U形阵列式微机械悬臂梁的研究

为提高悬臂梁的分辨率，实现悬臂梁的多功能性，设计了一种U形阵列式压阻悬臂梁.从理论上对悬臂梁的应力、噪声和灵敏度进行分析，优化了悬臂梁及力敏电阻的几何尺寸.选用多晶硅为力敏材料，基于硅微机械加工技术，制备U形阵列式悬臂梁.测量悬臂梁的噪声及灵敏度，得到多晶硅力敏材料的Hooge因子和应变灵敏度系数，分别为3×10^-3和27.在6V偏压和1000Hz测量带宽条件下，计算悬臂梁的最小可探测位移为0.5nm.同时对多晶硅力敏电阻噪声的产生机理进行了探讨. 关键词： 悬臂梁 噪声 灵敏度 最小可探测位移     

频闪剪切散斑干涉术的研究

提出了一种用于振动研究的方法——频闪剪切散斑干涉照相法。该方法由于采用了剪切镜,能得到较为精确的散斑剪切图,提高了测量的精度,是一种用于振动研究较为理想的散斑照相的新方法。讨论了频闪剪切散斑干涉术的基本原理,给出了频闪剪切散斑图的全场分析的平均光强分析的解析式,并给出了实验结果。理论和实验都表明频闪剪切散斑干涉照相法要优于时间平均剪切散斑干涉照相法。该方法在全场滤波分析时,能给出任一瞬时物体振动信息,得到清晰的、高衬比的全场干涉条纹图,是一种实用可行的方法。     

剪切散斑干涉术的统计分析

本文用统计光学方法分析了剪切散斑图的成象过程;散斑图的频谱分布以及全场滤波干涉条纹的形成.发现剪切散斑干涉条纹不仅与三维位移微分有关,而且与面内位移量有关.在此基础上又讨论了影响干涉条纹质量的有关因素,并作了实验验证.     

剪切散斑干涉术的无损检测研究

剪切散斑干涉术用于复合材料的光学无损检测具有较宽的加载范围,便于实现缺陷的全场记录,防止漏检。本文从理论上推导了剪切散斑干涉条纹(等应变条纹)的强度分布,并证明随着加载量的增大,条纹变密的程度较全息干涉条纹(等位移条纹)缓慢。加之,剪切散斑干涉条纹灵敏度具有可调性,加载范围大为加宽。实验观察与理论分析一致。     

双功能数字散斑干涉位移及空间梯度同时测量

为了满足无损检测中复合材料在复杂载荷下多参数变量评估的需求,提出了一种基于光路复用的双功能数字散斑干涉系统,能够同时实现数字散斑干涉和数字剪切散斑干涉测量功能.通过控制其中一个反射镜-波片组合,当该组合离位时,构成数字散斑干涉测量光路,实现离面位移测量;当该组合在位时,构成数字剪切散斑干涉测量光路,实现离面位移空间梯度的测量.测量过程中只需简单切换该组合的位置就可以实现单次加载下被测物体表面离面位移及其空间梯度的同时测量.该系统光路结构简单、切换效率高,能够同时获得高质量的位移及空间梯度测量结果.实验证明,双功能数字散斑干涉系统既具备高抗干扰能力,又具备高灵敏度测试能力,适合复合材料无损检测现场使用.     

超声散斑相移法测量技术

超声散斑相移法能满足工程建设中对水下物内层界面关键点位移进行测量的特殊要求。测量时,引入数字参考信号与物面测点上的散斑信号进行数字干涉,获得叠加信号强度。界面位移前后,应用软件逐步改变参考信号相位,可逐步改变叠加信号强度,根据这些信号强度值可计算出测点的位移量。应用此技术对水下试件内层表面的法线和切线方向上的位移进行了实测,测量结果与理论值有较好的吻合;研究表明打磨后的粗糙外层界面不影响应用相移法进行测量。在应用相移法测量时,不需声像转换,不需全场扫描,测量精度不受散斑尺寸限制。      

双波长剪切散斑干涉法在复合材料缺陷检测中的应用

为使剪切散斑干涉能适用于物体大变形的测量,选用双波长激光照射和彩色相机,用傅里叶变换法对干涉图进行频谱分离,用红色波长相位减去绿色波长相位,得到合成波长相位,经频域滤波和相位解包裹,得到连续相位.理论计算表明合成波长相位条纹数是单波长相位条纹数的0.189倍.合成波长参与计算可以有效减小相位条纹密度,解决剪切散斑干涉在物体离面位移测量中由于变形条纹过于密集而导致欠采样的问题,同时降低对干涉条纹滤波和相位解包裹难度,增强图像处理可靠度,提高了测量准确度.给出了合成波长与单波长相位幅度的比较以及相同外力下二者相位条纹密度的对比,实验验证了所提方法的有效性、准确性和可靠性,实现了剪切散斑干涉对复合材料大变形的测量,扩展了剪切散斑干涉工程应用的范围,为新型剪切散斑干涉测量系统的设计提供了参考.     

基于电子散斑干涉与数字剪切散斑干涉法的悬臂薄板振动分析

基于激光光路的光波随机相位扰动,分析了电子散斑干涉实时图像相减时模态条纹图的形成机理,提出了一种振幅涨落测量法。搭建了用于离面振动分析的电子散斑干涉和数字剪切散斑干涉测量系统,并对完整和含狭缝的悬臂铝板的振动特性进行了实验研究。实验结果表明,实时图像相减模式获得的模态条纹图对比度明显优于其他方法,得到的前10阶模态条纹图与有限元法计算结果具有良好的一致性。相比于电子散斑干涉法,数字剪切散斑干涉法对试样局部的刚度变化和缺陷更敏感。     

用于多参数同时测量的散斑干涉仪

本文描述了一种新的散斑干涉仪,它可以同时对表面应变物体的面内位移、离面位移、位移梯度和莫尔曲率进行测量;由于利用了取向滤波方法,在滤波系统输出平面同时得到了与这些参数对应的散斑条纹.还利用散斑空间运动规律较好地解释了散斑干涉与散斑剪切干涉之间的关系.     

形貌与微变形全场光学同时测量方法

在实际工程应用中,对材料形貌和结构变形等参量的检测是必不可少的,而且往往需要进行多参量同时测量。针对该背景,采用数字散斑干涉与数字条纹投影相结合的测量方法, 设计了一种集成光路,通过在数字散斑干涉实验光路中引入一个投影设备,实现物体表面形貌和微变形的同时测量。所提出的方法具有全场非接触测量的优点,且测量光路简单、操作方便、效率高、可靠性强。该方法的形貌测量分辨率优于10 μm,形变测量分辨率优于30 nm。     

Evaluation of elastic modulus of cantilever beam by TA-ESPI

The paper proposes an evaluation technique for the elastic modulus of a cantilever beam by vibration analysis based on time average electronic speckle pattern interferometry (TA-ESPI) and Euler-Bernoulli equation. General approaches for the measurement of elastic modulus of a thin film are the Nano indentation test, Buldge test, Micro-tensile test, and so on. They each have strength and weakness in the preparation of the test specimen and the analysis of experimental results. ESPI is a type of laser speckle interferometry technique offering non-contact, high-resolution and whole-field measurement. The technique is a common measurement method for vibration mode visualization and surface displacement. Whole-field vibration mode shape (surface displacement distribution) at resonance frequency can be visualized by ESPI. And the maximum surface displacement distribution from ESPI can be used to find the resonance frequency for each vibration mode shape. And the elastic modules of a test material can be easily estimated from the measured resonance frequency and Euler-Bernoulli equation. The TA-ESPI vibration analysis technique can be used to find the elastic modulus of a material requiring simple preparation process and analysis.     

Young's modulus measurement of the radius bone using a shearing interferometer with carrier fringes

A technique for measuring Young's modulus of the radius bone by using electronic speckle-shearing pattern interferometry is proposed. The technique is based on the introduction of carrier fringes and the use of a phase unwrapping algorithm to obtain a phase map corresponding to the out-of-plane displacements of a radius bone without sign ambiguities. The carrier fringes are obtained by the correlation algorithm of two consecutive speckle fields with a translation of the illuminating beam between each recording, then the spatial synchronous detection (SSD), an unwrapping phase algorithm and integration process along shear direction are successfully applied for obtaining a displacement phase map. Next, analysis of the radius bone as a cantilever allows us to obtain Young's modulus. The study was performed with speckle interferometry and with the finite element method for comparing the results. Advantages and disadvantages of the proposed method are discussed.     

Measurement of the off-plane displacement of carbon steel corrosion with twin-object-beam electronic speckle interferometry

In this paper, twin-object-beam electronic speckle interferometry is used to study the longitudinal corrosion of carbon steel. The displacement expression of this technique is deduced and optical fibers are used to reduce the influence of the optical system and improve the quality of speckle pattern. Twin-object-beam electronic speckle interferometry cannot only quantitatively cipher out off-plane displacement as a result of corrosion, but also estimate the change of corrosion speed.     

Comparison between instantaneous and integral intensities in dynamic speckle pattern interferometry

A new speckle measurement technique called temporal speckle pattern interferometry or time sequential speckle pattern interferometry has been developed recently. Its principle is that by capturing the temporal speckle patterns related to the object deformation or displacement, the whole-field displacement, the amplitude of the vibrating object and the shape of the tested object can be calculated through speckle intensity fluctuation scanning technique or Fourier-transforming method. In this paper, we combine the analytical and numerical methods to simulate the properties of the time demodulation in temporal speckle patterns interferometry techniques. The performance of three kinds of temporal phase sequences, power, exponential and harmonic phase sequences, are studied with the parameters of temporal speckle intensity fluctuation, the value of the spatial phase term, optical integral time of the recording camera and the initial phase of the temporal speckle intensities. The results indicate that the normalized value and period change of the instantaneous intensity are nearly coincident with that of the integral intensity for the harmonic temporal phase sequences and are different for the power and exponential temporal phase sequences.     

Digital speckle pattern interferometry (DSPI) with increased sensitivity: Use of spatial phase shifting

This paper presents a real-time digital speckle pattern interferometry system with twofold increase in sensitivity for the measurement of in-plane displacement and first order derivative of out-of-plane displacement (slope). Spatial phase shifting technique has been used for quantitative fringe analysis. The system employs a double aperture arrangement in front of the imaging system that introduces spatial carrier fringes within the speckle for spatial phase shifting. For in-plane displacement measurement, the scattered fields from the object are collected independently along the direction of illumination beams, and combined at the image plane. For slope measurement, a shear is introduced between the two scattered fields. Experimental results on an edge clamped circular plate subjected to in-plane rotation for in-plane displacement measurement and central loading for slope measurement are presented.     

Volume-grating phase-shifting digital speckle pattern interferometry used for measurement of out-of-plane displacement field

A new digital speckle pattern interferometry, called volume-grating phase-shifting digital speckle pattern interferometry, is discussed in this paper. The out-of-plane displacement field of a bent plate can be quantitatively measured using volume-grating phase-shifting digital speckle pattern interferometry proposed in this paper. Theoretical and experimental results, as well as absolute errors, are given.     

Temporal heterodyne shearing speckle pattern interferometry

Shearing speckle pattern interferometry is a full-field speckle interferometric technique used to determine surface displacement derivatives. In this paper, a new measurement system of real-time heterodyne shearography interferometry is presented. This system combined with heterodyne measurement, shearography interferometry and time domain signal processing technology can dynamically detect the out-of-plane displacement gradient. The principles and system arrangement are described. Using the Jones matrix, the mathematical expression of light intensity distribution passing through this system is deduced. A preliminary experiment was performed to demonstrate the performance of this new device, and simulations were conducted using the finite element method. Comparison of results shows that quantitative measurement of the displacement derivative has been achieved.     

Enhancement in flaw detectability by means of lockin temporal speckle pattern interferometry and thermal waves

A lockin method which takes into account the contribution of several modes from the Fourier spectrum generated by a heat load following a triangular waveform is used in temporal speckle pattern interferometry (TSPI) for the nondestructive detection of defects. By defining a parameter to quantify defect detectability, it is demonstrated that the use of this technique improves the detection of hidden flaws located in metal plates.     

电子散斑归一化互相关法测位移

把粗糙物体表面受到相干光照明时产生的散斑场看作是一个稳态随机信号,在此基础上,本文提出了一种能做到大量程,高精度位移测量的新方法——电子散斑归一化互相关法测位移或称电子散斑照相法测位移.该法实质上是借助数字图像处理技术,通过物体位移前后二个散斑场之间的相关性来进行位移测量方法的发展.文中给出了理论分析和实验系统.实验结果表明,该法有诸如准实时,大量程(毫米级),高精度和线性可靠等优点.     

Measurement of non-monotonous phase changes in temporal speckle pattern interferometry using a correlation method without a temporal carrier

Recently, a phase evaluation method was proposed to measure nanometric displacements by means of digital speckle pattern interferometry when the phase change introduced by the deformation is in the range [0,π) rad. This method is based on the evaluation of a correlation coefficient between two speckle interferograms generated by both deformation states of the object. In this paper, we present a novel technique to measure non-monotonous displacements in temporal speckle pattern interferometry using a correlation method without a temporal carrier. In this approach, the sign ambiguity is resolved automatically due to the introduction of a function that determines the correct sign of the displacement between two consecutive speckle interferograms. The rms phase errors introduced by the proposed method are determined using computer-simulated speckle interferograms. An application of the phase retrieval method to process experimental data is also presented.