低功耗聚合物Mach-Zehnder热光开关

采用传统的半导体工艺制作了聚合物Mach-Zehnder型热光开关.利用扫描电镜观测波导形貌,通过红外摄像机观测波导的近场输出光斑,在通信波段1550nm波长下测试了器件的输出光谱.在电极上施加直流信号,测得热光开关的消光比为-15dB,驱动功率为16mW.引入直流偏置网络,获得了器件的开关特性曲线,经测量开关上升时间为1.2ms,下降时间为0.8ms.     

基于Norland紫外固化胶的热光开关器件

采用新型聚合物材料Norland紫外固化胶（NOA）制备了聚合物M-Z型热光开关器件。对NOA薄膜材料的光学性质进行了表征,采用感应耦合等离子体（ICP）方法制备出形貌良好的波导器件。测得在1 550 nm波长下,长2.2 cm的直波导插入损耗为8.3 dB。在电极上施加直流信号,测得热光开关的消光比为11 dB,驱动功率为85 mW。引入直流偏置网络,获得了器件的开关特性曲线,测得开关器件的上升时间为1.085 ms,下降时间为489.5μs。实验结果表明：NOA材料在热光开关及其它聚合物光波导集成器件的制备中具有很大的应用潜力。     

一种基于聚合物材料的延迟线阵列与热光开关集成器件的设计

设计了一种基于聚合物材料的延迟线阵列与热光开关的集成器件.利用Rsoft软件设计并模拟了多模干涉热光开关的性能,可实现输出光场强度随电极加热温度变化.设计了螺旋结构的延迟线阵列,利用BPM软件对螺旋结构波导进行数值模拟,综合考虑器件尺寸和损耗参量设计出螺旋结构的弯曲半径.将延迟线阵列结构与热光开关进行集成,能够实现热光控制的聚合物延迟线阵列,该器件可实现的最大延迟时间为399.4ps,延迟间隔为9.2ps.以SiO2为下包层,SU-8紫外固化光刻胶为波导芯层,聚甲基丙烯酸甲脂为上包层,采用旋涂、光刻、湿法腐蚀等工艺制备了1×4延迟线阵列与MMI热光开关的集成器件,测试得到了延迟线阵列的近红外输出光斑,插入损耗为15~19dB.     

SOI波导反射模式的古斯-汉欣空间位移效应及其数字式热光开关

借助波导转角镜结构,利用古斯-汉欣空间位移和热光效应折射率调制的有效组合,提出了波导反射模式数字式热光开关结构。在给定入射角的条件下优化了空间古斯-汉欣位移,在具有古斯-汉欣效应的本征态下,反射光束出现了较大的跳跃。在1.0μm厚硅膜的绝缘体上硅平台上,单模输入波导和多模干涉波导结构之间的导模本征态匹配,验证了1×3数字式光开关功能。实验中,器件结构引起的光损耗为0.3 dB,开关功率为130~150 mW,开关时间约为50μs,相邻输出端之间隔离度为15 dB。与马赫-曾德尔干涉仪型的2×2热光开关和等离子体效应热光开关的最新结果进行比较证明了该数字式热光开关的先进性。     

SOI波导反射模式的古斯-汉欣空间位移效应及其数字式热光开关（英文）

借助波导转角镜结构,利用古斯-汉欣空间位移和热光效应折射率调制的有效组合,提出了波导反射模式数字式热光开关结构。在给定入射角的条件下优化了空间古斯-汉欣位移,在具有古斯-汉欣效应的本征态下,反射光束出现了较大的跳跃。在1.0μm厚硅膜的绝缘体上硅平台上,单模输入波导和多模干涉波导结构之间的导模本征态匹配,验证了1×3数字式光开关功能。实验中,器件结构引起的光损耗为0.3 dB,开关功率为130～150 mW,开关时间约为50μs,相邻输出端之间隔离度为15 dB。与马赫-曾德尔干涉仪型的2×2热光开关和等离子体效应热光开关的最新结果进行比较证明了该数字式热光开关的先进性。     

有机/无机热光开关制备及其测试系统研制

结合有机聚合物材料和无机SiO2材料,设计一种1×2多模干涉—马赫曾德尔干涉仪热光开关,优化器件参数,并对其性能进行模拟.利用化学气相沉积、光刻等工艺制备热光开关,并对其波导形貌进行表征.为了测试器件性能,采用ARM7处理器和InGaAs光电探测器,设计并研制了一种光开关性能测试系统.该系统主要由低纹波线性供电电源、光电探测器、前置放大器、主放大器、信号调理器、模数转换器、主控制器、显示器等构成.采用商用光功率计对该测试系统进行标定,其零点漂移小于0.5dBm.在光开关电极上施加不同的直流驱动电压,作为对比,利用自主研制的光功率计和商用光功率计分别测试光开关某端口的输出光功率.实验结果表明,两种情况下测得曲线的变化趋势一致,均在驱动电压为10V时,输出光功率达到最小值.该测试系统具有良好的性能,可满足实际测试需要.     

基于MZI结构的二氧化硅波导模式选择开关

设计并且制备了一种基于马赫-曾德尔干涉仪结构的二氧化硅波导模式选择开关。该器件由不对称定向耦合器及金属电极组成。通过金属电极产生的热场改变单模波导中的模式相位,实现了单模波导中E₀₀模式向多模波导中E₁₀模式的转换。器件采用标准CMOS工艺制备,在调制臂两侧引入空气槽,提高热场调制效率,降低开关功耗。实验结果表明,当输入E₀₀模式时,输出端的串扰小于-17.13 dB,消光比大于16.7 dB;当输入E₁₀模式时,输出端的串扰小于-19.84 dB,消光比大于22.5 dB。模式开关的上升时间和下降时间分别为0.7 ms和1 ms。该模式选择开关在模分复用系统中具有良好的应用前景。     

一种带有U形波导的交叉信道单微环电光开关

本文利用耦合模理论,电光调制理论和传输矩阵法,提出了一个带有U形波导的交叉信道单微环电光开关的器件模型,并在谐振波长为1561 nm的情况下对该器件进行了仿真计算.结果表明,该电光开关的开关电压约为400 V,串扰小于-30 dB,插入损耗小于4 dB,开关时间仅为5.4 ps,其中微环上的上升和下降时间仅为0.32 ps.此外,该电光开关由单刀双掷开关控制,通过在微环和U形波导上加载驱动电压可实现三种开关状态,不仅可以实现光信号在两条输出信道的选择,还可以使两条信道同时有光信号输出.     

硅基矩形结构马赫-曾德2×2热光开关的设计与仿真

高速光开关是实现光传输路径变换的关键器件之一.对于目前马赫-曾德型光开关本身占据的尺寸较大或者在一维方向上尺度较长的缺点,提出了一种利于高度集成的矩形马赫-曾德2×2光开关单元结构.器件由基于受抑全内反射原理的沟槽型微纳分光/合光器和90°弯曲波导的L型参考/相移臂两者构成,极大地减小了由此构成的马赫-曾德光开关器件的尺寸.利用硅的热光效应,举例设计了开关器件的L型相移臂上升50℃实现π相移时需要的总长度约为84μm.同时采用有限元法分析得到在NiCr金属电极加热器上施加电压3.5V时,可以使相移臂内的脊波导层上升温度约为50℃;模拟了介质覆盖上包层不同SiO2厚度时的时间响应特性,选用上包层SiO2厚度为0.5μm时得到器件上升时间35μs、下降时间48μs的开关速度.最后使用Rsoft FullWAVE软件模块时域有限差分法仿真验证了热光开关器件的开关功能.设计的硅基矩形结构马赫-曾德2×2热光开关的平面尺寸为56×38μm2.器件具有高效紧凑的特点,使其布局配置易于向二维方向扩展,并潜在应用于硅基高密度光子集成回路及片上光互连系统.     

有机/无机复合功能材料倒脊型波导热光开关

利用溶胶-凝胶技术自主合成了一种具有优良光学特性和高热稳定性的有机/无机复合芯层材料.这种功能材料的分子中含有有机柔性侧链,可形成环氧交联.与无机SiO2-TiO2体系相比,具有较高的热光系数(量级为10-4/K),以及更好的成膜性和可加工性.通过与实验室自行配制的P(MMA-GMA)包层材料相匹配,设计制备了基于这种有机/无机复合功能材料的倒脊型波导马赫-曾德尔型热光开关.器件的波导与热电极性能良好.插入损耗为10dB,驱动功率15mW,开关时间小于1ms,消光比15dB.     

An Easily Operating Polymer 1×4 Optical Waveguide Switch Matrix Based on Vertical Couplers

A three-dimensional （3D） polymer thermo-optic （TO） 1 × 4 waveguide switch matrix based on vertical couplers is demonstrated. It consists of four basic 3D switch units and because of its 3D structure, its construction is compact, only 9 mm in length; moreover, the control logic of the entire switch is very simple, the light signal can be easily switched to any output port by operating only a single switch unit. The finished devices exhibit a switching extinction ratio greater than 21 dB for all of four output ports and the crosstalk between two adjacent output ports is lower than -19 dB. The rise time and the fall time of the switch matrix are 0.8ms and 1.4ms, respectively. The required electrical power to initiate the switching function for M1 switching units is about 50mW.     

Green laser photocoagulator for the treatment of diabetic retinopathy developed at Raja Ramanna Centre for Advanced Technology

An all-solid-state green laser photocoagulator at 532 nm with output power varying from 100 mW to 1 W in a step of 10 mW and exposure time varying from 50 ms to 1000 ms in a step of 10 ms is developed for the treatment of diabetic retinopathy. The output power stability is better than ±1.5% with a nearly diffraction-limited beam quality. The system includes various safety and operational features like internal power monitoring system, safety interlock, emergency switch-off, graphical LCD display with table-top touch mode portable control panel, smart delivery device selection, aiming laser beam with controllable intensity, foot switch, patient records, service mode etc. The system has successfully passed the clinical trials and is being used on patients.     

光纤直接耦合微加工型1×2光开关

设计研制了一种新型小体积,低成本的1×2光纤直接耦合微加工型光开关.该器件使用电磁微线圈驱动一封装在微加工柔性框架上的活动光纤,使其对准另两根固定光纤,实现光路转换.驱动电压为5 V,开关时间小于2 ms,插入损耗达到0.9~1.1 dB.器件构造工艺采用了CNC雕刻技术和EDM技术.本文剖析了器件损耗,用有限元软件ANSYS分析了器件的磁场和弹簧受力而优化结构设计,并报告了器件性能测试.     

Wideband digitally tunable lasers based on fiber bragg grating external cavity array and 1×N optical switch

A novel wideband digitally tunable laser based on fiber Bragg grating external cavities and 1×N opticalswitch provides 5 ms fast tuning time with output power more than 1 dBm over whole C-band that is onlylimited by the laser emission bandwidth. Less than 50 pm wavelength drift over-10 to 55℃ temperaturerange make that the wavelength locker and monitor are not necessary in this tunable laser.     

Testing of a 100-kV 100-Hz Rep-Rate Gas Switch

A two-electrode gas switch with a self-breakdown voltage of 100 kV was operated at a pulse-repetition rate (PRR) of 100 Hz with bursts up to 10 s in duration. The output of a pulse transformer provided the (1 - cos ?t) waveform which charged the switch in about one-half ms. The switch discharged with a peak current of about 10 kA and a total charge transfer of about 10 mC into a damped LC circuit. A continuous purge of air through the interelectrode spacing enabled the switch to recover its breakdown voltage between discharges. Flow rates up to 35 standard cubic feet per minute (scfm) were employed. This paper discusses the dependence of switch jitter and waveform reproducibility on airflow rate.     

气体开关抖动对单模块快脉冲直线型变压器驱动源输出特性的影响

分析了快脉冲直线型变压器驱动源(FLTD)气体开关触发击穿延时的分布规律,利用MAT-LAB软件生成随机序列模拟开关击穿延时和抖动,在FLTD简化二阶电路的基础上,利用MATLAB分析了开关抖动对40个支路并联1 MA,100 ns FLTD模块输出电流脉冲前沿和幅值的影响。模拟计算结果表明:开关理想时,即抖动为0,输出电流峰值为996 kA,峰值时间为90 ns,10%~90%脉冲前沿为54 ns;开关自身抖动与开关之间分散性之和为10 ns时,输出电流脉冲前沿增加约14%,电流峰值下降约2%;开关自身抖动与开关之间分散性之和为20 ns时,输出电流脉冲前沿增加约38%,电流峰值下降约5%。     

PTS装置脉冲输出开关

出于开关性能参数和结构要求考虑,PTS装置脉冲输出开关设计为3对自击穿电极间隙的水介质开关,间隙结构采用板-球间隙的同轴-三平板结构。选择水介质自击穿开关作为研究对象,进行了1.5 MV同轴结构开关研究,并在此基础上开展了4 MV同轴-三平板结构开关研究。开关实验达到的技术指标为:自击穿电压3.5 MV,导通电流500 kA,电感65 nH,自击穿时间分散性极差4.0 ns（1.3 ns均方根值）。     

一种超小型1×2微机械光开关

设计制作了一种非硅基底的1×2微机械光开关,利用电磁驱动微反射镜运动实现输出端口切换,开关时间＜3 ms,封装尺寸缩小至21 mm×16 mm×12.6 mm,驱动电压5 VDC,经5×106次开关重复性测试,性能稳定.     

Flexible integration of optical switch with optical power splitting and attenuating functions for optical fiber-based networking applications

A flexible integration of optical switch with optical power splitting and attenuating functions has been proposed to optimally serve optical fiber-based networking applications. In this switch, an etched binary-slope sidewall reflector is electrostatically actuated in and out of the plane to manipulate optical signals between input and output optical fibers. The fabrication process is a simple combination of a bulk-silicon micromachining process and silicon-to-glass anodic bonding where fiber alignment grooves, reflectors and actuators are fabricated on the same silicon substrate. Ball-lensed fibers are assembled with the device to achieve high coupling efficiency. Performances of the fabricated devices are measured and discussed. The switching time is less than 9 ms at 31 V. The excess loss of the device is less than 3 dB and the controllable attenuation range is up to 38 dB at 139 V, respectively. Moreover, polarization-dependent loss is less than 0.7 dB in the whole attenuation and splitting range.     

Novel optical controllable terahertz wave switch

We study theoretically and demonstrate experimentally light controllable terahertz wave switch. When the modulated optical excitation source is used to irradiate a high resistivity silicon wafer, a novel controllable terahertz wave switch is achieved. The results show that the ON-OFF response time is less than 150 ms and the attenuation of the novel terahertz wave switch is more than 20 dB at frequency of 0.315 THz.