Silicon-based and suspended-membrane-type guided-mode resonance filters with a spectrum-modifying layer design

The concept of a spectrum-modifying layer is proposed for the design of a silicon-based guided-mode resonance filter. To realize such a novel device, a grating and waveguide structures are fabricated simultaneously in a suspended silicon nitride membrane. The cladding layer of the silicon substrate is replaced by the silicon dioxide membrane to reduce the absorption loss of the bulky substrate. Moreover, the silicon dioxide membrane plays a role in modifying the spectral response. According to the experimental results of the proposed structures, symmetrical line shapes and improved sidebands of nonresonance are demonstrated.     

导模共振效应光子晶体滤波器光谱检测稳定性的研究

由于光子晶体滤波器带宽窄和高灵敏度的特点,检测抗体含量极限可以达到ng·mL-1。可以应用于生物传感器监测生物大分子内部反应过程。一维光子晶体滤波器作为生物传感器换能元件将生物信息转化为可检测的光电信号信息,主要反应在光谱仪测得共振波峰所在波长的变化。精确测试时,检测传感系统的稳定性是首要考虑的关键因素。稳定性决定实验数据的有效性。该工作对所制备的基于导模共振效应的一维光子晶体滤波器结构进行形貌和光谱测试,介绍了实验室所搭建的实时检测传感系统。由于系统集成度、 耦合损耗等因素的影响,光谱信息出现一定的噪声信号。因此,重点提出利用Lab VIEW编程实时监控光子晶体滤波器共振波峰值随时间的变化,由光谱变化情况来反应本套检测系统的稳定性和测试数据的有效性。同时这种实时监控程序也可用来监控其他基于导模共振生物传感系统的稳定度。该检测系统由于震动,光源抖动等问题产生的共振峰值漂移为0.25 nm,通过与模拟计算结果比较可以判定系统稳定性可以达到试剂检测的要求。     

Silicon-based transmissive diffractive optical element

A silicon nitride (SiNx) membrane diffractive optical element (DOE) designed to exhibit beam-splitting and focusing behavior at visible wavelengths has been fabricated and tested. Since the fabrication process is based on silicon micromachining technology, the DOE is easily integrated with a laser diode chip and a photodiode chip on a silicon substrate to function as the hologram-laser-photodiode unit for use in the pickup head of a CD or DVD system. The SiNx film is deposited with low-pressure chemical-vapor deposition and the free-standing membrane is formed by KOH etching. The transmissive DOE showed a high diffraction efficiency (>20% for a binary-phase-level element). The experimental evaluation was in good agreement with the designed and modeled predictions.     

Performance of conformal guided mode resonance filters

Guided mode resonance (GMR) filters are highly functional micro-optics capable of narrowband spectral filtering. GMR devices have previously been demonstrated on flat substrates using a wide range of materials and configurations. In this Letter, we apply a soft lithographic technique followed by the deposition of dielectric layers to generate GMR filters on a concave lens surface. Resonances of the resulting conformal GMR filters are experimentally measured and characterized, and the results are compared to the performance of similar GMR filters fabricated on flat surfaces.     

光栅光阀器件的结构改进与制作工艺研究

根据光栅光阀的工作原理,在结构上对传统的光栅光阀器件进行了改进,分析了改进后光栅光阀器件的光学特性、结构特性,以及制作工艺流程.改进后的光栅光阀结构中硅基底上设有二氧化硅隔离层,隔离层上沉积无定形硅作为牺牲层,可动梁的材料是氮化硅,固定梁为蒸镀的金属铝层.通过离子刻蚀的方法刻蚀图形,用化学腐蚀方法掏空牺牲层得到所需桥梁状结构.研究表明改进后的器件黑区范围小,驱动电压较低,光学效率较高,具有潜在的应用前景.     

光栅光阀器件的结构改进与制作工艺研究

根据光栅光阀的工作原理,在结构上对传统的光栅光阀器件进行了改进,分析了改进后光栅光阀器件的光学特性、结构特性,以及制作工艺流程.改进后的光栅光阀结构中硅基底上设有二氧化硅隔离层,隔离层上沉积无定形硅作为牺牲层,可动梁的材料是氮化硅,固定梁为蒸镀的金属铝层.通过离子刻蚀的方法刻蚀图形,用化学腐蚀方法掏空牺牲层得到所需桥梁状结构.研究表明改进后的器件黑区范围小,驱动电压较低,光学效率较高,具有潜在的应用前景.     

Nonpolarizing guide-mode resonance filter with ultra-narrow linewidth

Ultra-narrow linewidth,nonpolarizing guide-mode resonance (GMR) filters with single and double common resonance wavelengths are designed.The guide-mode resonance filters consist of a single grating layer with asymmetric profiles.By choosing appropriate parameters,same resonance wavelengths for both transverse electric (TE) and transverse magnetic (TM) polarizations can be achieved.Results show that high reflection (more than 99.9%) is obtained at every resonance wavelength,and the full-width at halfmaximums (FWHMs) of TEand TM-polarized light are only 0.008 and 0.215 nm,respectively.     

立方氮化硼薄膜生长过程中的界面控制

在立方氮化硼薄膜气相生长过程中生成的无定形初期层和乱层结构氮化硼中间层，一直是阻碍立方氮化硼薄膜外延生长的主要原因.系统地分析了硅衬底预处理对立方氮化硼薄膜中无定形初期层成分的影响，发现在等离子体化学气相生长法制备薄膜时，硅衬底上形成无定形初期层的可能原因有氧的存在、离子轰击以及高温下硅的氮化物的形成.在H₂气氛中1200K热处理硅衬底可以有效地减少真空室中残留氧浓度，除去硅表面的自然氧化层，保持硅衬底表面晶体结构.控制衬底温度不超过900 K，就能防止硅的氮化物的形成，成功地除去无 关键词： 立方氮化硼薄膜 等离子体化学气相生长 界面 电子显微镜     

纳米Si-SiOx和Si-SiNx复合薄膜的低温制备及其发光特性

用等离子体增强化学气相沉积法在低温（低于50℃）衬底上沉积Si-SiOx和Si-SiNx复合薄膜,可得到平均颗粒尺寸小至3nm的高密度（最高可达4.0×1012cm-2）纳米硅复合薄膜.500℃快速退火后,这种复 合薄膜显现出优异的可见光全波段光致发光特性.通过比较相同条件下所制备的纳米Si-SiOx和Si-SiNx复合薄膜的光致发光效率,发现纳米Si-SiNx具有更为优异 的光致发光效率,这一点在可见光短波区表现得尤为显著. 关键词： 等离子体增强化学气相沉积 冷衬底 硅纳米颗粒 光致发光     

Dual material insulator SOI-LDMOSFET: A novel device for self-heating effect improvement

The silicon-on-insulator (SOI) power devices show good electrical performance but they suffer from inherent self-heating effect (SHE), which limits their operation at high current levels. The SHE effect is because of low thermal conductivity of the buried oxide layer. In this paper we propose a novel silicon on insulator lateral double diffused MOSFET (SOI-LDMOSFET) where the buried insulator layer under the active region consists of two materials in order to decrease the SHE. The proposed structure is called dual material buried insulator SOI-LDMOSFET (DM-SOI). Using two-dimensional and two-carrier device simulation, we demonstrate that the heat dissipation and the SHE can be improved in a conventional SOI-LDMOSFET by replacement of the buried oxide with dual material buried insulator (silicon nitride and silicon oxide) beneath the active region. The heat generated in the active silicon layer can be flowed through the buried silicon nitride layer to the silicon substrate easily due to high thermal conductivity of silicon nitride. Furthermore, the channel temperature is reduced, negative drain current slope is mitigated and electron and hole mobility is increased during high-temperature operation. The simulated results show that silicon nitride is a suitable alternative to silicon dioxide as a buried insulator in SOI structures, and has better performance in high temperature.     

Design of single-material guided-mode resonance filter

In this letter, a guided-mode resonance （GMR） filter with the same material for both the grating layer and the waveguide layer is designed, and its optical properties are investigated. The GMR filter owns almost 100% reflection at the resonance wavelength of 800 nm with the full-width at half-maximum （FWHM） of 20 nm, and its sideband reflection from 700 to 1000 nm is less than 5%. As the resonance wavelength is influenced by more than one parameter during the fabrication process, GMR filter with the same resonance wavelength can be obtained by adjusting other parameters or even one parameter to deviate from the design value.     

Optimizing the quality factor of a wideband guided-mode resonance biosensor

This work studies the effect of the biochemical molecular layer on the quality factor of guided-mode resonance (GMR) filter of an ultrasensitive label-free biosensor. A GMR biosensor with a narrower bandwidth has a higher sensitivity but requires much higher accuracy in its fabrication process. In this study, we have managed to present a GMR filter with a narrow bandwidth that requires less precision by controlling the thickness of the biochemical molecule layer, which increases the Q factor by up to three times.     

基于亚波长二维光栅的入射角不敏感颜色滤光片研究

提出了一种基于二维亚波长光栅的具有非偏振光入射下入射角不敏感特性的反射式颜色滤光片. 采用严格耦合波分析方法详细分析了光栅周期、光栅层厚度以及固定光栅占空比下光栅的结构尺寸对反射率峰值、反射带位置及带宽的影响. 结合入射角不敏感特性, 经过优化设计得到了光栅的最终结构参数, 获得了中心波长424 nm, 峰值反射率56%, 带宽45 nm的反射滤光片.模拟结果表明, 在非偏振光入射下, 此滤光片的反射光谱表现出显著的入射角不敏感特性. 当入射角高达60°时反射带的中心波长偏移6 nm 反射率下降6%带宽增加8 nm 其参数没有较大变化通过调整光栅的结构参数可在400–520 nm范围内调节滤光片的中心波长以获得不同颜色的入射角不敏感滤光片. 关键词： 反射式滤光片 二维亚波长光栅 入射角不敏感 严格耦合波分析     

Optically tunable plasmonic color filters

We fabricated sub-wavelength patterned gold plasmonic nanostructures on a quartz substrate through the focused ion beam (FIB) technique. The perforated gold film demonstrated optical transmission peaks in the visible range, which therefore can be used as a plasmonic color filter. Furthermore, by integrating a layer of photoresponsive liquid crystals (LCs) with the gold nanostructure to form a hybrid system, we observed a red-shift of transmission peak wavelength. More importantly, the peak intensity can be further enhanced more than 10% in transmittance due to the refractive index match of the media on both sides of it. By optically pumping the hybrid system using a UV light, nematic−isotropic phase transition of the LCs was achieved, thus changing the effective refractive index experienced by the impinging light. Due to the refractive index change, the transmission peak intensity was modulated accordingly. As a result, an optically tunable plasmonic color filter was achieved. This kind of color filters could be potentially applied to many applications, such as complementary metal-oxide-semiconductor (CMOS) image sensors, liquid crystal display devices, light emitting diodes, etc.     

Silicon nanowire grid polarizer for very deep ultraviolet fabricated from a shear-aligned diblock copolymer template

A silicon (Si) nanowire grid ultraviolet (UV) transmission polarizer has been fabricated, and its performance was measured over the visible to deep UV range. A cylinder-forming polystyrene-b-poly(hexylmethacrylate) diblock copolymer was coated onto an amorphous Si layer supported on a fused silica substrate, then shear aligned and employed as a mask for reactive-ion etching, resulting in a Si grid of 33 nm period and multi-centimeter-squared area. Due to the high plasma frequency and UV reflectance of the deposited Si, this nanowire grid was able to polarize light down into the deep UV, including 193 nm.     

带有多孔二氧化硅间隔层的导模共振光栅实现染料激光器发射增强

导模共振光栅是一种典型的平面波导共振结构,可在光栅表面或波导层内形成较强的局域电场,能增强光与物质的相互作用.本文在导模共振结构的光栅层和基底层之间,引入低折射率的多孔二氧化硅间隔层,显著增强了局域电场与增益介质的接触度.结果表明,引入多孔二氧化硅后,共振产生的电场增强区域上移至激光染料层,增加了激光染料与电场的相互作用,实现了激光出射增强.本文基于时域有限差分法,对结构参数进行分析优化,研究了820 nm共振波长激发下的出射激光特性,得到了连续的激光出射,其能量阈值约为2.5 mJ/cm^2,线宽约为0.3 nm.本文提出的结构实现了对表面局域电场的有效调控,增强了激发光与增益介质的相互作用,不但可应用于激光器,还为其它发光器件的设计提供了参考.     

Self detachment of free-standing porous silicon membranes in moderately doped n-type silicon

In this article we describe a reliable etching method to fabricate porous silicon free-standing membranes (FSMs) based on a self detachment of the porous layer in moderately doped n-type silicon substrates. We found that stable growth of smooth and straight pores is restricted to a narrow range of etching conditions and, unlike p-type substrates, the lift-off of the membrane is a self-limited process that does not require a large burst of current. The detachment of the porous membrane is independent of the structure of the already porosified layer, meaning that the average pore diameter can be tuned from nano to macro size within the same membrane. We also demonstrate that, despite their limited thickness, FSMs are quite robust and can sustained further processing. Thus, the etching receipt we are proposing here extends the range of sensors and filters that can be fabricated using porous silicon technology.     

高纯区熔单晶硅高增益光晶体管的研究

区熔单晶硅与直拉单晶硅以及其他半导体材料相比杂质含量少,少子寿命长,所以以区熔单晶硅为衬底制作的光晶体管在弱的光信号下仍然有高的增益,适宜于弱光探测.报道了以区熔单晶硅为衬底的光晶体管的实验结果.为了保持区熔高纯单晶硅内的少子寿命,背面淀积了一层掺磷多晶硅作为外吸杂层.已经测量得到对于实验中发射极直径为2mm的光晶体管在波长为0.83 μm的入射光照射下,光功率低至0.16 nW时,光晶体管的增益仍然高达4400.     

Guided mode resonance in planar metamaterials consisting of two ring resonators with different sizes

We proposed and experimentally investigated a two-ring-resonator composed planar hybrid metamaterial(MM), in which the spectra of guided mode resonance(GMR) and Fano resonance or EIT-like response induced by coherent interaction between MM resonance and GMR can be easily controlled by the size of the two rings in the terahertz regime.Furthermore, a four-ring-resonator composed MM for polarization-insensitive GMRs was demonstrated, where GMRs of both TE and TM modes are physically attributed to the diffraction coupling by two ±45° tilting gratings. Such kind of device has great potential in ultra-sensitive label-free sensors, filters, or slow light based devices.     

硅微机械FP腔器件机电特性模拟

介绍了一种硅微机械FP腔器件,该器件作为光学滤波器、光学衰减器等在光纤通信技术中具有广泛应用.采用化学气相沉积、刻蚀、金属蒸发等工艺对该器件进行加工,并利用湿法腐蚀释放使其形成悬空结构,悬空膜采用静电激励驱动.分析了器件的基本原理、工作范围、静电激励的阈值电压等特性,并指出了影响阈值电压大小的因素.