周期性和孤立的纳米结构的超透镜亚波长成像（英文）

超透镜光刻技术是一种很有前景的纳米结构成像技术,由于其具有可以克服衍射极限的能力,直到2005年,张翔和他的同事在365nm紫外线波长下成功的对一排纳米线和刻在高分子膜上的四个字母"NANO"实现了超分辨成像,分辨率高达1/6入射波长。通过传递矩阵方法优化出超透镜结构,并通过选择适当的材料和设计在超透镜结构中的每个层的厚度以及合理的优化实验等方法制备一个新的超透镜结构,利用这种超透镜结构实现了周期性纳米结构及孤立纳米结构的亚波长成像。实验结果表明,对于周期性的纳米结构,其图像分辨率达到100nm,而孤立结构的分辨率低于50nm,小于入射波长的1/7。     

单元超透镜模式分析及其亚波长成像特性研究

提出了一种可工作于可见光波段的波长可调的超透镜。该超透镜由一层等离子体金属薄膜和两侧等厚介质薄膜的平面波导构成。通过分析介质薄膜对波导表面等离子体模式的调制作用,给出了超透镜的成像规律。结果表明,通过调节透镜介质薄膜的厚度可实现从365~515nm、分辨率为λ/6、高能量透射率的亚波长成像。该三层膜超透镜结构简单,可有效地减小制备误差及表面粗糙度对成像的不利影响,降低了制造难度。此结构以其简单的结构、出色的成像性能在亚波长光刻、生物显微镜、高密度数据存储等方面具有潜在的应用价值。     

闪耀型亚波长光栅透镜的柱矢量光聚焦优化和调控

柱矢量光束的紧聚焦在光学微操纵、光学存储、激光微加工、超分辨率成像和粒子加速等领域发挥着重要作用。亚波长光栅平凹透镜对柱矢量光束的紧聚焦的能力仍有提升空间,本文利用闪耀结构将光的能量从零级转移并集中到-1级,对亚波长光栅平凹透镜的聚焦性能进行优化。提高了透镜的衍射效率,增强了焦场的能量。通过调整高斯径向偏振光的形状参数,改变入射光振幅及入射区域半径实现对焦场能量的动态调控。进一步地,调控柱矢量光束的偏振组分能够直接有效地横向调制焦场,获得多样化形貌的焦斑。本文的优化手段对于其他光栅透镜也具有参考意义,该研究结果在超分辨率成像以及光场调控等领域具有潜在的应用价值。     

一种Offner型小型短波红外成像光谱仪

通过对Offner分光光学系统分析,给出了快速计算初始结构参数公式,根据算得的初始结构参数优化出一套适用于短波红外(1 000～2 500 nm)的分光光学系统,设计的光学系统相对孔径大(F/#2.2)、光谱分辨率高(优于10 nm)和入射狭缝长(12 mm),在整个波长和视场范围内调制传递函数MTF均大于0.5。完成的成像光谱仪整机体积小,重量轻(小于5 kg),仪器测试结果表明,全光谱范围内光谱线性好,光谱标定后波长精度优于4 nm, 通过对不同波段分辨率测试,全波长范围内光谱分辨率与设计相符,动态成像实验表明, 光谱图像清晰并且光谱数据质量佳。     

表面等离子体平面金属透镜及其应用

由于衍射极限的存在,传统光学透镜成像分辨率理论上只能达到入射光波长的一半。通过恢复和增强携带物体细部特征信息的高频倏逝波,基于表面等离子体的平面金属透镜有望突破这种光学衍射极限,实现超分辨成像。本文对平面薄膜式与纳米结构式两类平面金属透镜进行了综述,详细介绍了若干典型平面金属透镜的结构设计、工作机理及其聚焦性能,并对其特点与存在的问题进行了分析与讨论。由于光波在金属中传播时存在一定损耗,如何更高效地增强高频倏逝波信号并转换成传播波,使其参与成像,以更好地实现远场超分辨成像,以及如何进一步增大近场超高分辨率聚焦光斑焦深以及减小远场聚焦光斑尺寸,是表面等离子体平面金属透镜进一步研究的重点。     

光谱仪光源双光束准直的自由曲面透镜

为了使光谱仪在分辨率基本不变的同时增宽工作光谱范围,利用非成像原理设计了自由曲面透镜,将光源发出的宽工作谱段的光束准直为两束波长不同、方向不同的平行光,实现探测器上光谱的折叠分布.首先,根据两束入射光线经自由曲面折射前、后的矢量关系,建立自由曲面上点坐标的一阶偏微分方程组;然后,采用Runge-Kutta法对偏微分方程组进行数值差分求解,得到自由曲面离散采样点,进而构建得到自由曲面透镜,将自有曲面透镜导入ZEMAX软件中对光源的双光束准直进行模拟,在Tracepro软件中进行光线追迹分析其照度分布;最后,将自由曲面透镜应用于近红外光谱仪中,将波段为800~2 400 nm的光源准直为两束波长分别为800~1 600 nm和1600~2 400 nm的方向不同的平行光束,经单个光栅色散后由成像透镜组成像在探测器表面,形成两组相互平行且首尾相连的折叠光谱,光谱仪的分辨率优于10 nm.结果表明,采用该自由曲面透镜可以同时实现光谱仪的高分辨率和宽工作光谱范围,且使光谱仪的结构更加紧凑.     

二维蜂窝结构声子晶体的负折射成像研究*

为了得到分辨率更好的平板透镜,对此进行了研究。利用有限元的方法研究了由水/水银材料组合的二维蜂窝结构声子晶体平板透镜的负折射成像特性,通过数值仿真计算了声子晶体的能带结构、等频色散曲线,模拟了点源成像,并且利用高斯波束验证了声子晶体平板透镜的负折射现象,得到了有效折射率neff =-1的成像。对比相同材料的正方晶格和三角晶格而言,该模型的成像效果更佳。为了改善成像分辨率,还在原来的模型上进行了改进,得到了分辨率约为0.37λ的亚波长像。     

基于宽带立体超透镜的远场超分辨率成像

为突破传统衍射极限实现远场超分辨率成像,提出了一种微波频段宽带立体超透镜用于目标远场超分辨率成像.该透镜可将携带着目标超分辨率信息的凋落波分量转换为传播波分量辐射到远场,进而可在远场接收这些信息并用于超分辨率成像.分别从频域和时域两方面对该透镜的超分辨率特性进行验证.在频域,利用多重信号分类算法对借助于该结构的扩展目标实现了λ/12的远场超分辨率成像,大幅度提升了成像效果.在时域,结合时间反演技术,验证了带宽提升对空间超分辨率聚焦特性带来的明显优势.     

可变焦叶绿体光学微透镜

光学微透镜在光学成像、信号探测、生物传感等方面有重要的应用。针对现有固体微透镜难以变焦和生物不兼容的问题，提出将细胞内的叶绿体作为天然的微透镜，并研究了叶绿体微透镜的聚焦特性及其在光学成像和信号探测中的应用。研究结果表明，叶绿体微透镜对不同波长的入射光能产生聚焦效应。借助光镊产生的光力可实现叶绿体形状的可控变化，进而可实现对叶绿体微透镜焦距的调节，调节范围为15～45μm。由于叶绿体微透镜具有光束聚焦特性，故其能够应用到亚波长结构的成像和荧光信号的增强中。在实验中，叶绿体微透镜实现了对线宽为200 nm的光栅结构和细胞内部肌动蛋白丝的光学成像，以及对量子点荧光信号的探测和增强。     

径向偏振光下的长焦、紧聚焦表面等离子体激元透镜

表面等离子体激元透镜(plasmonic lens, PL)是一种通过激发和操控表面等离子体激元 (SPPs), 突破衍射极限, 实现亚波长紧聚焦的纳米光子器件. 如何实现高效率的紧聚焦及调控, 一直是研究PL的重点. 如果选取电矢量沿径向振动的径向偏振光作为PL的入射光, 可从各个方向激发SPPs, 提高紧聚焦的能量效率. 本文提出了一种在径向偏振光激发下的长焦深、长焦距、亚波长紧聚焦的表面等离子体激元透镜, 该透镜由中心T 形微孔、阶梯形同心环和同心环结构组成. 本文首先利用有限元方法数值分析了中心微孔-同心环结构透镜的聚焦特性, 结果显示径向偏振光由底部入射可高效激发SPPs, 并且中心微孔透射光与散射至自由空间的SPPs由于多光束干涉形成了紧聚焦. 为进一步压缩焦斑、增加焦距、加深焦深、改善透镜聚焦特性, 本文引入中心T形微孔-阶梯形同心环结构, 从而对阶梯表面的SPPs同时提供了相位调制和传播方向的控制. 经过参数优化, 该透镜结构实现了光斑焦深、半高宽、焦距分别是入射光波长的2.5倍、0.388 倍、3.22倍的亚波长紧聚焦; 而且该透镜具有结构紧凑、尺寸小、易于集成的优点, 满足了纳米光子学对于器件微型化和高度集成化的要求. 该研究结果在纳米光子集成、近场光学成像与探测、纳米光刻等相关领域具有潜在的应用价值.     

Experimental study of transmission enhancement of evanescent waves through silver films assisted by surface plasmon excitation

In this paper, we investigated an essential precursor of superlensing: enhancing the transmission of evanescent waves assisted by excitation of surface plasmon. Using natural roughness as a well characterized grating, the transmission of evanescent waves is studied through silver thin films of increasing thickness. Measurements and calculations are performed in the wavelength range of 514.5 nm to 351.1 nm where the real part of the permittivity of silver is negative. Pronounced peaks due to surface-plasmon excitations are observed in the transmission spectra. We found the transmission of evanescent waves rapidly grows with the film thickness up to about 50 nm, after which it decays as loss becomes significant. As the permittivity of a silver slab approaches -1, we experimentally observed a broadening of surface plasmon bandwidth. Our study indicates a pathway to access the deep subwavelength features by metamaterial superlens. PACS 42.79-e; 42.30.Wb; 78.20.Ci; 78.66.Bz     

突破衍射极限的超级透镜技术及其应用研究

基于超材料的超级透镜能让携带物体高频信息的倏逝波分量参与成像,从而实现对小于半个工作波长的超精细结构的分辨。分析了几种典型的超透镜,如近场、远场和双曲超透镜的工作原理和研究进展,并对超透镜技术在实时生物成像、高密度光存贮、光刻等方面的应用前景进行了分析和总结。     

银层超透镜光学传递函数的研究

银层超透镜对基于表面等离子体激元的超分辨光刻、 成像和生物传感有着重要作用.利用银层超透镜的光学传递函数详 细研究了银板的表面等离子体激元共振和成像特性, 并利用时域有限差分法计算模拟了银层超透镜的成像过程, 得到与理论推导公式相符合的结果, 证明了光学传递函数的可靠性, 为基于表面等离子体激元的传感器件、 超分辨成像以及辅助增强干涉光刻提供了快速参数优化方法.     

Study on the imaging characteristics of far-field superlens

The optical transfer function of the far-field superlens imaging system is established in this thesis to make it easy to describe the corresponding relation between the far-field angular spectrum and the near-field object superresolution information. We utilized the established optical transfer function to make detailed research on the imaging characteristics of the far-field superresolution, also reconstruct the near-field nano-information through the far-field angular spectrum, which proves that the resolution of the far-field superlens with structure coupled with metal grating can reach 50 nm, and provides a helpful reference for the study of the new optical microscope imaging of superresolution.     

Morphology and size dependence of silver microstructures in fatty salts-assisted multiphoton photoreduction microfabrication

The morphology and size dependence of silver microstructures in a novel microfabrication process, fatty salts-assisted multiphoton photoreduction (MPR), were investigated by using the fatty salts with different carbon chain lengths (C _n : n=4,5,7,9) under varied powers and irradiation times of a femtosecond near-infrared laser with the wavelength of 800 nm. Not only the feature size of the silver structures was reduced but also the surface smoothness was improved by increasing the chain length of the fatty salts. The highest resolution of a silver line was obtained to be 285 nm, which exceeded the diffraction limit. The fatty salts-assisted MPR microfabrication approach would provide an efficient protocol for fabricating metallic micro/nanostructures with fine morphology and size and could play an important role in the fabrication of the metallic micro/nanostructures for applications in photonics and electronics as well as in sensors.     

Subwavelength imaging enhancement through a three-dimensional plasmon superlens with rough surface

In this Letter we investigate the subwavelength imaging of a three-dimensional plasmon superlens based on the full vector wave simulations of optical wave propagation and transmission. The optical transfer functions are computed. Comparisons are made between the results of lenses with flat and periodic/random rough surfaces. We also study the problem of practical imaging system geometry using laser as an illumination source. Results show that the lens with periodic or random roughness can reduce the field interference effects, and provide improved focus on the transmission field and the Poynting flux. We illustrate that the subwavelength roughness in a plasmon lens can enhance the image resolution over a flat lens for both matched and unmatched permittivity conditions. The enhancement of resolution occurs because the introduced subwavelength roughness can amplify the evanescent wave components and suppress the surface plasmon resonance peaks.     

样品表面银膜的粗糙度对钛酸钡微球成像性能的影响

研究了样品表面镀有不同表面粗糙度的银膜对钛酸钡（BaTiO₃ glass,BTG）微球成像效果的影响,发现当银膜表面的粗糙度（RMS）从3.23 nm增大到6.80 nm时,用直径为15 μm的BTG微球观察直径为250和580 nm的微球阵列,样品的成像范围增大.另外,BTG微球还可以清晰分辨原本不可分辨的直径为200 nm的微球阵列.结果表明,粗糙银膜引起的散射作用和表面等离激元波的局域场增强效应,使得更多物体的高频信息耦合进微球,提高了微球成像的分辨率和成像范围.     

Sub-diffraction-limited far-field imaging in infrared

We investigated a far-field superlens operating at mid-infrared wavelength that allows resolving subwavelength features in the far-field. By utilizing evanescent enhancement provided by surface plasmon excitation of silver nanorods and Moiré effect, we numerically demonstrated that subwavelength information of an object can be converted to propagating information. This information can then be captured by conventional optical components. A simple image reconstruction algorithm can restore the subwavelength object. A sub-diffraction-limited resolution of 2.5 μm at 6-μm wavelength is demonstrated.     

Far-field superlens for nanolithography

A far-field optical lithography is developed in this paper. By designing the structure of a far-field optical superlens, lithographical resolution can be improved by using a conventional UV light source. The finite different time domain numerical studies indicate that the lithographic resolution at 50~nm line width is achievable with the structure shown in this paper by using 365~nm wavelength light, and the light can be transferred to a far distance in the photoresist.     

Analytical modeling to design the vertically aligned Si-nanowire metal-oxide-semiconductor photosensors for direct color sensing with high spectral resolution

In the current work, an analytical model for the design of vertically aligned silicon (Si) nanowire metal-oxide-semiconductor (MOS) capacitor based multi-color photodetectors has been developed for the detection of entire visible spectrum with high spectral resolution. The photogeneration phenomena within the nanostructures are analyzed in detail by developing a quantum field model associated with second quantization electron-photon field operators. The non-equilibrium Green's function (NEGF) formalism is employed to solve the relevant equations. The study shows that the proposed device with specified design of diameter-voltage combinations is capable of detecting 64 spectral bands of the entire visible spectrum (380 nm to700 nm) directly with a very high resolution of 5 nm wavelength. Such direct sensing of each wavelength is observed to be independent of the fluctuations of illumination intensity. The device is designed to obtain a full-width-at-half-maximum (FWHM) smaller than the spectral resolution (5 nm) for each wavelength of the visible range, which indicates a very high quality digital imaging/sensing method. Such devices may be a potential alternative for the future nanoelectronics based photodevices for superior sensing/imaging applications.