Nanolithography using high transmission nanoscale ridge aperture probe

Nanoscale ridge apertures provide a highly confined radiation spot with a high transmission efficiency when used in the near field approach. The radiation confinement and enhancement is due to the electric–magnetic field concentrated in the gap between the ridges. This paper reports the experimental demonstration of radiation enhancement using such antenna apertures and lithography of nanometer size structures. The process utilizes a NSOM (near field scanning optical microscopy) probe with a ridge aperture at the tip, and it combines the nonlinear two photon effect from femtosecond laser irradiation to achieve sub-diffraction limit lithography resolution.     

A functional probe with bowtie aperture and bull's eye structure for nanolithograph

The bowtie aperture surrounded by concentric gratings(the bull’s eye structure) integrated on the near-field scanning optical microscopy(NSOM) probe(aluminum coated fiber tip) for nanolithography has been investigated using the finite-difference time domain(FDTD) method.By modifying the parameters of the bowtie aperture and the concentric gratings,a maximal field enhancement factor of 391.69 has been achieved,which is 18 times larger than that obtained from the single bowtie aperture.Additionally,the light spot depends on the gap size of the bowtie aperture and can be confined to sub-wavelength.The superiority of the combination of the bowtie aperture and the bull’s eye structure is confirmed,and the mechanism for the electric field enhancement in this derived structure is analyzed.     

基于人工表面等离激元探针实现太赫兹波的紧聚焦和场增强

为提高太赫兹近场显微成像技术的分辨率,设计了一款在Teflon探针的尖锥形表面镀上厚度渐变、具有相同占空比的超薄金属银制条带的探针,用于实现探针尖端处人工表面等离激元的激发和太赫兹波的亚波长聚焦.研究表明,对于频率为0.1 THz的入射波,厚度渐变镀银条带探针产生的紧聚焦光场的尺寸可稳定在20μm左右(λ/150),探针尖端处最大电场强度为入射电场强度的849倍.研究还发现,周期性金属条带的数目和入射电场的偏振方向可对探针尖端处产生的紧聚焦光斑的尺寸和电场强度等进行灵活有效的调控.     

High-Contrast Imaging of Nano-Channels Using Reflection Near-Field Scanning Optical Microscope Enhanced by Optical Interference

We demonstrated a contrast enhancement in a near-field scanning optical microscope (NSOM) by optical interference with an aperture probe in reflection (illumination-collection) mode operation. We observed a NiO film deposited on a sapphire substrate and clearly visualized 2-nm-deep nano-channel structures on the surface of the film. The reflection NSOM enhanced by optical interference is quite a promising instrument for high-resolution optical detection and estimation of low-contrast nanostructures.     

10 nm Spatial Resolution Fluorescence Imaging of Single Molecules by Near-Field Scanning Optical Microscopy Using a Tiny Aperture Probe

We demonstrate high-resolution fluorescence imaging of single molecules using near-field scanning optical microscopy (NSOM) with a tiny aperture probe for two different wavelengths in visible range in the illumination mode of operation. The spatial resolutions obtained at both excitation wavelengths were almost the same and the highest resolution realized was about 10 nm. To discuss the achievable resolution in aperture NSOM, we also employed a computer simulation by the finite-difference time-domain method for various aperture sizes and wavelengths. The resolution of 10 nm is predicted to be contributed by the single peak of localized near-field light around the rim of the aperture.     

Field enhancement effect of metal probe in evanescent field

Field enhancement effect of metal probe in evanescent field, induced by using a multi-layers structure for exciting surface plasmon resonance （SPR）, is analyzed numerically by utilizing two-dimensional （2D） TM- wave finite difference time-domain （FDTD） method. In this letter, we used a flmdamental mode Gaussian beam to induce evanescent field, and calculated the electric intensity. The results show that compared with the nonmetal probe, the metal probe has a larger field enhancement effect, and its scattering wave induced by field enhancement has a bigger decay coefficient. The field enhancement effect should conclude that the metal probe has an important application in nanolithography.     

Investigation of plasmonics resonance infrared bowtie metal antenna

An approximate resonance wavelength equation that varies with metal antenna structure size is developed to design a bowtie gold metal antenna working at near-infrared (IR) wavelength. Bowtie antenna structures with resonance wavelength of 1.06 μm, 1.55 μm and 10.6 μm are designed based on this equation. A finite-difference time domain (FDTD) algorithm with total field scattered field (TFSF) source simulation shows the resonance wavelength of the designed structures being precisely in agreement with the expected wavelengths from the equation. Planar integration of the metal bowtie antennas is discussed as well. Gold nanohole bowtie antenna arrays are fabricated and the near-field optical transmission properties of the nanohole array are investigated with a near-field scanning optical microscope (NSOM). Our experimental results verify the near-field optical transmission performance and further demonstrate that they are in agreement with the theoretical calculation results. The high enhancement efficiency and integration of the metal bowtie antennas open the possibility of a wide application in IR optoelectronics detection and imaging.     

通用型数字鱼眼镜头检测系统的设计

设计了一种通用型数字鱼眼镜头检测系统,由照明系统、检测标板、等效平行平板系统和球幕组成。照明系统内部设有平面反光镜、柱体蝇眼透镜阵列、准直物镜,起到了缩小系统体积,提高光能利用率和照明均匀性,以及实现照明光斑大小尺寸可调的作用。其球幕内壁刻有角度分划尺,用于测量被测镜头的视场角。测试系统的照明视场范围为φ8.1 mm~φ36.3 mm,照度均匀度达到91%,光通量大于5 000 lm,且大小可调。检测系统可实现对芯片尺寸为0.55″~1.55″的1DLP、3DLP、3LCD、3LCOS的各种类型的数字投影或放映鱼眼镜头的像方视场角、分辨率、彩色还原性能、色差等性能和放映效果进行测试,降低了检测成本,通用性强。     

Finite-Difference-Time-Domain Analysis for Electro-Magnetic Field Distribution on Near-Field Optical Recording Probe Head

In recent years there has been a strong trend and movement towards digitalism and high memory capacity in the multi-media field including digital movies. It is expected that new kinds of high density data storage to match this environment will be developed. The optical disk system using near-field optics and technology is considered to be a strong candidate for ultra-high density optical memory. In order to realize a new optical recording system we have focused on the writing head with high optical efficiency and resolution. We evaluated the properties of pyramidal probe heads using the FDTD (finite difference time domain) method and obtained simulation results in order to find the best structure and design for new near-field optical probes. From these results, we understood that a novel probe structure having metal layers on just 3 side planes (scoop type) shows the best performance in optical power density and beam size. We believe that optical enhancement and beam confinement arise from the effect of surface plasmon on a metal layer and the beam blocking of metal, respectively. Using this scoop-type probe having a tip size of 55 nm, we can get a very small spot size of 33 #x00D7; 60 nm² in FWHM (full with half maximum), which allows us to realize the recording density of 300 Gb/in².     

Optimizing bowtie structure parameters for specific incident light

We investigate optical properties of a bowtie-shaped aperture using the finite difference time domain method to optimize its geometric parameters for specific incident lights.The influence of the parameters on local field enhancement and resonant wavelength in the visible frequency range is numerically analysed.It is found that the major resonance of the spectrum is exponentially depended on the bowtie angle but independent of the whole aperture size.The simulation also demonstrates that increasing the aperture size raises the local field intensity on the exit plane due to an enlarged interaction area between the light and the metal medium.And the near-field spot size is closely related to the gap.Based on these results,the design rules of the bowtie structure can be optimized for specific wavelengths excited.     

径向偏振光束激发的金属纳米球-纳米圆盘间隙模式等离激元共振光谱特性研究

提出了一种可用于表面增强拉曼测量的基于金属纳米圆盘上方放置金属纳米球颗粒构成的金属纳米结构，其在径向偏振光束激发下，由于金属纳米圆盘的呼吸模式表面等离激元共振的作用，可以形成纵向电场有效增强的间隙模式等离激元共振。对此进行了有限元模拟计算研究，计算结果证明该间隙模式的纵向电场分量相对于径向偏振入射光的有效激发横向电场分量增强了100倍以上。为了更清晰地展现这种新型纳米结构的光谱特性以及表面电场分布特征，同时对单个金属纳米圆盘，单个金属纳米球，金属薄膜，金属纳米球-金属薄膜这几种纳米结构在同一个模拟计算框架下进行了计算以及比较分析。由于可以把金属纳米球类比为金属探针的尖端，所提出的新型间隙模式也有望在针尖型拉曼增强中得到应用。     

一种快速测量共聚焦X射线分析装置探测微元尺寸方法

共聚焦X射线荧光技术是一种无损的三维光谱分析技术,在材料,生物,矿物样品分析,考古,证物溯源等领域具有广泛应用。共聚焦X射线荧光谱仪的核心部件为两个多毛细管X光透镜。一个为多毛细管X光会聚透镜（PFXRL）,其存在一后焦点,作用是把X光管所发出的发散X射线会聚成几十微米大小的高增益焦斑。另一透镜为多毛细管X光平行束透镜（PPXRL）,其存在一几十微米大小前焦点,置于X射线能量探测器前端,其作用是接收特定区域的X射线荧光信号。在共聚焦Ｘ射线荧光谱仪中,PFXRL的后焦点与PPXRL的前焦点重合,所形成的区域称作探测微元。只有置于探测微元区域的样品能够被谱仪检测到,使样品与探测微元相对移动,逐点扫描,便能够对样品进行三维无损的X射线分析。探测微元的尺寸决定共聚焦X射线荧光谱仪的空间分辨率,因此精确测量谱仪的探测微元的尺寸是非常重要的。如图1所示,谱仪探测微元可以近似为椭球体,其尺寸可以用水平方向分辨率X, Y,和深度分辨率Z表示。目前,常采用金属细丝或金属薄膜通过刀口扫描的方法测量谱仪探测微元尺寸。为了精确的从三个维度测量探测微元尺寸,金属细丝直径要小于探测微元尺寸。金属细丝和探测微元都是数十微米级别的尺寸大小,很难把金属靠近探测微元。为了得到探测微元在不同X射线能量下尺寸变化曲线,要采用多种金属细丝测量。采用单个金属细丝依次测量比较耗费时间。采用金属薄膜可以很方便地测量探测微元的深度分辨率Z,但是当测量水平分辨率X, Y时,难以准确测量。为了解决以上谱仪探测微元测量中存在的问题,本文提出采用多种金属丝平行粘贴在硬纸片上作为样品用于快速测量探测微元尺寸。附有金属细丝的硬纸片靠近谱仪探测微元,可以将探测微元置于硬纸片所在平面。由于硬纸片与金属细丝在同一水平面,在谱仪摄像头的协助下,可以把金属细丝迅速的靠近探测微元。靠近探测微元后,在全自动三维样品台的协助下,金属细丝沿两个方向对探测微元分别进行一次二维扫描。通过对二维扫描数据的处理便可以获得探测微元尺寸随入射X射线能量变化曲线。采用此方法对实验室所搭建的共聚焦X射线荧光谱仪的探测微元进行了测量。     

数值模拟探针诱导表面等离子体共振耦合纳米光刻

采用有损耗介质和色散介质的二维时域有限差分方法,数值模拟了以光波长514.5nm的p偏振基模高斯光束为入射光源,激发Kretschmann型表面等离子体共振,并通过探针的局域场增强效应实现纳米光刻的新方法——探针诱导表面等离子体共振耦合纳米光刻.分别就探针与记录层的间距以及探针针尖大小,模拟分析了不同情况下探针的局域场增强效应和记录层表面的相对电场强度振幅分布.结果表明,探针工作在接触模式时,探针的局域场增强效应最明显,记录层表面的相对电场强度振幅的对比度最大;当探针针尖距记录层5nm时,针尖下方记录层表面的相对电场强度振幅大于光刻临界值的分布宽度与针尖尺寸相近. 关键词： 纳米光刻 表面等离子体共振 时域有限差分方法     

Geometrical phase and surface plasmon focusing with azimuthal polarization

Owing to a geometric phase effect, an isosceles triangular aperture etched into thin metal film leads to constructive or destructive interference of surface plasmons excited at the two equal sides under linearly polarized illumination. Through appropriate spatial arrangement of an array of triangles, a highly confined focal spot beyond the diffraction limit can be achieved at the geometric center under azimuthally polarized excitation with field enhancement comparable to a bull's eye plasmonic lens under radially polarized illumination. Through simply rotating the orientation of each triangle aperture by 90°, the plasmonic structure defocuses the same azimuthal polarization illumination due to destructive interference caused by a geometric π-phase difference between the two sides of the triangle and between the adjacent triangles.     

金属覆层光纤探针近场特性研究

采用有限积分法对用于近场光学显微镜的旋转对称光纤探针进行了数值模拟计算,研究了光纤探针开口附近亚波长范围的电磁场及其能量密度的分布.计算结果表明,在探针外,光场为沿探针轴线方向的近逝波,其空间光场的分布与激励光场及其极化方向有关,在激励光场的极化方向出现了由感应电荷引起的边缘增强效应.同时研究了近场光纤探针的空间分辨率和样品处的电磁场能量,结果表明光纤探针孔的尺寸及其与样品的作用距离是影响探针的分辨率和样品内电磁场能量的重要因素.     

Recent progress of nano-technology with NSOM

Recent progress of nano-technology with near-field scanning optical microscope (NSOM) is surveyed in this article. We focus mainly on NSOM, nano-scale spectroscopy with NSOM, probe technology of NSOM, and study of nano-structured metallic surface with NSOM. First, we follow developments of aperture NSOM and apertureless NSOM, and then address progress of NSOM-combined spectroscopy which is so sufficiently advanced with apertureless NSOM technology to provide chemical information on length scales of a few nanometers. Recent achievement of nano-scale Raman and IR spectroscopy will be introduced. Finally, research on nano-optic elements using surface plasmon polariton with NSOM is introduced as an example of NSOM applications to nano-structured metallic surfaces.     

超越SNOM探针通光孔径尺寸的金属纳米间隙超分辨测量

采用电磁场有限元方法,数值模拟了孔径型扫描近场光学显微镜(aperture Scanning Near-field Optical Microscopy,a-SNOM)在照明模式下的工作过程.针对金偶极天线结构,改变天线长度和纳米间隙尺寸,计算了a-SNOM探针孔径的远场辐射速率随探针端面中心坐标变化的扫描曲线,实现了超越a-SNOM探针通光孔径尺寸的天线金属纳米间隙的超分辨测量,对于100nm通光孔径的探针,可分辨最小尺寸为10nm(0.016倍波长)的金属间隙.通过对比金属和介质偶极天线的a-SNOM探针远场辐射速率测量的计算结果,表明天线金属纳米间隙的超分辨测量的实现是由于金属间隙表面等离激元的激发.     

Near-Field Scanning Optical Microscopy Combined with a Tapping Mode Atomic Force Microscope

Tapping mode atomic force microscopy is used to control the tip-sample distance in near field scanning optical microscopy (NSOM), which gives both topographic and near-field images simultaneously. The evanescent waves are scattered by a vibrating silicon-nitride tip in the proximity of sample surfaces and are detected through a microscope objective. This NSOM allows the observation of opaque samples with reflection illumination. A glass grating of 1-μm pitch and an InP grating of 0.5-μm pitch are observed with a lateral resolution of 100 nm.Presented at 1996 International Workshop on Interferometry (IWI ‘96), August 27-29, Saitama, Japan     

基于双表面等离子激元吸收的纳米光刻

光刻技术(lithography)是微纳结构制备的关键技术之一.受限于光的衍射极限,传统光刻方法进一步缩小特征尺寸变得越来越难.表面等离子激元(surface plasmon polariton,SPP)作为光与金属表面自由电子密度振荡相互耦合形成的一种特殊电磁形式,具有波长短、场密度大、异常色散等特点,在突破传统光学衍射极限的研究和应用中具有重要的学术和实用价值.本文针对SPP在光刻胶中的非线性吸收及其在大视场纳米光刻中的应用进行了理论和实验探索.在回顾SPP概念的基础上,阐述了双SPP吸收的概念及其应用于纳米光刻的优势,明确了该效应具有与传统双光子吸收不同的内涵和特性.在800和400nm飞秒激光的作用下,实现了基于双SPP吸收效应的周期干涉条纹,同时验证了双SPP吸收的闽值效应,通过控制曝光计量实现了图形线宽的调控,最小线宽小于真空光波长的1/10.利用SPP波长短、场增强的特点,并结合非线性吸收的闽值效应,单次曝光区域比纳米图形尺度大4 5个数量级,曝光区域的直径可达1.6 mm.同时制备出较为复杂的同心圆环结构.基于双SPP吸收独有的特性以及SPP丰富的模式,有望进一步在大光刻视场、超小尺度图形光刻技术上获得突破.     

用于CF-LCoS LED照明的大角度复眼系统共轭成像优化设计

根据LED发光特性以及彩色滤光片式硅基液晶芯片特性,从成像光学的角度导出了复眼照明系统的基本成像公式.在此基础上由彩色滤光片式硅基液晶芯片目标区域的大小及其对光束入射角以及LED经整形以后的光斑尺寸与发散角的要求,根据推导的复眼系统的基本成像公式计算彩色滤光片式硅基液晶芯片复眼照明系统的初始结构,利用复眼照明系统中的多重共轭成像关系,将复眼成像,中继透镜成像分别优化,最后将两者通过孔径与中间像匹配的基本要求进行复眼阵列组合,设计了基于彩色滤光片式硅基液晶芯片的大照度入射光下的复眼照明系统.该系统以较小的复眼数,在保证彩色滤光片式硅基液晶芯片照明要求的条件下,较好地解决了照明系统效率、均匀性与大角度问题.与传统计算方法相比,该方法简单明了.非成像软件的模拟结果证明该方法准确,均匀性好,效率高.实验样机结果验证了本文所提方法的正确性和有效性.