行了光致发光性能研究.在325nm的激发光照射下,多孔硅样品的发光峰在620nm处,其橙红色的发光肉眼可见,并随阳极电流密度与腐蚀时间乘积的增加.先增强,后减弱.其发光峰位置与量子限制效应、表面态及缺陷态有关,发光强度与样品表面深度较浅孔洞所占的面积比成正比.     

Stable ultraviolet photoluminescence emission in n-type porous silicon

This very paper is focusing on the investigation of porous silicon preparation with n-type silicon wafer by means of electrochemical anodization in the dark and, particularly, on its stable ultraviolet photoluminescence emission. A lateral electrical potential was applied, for this purpose, on silicon wafers, driving the electrons away and letting holes appear on the surface of the silicon wafer to enhance the electrochemical etching process. Characterizations have been made with scanning electronic microscope, fluorescence spectrophotometer and Fourier transform infrared spectroscope. An ultraviolet photoluminescence emission of 370 nm is found in the as-prepared n-type porous silicon, which seems to be well associated with the formation of oxygen-related species (twofold coordinated silicon defect) during the anodic oxidation. The result characterized by photo-bleaching performance indicates that the ultraviolet photoluminescence emission is so stable—only 7% reduction within 3600 s. Meanwhile the morphology of as-prepared n-type porous silicon is investigated.     

基于反射光谱特征辨识的光纤气压与温度集成监测方法

针对飞行器机载环境多参量综合测试需求,研究了一种基于反射光谱特征辨识的光纤布拉格光栅(FBG)气压与温度集成监测方法,给出了基于膜片式结构的双参量传感机理及其理论模型。采用基于耦合模理论的OptiGrating软件,得到不同气压与温度条件下光纤布拉格光栅传感器仿真反射光谱。在此基础上,借助弹塑性和恢复性能优良的平膜片感压机构,构建了膜片式双光纤气压/温度集成监测模型。研究表明,恒温条件下应变传感光纤光栅反射光谱随气压增加而逐渐向短波方向偏移,其中心波长灵敏度约为0.803 0 nm·MPa-1,且反射谱主峰及其旁瓣峰值均随气压变化呈现良好线性关系;当气压恒定而温度变化时,处于仅感温不受力状态的温度传感光纤光栅反射光谱中心波长灵敏度约为9.39 pm·℃-1;当气压与温度交叉变化时,能够实现对变温条件下的微小气压变化实时监测。传感光纤光栅受非均匀应变效应反射光谱存在一定啁啾现象,其反射光谱旁瓣峰值波长随环境温度、气压变化均会发生偏移,具有良好线性关系,且在不同气压下反射光谱对应的同一阶数旁瓣峰值幅度相等。该研究能够为航空航天器系统多物理参量在线综合测试提供有益帮助。     

激光辅助阳极化制备多孔硅的蓝光发射与红外研究

发现由n型单晶硅光照辅助阳极化制备的多孔硅在经过较长时间室温空气中放置氧化后，部分样品出现了蓝色光致荧光.荧光及红外透射、反射测量表明，在较强的氩离子488nm激光照射下制备的样品，经放置氧化后形成氧化层的组织较好，即氧化层中的应力较小、非晶程度相对较低、Si-O-Si的网络结构比较完整.而这样的氧化层是有利于多孔硅光致荧光中的蓝光发射的. 关键词：     

Patterning of porous silicon by metal-assisted chemical etching under open circuit potential conditions

Porous silicon is the most studied Si-based light-emitting material. The potential for the application of porous silicon in optoelectronics and also for chemical or biochemical sensing is high. Therefore, the successful patterning of porous silicon on Si wafers is of great interest. HF-based aqueous solutions containing H₂O₂ as oxidizing agent, in combination with appropriate metal deposition, can supply the necessary current in order to sustain the electrochemical etching of single crystalline Si under no external anodic bias. The H₂O₂ concentration can tune the etching rate of the Si wafers as well as the observed photoluminescence intensity and photon energy. We demonstrate that porous silicon growth can be preferentially initiated at sites where metal (Pt) has been deposited and effectively be confined there, in order to form a well-defined pattern of desired geometry. Conventional DC sputtering using stainless-steel masks was applied in order to test various patterning geometries and lengthscales. Photoluminescence spectroscopy, atomic force and optical microscopy were used in order to characterize the produced porous silicon patterns. This method could be a simple, cost-effective way for the production of porous silicon patterns on Si wafers, which could be used in various fields of application.     

Nanocrystalline cerium oxide coated fiber optic gas sensor

A clad-modified fiber optic sensor with nanocrystalline CeO₂ is proposed for gas detection. As-prepared and annealed CeO₂ (500 °C) samples have been used as gas sensing media. The spectral characteristics of the fiber optic gas sensor are studied for various concentrations of ammonia, ethanol and methanol gases (0–500 ppm). The sensor exhibits linear variation in the spectral peak intensity with the gas concentration. The characteristics of the sensor are also studied for gas selectivity. The time response characteristics of the sensor are reported.     

多孔硅的后处理及其发光特性

采用一种新颖而简便的方法,改善多孔硅的发光特性。该方法包括酸处理和阴极还原两步。实验证明通过对多孔硅进行酸处理,能有效提高多孔硅的发光强度;通过对多孔硅进行阴极还原处理,能明显改善多孔硅的发光稳定性,而且发光强度也得到了提高。综合酸处理和阴极还原两技术的特点,对所制备的多孔硅立即先进行酸处理,然后再对其进行阴极还原处理,结果表明该方法能较好地提高多孔硅的发光效率和发光稳定性。而且还对其发光机制进行了探讨。