| 利用光学方法测量薄膜厚度的研究 |
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| 引用本文： | 宋敏,李波欣,郑亚茹.利用光学方法测量薄膜厚度的研究[J].光学技术,2004,30(1):103-106. |
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| 作者姓名： | 宋敏 李波欣 郑亚茹 |
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| 作者单位： | 大连民族学院,机电信息工程系,大连,116600;辽宁师范大学,物理系,大连,116029 |
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| 基金项目： | 大连民族学院人才引进基金项目资助(项目编号20036205) |
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| 摘 要： | 介绍了测量固体薄膜厚度的光学方法。分析了这些方法的光学原理,对所使用的光源、测量范围、测量精度、实现的难度以及方法所适用的场合等多种因素进行了比较分析,结果表明:对于厚度在10～100μm范围的固体薄膜而言,激光干涉法是一种简单、易于实现且测量精度较高的方法。
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| 关 键 词： | 光学方法 薄膜厚度 测量 |
| 文章编号： | 1002-1582(2004)01-0103-04 |
| 修稿时间： | 2003年5月29日 |
Study of optical methods for measuring the thickness of the thin films |
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| SONG Min,LI Bo-xin,ZHENG Ya-ru.Study of optical methods for measuring the thickness of the thin films[J].Optical Technique,2004,30(1):103-106. |
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| Authors: | SONG Min LI Bo-xin ZHENG Ya-ru |
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| Institution: | SONG Min~1,LI Bo-xin~2,ZHENG Ya-ru~2 |
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| Abstract: | Some optical methods for measuring the thickness of the thin solid films are presented. The optical principle of these methods are analyzed, and many measuring factors are compared and analyzed, such as the light sources used in measurement, the measuring range of thickness, the precision, the difficulty for being applied and the situations for measurement etc. The results show that laser interference method is a simple, easy method, which is of high measuring accuracy with the range of 10～100 μm. |
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| Keywords: | optical method thickness of thin film measurement |
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