动力学晶格蒙特卡洛方法模拟Cu薄膜生长

利用动力学晶格蒙特卡洛方法模拟了Cu薄膜在Cu(100)面上的三维生长过程。模型中考虑了四个动力学过程:原子沉积、增原子迁移、双原子迁移和台阶边缘原子迁移,各动力学过程发生的概率由多体势函数确定。讨论了基底温度、沉积速率及原子覆盖率对Cu原子迁移、成核和表面岛生长等微观生长机制的影响;获得了Cu薄膜的表面形貌图并计算了表面粗糙度。模拟结果表明,随基底温度升高或沉积速率下降,岛的平均尺寸增大,数目减少,形状更加规则。低温时,Cu薄膜表现为分形的离散生长,高温时,Cu原子迁移能力增强形成密集的岛。Cu薄膜表面粗糙度随着基底温度的升高而迅速减小;当基底温度低于某一临界温度时,表面粗糙度随原子覆盖率或沉积速率的增大而增大;当基底温度超过临界温度时,表面粗糙度随原子覆盖率或沉积速率的变化很小,基本趋于稳定。     

高温下金属薄膜生长初期的模拟研究

采用实际的生长模型和物理参量,用Monte Carlo方法对高温下金属薄膜的生长过程进行了模拟研究.综合考虑了原子沉积、扩散、成核、生长和扩散原子的再蒸发、原子沿岛周界扩散和岛的合并等众多过程后,模拟得到与实验结果相当一致的薄膜生长形貌及其相应的定量结果.通过动态统计薄膜生长过程中的岛数目及薄膜生长率,得到实验中不易直接获得的高温下薄膜生长的许多细节,如岛数目和薄膜生长率随表面温度、覆盖度变化的详细情况等 关键词： 薄膜 Monte Carlo模拟 成核 岛密度 薄膜生长率     

超薄膜生长的Monte-Carlo研究

利用MonteCarlo(MC)模型研究了薄膜生长的初始阶段岛的形貌和岛的尺寸与基底温度之间的关系.模型中考虑了原子沉积、吸附原子扩散和蒸发等过程,与以前模型不同的是我们用Morse势计算粒子之间的相互作用,并详细考虑了临近和次临近原子的影响.结果表明,随基底温度的升高,岛的形貌经历了一个从分形生长到凝聚生长的变化过程.进一步研究表明,岛的形貌与基底的形貌之间的关系随着基底温度的升高有很大的变化,基底温度低时,岛的形状与基底形貌无关,高温时岛具有与基底形貌相似的结构.这些结果与实验结果一致.为了进一步说明 关键词：     

薄膜外延生长的计算机模拟

以Cu膜为例，用Monte-Carlo算法模拟了薄膜生长的随机过程，并提出了更加完善的模型.在合理选择原子间相互作用计算方法的基础上，考虑了原子的吸附、在生长表面的迁移及迁移所引起的近邻原子连带效应、从生长表面的脱附等过程.模拟计算了薄膜的早期成核情况以及表面粗糙度和相对密度.结果表明，随着衬底温度的升高或入射率的降低，沉积在衬底上的原子逐步由离散型分布向聚集状态过渡形成一些岛核，并且逐步由二维岛核向三维岛核过渡.在一定的原子入射率下，存在三个优化温度，成核率最高时的最大成核温度Tn、薄膜的表面粗糙度最低 关键词： Monte-Carlo算法 计算机模拟 薄膜生长     

理论预测晶体表面吸附二维原子岛的形状

提出了凝结势概念用以建立一种预测晶体表面吸附二维原子岛几何结构的理论方法.基于半经验相互作用势（SEAM势和OJ势）的计算表明,同相外延生长的二维原子岛在Cu和Ag的（111）面呈现正六边形结构, 而在Pt（111）面呈现截角三角形状;Cu和Ag的（100）面二维岛则形成正方形.这些理论预测均与实验观测结果一致.由于凝结势的计算不受原子数量的限制,该模型可普遍应用于预测各种表面二维原子岛形状. 关键词： 表面吸附 二维原子岛 量子点     

薄膜生长中的表面动力学(Ⅰ)

本文较全面地从理论上研究了薄膜生长过程中原子在表面上的和种动力学表现，涉及的内容包括亚单层生长时，原子在表面上的扩散，粘接，成核，以及已经形成的原子岛之间的相互作用，兼并，失稳，退化等一系列过程，作为研究的基础。在本文的第一部分（即0-6章）中，我们首先介绍了目前这方面理论研究中所主要使用的各种方法。例如，第一性原理计算，分子动力学模拟。蒙特卡罗模拟。速率方程和过渡态（TST）理论等。基于这些研究。我们介绍给读者为什么原子成岛时在低温下选择分形状，而在高温时则选择紧致状。这一过程可以用经典的扩散子限制集聚理论（Diffusion-Limited Aggregation,DLA)。然而当有表面活性剂存在时形核的规律安全相反，由此提出了一个反应限制集聚理论（Reaction-Limited Aggregation,RLA)，这两个理论目前可以很好的解释亚单层生长时的一般形核规律。接下来我们讨论了长程相互作用对生长初期原子形核的影响。并进一步得出了相应的标度理论。在第6章我们系统地研究了分了吸附对二维原子岛形状的控制性，从而提出了边-角原子扩散的对称破缺模型。     

第一性原理研究氧空位对Ag在MgO(001)面吸附的影响

采用基于密度泛函理论的第一性原理研究方法,应用Vienna Ab-initio Simulation Package (VASP),计算了氧空位对Ag原子在MgO(001)面吸附的影响．通过成键过程中电荷密度的变化以及电荷转移的讨论,从原子尺度上分析了MgO(001)面空位点Fs和Fs+对其吸附、聚集与成核属性的影响以及吸附的能量属性.结果表明,相对清洁的MgO表面而言,Ag原子吸附在O空位时,能够更牢固地与MgO表面结合,并吸引更多的Ag原子聚集在一起,形成一个个独立的Ag原子岛.     

Cu-W薄膜表面形貌的分形表征与电阻率

磁控溅射制备铜钨薄膜，用原子力显微镜和功率谱密度法分析薄膜生长表面形貌的分形维数，发现频段的选择基本不影响分形维数与溅射时间的关系.随溅射时间延长，薄膜厚度增加，分形维数增大，电阻率随分形维数的增大而升高.分析分形维数与电阻率的关系，认为对同一物质的导电薄膜，其表面形貌与电阻率存在对应关系. 关键词： Cu-W薄膜 分形维数 功率谱密度 电阻率     

有限步扩散反应置限分形聚集

综合考虑扩散粒子浓度n、粒子扩散限制范围Δ、扩散粒子与种粒子或团簇相遇时，反应概率P及粒子扩散步数W的影响，提出了有限步扩散反应置限聚集的分形生长模型，模拟得到一系列典型的聚集生长图形，计算了相应的分形维数.结果表明，在粒子浓度n较小时，呈离散团簇状生长；而在粒子浓度较大时，则随反应概率P或粒子扩散步数W的增大，从离散团簇状生长转变为连续枝叉状生长. 关键词：     

用不同密度分布的发光分子探测光子晶体的全态密度

单一原子（分子）的自发辐射衰变的动力学性质强烈地依赖于其在光子晶体中的位置及其辐射偶极矩与所处位置场的相对方向.测量单一原子（分子）的自发辐射衰变特性只能反映光子晶体的局域态密度特征，而不能反映光子晶体的全态密度特征.理论上研究发现，通过引入含不同密度分布的发光分子可以探测到光子晶体的全态密度的部分细节甚至全部信息.按来源首次将全态密度分为两个部分，证明了特定的发光分子分布可以完善地反映其中的一部分或者全部，这为解释、设计加速或抑制原子（分子）自发辐射的实验提供了有益的指导. 关键词： 光子晶体 自发辐射 态密度 密度分布     

MULTIPLE CLUSTER GROWTH OF ULTRA-THIN FILMS WITH ANISOTROPIC EDGE DIFFUSION

The multiple cluster growth of ultra-thin films on a hexagonal substrate with fractal, dendritic and compact morphology has been studied by computer simulation. The influence of the different diffusion processes along island edges on the island shape has been investigated. The results show that the anisotropic corner diffusion induces the dendritic growth, and the anisotropic step diffusion can promote the anisotropic growth and cause the ramified islands growing in three directions. In the case of compact growth, the island shape is mainly determined by the anisotropic corner crossing process. The nonuniform distribution of the multiple cluster formation can be described quantitatively by multifractal. With patterns changing from fractal to compact islands, the width and height of the bell-like or hook-like multifractal spectra increase, while the top f(α) decreases.     

SIMULATION OF MULTIPLE FRACTAL AND COMPACT GROWTH OF ULTRA-THIN FILMS ON HEXAGONAL SUBSTRATE

The multiple cluster growth of ultra-thin films with different deposition rate and different substrate temperature has been studied by kinetic Monte-Carlo simulation. With increasing diffusion rate along cluster edges (corresponding to an increasing substrate temperature), pattern structures change smoothly from fractal islands, compact islands with random shapes, to regular islands, and the average branch width of clusters increases continuously up to some constant value in the compact island limit. The formation of the multiple fractal and compact clusters can be described quantitatively by multifractal. The results of multifractal analysis show that with pattern change from fractal to compact islands, the Hausdorff dimension D₀, the information dimension D₁, and the correlation dimension D₂ decrease, while the width and height of the multifractal spectra increase.     

Growth and thermal evolution of submonolayer Pt films on Ru(0 0 0 1) studied by STM

The growth of submonolayer Pt on Ru(0 0 0 1) has been studied with scanning tunneling microscopy. We focus on the island evolution depending on Pt coverage θ_Pt, growth temperature T_G and post-growth annealing temperature T_A. Dendritic trigonal Pt islands with atomically rough borders are observed at room temperature and moderate deposition rates of about 5 × 10⁻⁴ ML/s. Two types of orientation, rotated by 180° and strongly influenced by minute amounts of oxygen are observed which is ascribed to nucleation starting at either hcp or fcc hollow sites. The preference for fcc sites changes to hcp in the presence of about one percent of oxygen. At lower growth temperatures Pt islands show a more fractal shape. Generally, atomically rough island borders smooth down at elevated growth temperatures higher than 300 K, or equivalent annealing temperatures. Dendritic Pt islands, for example, transform into compact, almost hexagonal islands, indicating similar step energies of A- and B-type of steps. Depending on the Pt coverage the thermal evolution differs somewhat: While regular islands on Ru(0 0 0 1) are formed at low coverages, vacancy islands are observed close to completion of the Pt layer.     

FORMATIONS OF FRACTAL ISLANDS AGGREGATED WITH DISCS IN GAUSSIAN DISTRIBUTION ON NONLATTICE SUBSTRATES

The growth mechanism of fractal islands on a two-dimensional nonlattice substrate with periodic boundary conditions has been investigated by using Monte Carlo technique. Results show that the fractal dimension d_f of the final ramified islands is almost independent of the diffusion step length, mobility and rigid rotation of the islands. The characteristics of the size distribution of the discs in an island do not change the dimension d_f of the island. However, we find that d_f increases linearly with the surface coverage ρ of the system and its slope decreases with the increase of the mean diameter of the discs.     

EFFECTS OF ISLAND-EDGE EXCHANGE BARRIER ON 2D PATTERN FORMATION IN SURFACTANT-MEDIATED EPITAXY

The nucleation and growth of two-dimensional islands in a surfactant-mediated epitaxy system have been studied by computer simulation. To improve the recent results published in the literature, we use a configuration-dependent energy barrier for the exchange process at the island edge in our model. The simulations produce fractal islands at high temperatures or low deposition fluxes, and a transition to regular compact islands occurs at lower temperatures or higher fluxes, in good agreement with the recent experimental results. The barrier for the island-edge exchange has quite a strong effect on the island density as a function of temperature and flux. A small change of the island-edge exchange barrier induces a large variation of the island density in the low-temperature or high-flux region. The flux-dependent island density shows a clear scaling-law behaviour in the intermediate-flux region. The scaling exponent increases evidently as the island-edge exchange barrier increases.     

基底显微结构对薄膜生长影响的Monte Carlo模拟研究

利用Monte Carlo方法研究了基底显微结构对薄膜生长的影响. 对不同显微结构基底上薄膜生长的初始阶段岛的形貌和尺寸与薄膜覆盖度和入射粒子沉积速率之间的关系进行了模拟和分析. 模型中考虑了粒子沉积、吸附粒子扩散和蒸发等过程. 结果表明,基底显微结构对薄膜生长具有明显影响. 当沉积温度为300K、沉积速率为0.005ML/s（Monolayer/second,简称ML/s）、覆盖度为0.05ML时,四方基底上薄膜生长呈现凝聚生长. 随着覆盖度增加,岛的尺寸变大,岛的数目减少. 而对于六方基底,当覆盖度从0.05ML变化到0.25ML时,薄膜生长经历了一个从分散生长过渡到分形生长的过程. 无论是四方还是六方基底,随着沉积速率的增加,岛的形貌由少数聚集型岛核分布状态向众多各自独立的离散型岛核分布状态过渡.     

六方晶格基底上薄膜生长的Monte Carlo模拟研究

利用Monte Carlo（MC）方法,模拟研究了六方晶格基底上薄膜生长的初始阶段岛的形貌和岛的尺寸与薄膜覆盖度以及入射粒子沉积速率之间的关系. 结果表明在基底温度为300K时,岛的形貌主要表现为分形生长,随着薄膜覆盖度的增加,岛的分形枝簇变大,岛的数目不断减少. 在同样的温度下,随着入射粒子沉积速率的增大,薄膜表面的形貌逐步由少数聚集型岛核分布状态向众多各自独立的离散型岛核分布状态过渡. 进一步研究得出,薄膜覆盖度和入射粒子沉积速率对粒子扩散能力的影响最终导致岛的形貌发生了改变.     

Kinetic Monte Carlo simulations of three-dimensional self-assembled quantum dot islands

By three-dimensional kinetic Monte Carlo simulations, the effects of the temperature, the flux rate, the total coverage and the interruption time on the distribution and the number of self-assembled InAs/GaAs(001) quantum dot(QD) islands are studied, which shows that a higher temperature, a lower flux rate and a longer growth time correspond to a better island distribution. The relations between the number of islands and the temperature and the flux rate are also successfully simulated. It is observed that for the total coverage lower than 0.5 ML, the number of islands decreases with the temperature increasing and other growth parameters fixed and the number of islands increases with the flux rate increasing when the deposition is lower than 0.6 ML and the other parameters are fixed.     

Bistability in the shape transition of strained islands

The equilibrium shape of a monatomic strained island on a substrate depends on the step free energies and the difference in surface stress between the island and the substrate. For small island sizes the step free energies dominate, resulting in compact islands. Beyond a critical island size, however, the strain energy becomes dominant and the island maximizes its perimeter, resulting in elongated islands. Here we show that for strained islands with force monopoles pointing in opposing directions at neighboring steps, a regime exists near the critical island size where both compact and elongated shapes can coexist.