Sinusoidal phase-modulating laser diode interferometer insensitive to intensity modulation for real-time displacement measurement with feedback control system

In sinusoidal phase modulating laser diode (LD) interferometer, the injection current of the LD is sinusoidally modulated to realize the modulation of the wavelength. However, the light intensity of LD is also modulated, which affects the measurement accuracy. An all-fiber sinusoidal phase modulating LD interferometer for real-time displacement measurement is proposed where the influence of the intensity modulation is eliminated with a new algorithm. It is made clear that an optimal depth of the sinusoidal phase modulation (SPM) exists in the algorithm. Moreover, the SPM depth is locked at the optimal value by controlling the injection current with a feedback control system. The feasibility of the proposed interferometer for displacement measurement is verified by experiments.     

Photothermal modulation of laser diode wavelength: application to sinusoidal phase-modulating interferometer for displacement measurements

In this paper, a novel laser-diode (LD) sinusoidal phase-modulating (SPM) interferometer, which utilizes a photothermal technique for LD wavelength modulation, is proposed to measure displacements with a nanometer accuracy. In conventional LD–SPM interferometers, the LD intensity modulation is concurrent with the wavelength modulation, which increases measurement errors. Using the photothermal technique, the LD wavelength modulation can be accomplished with negligible concomitant intensity modulation, and the measurement errors are thus eliminated. The computer simulations and experiment results verify the usefulness of this novel interferometer.     

Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement

A two-wavelength sinusoidal phase-modulating(SPM) laser diode(LD) interferometer for nanometer accuracy measurement is proposed.To eliminate the error caused by the intensity modulation,the SPM depth of the interference signal is chosen appropriately by varying the amplitude of the modulation current periodically. Then,the refine theory is induced to the measurement,and the two-wavelength interferometer (TWI) is combined with the single-wavelength LD interferometric technique to realize static displacement measurement with nanometer accuracy.Experimental results indicate that a static displacement measurement accuracy of 5 nm can be achieved over a range of 200μm.     

Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer

In this paper, we propose a sinusoidal phase modulating (SPM) interferometer that is insensitive to external disturbances, and its measuring principle is analyzed theoretically. In the SPM interferometer, the interference signal is detected by a high-speed image sensor based on a low-speed CCD and a signal processing circuit is used to obtain the phase of each point on the surface. Therefore, the surface profile can be measured real-time. The experiments measuring the surface profile of a wedge-shaped optical flat show that the measurement time of the SPM interferometer is less than 10 ms, the repetitive measurement accuracy is 4.2 nm. The results show that the impacts of nonlinear distortion of the piezoelectric transducer (PZT) and part external disturbance are removed.     

Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly.The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.     

Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method

<正>The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker.The detected self-mixing signal is processed by the phase reconstruction method.The 1st-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum(FWHM) of 0.13 kHz.The measurement results are verified by the sinusoidal phase modulating(SPM) interferometer.     

Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement

A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60 × 60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.     

物体表面形貌的正弦相位调制实时干涉测量技术研究

表面形貌干涉测量技术是一种高精度的非接触式测量技术,在工业生产和科学研究中具有广泛的应用。提出一种实时测量表面形貌的正弦相位调制干涉测量新技术。该技术用激光二极管作光源,用自制的高速图像传感器探测干涉信号,通过信号处理电路实时解相得到被测表面所对应的相位分布,实时分析相位获得物体表面形貌。该技术消除了光强和部分外界干扰的影响,提高了系统的测量精度。楔形光学平板表面形貌的测量结果表明,测量点为60×60个的情况下,测量时间小于8.2 ms,重复测量精度(RMS)为4.3 nm。     

光栅成像与Lau效应

本文推导了两个光栅干涉仪的光强分布。分析了光栅周期与狭缝宽度比值对Lau条纹的影响。指出有β>p/(2a)的清晰的Lau条纹存在,并在数值计算与实验上加以证实。 关键词：     

Sub-500-nm patterning of glass by nanosecond KrF excimer laser ablation

The surface of flint glass of type F2 is patterned by nanosecond KrF excimer laser ablation. Strong UV absorption provides a comparatively low ablation threshold and precise ablation contours. By using a two-grating interferometer, periodic surface patterns with 330 nm period and 100 nm modulation depth are obtained. This method enables the fabrication of 7 mm×13 mm wide grating areas with perfectly aligned grooves without the need of high-precision sample positioning. By double exposure, crossed gratings with adjustable depths in the two orthogonal directions can be generated.     

High resolution photolithography with sub-wavelength grating

Large area linear and crossed grating structures on steel surfaces are obtained by UV-femtosecond-laser ablation at 248 nm. High resolution on large areas is secured using a beam delivery system based on a two-grating interferometer. Thus, deterministic gratings with periods down to 330 nm and modulation depths of more than 100 nm are fabricated on tool steel and stainless steel. Areas of up to $5\,\mathrm{mm}\times 13\, $ mm can be processed without stitching errors.     

基于偏振位相调制的位相轮廓测量

本文介绍了一种用来测量三维物体面形的位相轮廓方法，它是通过将正弦光场投影到被测物面，该光场被物体表面调制后发生位相改变，利用偏振位相调制及位相检测算法计算物面的位相分布，再根据几何关系实现对物体三维形貌的测量。实验装置采用一种偏振位相调制的干涉光场投影装置对光场进行简便而精确的移相，采用ＣＣＤ摄像机记录畸变光场，并用计算机处理和显示测量结果。文中给出了有关实验结果。     

Sinusoidal fringe projection system based on compact and non-mechanical scanning low-coherence Michelson interferometer for three-dimensional shape measurement

We report a sinusoidal fringe projection system based on superluminiscent diode (SLD) as a broad-band light source in conjunction with an acousto-optic tunable filter (AOTF) as frequency tuning device for three-dimensional shape measurement. The present system is based on a compact low-coherence Michelson interferometer system. The conventional interferometric system was modified in which one side of the beam splitter was coated with aluminum oxide which is used as reference mirror. With this modified version, interference fringes can easily be obtained by simply placing the external mirror in contact on the other side of beam splitter. Sinusoidal fringes with multiple spatial-carrier frequency can be generated in real-time using the present system by means of changing the radio-frequency signal to AOTF electronically without mechanically moving any component in the system. The present system was tested by projecting the sinusoidal fringes on a step-like object and 3D shape of the object was reconstructed using Fourier transform fringe analysis technique. The main advantages of the proposed system are completely non-mechanical scanning, easy to align, high stability because of its nearly common-path geometry and compactness.     

X射线干涉仪实现扫描探针显微镜样板线间距纳米测量

X射线干涉仪以非常稳定的单晶硅晶格作为长度单位 ,可以实现亚纳米精度的微位移测量。提出了将 X射线干涉仪和扫描隧道显微镜结合起来 ,利用单晶硅的晶格尺度测量扫描探针显微镜样板节距的技术方案 ,并进行了实验研究     

A new pixel matching method using the entire modulation of the measured object in online PMP

A method using entire modulation information of the measured object itself for pixel matching is proposed in online phase measuring profilometry (PMP). Only one fixed sinusoidal grating is projected onto the moving measured object and then five deformed patterns are captured by the imaging system (CCD). Because the contrast of the sinusoidal grating is a constant, the modulation distribution of each deformed pattern reflecting the gray of the measured region can be extracted. The entire modulation of the object cut from one of them is regarded as a template, and then the distance of the measured object's movement between each two adjacent deformed pattern can be calculated by the correlation operation so that we can cut the corresponding parts containing the measured object's information from five deformed patterns. Then the discrete phase can be calculated with Stoilov algorithm. By the phase unwrapping and the mapping algorithm, the object can be reconstructed exactly. A series of simulations and experiments confirm its feasibility and validity.     

锗红外干涉仪

本文叙述了一个锗制的红外干涉仪,它可供在2—11微米的红外区域内测定有机液体色散曲线之用。用此干涉仪测量了液体苯及氯仿在2—6微米区域内的色散曲线,所得结果与前人数据相比,符合良好。     

Simultaneous Measurement of Refractive Index and Thickness of Transparent Plates by Low Coherence Interferometry

We demonstrate a novel low coherence Michelson interferometer which can provide simultaneous measurement of the refractive index and thickness of transparent plates used as a measured object. Unlike the existing low coherence interferometers reported so far, either an object or a focusing lens aligned on the signal arm is scanned repeatedly by a precise translation stage in synchronization with movement of a reflection mirror on the reference arm. The so-called object or lens scanning method gives us two measured quantities a movement distance of the stage between two light focusing states on the front and rear planes of an object and the corresponding optical path difference. These two measured quantities, result in desirable values of the index and thickness of the object with a short calculation. The measurement accuracy of ≤0.1% is expected for a thickness of more than 1 mm. In the experiment using the object scanning method, the accuracy of 0.3% or less was successfully attained for nearly 1-mm thick plates of fused quartz, sapphire, LiTaO₃ and slide glass.     

On the horizontal wobbling of an object levitated by near-field acoustic levitation

A circular planar object can be levitated with several hundreds of microns by ultrasonic near-field acoustic levitation (NFAL). However, when both the sound source and the levitated object are circularly shaped and the center of the levitated object does not coincide with the source center, instability problem often occurs. When this happens, it becomes difficult to pick up or transport the object for the next process. In this study, when the center of the levitated object was offset from the source center, the moving direction of the levitated object was predicted by using the time averaged potential around the levitated object. The wobbling frequency of the levitated object was calculated by analyzing the nonlinear wobbling motion of the object. It was shown that the predicted wobbling frequencies agreed with measured ones well. Finally, a safe zone was suggested to avoid the unstable movement of an object.     

一种基于PMP的圆型流水线上工件的三维在线检测方法

提出了一种基于PMP原理的对圆形流水线上工件面形进行在线检测的方法。利用DLP将一环形正弦光栅图投射在圆型流水线上某一区域，使用相移器在物体运动方向的垂直方向上进行相移，实现了圆周运动物体各物点相移一致性，同时由于相移方向与物体移动方向垂直，工件移动不会影响相移量，相移量可以较精确地控制。通过采用参考标记和图像旋转恢复可实现N帧变形条纹图像的像素匹配，从而提取三维物体的截断相位，经过相位展开，得到连续相位，并由相位最后解调出物体的高度信息。通过计算机仿真验证了方法的可行性。该方法具有在线、快速，非接触性等特点。     

Double-grating interferometer with a one-to-one correspondence with a Michelson interferometer

We describe a double-grating interferometer that has a one-to-one correspondence with a Michelson interferometer. The half spatial periods of the gratings are equivalent to the wavelengths of the interferometer. The widths of the interference fringes can be changed easily. The intensity distribution of the interference pattern is independent of the wavelength of the light source used. The surface profile of an object can be measured because two interference beams can coincide precisely on the image plane of the object. The measuring range is much larger than that of a Michelson interferometer.