共查询到18条相似文献,搜索用时 156 毫秒
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<正> 日本Mitsubishi电气公司研制出一种现代化的MD2301厚度测试系统,该系统能够测量涂敷在薄膜上的各种类型涂层的厚度或者这些薄膜自身的厚度。在生产这些薄膜时,薄膜在进给辊上运行,在薄膜和薄膜进给辊之间会出现一个小间 相似文献
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为了实现纳米薄膜厚度的高精度计量,研制了可供台阶仪、扫描探针显微镜等接触测量的纳米薄膜样片,研究了X射线掠射法测量该纳米薄膜样片厚度的基本原理和计算方法,导出了基于Kiessig厚度干涉条纹计算膜层厚度的线性拟合公式,并提出了一种可溯源至单晶硅原子晶格间距和角度计量标准的纳米膜厚量值溯源方法,同时给出了相应的不确定度评定方法.实验证明:该纳米薄膜厚度H测量相对扩展不确定度达到U=0.3 nm+1.5%H,包含因子k=2.从而建立了一套纳米薄膜厚度计量方法和溯源体系. 相似文献
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基于白光干涉的光学薄膜物理厚度测量方法 总被引:4,自引:1,他引:3
设计了一套利用白光干涉理论测量薄膜厚度的系统,主要包括迈克耳孙白光于涉系统和光纤光谱仪.对干涉信号进行频域分析,结合拟合测试与理论能量曲线的方法并选择合适的目标函数,进一步精确反演得到待测薄膜样品的物理厚度,使用上述方法对多组不同厚度的薄膜样品进行计算,并对结果进行了详细的精度及误差分析.将本实验装置测试所得到的数据与传统的光度法相比较,结果表明使用该测试方法测量光学薄膜物理厚度的误差可以小于1 nm.与传统的光度法和椭偏法相比,提供了一种测量光学薄膜厚度的较为简单、快速的解决方案,同时保证了较高的精度. 相似文献
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高党忠 《工程物理研究院科技年报》2009,(1):9-10
惯性约束聚变(ICF)物理实验研究中,10-100μm厚度的Al,Cu等白支撑金属薄膜是常用的靶材料,由于薄膜厚度及其分布与冲击波速度、压强等物理实验结果直接相关,因此需要对其厚度进行精确的测量。长期以来,对薄膜样品厚度的测量主要采用传统的单面定位测量法,但由于薄膜一基底之间的定位误差,薄膜厚度的精密测量存在难以克服的技术难题。 相似文献
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光谱椭偏仪是常用的测量薄膜厚度及材料光学性质的仪器,其准确性主要由系统的校准过程确定。提出一种新的利用标准样品校准光谱椭偏仪的方法。该方法通过对多个已知厚度和已知材料特性的薄膜样品进行测量,利用测量得到的多个样品的傅里叶系数光谱与包含未知校准参数的理论光谱之间进行对比,通过最小二乘法拟合,回归求解出整个系统的未知校准参数,包括偏振器方位角,波片延迟,波片方位角和系统入射角等。将该方法的应用领域扩展到200~1000nm的宽光谱区域,并通过测量3~13nm的SiO2/Si薄膜样品,实验验证了该方法的有效性,准确性达到0.194nm。该方法相对于传统校准方法更加简单、快速。 相似文献
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Kazuhiko Ishikawa Hitomi Yamano Katsuhiko Asada Koichi Iwata Masahiro Ueda 《Optics and Lasers in Engineering》2004,41(5):731
An ingenious optical method was developed for measuring the thickness of a coating directly and in real time at a measuring frequency of a few tens of Hz. The basic optical arrangement is very simple, and consists of a semiconductor laser, two cylindrical lenses, and a silicon photodiode array or CCD camera. The range of measurable thickness is roughly between λ and 100λ, where λ is a wavelength of the laser light, and its measuring error is a few percent. The previously developed method for measuring the thin film in air, which can be analyzed theoretically, can also be applied for estimating the thickness of a coating on the substratum within an error of 2%. 相似文献
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基于等色干涉的膜分析 总被引:2,自引:2,他引:0
基于膜等色干涉原理,将等色干涉条纹与已知线光谱在光谱仪谱面上叠加,通过对干涉条纹宽度及其变化的测量,可计算出膜厚、膜厚突变、膜厚渐变等.对膜进行扫描分析,膜的面积达10-2mm2数量级即可进行测量. 相似文献
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Fringes of equal chromatic order in transmission across a thin liquid or a thin solid sample inside a wedge interferometer, followed with a grating spectrograph, are produced. A single-shot interferogram of the air and sample regions is recorded. Locations of fringes maxima in the air region are fitted in a numerical procedure based on Cauchy's dispersion function. Then it is used for measuring the interferometric gap thickness. The order of interference in the sample region is represented by a third-order polynomial in the wavenumber for deducing the sample group refractive index. An error analysis of the measured group refractive index is given. The method is applied for measuring the group refractive index of water and mica samples across the visible spectrum. The method measures both the sample thickness and its group refractive index. It is static with no moving parts and suitable for thin liquid or solid samples without immersion liquids. 相似文献
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P. K. Bhattacharya S. K. Andersen J. Chevallier N. Hertel 《Applied Physics A: Materials Science & Processing》1980,21(1):47-53
An experimental facility was built where thin metal (Ta) crystals, with known thickness, could be studied by transmission channeling of MeV ions. The details of obtaining a faint beam (1.5–3.6 MeV) of constant flux (±1%) on the target and normalization of the spectrum of forward scattered particles have been discussed with merits and demerits of various setups used. Preliminary experimental results are reported for measuring dechanneling coefficients from edge dislocations produced by cold work, using H+ ions. The H+ stopping power for Ta in various planar channels and random direction are estimated and using those, it is shown possible to use the setup for thickness measurements of thin crystal films. 相似文献
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Combining Cubic Spline Interpolation and Fast Fourier Transform to Extend Measuring Range of Reflectometry 下载免费PDF全文
The reflectometry is a common method used to measure the thickness of thin films. Using a conventional method,its measurable range is limited due to the low resolution of the current spectrometer embedded in the reflectometer.We present a simple method, using cubic spline interpolation to resample the spectrum with a high resolution,to extend the measurable transparent film thickness. A large measuring range up to 385 m in optical thickness is achieved with the commonly used system. The numerical calculation and experimental results demonstrate that using the FFT method combined with cubic spline interpolation resampling in reflectrometry, a simple,easy-to-operate, economic measuring system can be achieved with high measuring accuracy and replicability. 相似文献
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符号表A无量纲温度幅值L。热扩散长度。1二维效应作用区边界AD温度幅值。试样表面法向Yd样品无量纲厚度AO特征温度q热源热流。材料热扩散率C材料体积比热容qb热源热流幅值。”测量热扩散率d样品厚度T试样上某点温度A材料导热系数h表面等效换热系数几边界温度p温度相位He无量纲换热系数。。光源边界。测量角频率1前言使用周期热流法测量薄膜材料面向热扩散率的基本原理如图1所示,调制光对试样加热,遮光板沿V方向以一定速度V移动,引起试样上热源边界l变化,假设没有热损失,试样上经历沿。方向的一维导热过程,则热电偶测得之温度幅… 相似文献
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氮化硅纳米薄膜非平衡热导率实验研究 总被引:1,自引:1,他引:0
3ω实验方法是一种可以对薄膜热导率进行瞬时测量的方法。根据3ω方法测试原理,搭建了薄膜导热系数测试平台,并且分别测试低频率段和高频段薄膜与基底的温升以及薄膜热导率。测试结果表明:Si3N4薄膜的热导率随温度的升高而增大;高频段下,热导率受频率影响大,误差大;在低频段下薄膜热导率与频率变化基本无关;基于电子与声子的局部热平衡运输方程假设,S i3N4薄膜的热导率具有极度非平衡性;通过比较电阻、热导率与温度的关系可以看出加热器的尺寸大小会影响薄膜的热导率,最佳加热器的宽度选用20μm左右。 相似文献