包埋Pt纳米粒子对金属-半导体-金属结构ZnO紫外光电探测器性能的影响

利用射频磁控溅射设备制备ZnO薄膜, 最终制备ZnO/Pt纳米粒子/ZnO 结构的金属-半导体-金属型紫外光电探测器. 研究了Pt纳米粒子处在ZnO薄膜层中的不同深度对金属-半导体-金属型紫外光电探测器响应性能的影响. 结果表明, 探测器的响应度随着Pt纳米粒子在ZnO薄膜层中所处深度的增大而升高. 在60 V偏压下, 包埋Pt最深的探测器在波长365 nm处取得响应度最大值1.4 A·W^-1, 包埋有Pt探测器的响应度最大值为无Pt 纳米粒子探测器响应度最大值的7倍. 结合对ZnO薄膜表面的表征及探测器各项性能的测试, 得出包埋Pt纳米粒子增强器件的响应性能可归因于表面等离子体增强散射.     

基于二维材料的快速响应金属-半导体-金属结构光电探测器研究进展

快速响应光电探测器在光通信、高速摄影、生物医学成像等领域有广泛的需求。目前,市场上应用的快速响应光电探测器大多基于硅、砷化镓等传统的无机半导体材料,但是其制作工艺复杂、成本较高,并且机械灵活性差。以石墨烯、二硫化钼为代表的二维材料具有独特的层状结构以及良好的光学、电学、热学和机械特性,是制备光电探测器的理想材料。尤其是部分二维材料所拥有的超高载流子迁移率特性,十分适用于研制快速响应光电探测器。近年来,一系列基于二维材料的金属-半导体-金属结构光电探测器(Metal-semiconductor-metal photodetectors, MSM-PDs)被陆续报道,很多具有1μs以下的快速响应特性。本文以基于二维材料的快速响应MSM-PDs为主题进行综述。首先介绍了MSM-PDs中的基本结构及工作原理,深入剖析了决定其响应速度的主要因素。随后介绍了石墨烯、过渡金属硫化物、黑磷、二维钙钛矿、三元硒氧铋等二维材料的分子结构、光学、电学等特性,并对各类二维材料在MSM-PDs的应用进行对比。然后分类介绍了响应速度在1μs以下的欧姆接触型、肖特基接触型以及基于表面等离激元效应二维材料MSM-PD...     

基于表面等离子体共振增强的硅基锗金属-半导体-金属光电探测器的设计研究

金属-半导体-金属光电探测器的光栅结构可激发表面等离子体, 有效增强探测器的吸收. 为深入研究器件结构对于表面等离子体的激发及共振增强的影响, 本文提出了一种具有超薄有源层的硅基锗金属-半导体-金属光电探测器的设计方法. 采用时域有限差分的方法详细分析了光栅周期、光栅厚度、 光栅间距及有源层厚度对于表面等离子体共振增强器件性能的影响, 通过仿真模拟获得了器件的最佳结构, 详细地分析了各个界面激发的表面等离子体及其共振模式对于光谱吸收增强的机理. 仿真结果表明, 有源层锗的厚度为400nm的超薄器件在通信波段具有较高的吸收, 尤其在1550nm波长处器件的归一化的光谱吸收率可以高达53.77%, 增强因子达7.22倍. 利用共振效应能够极大地提高高速器件的光电响应, 为解决光电探测器响应度与响应速度之间的相互制约关系提供了有效途径. 关键词： 表面等离子体 锗探测器 时域有限差分仿真     

MSM结构Mg0.2Zn0.8O可见盲光电探测器

采用射频磁控溅射,通过传统的紫外曝光和湿法腐蚀的方法,制备了不同电极间距的金属-半导体-金属(MSM)结构Mg0.2Zn0.8O可见盲光电探测器.研究了器件的暗电流和响应度随电极间距的变化关系,当施加的电压没有达到贯穿电压的时候,暗电流和响应度均随着电极间距的增加而减小,并对其具体的机制进行了研究.     

ZnO纳米线紫外探测器的制备和快速响应性能的研究

一维ZnO纳米结构由于具有比表面积大、室温下具有大激子结合能等特点而受到广泛关注. 但是如何实现纳米结构的器件一直是目前研究的一个挑战. 文章通过水热方法, 在玻璃衬底上实现了ZnO纳米线横向生长, 并制备出基于ZnO纳米线的金属-半导体-金属紫外探测器. 测量结果显示器件在365 nm处探测器的响应度达到5 A/W, 并且制备的探测器在空气中对紫外光照具有快速的响应, 其上升时间约4 s, 下降时间约5 s, 这与ZnO纳米线中的氧空位吸附和脱附水分子相关.     

不同钝化结构对非极性AlGaN-MSM紫外探测器性能的提升

在r面蓝宝石衬底上,采用金属有机化学气相沉积（MOCVD）法高温生长了未掺杂非极性AlGaN半导体薄膜,在此基础上制备了金属-半导体-金属（MSM）结构的紫外探测器。系统研究了在AlGaN半导体薄膜表面分别磁控溅射SiO₂纳米颗粒与SiO₂钝化层两种钝化手段对非极性AlGaN-MSM结构的紫外探测器性能的影响。实验结果表明：磁控溅射SiO₂纳米颗粒钝化或SiO₂钝化层两种手段都能提升AlGaN-MSM结构紫外探测器性能。暗电流测试表明,SiO₂纳米颗粒和SiO₂钝化层可使器件暗电流下降1~2个数量级,达到nA量级。光谱响应测试发现,在5 V偏压下,探测器在300 nm处具有陡峭的截止边,这表明其具有很好的深紫外特性,光谱响应提高了10³倍,紫外可见抑制比高达10⁵。     

基于HfO2插层的Ga2O3基金属-绝缘体-半导体结构日盲紫外光电探测器

作为一种新兴的超宽带隙半导体, Ga₂O₃在开发高性能的日盲紫外光电探测器方面具有独特的优势.金属-半导体-金属结构因其制备方法简单、集光面积大等优点在Ga₂O₃日盲紫外光电探测器中得到了广泛的应用.本文在传统的金属-半导体-金属结构Ga₂O₃日盲紫外光电探测器的基础上,利用原子层沉积技术引入高介电性和绝缘性的氧化铪(HfO₂)作为绝缘层和钝化层,制备出带有HfO₂插层的金属-绝缘体-半导体结构的Ga₂O₃日盲紫外光电探测器,显著降低了暗电流,提升了光暗电流比,同时提高了器件的比探测率和响应速度,为未来Ga₂O₃在高性能弱光探测器件制备提供了一种新通用策略.     

ZnO基紫外探测器的制作与研究

利用新型的等离子体辅助金属有机化学气相沉积(P-MOCVD)系统在蓝宝石、硅等衬底上生长出具有单一c轴取向、高阻的ZnO薄膜,利用添加的等离子体发生装置,进行氮掺杂获得高阻ZnO薄膜。利用ZnO的宽禁带与高光电导特性,结合MSM(金属-半导体-金属)结构器件响应度高、速度快、随偏压变化小、工艺简单、易于单片集成等优点,制作了ZnO基紫外探测器,器件规格为80 μm×100μm,电极为叉指式电极。测试中采用500 W的氙灯做测试光源,探测器的Ⅰ-Ⅴ特性曲线显示;正向偏压下探测器的暗电流及光照电流与外加偏压呈线性增长。不同波长下的响应曲线显示:探测器对紫外波段有响应,响应峰值在375nm附近。     

吸收增强的光栅型金属-半导体-金属光电探测器的优化设计

针对可见光通信对硅基光电探测器高响应度的要求,本文利用亚波长金属光栅的异常光学透射现象,提出一种增强与硅基CMOS工艺兼容的金属-半导体-金属光电探测器吸收的方法。采用时域有限差分法,详细分析了光栅周期、光栅高度和狭缝宽度对探测器吸收性能的影响,证明了类法布里-珀罗共振和表面等离子体激元是吸收增强的物理起源。对于波长615 nm的红光通信而言,探测器金属光栅的最佳周期、最佳高度和最佳狭缝宽度分别为580,91,360 nm。与没有亚波长金属光栅结构的探测器相比,本文设计的探测器吸收系数提高了32%。本文研究的MSM探测器结构与CMOS工艺完全兼容,有望在可见光通信芯片中得到实际应用。     

N型槽栅金属-氧化物-半导体场效应晶体管抗热载流子效应的研究

用二维器件仿真软件MEDICI模拟分析了N型槽栅金属-氧化物-半导体场效应晶体管的热载流 子特性及其对器件性能所造成的损伤,并与相应常规平面器件进行了比较,同时用器件内部 物理量的分布对造成两种结构器件特性不同的原因进行了解释.结果表明槽栅器件对热载流 子效应有明显的抑制作用,但槽栅器件对热载流子损伤的反应较平面器件敏感. 关键词： 槽栅MOSFET 热载流子效应 界面态 特性退化     

The influence of electron intervalley transfer on response pulse width of the MSM photodetector

This paper analyses the influence of nonstationary effects on response pulswidth of Metal-Semiconductor-Metal Photodetector (MSM-PD) made of a two-valley semiconductor. A phenomenological model is used for 2D numerical simulation of carrier transport and intervalley transfer. The analysis of the pulsewidth response of the MSM-PD has been made for various micron and submicron structures, bias voltages and incident light wavelengths.     

Analysis of nano-grating-assisted light absorption enhancement in metal-semiconductor-metal photodetectors patterned using focused ion-beam lithography

We present finite-difference time-domain (FDTD) analysis results of light absorption enhancement factor dependence on the profile shape of nano-gratings etched into the surfaces of metal-semiconductor-metal photodetector (MSM-PD) structures. The MSM-PDs patterned by nano-gratings are optimized geometrically, improving the light absorption near the design wavelength through plasmon-assisted electric field concentration effects. FDTD simulation results show about 50 times light absorption enhancement prediction for 850 nm light due to improved optical signal propagation through the nano-gratings in comparison with the conventional MSM-PD designs employing only a subwavelength aperture. We also report on the nano-grating profile shapes obtained typically in our experiments using focused ion-beam lithography and discuss the dependency of light absorption enhancement on the geometric parameters of nano-gratings inscribed into MSM-PDs.     

Simulation of the Metal-Semiconductor-Metal photodetector based on InGaAs for the photodetection at the wavelength 1.55 μm

In this paper we present the simulation of Metal-Semiconductor-Metal photodetector (MSM-PD) of interdigitated planar structure based on InAlAs/InGaAs adapted for photodetection at the wavelength 1.55 μm. We use the theoretical models to plot the variations of the dark current, the photocurrent, the capacity, and the cut-off frequency of the photodetector as a function of bias voltage and the interelectrode distance. The obtained results show a very low dark current, mainly due to the introduction of a thin layer to increase the Schottky barrier based on In_0.52Al_0.48As in the epitaxial structure of component. The obtained photocurrent and cut-off frequencies are very appreciable, these latter are mainly limited by the transit time of the photo-generated carriers given the low component capacity obtained by simulation.     

变色薄膜的紫外线辐照响应研究

 制备了含多芳氨基甲烷类化合物的高分子变色薄膜，经紫外线辐照后，这种薄膜随吸收剂量的不同由无色透明逐渐变为绿色，在可见光区主要吸收峰位于626 nm附近，光密度响应与辐照时间近似成线性关系。研究表明：该辐射变色薄膜变色响应随紫外线能量密度增加而增加；分次辐照能略微提高光密度响应；辐射变色薄膜响应受温度和湿度影响较大，在20～50 ℃温度范围、40%～60%相对湿度范围，响应基本稳定；卤代物添加剂可以大大提高辐射变色薄膜的响应灵敏度；受后辐照效应影响，辐照结束最初2 h内响应迅速增加，2 h后响应才基本稳定。     

计算相位响应曲线的方波扰动直接算法

通过相位响应曲线可对具有极限环周期运动的动力系统的性质有更为深入的理解.神经元是一个典型的动力系统,因此相位响应曲线提供了一种研究神经元重复周期放电行为的新思路.本文提出一种求解相位响应曲线的方法,即方波扰动的直接算法,通过Hodgkin-Huxley,Fitz Hugh-Nagumo,Morris-Lecar和Hindmarsh-Rose神经元模型验证该算法可计算周期峰放电、周期簇放电的相位响应曲线.该算法克服了其他算法在运用过程中的局限性.利用该算法计算结果表明:周期峰放电的相位响应曲线类型是由其分岔类型所决定;在Morris-Lecar模型中发现一种开始于Hopf分岔终止于鞍点同宿轨道分岔的阈上周期振荡,其相位响应曲线属于第二类型.通过大量的相位响应曲线的计算发现相位响应的相对大小及正负性仅取决于扰动所施加的时间,而且周期簇放电的相位响应曲线比周期峰放电的相位响应曲线更为复杂.     

Estimation of damping from response spectra

In this paper procedures for estimating damping ratio from response spectra are examined. The study is restricted to an evaluation of bias and random errors introduced by signal processing requirements. A second order system is used in the study, and a Gaussian white noise input is assumed. It is shown that, due to bias errors in estimating the response spectra, calculations of damping ratio by the peak response and half-power bandwidth methods give overestimates. The bias errors of the damping ratio estimates are a function of the true damping of the system and the ratio of analysis bandwidth to resonant frequency. The bias error for the half-power bandwidth method is three times that for the peak response method. It is also shown for large ranges of damping ratio and bandwidth ratio that zero bias response occurs at a point where the response is approximately 80% of the peak response. Numerical results obtained by simulation studies are used to verify the expressions for normalized bias error. Expressions for random error associated with damping ratio estimates are also developed. Random error can be minimized by maintaining a high coherence between the system input and response.     

RANDOM VIBRATION OF A ROTATING BLADE WITH EXTERNAL AND INTERNAL DAMPING BY THE FINITE ELEMENT METHOD

The finite element model is employed to investigate the mean-square response of a rotating blade with external and internal damping under stationary or non-stationary random excitation. The blade is considered to be subjected to white-noise and earthquake excitations. The effects of rotational speed, external and internal damping on the mean-square response are studied. It is found that the mean-square response decreases quickly when the external and internal damping increases within some scope. Moreover, the increment of rotational speed will reduce the mean-square response of a rotating blade. It is also found that the mean-square response decreases when the low natural frequency of base decreases. Inversely, the mean-square response increases when the high natural frequency of base (natural frequencies of base are over the first natural frequency of blade) decreases. The reliability of a rotating blade subjected to stationary or non-stationary excitations is also obtained.     

γ射线及质子辐照导致CCD光谱响应退化的机制

光谱响应是表征CCD性能的重要参数。为了研究辐射环境对CCD光谱响应产生影响的规律及物理机制,开展了不同粒子辐照实验,对CCD光谱响应曲线的退化形式及典型波长下CCD光响应的退化情况进行了分析。辐射效应对CCD光谱响应的影响可以分为电离总剂量效应和位移效应导致的退化,本文从这两种辐射效应出发,采用⁶⁰Co-γ射线及质子两种辐照条件,研究了CCD光谱响应的退化规律。针对460 nm（蓝光）和700 nm（红光）等典型CCD光响应波长,从辐射效应导致的损伤缺陷方面分析了CCD光谱响应退化的物理机制。研究发现,在⁶⁰Co-γ射线辐照时CCD光谱响应曲线变化是由于暗信号增加导致的,而质子辐照导致CCD对700 nm波长的光响应退化明显大于460 nm波长的光响应,且10 MeV质子导致的损伤比3 MeV质子更明显,表明位移损伤缺陷易导致CCD光谱响应退化。结果表明,电离总剂量效应主要导致CCD光谱响应整体变化,而位移效应则导致不同波长光的响应差异增大。     

Measurement of the frequency response of a diaphragm-based pressure sensor by use of a pulsed excimer laser

We present a novel method for measuring the frequency response of a diaphragm-based optical fiber Fabry-Perot interferometric pressure sensor. The impulse response of the sensor to the radiation pressure generated by an excimer laser pulse is measured. The Fourier transform of the impulse response yields the frequency response of the pressure sensor. Experimental results show that it is a convenient and efficient method for measurement of the frequency response of diaphragm-based pressure sensors.     

Optics of embedded semiconductor nano-objects using a hybrid model: bare versus dressed polarizabilities

The influence of the surrounding semiconducting matrix upon the optical response of embedded nano-objects (quantum dots) has been investigated. This system can be described by means of a hybrid model, where the full response is a combination of a macroscopic electrostatic response term and a dynamic response term, obtained quantum mechanically. The result is a modified discrete dipole model, where excess discrete dipoles having an excess polarizability with respect to a uniform background identical to the dielectric host material represent the response. In this model all electrodynamic interactions are screened by the host material. The electrostatic response is obtained by approximating the quantum dots by embedded dielectric oblate ellipsoids. Closed expressions for the electrostatic response of these ellipsoids have been derived. The electrodynamic nature of the dynamic quantum mechanical polarizability term however is unclear. It is not certain whether this polarizability is dressed or bare. Therefore we have investigated in detail the consequences of both options. Although there is no real qualitative difference between them, the difference is so large that experiment can easily discriminate between both. Results should be easily measurable anyhow.