脉冲激光辐照液滴锡靶等离子体极紫外辐射的实验研究

采用波长13.5 nm的极紫外光作为曝光光源的极紫外光刻技术是最有潜力的下一代光刻技术之一, 它是半导体制造实现10 nm及以下节点的关键技术. 获得极紫外辐射的方法中, 激光等离子体光源凭借转换效率高、收集角度大、碎屑产量低等优点而被认为是最有前途的极紫外光源. 本文开展了脉冲TEA-CO₂激光和Nd:YAG激光辐照液滴锡靶产生极紫外辐射的实验, 对极紫外辐射的谱线结构以及辐射的时空分布特性进行了研究.实验发现: 与TEA-CO₂激光相比, 较高功率密度的Nd:YAG激光激发的极紫外辐射谱存在明显的蓝移; 并且激光等离子体光源可以认为是点状光源, 其极紫外辐射强度随空间角度变化近似满足Lambertian分布.     

低密度SnO2靶激光等离子体极紫外光及离带热辐射

极紫外光刻技术是我国当前面临35项“卡脖子”关键核心技术之首.高极紫外光转换效率和低离带热辐射的激光等离子体极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用激光作用固体Sn和低密度SnO₂靶对极紫外光源以及其离带热辐射进行研究.实验结果表明,两种形式Sn靶在波长为13.5 nm附近产生了强的极紫外光辐射.由于固体Sn靶等离子体具有较强自吸收效应,在光刻机中心工作波长13.5 nm处的辐射强度处于非光谱峰值位置.而低密度SnO₂靶具有较弱的自吸收效应,其所辐射光谱的峰值恰好位于13.5 nm处.相比于固体Sn靶,低密度SnO₂靶中处于激发态的Sn离子发生跃迁所产生的伴线减弱,使其在13.5 nm处的光谱效率提升了约20%.另一方面,开展了极紫外光源离带热辐射(400—700 nm)的实验研究,光谱测量结果表明离带热辐射主要是由连续谱所主导,低密度SnO₂靶中含有部分低Z元素O(Z=8),导致其所形成的连续谱强度低,同时离带辐射时间短,因而激光作用低密度SnO₂靶所产生的离带...     

双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

基于脉冲CO2激光锡等离子体光刻光源的极紫外辐射光谱特性研究

研究了不同条件下脉冲放电CO₂激光烧蚀平板锡靶产生的等离子体极紫外辐射特性, 设计并建立了一套掠入射极紫外平焦场光栅光谱仪, 结合X射线CCD探测了光源在6.5～16.8 nm波段的时间积分辐射光谱,得到了极紫外光谱随激光脉宽, 入射脉冲能量及背景气压的变化规律。实验结果发现：入射激光脉冲能量在30～600 mJ变化时,极紫外辐射光谱的强度随辐照激光脉冲能量的增加而增加, 但并不是线性关系, 具有饱和效应, 且产生极紫外辐射的脉冲能量阈值约为30 mJ,当激光脉冲能量为425 mJ时具有最高的转换效率,此时中心波长13.5 nm处2%带宽内的转换效率约为1.2%。激光脉冲半高全宽在50～120 ns范围内变化时, 极紫外辐射光谱的峰值位置均位于13.5 nm,光谱形状几乎没有什么变化, 但是脉宽从120 ns变到52 ns后,由于激光功率密度的提高,极紫外辐射强度也随之增强了约1.6倍。极紫外光谱的强度随背景气压的增大而迅速下降, 当腔内空气气压为200 Pa时, 极紫外辐射光子几乎被全部吸收,而当缓冲氦气气压为7×104 Pa时,仍能够探测到微弱的极紫外辐射信号,计算表明100 Pa的空气对13.5 nm极紫外光的吸收系数为3.0 m-1,而100 Pa的He气的吸收系数为0.96 m-1。     

激光等离子体极紫外光刻光源

研究并讨论了下一代光刻的核心技术之一—激光等离子体极紫外光刻光源。简要介绍了欧美和日本等国极紫外光刻技术的发展概况,分析了新兴的下一代13.5 nm极紫外光刻光源的现状,特别讨论了国内外激光等离子体极紫外光刻光源的现状,指出目前其存在的主要问题是如何提高光源的转化效率和减少光源的碎屑。文中同时概述了6.x nm（6.5～6.7 nm）极紫外光刻光源的最新研究工作。最后,介绍了作者所在研究小组近年来在极紫外光源和极紫外光刻掩模缺陷检测方面开展的研究工作。     

同带抽运高效率光纤放大器

以光纤光栅为谐振腔搭建了波长为1020 nm的光纤激光器,并通过两级级联放大获得了590 mW的最大输出功率. 利用获得的波长为1020 nm的激光进行了波长为1064 nm种子光同带抽运放大,实验研究了不同增益光纤长度时放大器的输出功率和转换效率. 当增益光纤长度为8.5 m时,放大器最大输出功率为385 mW,斜率效率为81%. 进行了波长为976 nm的半导体激光器直接抽运波长为1064 nm种子光的实验. 在增益光纤长度最优时,其斜率效率为56.4%. 实验结果表明,同带抽运方式比传统抽运方式具有更高的转换效率. 研究结果可为波长为1020 nm的激光高功率放大和波长为1064 nm的光纤激光高功率同带抽运放大提供一定的参考. 关键词： 同带抽运 光纤放大器 斜率效率     

激光等离子体13.5 nm极紫外光刻光源进展

半导体产业是高科技、信息化时代的支柱。光刻技术,作为半导体产业的核心技术之一,已成为世界各国科研人员的重点研究对象。本文综述了激光等离子体13.5 nm极紫外光刻的原理和国内外研究发展概况,重点介绍了其激光源、辐射靶材和多层膜反射镜等关键系统组成部分。同时,指出了在提高激光等离子体13.5 nm极紫外光源输出功率的研究进程中所存在的主要问题,包括提高转换效率和减少光源碎屑。特别分析了目前已实现百瓦级输出的日本Gigaphoton公司和荷兰的ASML公司的极紫外光源装置。最后对该项技术的发展前景进行了总结与展望。     

980nm OPS-VECSEL关键参数的理论分析

光抽运半导体垂直外腔面发射激光器(Optically Pumped Semiconductor Vertical External Cavity SurfaceEmission Laser)的输出特性受到诸多参数的影响,理论分析和模拟显得尤为重要.设计了一种以808 nm二极管激光耦合模块为光抽运光源,In_0.159Ga_0.841As/GaAs_0.94P_0.06为增益介质的980 nm光抽运垂直外腔面发射激光器,并借助于PICS3D软件计算了器件各种特性参数.分析了芯片半径、量子阱的周期数以及外腔镜反射率对器件性能的影响,特别是对阈值和光-光转换效率的影响.模拟结果表明,器件的半径影响光-光转换效率.量子阱个数和外腔镜反射率对器件的输出功率和光-光转换效率都有影响,所以要根据实际需要,设计、生长结构和进行实验.     

激光二极管抽运Nd∶YVO4晶体1342nm和671nm激光器研究

报道了激光二极管抽运的Nd∶YVO₄晶体1342和671nm激光特性.1342nm激光最大输出功率为1.75W，光-光转换效率为32.1%，斜效率为43%.利用Ⅰ类非临界相位匹配LBO晶体腔内倍频，当输入抽运功率为6W时，获得功率为502mW的671nm激光输出，光-光转换效率超过8.3%；当671nm激光输出功率为400mW时，短期的不稳定度小于2%. 关键词：     

激光诱导放电等离子体极紫外辐射的模拟

极紫外光刻是目前新一代超高集成度半导体芯片制造流程中重要的一环,激光诱导放电等离子体是极紫外光源产生的重要技术手段之一.本文基于全局状态方程、原子结构计算程序、碰撞辐射模型建立了一个辐射磁流体力学模型,对激光诱导放电等离子体的动力学特性及极紫外的辐射特性进行模拟,模拟复现了放电过程中的箍缩现象,得到的极紫外光的转化效率与实验符合.研究发现放电电流的上升速率对极紫外光的产生有极大的影响,该结果对后续极紫外光输出功率、转化效率以及光谱纯度的提升有重要的指导意义.     

Y2O3:Yb3+,Tm3+纳米材料的可见及紫外上转换发光

通过燃烧法制备了Yb³⁺-Tm³⁺共掺的Y₂O₃纳米粉体,并对样品在980 nm激光照射下的上转换发光特性进行了研究.实验发现,样品在可见光区域能够产生强烈的蓝色发光(476 nm和487 nm)和较弱的红色发光(约650 nm),而且同时观察到了两个紫外发光峰¹I₆→³H₆ (~297 nm)和^{1关键词： 2O₃:Yb3+')" href="#">Y₂O₃:Yb3+ 3+}')" href="#">Tm³⁺ 上转换光谱 敏化 紫外发光     

Excimer ArF laser with an output energy of 1.3 J at 2.0% efficiency on the He:Ar:F2 mixture

In this paper it is shown that to achieve a maximum efficiency and high output energy of an ArF (193 nm) excimer laser, one should use optimal pump intensity. It has been shown experimentally that the optimal pump intensity for an ArF excimer laser with the mixture of He:Ar:F₂ has a value of 4.5–5.0 MW/cm³. The results of an experimental study of the pump and active medium parameters effect on the efficiency and output energy of the ArF excimer laser on the mixture of He:Ar:F₂ are presented. To provide high pump intensity of an active medium, the excitation scheme of the LC-inverter type has been used where the current return conductor inductance had been increased from 30 to 80 nH. This allows the pump to achieve levels of intensity above 5.0 MW/cm³. By using the pump intensity of 5.0 MW/cm³ in an active medium of He:Ar:F₂–79.7:20:0.3 at total pressure of 2.4 atm, we are the first to obtain the output energy of 1.3 J at the total efficiency of 2.0%. The pulse duration (FWHM) was 15±1 ns and the peak pulse power was 85 MW. PACS 42.55.Lt; 42.60.Lh     

Some characteristics of efficient dye laser emission obtained by pumping at 248 nm with a high power KrF1 discharge laser

Characteristics of dye laser emission under high intensity uv pumping, at 248 nm wavelength have been investigated with peak pump powers of ～ 10 MW at a pulse duration of ～ 30 ns, provided by a multi-atmosphere KrF¹ discharge laser. Energy conversion efficiencies, spectral features and temporal behaviour of several dyes were parametrically studied. Significant pump intensity dependent conversion efficiency and pulse shape variations were observed for the most efficient uv dye, p-terphenyl.     

Ultraviolet quasi-phase-matched second harmonic generation in surface periodically poled lithium niobate optical waveguides

The compatibility of low concentration (α-phase) proton exchange channel waveguides with electric field surface periodic poling of congruent lithium niobate (SPPLN) crystals has been experimentally demonstrated. With such waveguides, we obtained ultraviolet second harmonic generation (SHG) by first order quasi-phase-matching (QPM), a result made possible by the fabrication, on Z-cut LN crystals, of periodic structures with a pitch down to 750 nm. Nonlinear copropagating QPM-SHG measurements have been carried out on such structures. The pump source was a Ti:sapphire laser with a tunability range of 700–980 nm and a 40 GHz linewidth. We have measured UV continuous wave light at 390 nm by means of a lock-in amplifier and a photodiode with an enhanced response in the UV. The measured conversion efficiency was about 1% W^?1 cm^?2.     

Optimization of EUV radiation yield from laser-produced plasma

We optimize the conversion of laser energy into extreme ultraviolet (EUV) radiation by tailoring the laser parameters for a laser-produced plasma generated from 20 μm diameter water droplets. It is shown that mass-limited targets require careful adaption of laser-pulse energy and laser-pulse duration separately, rather than laser intensity, which seems to be adequate for bulk targets. The optimal pulse duration scales with the droplet radius, and the optimal pulse energy with the droplet volume. With optimized parameters, we obtain a conversion efficiency of 0.23% in 4π and 2.5% bandwidth for 13 nm radiation, the future EUV lithography light. Received: 16 July 2001 / Revised version: 25 September 2001 / Published online: 7 November 2001     

Tunable,narrow bandwidth, 2 MW dye laser pumped by a KrF1 discharge laser

Characteristics of p-terphenyl and PBD, the most efficient uv dyes, have been investigated under high intensity pumping by a multi-atmosphere KrF¹ discharge laser at 248 nm wavelength. Energy conversion efficiencies, spectral features and temporal behaviour of the dyes were studied parametrically. A maximum powerof 2 MW uv emission with a bandwidth of ～2×10^-2 nm was obtained for PBD. It was found that a mixture of both dyes provided higher (by a factor of 1.3) output in the range 348–366 nm than either of the dyes alone. Significant pump intensity dependent conversion efficiency and pulse shape variations were observed for the most efficient uv dye, p-terphenyl and were related to triplet-triplet adsorption processes in the dye.     

Generation of high average power 1 kHz shaped THz pulses via optical rectification

Generation of near single-cycle THz pulses from lithium niobate with 3.3 μJ energy, 3.3 mW average power, 1.2 THz central frequency and 4 MW peak power was demonstrated by tilting the intensity front of the pump pulses from a 1 kHz Ti:sapphire laser. THz pulse intensity as high as 200 MW/cm² was achieved. The energy conversion efficiency was 7 × 10⁻⁴. The capability of the present scheme to generate high energy shaped THz pulses was also demonstrated by using a sequence of optical pump pulses.     

High efficiency,high repetition-rate Nd:YVO<Subscript>4</Subscript> laser with TEM<Subscript>00</Subscript> end-pumped by 887 nm

Thermal effect of laser crystal is a very important factor for solid lasers. The most of heat is generated from the quantum loss between pump light and lasing light. If a longer wavelength of pump light is adopted, quantum loss and quantum loss efficiency can be reduced and improved, respectively. In this paper, a Nd:YVO₄ laser end-pumped by 887 nm LD is reported. Output power of 25 W is obtained from a single Nd:YVO₄, when the crystal absorbs pump light power of 38 W. The corresponding opto-optic conversion efficiency is up to 65.7%. When 30.7 W pump light is absorbed in the crystal, 19.4 W TEM₀₀ is obtained with M _x ² = 1.30, M _y ² = 1.26 and opto-optic conversion efficiency of 63.2%. The laser can work at the Q-switched mode. The uniform pulses are generated at high repetition of 100 kHz. And the conditions of pulse stability are analyzed in this paper.     

Red and near infrared down-conversion in Er3+/Yb3+ co-doped YF3 performed by quantum cutting

Er³⁺/Yb³⁺ co-doped YF₃ powder is prepared by combining a nitrate decomposition method with a NH₄HF₂ fluorization process, from which efficient energy transfer induced down-conversion is achieved. An absorbed 365 nm near ultraviolet photon is split into two photons of 650 nm red and 1000 nm near infrared radiations, both falling in the responding region of Si-based solar cells. The quantum cutting mechanism has been proposed and discussed and the energy transfer efficiency for the quantum cutting is evaluated by developing an emission intensity ratio contrast method. The investigation might offer a new possible approach to achieve Si-based solar cells of high efficiency by down-converting the near ultraviolet part of the solar spectrum.