The use of broadband acoustic transducers and pulse-compression techniques for air-coupled ultrasonic imaging

A pulse-compression technique has been applied to air-coupled testing of solid materials. Capacitance transducers were used to generate wide bandwidth swept-frequency (chirp) signals in air, which were then used to measure and image solid samples in through transmission. The results demonstrate that such signal processing techniques lead to an improvement in the signal to noise ratio and timing accuracy for air-coupled testing. Measurements of thickness and spectroscopic experiments are presented. Images of defects in a wide range of materials, including metals and carbon-fibre composites have also been obtained. This combination of capacitive transducers with pulse-compression techniques is shown to be a powerful tool for non-contact air-coupled ultrasonic measurements.     

超声换能器对线性调频信号脉冲压缩性能的影响分析*

该文研究了不同编码带宽下超声换能器对编码信号脉冲压缩后信噪比与轴向分辨率的影响关系。将脉冲压缩后的时域峰值转化为频域积分的形式，得到考虑换能器影响的脉冲压缩信噪比公式。以线性调频信号为例，仿真与实验结果表明，编码激励相对于方波激励的信噪比增益随编码带宽的减小而增大，因为受换能器带宽限制，编码激励的轴向分辨率随编码带宽的增大先减小后趋于稳定。该研究为编码激励方法更有效地应用于超声检测的背景中提供了参考。     

Parameter optimization of pulse compression in ultrasound imaging systems with coded excitation

A linear array imaging system with coded excitation is considered, where the proposed excitation/compression scheme maximizes the signal-to-noise ratio (SNR) and minimizes sidelobes at the output of the compression filter. A pulse with linear frequency modulation (LFM) is used for coded excitation. The excitation/compression scheme is based on the fast digital mismatched filtering. The parameter optimization of the excitation/compression scheme includes (i) choice of an optimal filtering function for the mismatched filtering; (ii) choice of an optimal window function for tapering of the chirp amplitude; (iii) optimization of a chirp-to-transducer bandwidth ratio; (iv) choice of an appropriate n-bit quantizer. The simulation results show that the excitation/compression scheme can be implemented as a Dolph–Chebyshev filter including amplitude tapering of the chirp with a Lanczos window. An example of such an optimized system is given where the chirp bandwidth is chosen to be 2.5 times the transducer bandwidth and equals 6 MHz: The sidelobes are suppressed to −80 dB, for a central frequency of 4 MHz, and to −94 dB, for a central frequency of 8 MHz. The corresponding improvement of the SNR is 18 and 21 dB, respectively, when compared to a conventional short pulse imaging system. Simulation of B-mode images demonstrates the advantage of coded excitation systems of detecting regions with low contrast.     

面向水下应用的电容式微机械超声换能器*

电容式微机械超声换能器具有宽频带和易于制造二维阵列等优势,已经成为一种重要的新型超声换能器。该文针对图像声呐系统对新型超声换能器的迫切需求,提出了一种电容式微机械超声换能器结构和参数,并利用硅微加工技术制备出了该换能器,最后对其主要性能参数进行了测试和分析。测试结果表明该换能器具有发射和接收超声波的功能,中心工作频率为1.965 MHz,6 dB相对带宽达到109.4%,在1 MHz、2 MHz和3 MHz频率时的接收灵敏度分别为-218.29 d B、-219.39 dB和-218.11 dB。该文研制的电容式微机械超声换能器显示出了优秀的宽频带特性,且工作频率和接收灵敏度性能均基本满足了高频图像声呐系统的需求。     

前盖板开矩形通孔型宽带换能器

提出一种利用多模态耦合的开孔型宽带换能器。在传统纵振换能器前盖板一定距离处开一矩形通孔,以激发出能与纵振耦合从而拓宽频带的振动模态。以带宽为目标,利用有限元方法对通孔的长度、宽度和孔前端离前盖板端面的距离进行了优化设计,得到了最佳的开孔位置和尺寸。研制了换能器样机。测试结果表明,在12~32 kHz频带范围内,换能器有3个工作模态,后两阶模态对工作带宽的展宽有贡献。未开孔的同尺寸纵振换能器-3 dB带宽仅3 kHz,开孔换能器带宽则达10.50 kHz,有效地拓展了工作带宽。理论计算和测试结果吻合较好。      

多基元聚焦空气耦合超声换能器*

文中针对空气耦合超声换能器及其在表面缺陷检测中的应用开展了研究。选用1-3型压电复合材料及双匹配层结构来实现超声换能器压电材料与空气之间声阻抗的逐渐过渡,提高压电材料/空气界面的声能量透射率进而提高空气耦合超声换能器的灵敏度。在此基础上研发制作了440 kHz多基元聚焦空气耦合超声换能器,并对其性能进行了测试。其焦距、焦宽及焦深分别为41.44 mm、1.14 mm和20.30 mm,灵敏度和带宽分别为-50 d B和20.2%。测试结果表明该空气耦合超声换能器具有优良的性能,利用该超声换能器可以有效检测材料表面缺陷。     

Supermode-noise-free eighth-order femtosecond soliton from a backward dark-optical-comb-injection mode-locked semiconductor optical amplifier fiber laser

A backward dark-optical-comb-injection mode-locked semiconductor optical amplifier fiber laser (SOAFL) with a femtosecond pulse width and an ultrahigh supermode-noise suppressing ratio (SMSR) is primarily demonstrated. The mode-locked SOAFL pulse with a spectral linewidth of 0.45 nm is shortened from 15 to 8.6 ps under chirp compensation in a 420 m long dispersion-compensated fiber, corresponding to a time-bandwidth product of 0.48. The eighth-order soliton is obtained by the nonlinearly soliton's compression of the chirp-compensated SOAFL pulse in a 112 m long single-mode fiber at an input peak power of 51 W, providing the pulse width, the linewidth, and the nearly transform-limited time-bandwidth product are <200 fs, 13.8 nm, and 0.34, respectively. The phase noise and integrated timing jitter at an offset frequency below 1 MHz are -105 dBc/Hz and 0.8 ps, respectively. An ultrahigh pulse-compression ratio of 43 and a SMSR of 87 dB for the eighth-order SOAFL soliton are reported.     

微纳相控线阵超声换能器参数的理论分析*

微纳相控线阵超声换能器参数(阵元数目、阵元宽度及阵元间距)直接影响其横向声场分布,而其横向声场分布是能否实现高成像分辨率、大探测深度的决定性因素,也是制备换能器的主要依据。该文利用数值模拟研究微纳相控线阵超声换能器阵元参数对其横向声场中主瓣强度、-3 dB主瓣宽度、第一级旁瓣及栅瓣的影响。结果表明,主瓣强度随着阵元数目增加而增大,随阵元间距减小而增大,随着阵元宽度的增大呈现先增大后减小的趋势;-3 dB主瓣宽度随着阵元数目和阵元间距的增大而减小,随着阵元宽度的减小而减小;此外,减小阵元数目、减小阵元间距或增大阵元宽度均可以抑制旁瓣;栅瓣在阵元间距满足一定条件时可以完全消除。通过这些研究为微纳相控线阵超声换能器的优化设计与制备提供理论参考。     

超声阵列的多频脉冲压缩方法研究

脉冲压缩方法通过采用编码信号激励与脉冲压缩接收来提高超声检测的时间分辨率和信噪比。然而,受换能器带宽的限制,编码信号的时间带宽积往往有限,影响脉冲压缩效果。开展了基于超声阵列的多频脉冲压缩方法研究,超声阵列是由具有不同中心频率和带宽的多个阵元组成,从而使得整个阵列具有比单个换能器更宽的带宽。提出了压缩后叠加取包络的脉冲压缩方法,并研究了这种方法在提高时间分辨率和主副瓣比上的技术方案,对多频脉冲压缩的超声阵列进行了设计与优化,发现多频脉冲压缩方法能很大程度地提高时间分辨率,并能有效地抑制各阵元信号叠加产生的周期副瓣。理论和实验结果表明,这种压缩后叠加取包络的方法得到的时间分辨率在性能上受阵元带内不平整度的影响很小,能使阵元压缩包络中的主副瓣比得到明显改善。      

宽光谱AOTF匹配网络对光谱衍射效率影响的研究

基于声光可调滤波器(acousto-optic tunable filter,AOTF)光谱成像分析仪在可见至红外光谱的多个谱区内广泛应用,对AOTF的光谱带宽及衍射效率提出了更高的要求。超声换能器作为AOTF的核心部件,其3 dB工作带宽决定AOTF的光谱衍射范围,故在同一声光介质上制作两片厚度不同的换能器来提高AOTF光谱带宽。由于超声换能器在不同频率下具有不同的输入阻抗,当驱动信号源输出阻抗与超声换能器输入阻抗失配时会产生能量损耗,导致无法把功率最大限度的传递给超声换能器,从而使AOTF光谱衍射效率降低,影响光谱成像清晰度。通过射频电路先进设计系统(ADS)仿真及实验测试,设计了一种新型宽带阻抗匹配网络,在60～200 MHz带宽范围内,阻抗匹配网络功率效率达到90％以上,光谱衍射效率最高达90％,提高了在420～1 150 nm波段内的光谱灵敏度。     

High-frequency PIN–PMN–PT single crystal ultrasonic transducer for imaging applications

A high-frequency (～60 MHz) ultrasonic transducer with a [001]-oriented 0.27Pb(In_1/2Nb_1/2)O₃–0.45Pb(Mg_1/3Nb_2/3)O₃–0.28PbTiO₃ (PIN–PMN–PT) piezoelectric single crystal as an active element has been fabricated and characterized. The poled PIN–PMN–PT single crystal has thickness mode electromechanical coefficient k _t of 0.56 and piezoelectric constant d ₃₃ of 1550 pC/N. The ?6 dB bandwidth of the transducer is 73 % and the insertion loss at its centre frequency is ?20 dB. With the study as a function of temperature, the PIN–PMN–PT transducer shows better thermal stability than the binary single crystal transducer. Furthermore, the transducer was evaluated using a 30-μm aluminum wire phantom image, in which the ?6 dB axial and lateral resolutions are found to be 26 μm and 127 μm, respectively. Ultrasonic images of fish eyes were obtained with the 60-MHz transducer. It is shown that the high-sensitivity transducer can produce the images with high signal-to-noise ratio and good contrast.     

调频激励增强微气泡的次谐波理论和实验研究

超声造影剂的次谐波成像可以提高造影组织比，提供更好的图像质量. 提出一种利用调频脉冲激励以增强造影剂微气泡产生的次谐波新方法. 基于修正的Church方程，从理论上讨论了次谐波的产生与调频激励声压的关系及产生阈值，并且实验证实了优化调频信号的带宽及调频时间可以提高次谐波信号幅度及改善主瓣和旁瓣特性. 理论与实验表明，与传统脉冲信号激励相比，调频信号激励产生的次谐波幅度可提高约22dB. 关键词： 调频激励 超声造影剂 微气泡 次谐波     

PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers

In this work, a novel high-frequency ultrasonic transducer structure is realized by using PMNPT-on-silicon technology and silicon micromachining. To prepare the single crystalline PMNPT-on-silicon wafers, a hybrid processing method involving wafer bonding, mechanical lapping and wet chemical thinning is successfully developed. In the transducer structure, the active element is fixed within the stainless steel needle housing. The measured center frequency and −6 dB bandwidth of the transducer are 35 MHz and 34%, respectively. Owing to the superior electromechanical coupling coefficient (k _t ) and high piezoelectric constant (d ₃₃) of PMNPT film, the transducer shows a good energy conversion performance with a very low insertion loss down to 8.3 dB at the center frequency.     

High Frequency PMN-PT 1-3 Composite Transducer for Ultrasonic Imaging Application

Development of PMN-PT single crystal/epoxy 1-3 composites for high-frequency ultrasonic transducers application is presented. The composite was fabricated by using a DRIE dry etching process with a 45% volume fraction of PMN-PT. A 35 MHz ultrasound flat transducer was fabricated with the composite, which was found to have an effective electromechanical coupling coefficient of 0.81, an insertion loss of 18 db, and a -6 dB bandwidth as high as 100%. Tungsten wire phantom image shows that the transducer had an axial resolution of 30 μm, which was in good agreement with the theoretical expectation. The initial results showed that the PMN-PT/epoxy 1-3 composite has many attractive properties over conventional piezoelectric materials for medical imaging applications.     

Broadband flextensional transducer with major axis lengthened

The bandwidth of the Class IV flextensional transducer is narrow for its high mechanical quality factor.For improving its bandwidth performance,a flextensional transducer with major axis lengthened was proposed by the theory of multiple-mode-coupling based on the oval shell.The transducer driven by novel relaxor ferroelectric single crystal lead magnesium niobate-lead titanate(PMNT)was designed and analysed using finite element software ANSYS and a prototype of the transducer was developed.The transmitting voltage response of the transducer reaches to 136 dB with fluctuation 7.8 dB from 1.6 kHz to 16 kHz.Based on the theoretical analysis and experimental results,it proves that the flextensional transducer with major axis lengthened has a much broader bandwidth than the ClassⅣflextensional transducer combing with the advantages of low frequency and high response.     

宽带宽波束纵向水声换能器研究

本文通过设计纵向水声换能器辐射头的形状及利用其弯曲振动模,实现宽带宽波束辐射特性,采用后质量块的嵌套结构有效缩小了换能器的长度。利用ANSYS有限元软件模拟了小型宽带宽波束纵向水声换能器的电声特性。研制了换能器样品,实现了与有限元模拟计算结果相一致的电声参数:谐振频率14kHz,最大发射电压响应141．9dB,-3dB带宽为11．3～18．7kHz,-3dB带通Q值为1．9,在14kHz频率下波束宽度为132°,比通常纵向换能器波束宽度宽23％。     

四边型弯张换能器特性研究及宽带设计

四边型弯张换能器通常工作带宽较窄,为了提高带宽性能,对四边型弯张换能器振动及辐射特性进行了研究,重点分析壳体结构参数对换能器发送电压响应的影响。根据分析结果提出了拓宽换能器工作带宽的方法,利用有限元软件进行了仿真计算并制作了四边型弯张换能器样机。测量得到在2.4~5 kHz的频率范围内,换能器的最大发送电压响应值达到140 dB,带内起伏4 dB,有限元仿真结果与实验结果吻合较好。研究结果表明设计的四边型弯张换能器不仅能够低频工作,并且可以在小尺寸下实现大功率发射,同时还具备宽带发射特性。      

Properties study of LiNbO3 lateral field excited device working on thickness extension mode

This paper investigates the properties of thickness extension mode excited by lateral electric field on LiNbO3 by using the extended Christoffel-Bechmann method. It finds that the lateral field excitation coupling factor for amode (quasi-extensional mode) reaches its maximum value of 28% on X-cut LiNbO3. The characteristics of a lateral field excitation device made of X-cut LiNbO3 have been investigated and the lateral field excitation device is used for the design of a high frequency ultrasonic transducer. The time and frequency domain pulse/echo response of the LiNbO3 lateral field excitation ultrasonic transducer is analysed with the modified Krimholtz-Leedom-Matthae model and tested using traditional pulse/echo method. A LiNbO3 lateral field excitation ultrasonic transducer with the centre frequency of 33.44 MHz and the -6 dB bandwidth of 33.8% is acquired, which is in good agreement with the results of the Krimholtz-Leedom-Matthae model. Further analysis suggests that the LiNbO3 lateral field excitation device has great potential in the design of broadband high frequency ultrasonic transducers.     

PMN-PT single crystal focusing transducer fabricated using a mechanical dimpling technique

A ∼5 MHz focusing PMN-PT single crystal ultrasound transducer has been fabricated utilizing a mechanical dimpling technique, where the dimpled crystal wafer was used as an active element of the focusing transducer. For the dimpled focusing transducer, the effective electromechanical coupling coefficient was enhanced significantly from 0.42 to 0.56. The dimpled transducer also yields a −6 dB bandwidth of 63.5% which is almost double the bandwidth of the plane transducer. An insertion loss of the dimpled transducer (−18.1 dB) is much lower than that of the plane transducer. Finite element simulation also reveals specific focused beam from concave crystal surface. These promising results show that the dimpling technique can be used to develop high-resolution focusing single crystal transducers.     

Micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular array

This paper reports the design, fabrication, and performance of miniature micromachined high frequency PMN-PT/epoxy 1-3 composite ultrasonic annular arrays. The PMN-PT single crystal 1-3 composites were made with micromachining techniques. The area of a single crystal pillar was 9 × 9 μm. The width of the kerf among pillars was ∼5 μm and the kerfs were filled with a polymer. The composite thickness was 25 μm. A six-element annular transducer of equal element area of 0.2 mm² with 16 μm kerf widths between annuli was produced. The aperture size the array transducer is about 1.5 mm in diameter. A novel electrical interconnection strategy for high density array elements was implemented. After the transducer was attached to the electric connection board and packaged, the array transducer was tested in a pulse/echo arrangement, whereby the center frequency, bandwidth, two-way insertion loss (IL), and cross talk between adjacent elements were measured for each annulus. The center frequency was 50 MHz and −6 dB bandwidth was 90%. The average insertion loss was 19.5 dB at 50 MHz and the crosstalk between adjacent elements was about −35 dB. The micromachining techniques described in this paper are promising for the fabrication of other types of high frequency transducers, e.g. 1D and 2D arrays.