深振幅Al调制靶的化学腐蚀制备工艺研究

 介绍了用于惯性约束聚变分解实验的铝调制靶的制备。以半导体光刻工艺结合化学腐蚀工艺在铝箔表面引入周期为50 μm的条槽图形,研究腐蚀条件对腐蚀速率的影响;采用光学显微镜、扫描电镜和台阶仪对图形形貌和样品表面成分进行测量和分析,获得厚度在32 μm左右、腐蚀深度达到20 μm的铝调制靶。     

ICF流体力学不稳定性实验用柱状激波管的研制

在惯性约束聚变(ICF)实验中,点火靶丸表面(界面)的粗糙度和缺陷所产生的流体力学不稳定性是决定点火成功与否的关键因素之一,设计和研制流体力学不稳定性分解实验用靶是解决该问题的主要技术手段。结合国内外的研究现状和神光-Ⅱ激光装置的特点,设计并研制了一种新型柱状激波管。该靶型由三种介质组成,分别为调制聚苯乙烯(CH)圆片、柱状碳气凝胶(CRF)和CH微套管。调制CH圆片和柱状CRF通过微加工技术装配到CH微套管内,封装后形成柱状激波管。介绍了该靶型的设计原理和详细的制备工艺,并对相应的靶参数进行了测量。结果表明:柱状CRF气凝胶具有较好的成型性,长度、直径和密度分别为1000μm、730μm和250mg·cm-3;CH圆片的厚度和直径分别为15μm和730μm,表面调制图形的周期和峰谷差分别为100μm和4.3μm;实验得到的柱状激波管的轴向和径向最大装配误差分别为2μm和3μm。     

XUV成像系统中像传递函数研究用的Si刻蚀膜

 研制具有网格或条状图形的Si刻蚀膜靶，用于XUV系统中像传递函数的研究。在自截止腐蚀工艺制备Si平面薄膜的基础上，结合离子束刻蚀工艺，获得刻蚀深度为1.0 μm左右，网格尺寸为25 μm×25 μm，或条状线宽为5 μm的Si刻蚀膜；测量了Si刻蚀膜的形貌和刻蚀深度；研究了离子束刻蚀参数对图形形貌的影响。并介绍采用两种靶型获得的像传递函数信息。     

基于高精度3D打印工艺的ICF调制靶

惯性约束聚变(ICF)中的瑞利-泰勒不稳定性(RTI)研究需要基于多种结构的调制靶,针对目前调制靶制备的工艺问题,采用双光子3D打印工艺制备了平面调制、平面复合调制及球壳型调制三种典型结构的调制靶,靶材料为光敏树脂(95%:C₂₃H₃₈N₂O₈,5%:C₄H₆O₂)。采用激光共聚焦显微成像分析了三种调制靶的实际结构参数,三种靶型的实测形貌及其参数与设计结构及参数具有良好匹配度。为进一步验证双光子3D打印新型工艺制备调制靶的可行性,实验团队在“神光Ⅱ”高功率激光实验装置上进行了纳秒激光打靶实验,结果显示靶表面的调制在激光直接驱动下受RTI的作用随时间呈增长趋势,初始峰谷值为4μm的调制在激光驱动2.5 ns后形成了长度达100μm的高密度射流,表明基于高精度3D打印工艺制备结构复杂的调制靶用于RTI研究具有较高可行性。     

平面调制靶的表面起伏图形研制

表面起伏靶是惯性约束聚变（ＩＣＦ）分解实验中的重要实验用靶。本文报导了采用离子束刻蚀和激光干涉两种方法制备初始微扰振幅和波长分别在几微米和几十微米范围的正弦调制形状；摸索了相应的工艺条件和工艺过程；用台阶仪及光学显微轮廓仪测微加工后的形貌；探讨了调制波长的精确控制与干涉工艺之间的关系。     

大调制度表面正弦图形制作工艺研究

表面起伏靶是惯性约束聚变（ＩＣＦ）分解实验中的重要实验用靶。为了得到调制深度大于１０μｍ光刻胶表面正弦图形，采用激光全息光刻的方法，固定曝光条件，同时保证曝光量足够，然后通过控制显影条件来实现起伏深度的变化。成功得到了调制深度分别为１５μｍ，２５μｍ，３５μｍ，周期分别为２０μｍ，５５μｍ和７５μｍ的表面正弦调制图形     

用于ICF实验的掺溴聚苯乙烯平面调制箔靶

以掺溴聚苯乙烯平面调制箔靶的制备为主，介绍通过激光干涉法结合图形转移工艺获得具有正弦起伏图形的掺溴聚苯乙烯平面调制箔靶的工艺．对表面调制起伏图形的精确转移进行研究，以ＳＥＭ和台阶仪监控图形转移过程，控制耦合在调制图形上的表面粗糙度．     

掺溴聚苯乙烯平面调制箔靶的制备及测量

 平面调制靶是ICF分解实验中的重要用靶。介绍了在过去工作的基础上掺溴聚苯乙烯平面调制箔靶的制备工艺,研究旋转涂覆和流延工艺对靶的表面起伏图形转移的影响,采用SEM观察薄膜表面起伏图形的形貌,对掺杂溴的含量进行测量和控制,以台阶仪测量靶的表面粗糙度。     

ICF研究中的Rayleigh-Taylor不稳定性实验用靶

 概述了当前研究Rayleigh-Taylor不稳定性增长实验所用的靶型情况。从实验用靶来看，调制靶的设计正从平面向立体发展，出现了球形和柱形等新靶形，制备手段包括精密机械微加工、激光束、电子束和离子束加工、半导体工艺和微米纳米技术加工等。根据对国外新靶型的研究，结合国内工艺条件和实验需求，对国内可能采用的靶型进行了研究探索。     

应用于微靶装配的显微视觉检测技术

针对如何实现微小尺度（μm～mm）靶零件装配过程中的在线检测，研制了应用于微靶装配的显微视觉检测系统，并对系统的构成与显微成像、图像预处理、特征检测等关键图像处理技术进行了详细论述。提出了针对微靶零件的新型多重滤波除噪算法和几何特征检测算法，并以铝台阶、柱腔等微靶零件为应用实例开展了实验研究。结果表明，该系统采用的算法能有效、快速、准确地对靶零件进行几何特征和实时位置检测，在检测视场为3mm时，其检测精度≤3μm，角度检测精度≤0．1°，适用于ICF微靶等微型器件的微装配。     

Spectral enhancement of thermal radiation by laser fabricating grating structure on nickel surface

Previous studies have shown some correlations between the optical properties of objects and their surface patterns. We fabricate tens of micrometer period gratings by femtosecond laser direct writing technology on polished nickel targets and measure their thermal radiation spectra at a temperature of 623 K by Fourier transform infrared(FTIR) spectrometry. The results show an obvious major enhanced peak in which the wavelength is slightly larger than the grating period. Surface plasmon resonance(SPR) and Kirchhoff's law of thermal radiation are applied to give this phenomenon a preliminary explanation. In addition, we utilized rigorous coupled wave analysis(RCWA) to simulate the absorption spectrum of the grating surface. The experiment results show good agreement with the simulation results.     

惯性约束聚变实验用平面薄膜的制备及其表面图形的引入

平面薄膜是ICF分解实验的重要靶型,以半导体技术结合重掺杂自截止腐蚀制备厚度为3－4um的Si平面薄膜,以热蒸发结合脱膜工艺制备Al平面薄膜,两者的表面粗糙度分别为30nm和10nm左右;进一步采用离子束刻蚀在平面薄膜的表面引入网格或条状图形,获得测量成像系统像传递函数的刻蚀膜,控制离子束刻蚀工艺的参数以实现图形的精确转移。     

Heat-insulation film with gold layer deposited on antireflection subwavelength-structured surface

The optical properties of gold layer deposited on antireflection subwavelength-structured surface are first exposed. The experimental results of the reflectances and transmittances for several different thicknesses of gold-deposited layers on the subwavelength structures are carried out. The nanostructured surface with spatial period and a diameter of about 230 nm and height of about 150 nm on polyethylene terphthalate (PET) film is fabricated by micro-replication process of UV imprinting. Comparing these with the bare gold-deposited layer and bare nanostructure, the results show that the optical films with the suitable gold layer deposited on antireflection subwavelength-structured surface has high transmittance and low glare in the visible spectral range and high reflectance in the infrared range. That is to say, when the antireflection subwavelength-structured surface is coated with a gold layer of several tens of nm thickness, it will have some unique optical characters.     

Self-similar evolution of the surface morphology of a stressed amorphous alloy foil

A time-ordered sequence of topographic images of a stressed amorphous Fe₇₀Cr₁₅B₁₅ ribbon is presented. It is shown that the surface of this material (unlike polycrystalline metal foil) has a fractal structure due to the nonequilibrium conditions of its formation. As a tensile stress of about 500 MPa is applied to the surface, the fractal dimension of the surface increases from 1.21±0.02 to 1.34±0.03, then drops to 1.12±0.03, and finally increases to 1.22±0.02. In about 1.5 hours, a complex surface morphology characterized by a roughness amplitude of several tens of nanometers evolves into a regular pattern of shear bands with amplitude of about 300 nm. Self-affine changes in surface morphology are explained by competition between several processes, including crack propagation, surface smoothing, and self-diffusion.     

Spontaneous formation of polymer nanoparticles by good-solvent evaporation as a nonequilibrium process

In recent years, polymer nanoparticles have been investigated with great interest due to their potential applications in the fields of electronics, photonics, and biotechnology. Here, we report the spontaneous formation of polymer nanoparticles from a clear solution containing a nonvolatile poor solvent by slow evaporation of a volatile good solvent. During evaporation of the good solvent, the solution gradually turns turbid. After evaporation, polymer nanoparticles of homogeneous shape and size are dispersed in the poor solvent. Homogeneous nucleation and successive growth of polymer particles takes place during the dynamic nonequilibrium process of solvent evaporation. The size of the particles, ranging from tens of nanometers to micrometer scale, depends on both polymer concentration and the solvent mixing ratio. Because of the physical generality of the particle formation mechanism, this procedure is applicable to a wide variety of polymers with suitable combinations of solvents. Here, we also show unique features, surface structures and surface properties of polymer nanoparticles prepared by this method.     

Dynamics of femtosecond laser-produced plasma ions

We investigated the ion laser-produced plasma plume generated during ultrafast laser ablation of copper and silicon targets in high vacuum. The ablation plasma was induced by ≈50 fs, 800 nm Ti:Sa laser pulses irradiating the target surface at an angle of 45°. An ion probe was used to investigate the time-of-flight profiles of the emitted ions in a laser fluence range from the ablation threshold up to ≈10 J/cm². The angular distribution of the ion flux and average velocity of the produced ions were studied by moving the ion probe on a circle around the ablation spot. The angular distribution of the ion flux is well described by an adiabatic and isentropic model of expansion of a plume produced by laser ablation of solid targets. The angular distribution of the ion flux narrows as the laser pulse fluence increases. Moreover, the ion average velocity reaches values of several tens of km/s, evidencing the presence of ions with kinetic energy of several hundred eV. Finally, the ion flux energy is confined in a narrow angular region around the target normal.     

Center-of-mass quantization of excitons and Fabry–Perot modes of the polariton in ZnSe epilayers

Reflectance properties of ZnSe epilayers grown on GaAs substrates are studied at 80 K. Oscillation features are observed in the region of exciton resonance which are significantly different depending on the epilayer thickness L. For optically thin layers with thickness in the range of several tens of nanometer, reflectance oscillations appear above the light-hole (lh) exciton, while for optically thick layers with thickness in the range of a micrometer, reflectance oscillations appear between 1s and 2s excitons. These oscillations are interpreted as the quantized levels of the exciton center-of-mass motion in the lower branch of the polariton for optically thin layers and Fabry–Perot modes in the upper branch of the polariton for optically thick layers, respectively. The reflectance data are analyzed in the frame work of a dielectric function with a polariton dispersion.     

Hard X-ray generation from solids driven by relativistic intensity in the lambda-cubed regime

Interaction of relativistic intensity laser pulses encompassed at focus by a volume of a few wavelengths cubed with solids is examined. Spectroscopy of hard X-rays of several metallic targets, including Cu, Ge, Mo, Ag, and Sn, irradiated in this regime at a high repetition rate (0.4 kHz), has been experimentally studied. The K_α and K_β peaks of all targets were obtained. Averaged electron temperatures of several tens of keV and total X-ray conversion efficiencies up to 0.02% are calculated. The X-ray source size is measured to be ∼10 micron with varying elliptical shape. PACS 52.38.Ph; 52.59.Px; 52.70.La