高效高分辨率大面积透射光栅谱仪特性的理论分析

为提高透射光栅谱仪对激光等离子体Ｘ光源的收集效率的光谱分辨同铲高分辨率大面积航向光栅光谱仪。该谱仪由轮胎镜、无支撑高线密度光栅和软Ｘ光ＣＣＤ相机组成。应用部分相干光衍射理论,研究了该谱仪成偈面上的光强分布和光谱分辩率,在１．４～１２ｎｍ的摄谱范围内光 人发辨率为０．０５ｎｍ,与实验符合得很好。由于其高效率,该谱仪尤其适用于超短飞秒脉冲激光产生等离子体的实验研究。     

准随机矩形孔阵列透射光栅

自支撑透射光栅的周期加强筋结构在降低光栅的通光面积、减少光栅衍射效率的同时, 也影响了光栅原有的衍射模式, 致使其应用更加复杂. 为了应对这一问题, 作者提出了利用在高Z材料薄膜上准随机排布矩形孔实现自支撑透射光栅的技术方法. 理论分析与实验结果表明, 利用新方法制作的透射光栅较好地摆脱了周期性加强筋对透射光栅衍射模式的强加干扰.     

Temporal diffraction characteristics of transmitted multilayer volume holographic grating illuminated by an ultrashort pulse

Based on the coupled wave theory of Kogelnik and Fourier optics, the time-domain diffraction characteristics of tramsmitted multilayer volume holographic grating (MVHG) under an ultrashort pulse readout are investigated. It is shown that the temporal diffraction characteristics depend not only on the numbers of the grating layers, but also on the thicknesses of the grating layers and buffer layers, grating period and the refractive index modulation. Furthermore, using group velocity dispersion we give explanation on the time-delay of diffraction pulse with respect to the center of the readout pulse. Results of our discussion may find applications in optical communications, pulse shaping and processing.     

一种新型透射式自聚焦光栅的设计及理论研究

结合普通透射光栅的分光特性和菲涅耳波带片的聚焦特性,提出一种应用于软X射线波段的新型透射式自聚焦光栅。根据菲涅耳衍射理论,对其衍射特性进行理论推导,证明该新型光栅存在一个与光栅平面垂直的焦平面,不同波长的光波聚焦于该焦平面的不同位置。在焦平面上,焦点位置随光子能量的变化是线性的,即能实现光子能量的线性测量。通过解析推导,得到在沿着焦平面和垂直于焦平面两个方向上光斑的展宽模式,发现该新型光栅在沿着焦平面的光斑展宽模式不同于普通光栅。根据基尔霍夫衍射公式,设置实用化参数,对其衍射模式进行了详细的数值模拟研究,并讨论了相应的测谱范围和谱分辨率。     

Design, Fabrication and Test of a Soft X-Ray Even-Order Transmission Grating

Most transmission gratings in the x-ray region work with their first orders and dispersion is limited by the line density achievable with current fabrication technology. We present a novel design of a two-dimensional x-ray transmission grating. The grating works with higher dispersion using its second orders, and the influence from first and third orders can be suppressed. A grating according to the novel design is fabricated and its diffraction performance is tested in comparison with a traditional x-ray transmission grating with the same line density. The novel grating could be especially useful when high dispersion is desired while the fabrication of high-density gratings becomes more difficult.     

Hard X-ray one dimensional nano-focusing at the SSRF using a WSi2/Si multilayer Laue lens

The multilayer Laue lens (MLL) is a novel diffraction optics which can realize nanometer focusing of hard X-rays with high efficiency. In this paper, a 7.9 μm-thick MLL with the outmost layer thickness of 15 nm is designed based on dynamical diffraction theory. The MLL is fabricated by first depositing the depth-graded multilayer using direct current (DC) magnetron sputtering technology. Then, the multilayer sample is sliced, and both cross-sections are thinned and polished to a depth of 35-41 μ. The focusing property of the MLL is measured at the Shanghai Synchrotron Facility (SSRF). One-dimensional (1D) focusing resolutions of 205 nm and 221 nm are obtained at E=14 keV and 18 keV, respectively. It demonstrates that the fabricated MLL can focus hard X-rays into nanometer scale.     

Optical properties of sliced multilayer gratings

Fabrication, calculation and optical properties of gratings fabricated by bevel cutting multilayer structures are discussed. Such gratings have very short period (about 100 nm) and provide high angular dispersion as compared to ruled, holographic or multilayer coated gratings without reduction of diffraction efficiency. Using graded multilayers it is possible to produce sliced multilayer gratings (SMG) with graded period (GSMG), which can focus radiation in one direction. Examples of SMG for various wavelengths in the interval 2–20 nm are considered.     

带前置光学系统的软X射线透射光栅光谱仪

软Ｘ射线检测是激光等离子体诊断中最复杂而又是最重要的一项工作。本文简要介绍了带有前置光学系统的软Ｘ射线大面积透射光栅光谱仪和用它获得的铝和铜靶激光等离子体的光谱图。     

Transmission guided-mode resonance filters based on high reflection multilayer stacks

The transmission guided-mode resonance filters are implemented by integration of diffraction grating into classical thin films to produce high efficiency in the central wavelength and arbitrarily low sideband response over a quite large spectral range. Transmission guided-mode resonance filters require considerable fewer thin films to acquire narrow line width and high peak transmission in the central wavelength compared with classical multilayer high-reflectance coatings with a stack of quarter-wave thickness. The properties of transmission filters with single/double waveguide grating in the different layers of high refection stacks are compared each other. It is demonstrated that the narrow line width transmission filters can be abstained with only two different materials.     

透射光栅衍射效率的通用模型

在远场条件下采用夫朗和费衍射近似,经过波动光学的计算推导,得到透射光栅各级绝对衍射效率及相对衍射效率通用计算模型. 此模型可以用来计算任意栅线截面情况下透射光栅的衍射效率. 利用此模型,分别建立了矩形、梯形和5边准梯形截面的衍射效率计算模型,并对模型正确性进行了验证. 关键词： 透射光栅 衍射效率 数值模拟     

Polarization and Color Separator Using Binary Phase Grating with Subwavelength Period

A data projector using three liquid crystal display panels has a complex optical system. The illuminating optics separate the beam from a light source into three primary colors and separate those into opposite polarizations using multi-layer films and prisms. A reflection grating with the period of subwavelength has high diffraction efficiency for p polarized light and high regularly reflectance for s polarized light. The diffraction angle of a grating largely depends on the wavelength, because a diffractive optical element (DOE) has large chromatic dispersion. The grating with the period of subwavelength can separate the unpolarized light into polarization components effectively using its polarization dependency and can separate white light into color components using its chromatic dispersion simultaneously. The grating makes the optical system simpler and smaller than those with conventional devices. In this paper the efficiency of polarization separation for the grating is calculated by a rigorous analytical method. Next, the condition for color separation is calculated by Snell#x0027;s law, and an optical system using a grating that performs polarization and color separation is proposed. Experimental results of the DOE fabricated are well matched with those of this simulation.     

红外波段高效率低偏振相关损耗光栅的设计

衍射效率高、偏振相关损耗低的衍射光栅是集成波分复用/解复用器件的一种核心元件,在光通信中具有很重要的应用价值。通过利用严格的耦合波理论计算光栅衍射效率的方法,分别编制出了计算TE波和TM波的衍射效率程序。通过改变光栅的面形来进行计算,最终得到了衍射效率高和偏振相关损耗小的光栅面形。     

Electromagnetic effects for the resonance-domain IR diffractive optics

Binary optics technology enables the manufacture of arrays of diffractive micro-optical elements which are used in many optoelectronic devices, e.g. the focal plane collection optics. The first-order diffraction grating efficiency decreases in the best part of the resonance-domain region of diffraction, i.e. when the grating period is close to the optical wavelength in the substrate material. A large fraction of the fast binary lens surface relief is built of staircase annular structures whose width is of wavelength scale. Therefore, the rigorous electromagnetic theory of gratings has been applied in this paper to calculate and analyze the diffraction effects for the resonance-domain longwave (8–12 μm) infrared (LWIR) binary optics. It is shown that electromagnetic effects limit the speed of the LWIR first-order diffractive lenses and the optical gain achievable with the diffractive lenses used as the focal plane collection optics in the IR detection systems.     

基于X射线塔尔博特效应的纳米光栅制作模拟研究

沿纳米多层膜生长方向切割可制成周期只有几纳米而厚度几十微米的切片多层膜光栅. 基于该切片多层膜光栅塔尔博特自成像效应的X射线光刻是一种新型的纳米图样制作方法. 已有学者用该方法完成了百纳米结构光栅的制作. 采用严格耦合波方法, 本文模拟计算了切片多层膜光栅在满足塔尔博特自成像条件下的后表面光场分布, 详细讨论三个影响光栅后表面成像质量的重要参数:光栅厚度、材料厚度所占比例和多层膜周期. 模拟结果表明, 光栅厚度不仅影响X射线透射率, 还会改变像面条纹衬比度. 材料厚度比的大小直接决定像面是否存在清晰条纹, 选取合适的材料厚度比, 得到了前人实验中近场反常成像现象. 计算还表明, 在一定条件下, 采用周期更小的多层膜光栅有望获得更高分辨率的纳米图形, 这说明使用塔尔博特效应制作更加精细的纳米结构图形具有可行性.     

自支撑透射光栅的设计、制作和测试

采用标量衍射理论和严格耦合波理论分别计算和讨论了金自支撑透射光栅的衍射效率随波长和光栅周期变化的情况并设计了光栅的结构参数.制作了周期为300 nm、线宽/周期比为055、厚度为200 nm、总面积为1 mm×1 mm、有效面积比为65%的金自支撑透射光栅.在国家同步辐射实验室检测了该光栅在55—38 nm波长范围内的绝对衍射效率.检测结果表明所制作的光栅在8 nm附近具有接近10%的最大衍射效率,并且该光栅对于波长15—35 nm范围内的极紫外波段具有基本稳定的衍射效率. 关键词： 自支撑透射光栅 电子束光刻 电镀     

High efficiency terahertz diffraction grating with trapezoidal elements

A newly designed grating used in terahertz region is proposed, which is composed of the trapezoidal elements repeated successively along one dimension of the substrate, and uniform interval(the grating period) repeated along the other dimension. The transmission of the grating owns a designable trapezoidal profile dependent on the geometric dimensions of the element. The far-field diffraction patterns of a designed grating at incident broadband terahertz frequencies, with element dimensions of upper, lower side and period of 50, 250, and 300 μm, respectively, are simulated by the scalar diffraction theory. The simulation results indicate that the terahertz grating exhibits a property of single-order diffraction,and the diffraction efficiency of the first order reaches 6.6%, exceeding that of a traditional sinusoidal amplitude grating with identical period and duty cycle. Owing to the regular architecture and the high single-order diffraction efficiency, the grating is easy to fabricate and shows great potential applications in single-shot spectral measurements of weak broadband terahertz pulse.     

透射型光折变体全息光栅对超短脉冲激光光束衍射的特性

在Kogelnik耦合波理论的基础上,考虑光栅记录介质的色散效应的影响,研究了光折变体全息光栅对不同偏振状态的超短脉冲激光光束衍射的性质,讨论了高斯型入射脉冲激光光束的谱宽与光栅的有效衍射谱宽之比不同时,衍射和透射光束的光谱宽度、时间宽度、波形和衍射效率的变化。结果表明,光栅的有效衍射谱宽受光栅参量及入射条件的影响,对衍射性质的影响很大,且在考虑光栅记录介质的色散效应时减小。当入射脉冲的偏振方向垂直于入射面时,光栅的有效衍射谱宽大于偏振方向平行于入射面的情形,衍射效率在入射脉冲宽度较大时小于偏振方向平行于入射面的情形;谱宽比较大时,衍射光束的时间分布曲线产生展宽和变形,且比偏振方向平行于入射面的情形展宽和变形得更加明显。     

亚波长金属偏振分束光栅设计分析

结合有效介质理论和薄膜光学的抗反射设计方法,设计了基于0.65μm工作波长的亚波长金属偏振分束光栅,给出了光栅的优化设计参数,采用严格耦合波理论分析了光栅的偏振分束特性.结果表明,亚波长金属光栅对TE偏振表现为金属膜特性,具有高反射,对TM偏振表现为介质膜特性,具有高透射,在-30°<θ<30°的大入射角范围和0.47μm<λ<0.80μm的宽入射波谱内,该光栅的透射光和反射光均具有高偏振消光比和低插入损耗的特点. 关键词： 亚波长金属偏振分束光栅 有效介质理论 薄膜光学 严格耦合波理论     

3333lp/mm X射线透射光栅的研制

针对X射线透射光栅摄谱仪中的高线密度光栅,研究了采用电子束曝光和X射线曝光技术结合制作高线密度X射线透射光栅的工艺技术.首先利用电子束曝光和微电镀技术在镂空的薄膜上制备母光栅X射线掩模版,然后利用X射线曝光和微电镀技术小批量复制光栅.在国内首次完成了3333lp/mm X射线透射光栅的研制,栅线宽度为150nm,周期为300nm,金吸收体厚度为500nm.衍射效率标定的结果表明,该光栅的占空比合理、侧壁陡直,具有良好的色散特性,能够满足空间探测、同步辐射和变等离子诊断等多个领域的应用.     

星载高分辨率超光谱成像仪分光方式的选择

从多个方面分析了棱镜和光栅色散分光的优缺点,分析结果表明棱镜更适于星载高分辨率超光谱成像仪的分光。在透过率方面,棱镜光谱仪透过率高达95.24％(VNIR),而光栅的衍射效率仅为60%~70%。在杂散光方面,棱镜光谱仪的杂散光可达10－4,而光栅的杂散光为10－2。在0.4 －2.5 范围,棱镜光谱仪相对光栅光谱仪有优越性。在色散线性方面,光栅光谱仪基本线性,棱镜光谱仪的短波非线性问题可通过复合棱镜进行补偿。可靠性方面,棱镜光谱仪较光栅光谱仪有优势;在光谱带宽和成本方面,棱镜光谱仪与光栅光谱仪基本接近。