激光钝化对熔石英修复后损伤性能影响的实验研究

采用10.6 μupm 的 CO₂激光, 对单次激光脉冲辐照修复熔石英存在的烧蚀采用大光斑钝化去除. 经过辐照修复的区域置于前表面测试初始损伤阈值, 结果表明调制造成的损伤得到了一定程度的抑制; 辐照区域置于后表面修复后 熔石英的初始损伤阈值超过了基底的初始损伤阈值. 实验观察到了应力分布外扩, 同时明显减弱. 对损伤增长的测试说明, 经过激光熔融辐照后的损伤点, 当应力释放以后, 损伤扩展初期表现出指数增长趋势, 后期随着辐照次数的增加, 损伤增长不再明显, 并且趋于恒定值.     

激光钝化对熔石英修复后损伤性能影响的实验研究

采用10.6 μupm 的 CO₂激光, 对单次激光脉冲辐照修复熔石英存在的烧蚀采用大光斑钝化去除. 经过辐照修复的区域置于前表面测试初始损伤阈值, 结果表明调制造成的损伤得到了一定程度的抑制; 辐照区域置于后表面修复后 熔石英的初始损伤阈值超过了基底的初始损伤阈值. 实验观察到了应力分布外扩, 同时明显减弱. 对损伤增长的测试说明, 经过激光熔融辐照后的损伤点, 当应力释放以后, 损伤扩展初期表现出指数增长趋势, 后期随着辐照次数的增加, 损伤增长不再明显, 并且趋于恒定值.     

熔石英表面热致应力对激光损伤行为影响的研究

为了研究热致应力对光学元件损伤特性的影响,通过实验测试退火处理消除热应力和未消热应力石英基片的激光损伤特性,研究了热致应力对石英元件初始损伤阈值、损伤增长阈值以及损伤增长规律的影响.结果表明,热致应力对熔石英光学元件的初始损伤阈值有影响,初始损伤阈值随着热致应力增大而降低;热致应力会加剧激光引发的损伤增长,相同的激光通量下,表面应力越大的区域拥有越高的损伤增长因子,但损伤增长仍遵从指数增长规律.热致应力对损伤增长阈值没有明显的影响.本文的研究将为CO2激光预处理工艺能否被应用于大口径光学元件提供一个必要的技术参考.     

沉积温度对LaF3薄膜性能的影响

 在189，255，277和321 ℃的沉积温度下用热舟蒸发方法制备了LaF₃薄膜。通过X射线衍射(XRD)测试了薄膜的晶体结构;采用分光光度计测量了薄膜的透射光谱，并计算得到样品的折射率、消光系数和截止波长;利用光学干涉仪测试得到了薄膜的残余应力;采用三倍频Nd:YAG脉冲激光测试了薄膜的激光损伤阈值。结果表明：随沉积温度的提高，LaF₃薄膜的结晶状况明显变好，晶粒尺寸逐渐变大；膜层变得更加致密，折射率变大，然而薄膜吸收变得严重，截止波段向长波漂移，同时薄膜的残余应力也增加，内应力在薄膜的残余应力中起着决定作用；薄膜的激光损伤阈值在高温制备时相对较高。     

CO2激光局域辐照对熔石英损伤特性的影响

研究了CO₂激光局域辐照对熔石英损伤特性的影响, 发现当辐照中心温度较低时(1139 K), 辐照对损伤阈值没有明显影响, 但辐照中心温度较高时(1638 K), 辐照对损伤阈值有明显的影响, 损伤阈值随距离辐照中心间距的增大而减小, 在残余应力产生光程差最大处附近, 损伤阈值降到最小, 随着与辐照中心间距的进一步增加, 损伤阈值略有上升. 对导致此现象的原因做了分析. 由于残余应力的存在, 在辐照中心发生再损伤产生的裂纹后, 裂纹先沿径向扩展, 在残余应力产生光程差最大处附近, 裂纹转而向切向扩展, 这可能与径向和环向张应力随半径的变化有关. 在采用热处理炉退火消除残余应力时, 必须注意元件的洁净处理, 否则退火会出现析晶现象, 对损伤阈值和透射率造成不良影响. 关键词： 2激光局域辐照')" href="#">CO₂激光局域辐照 熔石英 损伤特性     

熔石英表面铜膜污染物诱导损伤实验研究

 在熔石英元件表面溅射一层厚度小于10 nm的金属铜膜污染物,并测试元件的透过率。测试355 nm熔石英元件的激光损伤阈值,并用光学显微镜观测损伤形态。实验结果表明：污染后的熔石英元件的损伤阈值降低20%左右,元件表面的金属污染物薄膜经强激光辐照,在熔石英表面形成很多坑状微损伤,分布不均的热应力导致表面起伏,并有明显的烧蚀现象,导致基底损伤阈值下降。建立的光吸收和热沉积传输模型初步解释污染物膜层导致熔石英元件损伤的机理。     

退火对ZrO2薄膜微结构及激光损伤阈值的影响

利用电子束蒸发方法在Yb∶YAG晶体和熔融石英衬底上沉积单层ZrO2薄膜,分别在673 K和1 073 K的温度下经过12 h退火以后,通过X射线衍射（XRD）分析了薄膜晶相,计算了薄膜的晶粒尺寸;利用表面热透镜技术获得了薄膜的吸收;测量了退火后薄膜的激光损伤阈值。实验结果表明:两种衬底上的薄膜结构受到退火温度和衬底表面结构的影响,高温退火有利于单斜相的形成,含单斜相的ZrO2薄膜具有较高的激光损伤阈值,而由于衬底的吸收,Yb∶YAG晶体上薄膜的损伤阈值远小于石英衬底上薄膜的损伤阈值。     

355 nm皮秒激光辐照下熔石英的损伤特性

利用光学元件激光损伤测试平台,测试了355 nm皮秒激光辐照下熔石英光学元件的初始损伤及损伤增长情况,并通过荧光检测分析了损伤区缺陷。研究结果表明:皮秒激光较高的峰值功率导致熔石英损伤阈值较低,前表面损伤阈值为3.98 J/cm2,后表面损伤阈值为2.91 J/cm2;前后表面损伤形貌存在较大差异,后表面比前表面损伤程度轻且伴随体内丝状损伤;随脉冲数的增加后表面损伤直径增长缓慢,损伤深度呈线性增长;皮秒激光的动态自聚焦和自散焦导致熔石英体内损伤存在细丝和炸裂点重复的现象;与纳秒激光损伤相比,损伤区缺陷发生明显改变。     

抑制损伤发展的CO_2激光修复技术及机理研究

熔石英表面激光损伤发展问题一直制约着激光器的运行通量。采用CO2激光在线熔融修复损伤点,修复后形成一个光滑的高斯坑,去除了损伤点中的裂纹,平滑了凹凸不平的表面,并且在紫外脉冲激光作用下,修复斑再次产生损伤的阈值高于熔石英元件的损伤生长阈值。因此CO2熔融修复技术能有效地抑制损伤发展。通过分析CO2激光作用下熔石英表面的温度分布,讨论修复坑的形成过程,确定激光参数对修复效果的影响,为寻找最佳修复参数提供理论基础。同时利用原子力显微镜(AFM)、轮廓仪细致分析损伤点和修复斑的微细结构,采用有限差分时域方法计算损伤点和修复斑周围的光强分布,探索消除裂纹和平滑表面对抑制损伤生长的作用。     

CO2激光对熔石英表面小尺寸损伤的修复

 利用10.6 μm的CO₂激光对不同直径的点状损伤和不同宽度的划痕进行了修复。经过波长351 nm的紫外激光考核发现,对于直径小于80 μm的点状损伤和对于宽度小于40 μm的划痕,随着损伤点尺寸和划痕宽度的增加,修复后阈值提高程度逐渐降低。划痕的宽度在达到40 μm以后修复效果非常微弱。修复过程中,由于作用时间较短及温度分布不均产生了热应力导致样片损伤以后产生径向裂痕,后续的紫外激光会使裂痕明显扩展。当样品被置于高温退火炉内退火3 h以后,应力导致开裂的现象得到了解决。     

Surface defects,stress evolution,and laser damage enhancement mechanism of fused silica under oxygen-enriched condition

Oxygen ions (O⁺) were implanted into fused silica at a fixed fluence of 1×10¹⁷ ions/cm² with different ion energies ranging from 10 keV to 60 keV. The surface roughness, optical properties, mechanical properties and laser damage performance of fused silica were investigated to understand the effect of oxygen ion implantation on laser damage resistance of fused silica. The ion implantation accompanied with sputtering effect can passivate the sub-/surface defects to reduce the surface roughness and improve the surface quality slightly. The implanted oxygen ions can combine with the structural defects (ODCs and E' centers) to reduce the defect densities and compensate the loss of oxygen in fused silica surface under laser irradiation. Furthermore, oxygen ion implantation can reduce the Si-O-Si bond angle and densify the surface structure, thus introducing compressive stress in the surface to strengthen the surface of fused silica. Therefore, the laser induced damage threshold of fused silica increases and the damage growth coefficient decreases when ion energy up to 30 keV. However, at higher ion energy, the sputtering effect is weakened and implantation becomes dominant, which leads to the surface roughness increase slightly. In addition, excessive energy aggravates the breaking of Si-O bonds. At the same time, the density of structural defects increases and the compressive stress decreases. These will degrade the laser laser-damage resistance of fused silica. The results indicate that oxygen ion implantation with appropriate ion energy is helpful to improve the damage resistance capability of fused silica components.     

Localized CO2 laser treatment and post-heating process to reduce the growth coef f icient of fused silica surface damage

The lifetime of optical components in high-fluence ultraviolet (UV) laser applications is typically limited by laser-initiated damage and its subsequent growth. Using 10.6-μ m CO 2 laser pulses, we successfully mitigate 355-nm laser induced damage sites on fused silica surface with dimensions less than 200 μ m. The damage threshold increases and the damage growth mitigates. However, the growth coefficients of new damage on the CO 2 laser processed area are higher than those of the original sample. The damage grows with crack propagation for residual stress after CO 2 laser irradiation. Furthermore, post-heating is beneficial to the release of residual stress and slows down the damage growth.     

Effects of annealing time on the structure,morphology, and stress of gold–chromium bilayer film

In this work, a 200-nm-thick gold film with a 10-nm-thick chromium layer used as an adhesive layer is fabricated on fused silica by the electron beam evaporation method. The effects of annealing time at 300℃ on the structure, morphology and stress of the film are studied. We find that chromium could diffuse to the surface of the film by formatting a solid solution with gold during annealing. Meanwhile, chromium is oxidized on the surface and diffused downward along the grain grooves in the gold film. The various operant mechanisms that change the residual stresses of gold films for different annealing times are discussed.     

CO2激光扫描辐照修复熔石英表面损伤

采用振镜系统结合10.6 m的CO2激光,对熔石英表面损伤点进行辐照,成功地修复了直径500 m的大尺寸损伤点,损伤修复后表面无烧蚀残留,损伤内部完全愈合,无气泡和残余裂纹。和定点修复方式相比,这种修复具有修复尺度大、面形影响区域小、应力分布范围小的优势。80%扫描辐照修复的损伤点的初始损伤阈值恢复甚至超过了基底的初始损伤阈值。     

High temperature thermal behaviour modeling of large-scale fused silica optics for laser facility

High temperature annealing is often used for the stress control of optical materials.However,weight and viscosity at high temperature may destroy the surface morphology,especially for the large-scale,thin and heavy optics used for large laser facilities.It is necessary to understand the thermal behaviour and design proper support systems for large-scale optics at high temperature.In this work,three support systems for fused silica optics are designed and simulated with the finite element method.After the analysis of the thermal behaviours of different support systems,some advantages and disadvantages can be revealed.The results show that the support with the optical surface vertical is optimal because both pollution and deformation of optics could be well controlled during annealing at high temperature.Annealing process of the optics irradiated by CO2 laser is also simulated.It can be concluded that high temperature annealing can effectively reduce the residual stress.However,the effects of annealing on surface morphology of the optics are complex.Annealing creep is closely related to the residual stress and strain distribution.In the region with large residual stress,the creep is too large and probably increases the deformation gradient which may affect the laser beam propagation.     

酸蚀与紫外激光预处理结合提高熔石英损伤阈值

采用HF酸刻蚀和紫外激光预处理相结合的方式提升熔石英元件的负载能力,用质量分数为1%的HF缓冲溶液对熔石英刻蚀1~100 min,综合透过率、粗糙度和损伤阈值测试结果,发现刻蚀时间为10min的熔石英抗损伤能力最佳。采用355 nm紫外激光对HF酸刻蚀10 min的熔石英进行预处理,结果表明:紫外预处理能量密度在熔石英零损伤阈值的60%以下时,激光损伤阈值单调递增;能量到达80%时,阈值反而低于原始样片的损伤阈值。适当地控制酸蚀时间和紫外激光预处理参数能有效提高熔石英的抗损伤能力。     

退火对熔石英表面损伤修复点损伤增长的影响

研究不同参数退火处理的熔石英表面损伤修复点再次损伤及损伤增长时的形貌和损伤增长率的差异, 同时与未退火的基底及修复点的损伤增长行为对比. 结果表明: 未退火的修复点再次损伤后, 损伤点周围的裂纹会在应力的作用下继续扩展, 导致更加严重、尺寸更大的损伤点; 当退火处理将修复点周围应力导致的光程差控制在25 nm左右时, 虽损伤增长速率较快, 但可有效抑制裂纹扩展. 同时研究结果也表明只要退火过程能将修复点周围应力导致的光程差控制在10 nm以下, 其损伤增长率与基底的损伤增长率没有明显差异, 从而可以有效控制修复点的损伤增长速率. 研究结果可为分析应力对修复点损伤增长的影响、指导退火参数的优化提供参考.     

预应力对熔石英损伤的影响

采用ANSYS进行形变-应力模拟。对不同应力状态下的熔石英表面进行三倍频激光损伤测试,结果发现,预加压应力为0~50 MPa时损伤阈值有明显提高的趋势,用应力耦合作用对此给出了解释:0~50 MPa的预加压应力可以降低和抵消激光辐照产生的张应力破坏,大于50 MPa预应力的耦合作用会使得该处机械性能下降,另外,损伤增长在预应力存在时更容易发生。因此,0~50 MPa预加压应力时的表面预应力可以提高熔石英的抗激光辐照能力。