CO2激光和等离子体清洗提高石英基片损伤阈值

 采用连续CO₂激光和真空等离子体相结合的方法对石英基片进行清洗。通过光学显微图、水接触角、透过率和损伤阈值测量分别表征了CO₂激光和等离子体对真空硅脂蒸发物污染过的石英基片的清洗效果。研究表明：对于真空硅脂蒸发物污染后的石英基片，可以先采用低能量的CO₂激光进行大面积清洗，再用真空等离子体进行精细清洗。光学显微图像表明：清洗后的基片表面的油珠被清除干净；水滴接触角由63°下降到4°；在400 nm附近，基片透过率由92.3%上升到93.3%；损伤阈值由3.77 J/cm²上升到5.09 J/cm²。     

K9和石英玻璃基片上Au膜真空紫外反射特性研究

采用离子束溅射法,分别在经过不同前期清洗方法处理过的K9及石英玻璃光学基片上,选择不同的镀膜参量,镀制了多种厚度的Au膜。对镀制的Au膜在真空紫外波段较宽波长范围内的反射率进行了连续测量。测试结果表明:辅助离子源的使用方式、Au膜厚度对反射镜的反射率有重大影响。基片材料、镀前基片表面清洗工艺等对反射率也有一定影响。采用镀前离子轰击,可显著提高Au膜反射率及膜与基底的粘合力;获得最高反射率时的最佳膜厚与基片材料、镀膜工艺密切相关。对经过离子清洗的石英基片,膜厚在30 nm左右反射率最高;比较而言,石英基片可获得更高的反射率;辅助离子源的使用还显著影响获得最高反射率时对应的最佳膜厚值,且对K9基片的影响更显著。     

原子光刻中驻波场与基片距离的判定方法研究

原子光刻实验中, 激光驻波场能起到原子透镜的效果, 实现原子汇聚. 激光驻波场与沉积基片间的距离对形成纳米条纹结构的质量具有重要影响. 利用高斯光束传播规律, 提出了一种能够定量判断激光驻波场与沉积基片相对位置的实验方法. 该方法通过调节装载有凸透镜和反射镜的精密位移台改变驻波场距基片的距离, 利用光电探测器接收反射光强的变化, 将位移改变量转变为接收器的电压信号. 利用驻波场激光束光斑直径值, 实现准确定位驻波场与基片的距离. 对上述实验过程进行数值模拟, 数值计算的结果和实验结果高度符合. 该方法实现了准确定位驻波场距基片的距离, 为后续深入研究驻波场和基片间距离对沉积纳米条纹结构质量的影响提供实验基础.     

CO_2激光预处理参数对石英基片表面粗糙度的影响

为研究CO2激光预处理参数对熔石英基片表面粗糙度的影响,采用频率为100 Hz,光斑面积为1 mm2的CO2激光对理想的熔石英基片进行辐照处理,根据处理后基片表面微观形貌特征将修复程度分别定义为轻度、中度和重度修复,并对3种修复程度下基片的表面粗糙度值进行了统计。研究了不同脉冲作用时间和不同占空比(激光功率)的激光束单点单次辐照基片后的表面粗糙度。结果表明:石英基片的表面粗糙度均方根值和处理造成的凹陷深度均随脉冲作用时间和功率的增加逐渐变大;均方根值的增幅逐渐增加,凹陷深度的增幅逐渐减小。     

应用于精密振荡器的石英晶体温度特性研究

采用一种新型压电材料精确表征方法研究了不同环境温度条件下应用于振荡器的石英材料特性变化.测量了从室温至100℃不同稳定环境温度下AT切向石英晶体材料的电子阻抗共振特性,并采用基于模拟退火优化算法的压电材料精确表征方法对电子阻抗共振特性进行了准确的拟合,计算出了AT切向石英晶体材料在不同温度下包含损耗特性的复数形式材料参数.通过研究和分析温度变化对石英晶体材料参数及其损耗特性的影响,为具有稳定温度特性的精密振荡器设计提供了理论和技术支持.     

基于SVD的超精密工件自寻位加工算法能力评价

为进一步改善超精密表面修形的最终精度、效率与成本,优化超精密自寻位加工的工艺方向与工艺决策过程, 开展了对超精密工件的自寻位加工算法点云融合过程的定量评价研究,提出了基于SVD的自寻位加工算法能力评价方法。首先基于运动学方法建立了点云融合的矩阵表示,分别对平动、转动、复合运动等情况建立了自寻位结果的转换矩阵表示,获得自寻位点云融合转换矩阵;进而对转换矩阵进行奇异值分解得到转换矩阵的奇异值列表;最后将列表中最大奇异值用以表征自寻位加工算法的能力。通过对某型超精密叶片在平动、转动和复合运动、共计1078组自由放置状态进行分析,发现所提出的评价指标在独立平动和独立转动两种任意放置情况下能够正确地表征自寻位加工算法的工艺能力。对于独立平动情况,自寻位加工算法能够正常定位加工,其最大奇异值也与预设偏差较小;对于独立转动情况,当旋转角度小于45°时,均能够正确地进行自寻位加工,最大奇异值差值也趋近于零,旋转角度超过45°时,算法的自寻位加工能力恶化,这一特性能够被所提指标正确捕捉。对于由平动和转动构成的复合运动而言,所提指标显示约35%的情况能够正确进行自寻位加工,其余情况无法进行正确的自寻位加工。结果表明本文所提方法建立的指标能够正确表征自寻位加工算法能力。     

离子束清洗在激光薄膜中的应用

介绍了在激光薄膜中End Hall型离子源离子束清洗的应用。通过实验验证了基片的二次污染和离子束的清洗效果,观测了离子束清洗前后基片的表面形貌变化。研究了用离子束清洗基片时对薄膜抗激光损伤阈值的作用。分析了用离子束清洗基片时其基片表面的性质,如清洁度、表面能、接触角、表面形貌的变化机理。指出了杂质微粒的去除和附着力的增加是如何使薄膜抗激光损伤阈值显著提高的。     

基于信息熵的机械传动油液光谱监测数据选择方法

机械传动装置磨损产生的金属微粒在润滑油中均匀混合并不断积累，是一个缓慢退化过程，可通过油液光谱分析监测。MOA Ⅱ型原子发射光谱仪能够分析得到多达15种元素浓度数据，应用分析得到的油液光谱数据，便能够实现机械传动装置健康状态的监测与评估。然而，并不是所有的油液光谱数据都能够表征装备的健康状态，只有部分油液光谱数据能够提供有用的退化表征信息。应用全部油液光谱数据进行机械传动装置的健康状态监测会增加退化模型的复杂性。鉴于此，为实现机械传动装置健康状态的准确表征，提出了基于信息熵的油液光谱监测数据的选择方法，旨在为机械传动装置的健康状态监测与剩余寿命预测提供有效的退化数据。与传统的油液光谱监测数据选择方法相比，该方法使用信息熵表征各监测数据中蕴含退化信息量的大小，并以此为指标定量选择机械传动装置的退化数据。通过对综合传动装置可靠性试验油液光谱监测数据的实例分析证明了该方法的有效性，能够实现油液光谱数据的定量选择，提高了综合传动装置寿命预测的准确性，也为其他装备监测数据的选择提供了指导。     

新的压电薄膜——Ta2O5

据报道,日本Yasuhiko Nakagawa和Yasuo Gomi用磁控反应直流二极管溅射法将Ta_2O_5,沉积在石英基片上,得到了单晶薄膜,并且首次观察到了这种薄膜的压电现象.用叉指换能器在Ta_2O_5薄膜上成功地激发了声表面波.在Ta_2O_5/熔石英基片上,当薄膜厚度h在hk(=2πh/λ)=1.0时,其机电耦合系数k~2=0.5％,它可与熔石英基片上ZnO薄膜的机电耦合系数相比拟. 利用Ta_2O_5单晶的X射线衍射数据,推断出Ta_2O_5     

紫外激光SiO2减反膜的制备

介绍溶胶－凝胶制备ＳｉＯ２减反膜的溶液配制，基片清洗和膜层制备过程，利用正硅酸乙酯的碱性催化水解，通过浸入移液法在石英透镜的表面涂敷一层多孔ＳｉＯ２减反膜，涂膜后石英透镜的透过率在３５０ｎｍ波长处达到９８．０％以上。     

低压下直流电弧热等离子体射流电子密度的光谱法测量

采用原子发射光谱仪研究低压直流电弧热喷涂等离子体射流的特性。利用Stark展宽法采集H_β谱线,使用其Δλ_1/2来计算等离子射流中的电子密度,研究了氢气流量、输入功率和探测距离对等离子体射流中电子密度的影响。使用Saha方程计算热等离子体的电离程度,研究了功率/氢气流量与等离子体电离程度的关系。结果表明:电子密度和电离程度随着电流强度的增大而增加;氢气流量增加可以明显提高等离子体射流的能量,但对电离程度影响不大。     

Arc plasma jet cleaning of the silicon surface before CoSi2/Si contact formation

Cleaning of the silicon surface before Co film deposition is a key procedure in the synthesis of silicide (CoSi₂) and, hence, in the production of the metal-semiconductor contact. This study deals with a new method of surface cleaning using arc plasma jet treatment (APJT) at atmospheric pressure. The results show that cleaning of the Si surface using APJT (Ar/CCIF₃) improves the Schottky barrier contact parameters in comparison with conventional wet HF final cleaning and additional cleaning using in situ Ar-ion-beam sputter etching. Moreover, substantially longer time of wafer exposure to air between final cleaning and metal deposition is acceptable. Auger electron spectroscopy shows that APJT removes oxygen from the Si surface.     

高功率脉冲TEA CO2激光除漆的研究

选用高功率脉冲TEA CO2激光器,对不同颜色不同种类的油漆进行了清洗实验,运用数码照片分析程序计算出清洁率,找出了完全清洗阈值和损伤阈值.实验结果较为清晰地给出了激光输出能量和重复频率对清洗效果的影响.对红色醇酸漆来说,完全清洗阈值为10.37J/cm2,而损伤阈值为11.43 J/cm2;红色金属喷漆的完全清洗阈值为9.66 J/cm2,其损伤阈值达10.37 J/cm2;黄色金属喷漆的完全清洗阈值为10.71 J/cm2,损伤阈值则为11.07 J/cm2.输出能量和重复频率未达指定参数时,激光清洗清洁率则低于100%.     

Evaluating the use of laser radiation in cleaning of copper embroidery threads on archaeological Egyptian textiles

Cleaning of copper embroidery threads on archaeological textiles is still a complicated conservation process, as most textile conservators believe that the advantages of using traditional cleaning techniques are less than their disadvantages. In this study, the uses of laser cleaning method and two modified recipes of wet cleaning methods were evaluated for cleaning of the corroded archaeological Egyptian copper embroidery threads on an archaeological Egyptian textile fabric. Some corroded copper thread samples were cleaned using modified recipes of wet cleaning method; other corroded copper thread samples were cleaned with Q-switched Nd:YAG laser radiation of wavelength 532 nm. All tested metal thread samples before and after cleaning were investigated using a light microscope and a scanning electron microscope with an energy dispersive X-ray analysis unit. Also the laser-induced breakdown spectroscopy (LIBS) technique was used for the elemental analysis of laser-cleaned samples to follow up the laser cleaning procedure. The results show that laser cleaning is the most effective method among all tested methods in the cleaning of corroded copper threads. It can be used safely in removing the corrosion products without any damage to both metal strips and fibrous core. The tested laser cleaning technique has solved the problems caused by other traditional cleaning techniques that are commonly used in the cleaning of metal threads on museum textiles.     

Charged spray generation for gas cleaning applications

The paper presents results of experimental investigation of properties of charged sprays generated by two types of pressure atomizers with charging by induction. Among other possible methods of charged spray generation, the induction charging has been considered due to its most practical importance. The goal of this research is to optimise the charging process with respect to obtain droplets of required size and charge for their application for exhaust gas cleaning from submicron particles in electrostatic scrubber used for the removal of PM from Diesel engine exhausts. Electrostatic scrubbers use electrostatic forces in order to deposit fine charged particles onto oppositely charged droplets.     

Very low pressure plasma sprayed alumina and yttria-stabilized zirconia thin dense coatings using a modified transferred arc plasma torch

As a novel thermal spray process, very low pressure plasma spray (VLPPS) process has been significantly used to deposit thin, dense and homogenous ceramic coating materials for special application needs in recent years. In this study, in order to enhance low-energy plasma jet under very low pressure ambience, a home-made transferred arc nozzle was made and mounted on a low-power F100 plasma torch to fully melt or evaporate powder feedstock. As a result, thin and dense alumina (Al₂O₃) and yttria-stabilized zirconia (YSZ) ceramic coatings with an average thickness of 30-40 μm were successfully elaborated by the VLPPS process below 1 mbar. An optical emission spectroscopy (OES) was used to analyze the plasma jet properties. The microstructures of the coatings were observed by means of a scanning electron microscopy (SEM). It was found that the YSZ coatings displayed a bimodal microstructure which was composed of splats formed by melted particles and a little amount of vapor condensation from evaporated particles. However, vapor condensation could not be observed in the Al₂O₃ coatings, and only lamellar splats were found. The mechanical properties of both coatings were also evaluated.     

Multi-nozzle electrospray system for gas cleaning processes

A multi-nozzle electrospray system was developed as a charged droplet source for cleaning a gas contaminated with fine particles. The efficiency of removal of fine particles from the gas can be significantly increased, as compared to uncharged sprays, when the droplets are electrically charged. In the presented experiments, the spray of the droplets of size lower than 100 μm was charged either positively or negatively. Cigarette smoke was used as a source of submicrometer particles. The suppression of the particle concentration was determined after different time intervals of spraying of water. Further improvement in gas cleaning was obtained after charging the smoke particles using a specially designed corona charger. The efficiency of the cleaning process was similar to that obtained for droplets generated by mechanical atomisers with induction charging, but the electrospraying allowed decreasing the water consumption up to about three times.     

海刺参及其产品红外光谱的分析与鉴定

作为高档的保健品,深加工的海刺参产品如海刺参注射液、海刺参胶囊等,有着广阔的市场前景,但是目前还没有统一有效的品质鉴定手段和标准。作者采用傅里叶变换红外光谱法(FTIR)和二维相关红外光谱技术(2DIR)对海刺参粉末进行分析,得到了自制海刺参粉的谱图,然后以此为标准对五个不同厂家的海刺参胶囊进行相关性比较,结果显示大连海晏堂的海刺参胶囊与作者自制的鲜活冻干样品最为相符,这表明它基本上是纯的冷冻干燥海刺参粉;实验还表明通过建立标准红外谱图库来监控海刺参产品质量、制定统一标准是完全可能的。     

Combustion of partially premixed spray jets

Gas turbines, liquid rocket motors, and oil-fired furnaces utilize the spray combustion of continuously injected liquid fuels. In most cases, the liquid spray is mixed with an oxidizer prior to combustion, and further oxidizer is supplied from the outside of the spray to complete diffusion combustion. This rich premixed spray is called “partially premixed spray.” Partially premixed sprays have not been studied systematically although they are of practical importance. In the present study, the burning behavior of partially premixed sprays was experimentally studied with a newly developed spray burner. A fuel spray and an oxidizer, diluted with nitrogen, was injected into the air. The overall equivalence ratio of the spray jet was set larger than unity to establish partially premixed spray combustion. In the present burner, the mean droplet diameter of the atomized liquid fuel could be varied without varying the overall equivalence ratio of the spray jet. Two combustion modes with and without an internal flame were observed. As the mean droplet diameter was increased or the overall equivalence ratio of the spray jet was decreased, the transition from spray combustion only with an external group flame to that with the internal premixed flame occurred. The results suggest that the internal flame was supported by flammable mixture through the vaporization of fine droplets, and the passage of droplet clusters deformed the internal flame and caused internal flame oscillation. The existence of the internal premixed flame enhanced the vaporization of droplets in the post-premixed-flame zone within the external diffusion flame.