基于双表面等离子激元吸收的纳米光刻

光刻技术(lithography)是微纳结构制备的关键技术之一.受限于光的衍射极限,传统光刻方法进一步缩小特征尺寸变得越来越难.表面等离子激元(surface plasmon polariton,SPP)作为光与金属表面自由电子密度振荡相互耦合形成的一种特殊电磁形式,具有波长短、场密度大、异常色散等特点,在突破传统光学衍射极限的研究和应用中具有重要的学术和实用价值.本文针对SPP在光刻胶中的非线性吸收及其在大视场纳米光刻中的应用进行了理论和实验探索.在回顾SPP概念的基础上,阐述了双SPP吸收的概念及其应用于纳米光刻的优势,明确了该效应具有与传统双光子吸收不同的内涵和特性.在800和400nm飞秒激光的作用下,实现了基于双SPP吸收效应的周期干涉条纹,同时验证了双SPP吸收的闽值效应,通过控制曝光计量实现了图形线宽的调控,最小线宽小于真空光波长的1/10.利用SPP波长短、场增强的特点,并结合非线性吸收的闽值效应,单次曝光区域比纳米图形尺度大4 5个数量级,曝光区域的直径可达1.6 mm.同时制备出较为复杂的同心圆环结构.基于双SPP吸收独有的特性以及SPP丰富的模式,有望进一步在大光刻视场、超小尺度图形光刻技术上获得突破.     

Horizontally slotted photonic crystal nanobeam cavity with embedded active nanopillars for ultrafast direct modulation

A horizontally slotted photonic crystal nanobeam cavity with an embedded active nanopillar structure is proposed for ultrafast direct modulation. By designing the thicknesses of both the nanobeam and the horizontal slot layer, the quality factor (Q factor) and the mode volume (Vn ) of the proposed cavity can be engineered independently. As a result, the spontaneous emission (SpE) rate is enhanced with a small Vn of 2.4 while the SpE rate and the cavity photon lifetime have an optimal Q factor of ～ 1000. In our simulation, the modulation bandwidth could be enhanced up to 170 GHz with different emission linewidths of the active nanopillar.     

Optical fiber sensor based on the short-range surface plasmon polariton mode简

The dispersion compensation properties of dual-concentric core photonic crystal fibers are theoretically investigated in this letter. The effects of geometric structure on the dispersion properties of dual-concentric core photonic crystal fibers are carefully studied by finite element method. The first layer of holes around the core area is enlarged in a new manner with the near-core point fixed. Considering the tradeoff among several parameters, results show that the dispersion compensation wavelength and strength can be tuned to desired values by constructing an appropriate design of the geometric structure of photonic crystal fibers.