中心波长14.95μm超窄带滤光片的研制

讨论了大气探测红外分光辐射计第1光谱通道超窄带滤光片的研制情况。采用富碲碲化铅材料作为高折射率膜层材料,通过控制沉积速率、沉积温度、真空度等工艺参数,镀制的膜层具有小的自由载流子浓度,整个膜系具有低的光吸收和高的透射能量。研制出入射光束半锥角Φ为18°时,中心波长14.95μm、带宽0.065μm、相对带宽小于0.5%的长波CO2超窄带滤光片。该超窄带滤光片已实现空间应用5年,在天气预报数据获取中工作稳定。     

光锥角对窄带滤光片透射率的影响及补偿方法

全介质膜窄带滤光片因具有优良的光学性能、较强的工艺性和空间环境适应性被广泛应用于空间多光谱遥感仪器中,但锥光束入射导致的中心波长漂移问题严重影响此类窄带滤光片的光谱选择性能。为了研究光锥角对窄带滤光片透射率特性的影响,设计了非规整型全介质膜窄带滤光片,分析了高斯光束倾斜入射窄带滤光片导致透射率的变化,建立了非均匀照度下锥光束正入射时窄带滤光片等效透射率的求解模型,定量求解了等效透射率及中心波长漂移量,并对理论模型进行了实验验证。结果表明,锥光束正入射对窄带滤光片透射率的影响主要表现为中心波长的蓝移;在镀膜工艺相对稳定的基础上,理论模型的等效透射率预测精度优于中心波长的0.15%。所以,可以使用等效透射率求解模型定量计算锥光束正入射导致窄带滤光片透射率的变化,并利用中心波长漂移量修正后的设计数据指导滤光片镀膜,进而实现窄带滤光片的高精度光谱选择,这为解决介质膜窄带滤光片因锥光束入射导致的中心波长漂移问题提供了新的技术途径。     

254 nm低通滤光片的研制

根据紫外光学系统的设计要求,在K9基底上研制了254 nm高反射率、可见光谱区高透过率的低通滤光片.根据膜系设计理论,通过针法优化,获得了干涉型低通滤光片的膜系;对电子束蒸镀HfO_2和MgF_2材料进行了研究,解决了材料喷溅的问题,减少了薄膜的吸收;采用考夫曼离子源,通过优化工艺参数,提高膜层致密性,解决了光谱曲线漂移的问题,改善了成膜质量.     

红外滤光片低温光谱特性研究

低温光谱是红外滤光片一项重要的考核参数，采用傅里叶光谱仪测试了红外滤光片在安装滤光片架前后的常温和85K低温光谱，同时利用有限元分析方法模拟了85K的红外滤光片安装滤光片支架前后的形变和应力，分析和比较了试验结果，为进一步优化红外滤光片的可靠性设计提供了参考。     

Q开关Nd:YAG脉冲激光对红外滤光片的损伤效应

 介绍了由滤光片膜层结构决定的激光在光学薄膜中形成温度场及驻波场特性。用1.06μm调Q Nd:YAG激光器，在激光脉冲宽度10ns和光斑直径0.61μm的条件下，进行了激光辐照红外滤光片的损伤特性实验研究。根据脉冲激光辐照红外滤光片后样品损伤分析，发现滤光片的最初损伤发生在里面的膜层中，从而在实验上验证了计算得到的滤光片膜层中存在其温度场及驻波场的结果。它对提高红外滤光片的抗激光辐照能力研究具有一定的参考价值。     

致冷多层干涉滤光片的光学特性

本文系统地研究了红外多层干涉滤光片的低温特性、并从薄膜的基本光学特性出发,推导了窄带滤光片、截止滤光片透射率与波长的温度效应.给出了截止滤光片截止波长的温度漂移公式.     

屏蔽电磁波和红外的激光滤光片研制

为了研制具有高效电磁屏蔽功能的反红外、透1064nm激光的滤光片,基于金属薄膜诱导理论和多层薄膜的干涉原理,设计了诱导滤光膜的膜系结构,并讨论了金属Ag薄膜厚度误差对滤光片光谱性能的影响。采用离子束辅助沉积的方式制备膜系中的介质薄膜,采用离子束溅射方式制备了金属Ag薄膜;利用放大膜厚控制误差的方法,精确地监控薄层金属Ag膜的沉积厚度,同时避免了Ag膜被氧化。通过工艺实验,制备的滤光片在1064nm激光波长的透射率达到88%以上、中长波红外波段反射率达90%以上,对18～36GHz电磁波屏蔽效能达到23dB以上,具有良好的中长波红外及电磁波屏蔽功能。     

低温对中波红外带通滤光片光谱特性的影响

为考察滤光片在低温环境下的可靠性,镀制了Ge基和宝石基中波带通滤光片,分别实施了5 min、15 min、25 min、35 min、120 min、300 min的液氮低温试验,并测试出其透过率曲线,考察低温对其光谱特性及膜层牢固度的影响。带通滤光片通带区透过率随低温时间增长有逐渐下降趋势,中心波长出现13 nm的微小偏移,是所镀制的膜料高、低折射率相对变化使中心波长和截止波长的比值发生变化所致。Ge基材料对温度更为敏感,在由常温到低温过渡期间,Ge基中波滤光片通带透过率降低幅度比宝石基底的中波带通滤光片大10%。在300 min以内的低温环境下,2种中波红外带通滤光片均未出现膜层脱落现象。     

带缓冲层的导模共振滤光片反射光谱特性

将均质多层膜系设计中的缓冲层概念引入到反射导模共振滤光片的设计中,以研究缓冲层的增加对导模共振滤光片反射光谱特性的影响.设计并通过严格的耦合波理论计算了一、二、三、四通道导模共振反射滤光片光谱特性.在膜系设计中增加缓冲层后.随着其厚度的逐渐增加.反射光谱中依次出现二、三、四个窄带反射峰;缓冲层厚度为796.35 nm时.当滤光片光栅层占空比在0.2～O.9范围内、光栅深度在100～200 nm变化时,共振峰的位置、反射率峰值高度几乎不变,保持了很好的多通道滤光片特性.     

红外中带滤光片的结构、带宽估算及调整

中波红外波段在航天、气象、遥感等领域有着重要的应用，为了提高信噪比，系统中经常使用高质量的红外中带滤光片。相对带宽是红外中带滤光片重要的指标，主要取决于光学薄膜的膜系结构和具体设计。首先给出双截止组合型、F-P型、多半波型等几种膜系结构，归纳了相对带宽估算公式。同时从实用性出发，对一些具体膜系结构进行了相对带宽估算和综合分析，结果表明多半波结构最为可行。针对多半波结构，提出了间隔层膜料和光学厚度的选择、采用等效膜、调整膜层折射率等相对带宽调整的方法。最后，利用上述相对带宽调整方法对红外中带滤光片进行了设计，给出了实际镀制结果，滤光片相对带宽指标满足设计要求。     

Optimal Design of Thin Film Filters for IR Integrated Photonic Amplifiers

This paper addresses in the design of thin film filter for IR broadband integrated photonic amplifiers. A cascaded multilayer medium thin film filter structure is presented. This proposed filter consists of some different filtering unit cells with different central wavelength and bandwidth, and each cell can suppress certain peak gain at a specific wavelength. The intrinsical gain spectrum of amplifier is obtained by solving a set of rate and power propagation equations with finite difference time-domain(FDTD)-based overlapping integral-Runge Kutter(RK) method. The effect of transmittance spectrum of the proposed cascaded multilayer medium thin film filter on flattening gain is discussed. The transmission function of the cascaded multilayer medium thin film filter is obtained. Finally, a real device is fabricated, it is shown that the design is valid.     

Bireflectance thin film in a high beat frequency laser

This paper investigates a kind of bireflectance thin film on the window plate of a 633 nm He–Ne laser. The film is coated on the substrate with the application of external load on it. The load on the substrate is removed after the coating has been accomplished, then the strain on the substrate will be transferred to the multilayer coatings. Due to photoelastic effect, the multilayer film becomes an anisotropic film. Selecting appropriate film structure and suitable center wavelength, a high phase dispersion with nearly constant reflectivity around the working wavelength will be obtained. For normal incidence, a sufficient phase shift difference between the two orthogonal polarization states of the reflected wave will be produced. As a result, a dual-frequency laser with a beat frequency of 5 MHz can be carried out by using this kind of multilayer film. The theory of designing such a film is emphasized and an example of bireflectance thin film is proposed.     

Optical and electrical properties of PbTe films grown by laser induced evaporation of pressed PbTe pellets

A simple and cheap method has been developed for the deposition of lead telluride thin films on glass substrates by pulsed Nd:YAG laser evaporation of lead telluride pellets made of high purity Pb and Te powders.Preliminary characterization of the crystallographic and optical properties of the films has been performed as a function of the substrate temperature.The influence of deposition conditions on the sheet resistance of these thin films has been studied. Both deposition temperature, nitrogen pressure during deposition, and addition of Ga and As impurities in the source pellets have been considered.     

Focusing diffused waveguides

Focusing optical fibre and thin film guide can be made to have nearly the same group velocity for every mode if the optimum distribution of refractive index or thickness of the film is realized. A focusing optical fibre is manufactured from a multilayer glass rod by solid state diffusion. A thin film waveguide is prepared from nitrocellulose by controlling the airflow distribution. Undulation of light propagating in the film is observed, and it is confirmed that the focusing property is determined by the distribution of the film thickness. The field distributions of the TE modes have been analysed for an optical waveguide fabricated by solid state diffusion. Glass waveguide has been manufactured with the appropriate concentration of lead ions to give the maximum propagation constant. A low loss waveguide is fabricated by the diffusion of lead or thallium ion into glass followed by selective etching.     

Dependence of wavDependence of wavefront errors on nonuniformity of thin films

In contrast to uncoated substrate, a nonlinear relationship of phase shift with the thicknesses of the thin film makes the calculation of wavefront aberration complicated. A program is compiled to calculate the wavefront aberration of multilayer thin film produced by thickness nonuniformity. The physical thickness and the optical phase change on reflection are considered. As an example, the wavefront aberration of the all-dielectric mirror is presented in ArF excimer lithography system with a typical thickness distribution. In addition, the wavefront errors of the thin film at wavelengths of 193 and 633 nm are compared in the one-piece and two-piece arrangements. Results show that the phase shift upon reflection of the thin film produced by thickness nonuniformity is very sensitive to the incident angle, wavelength, and polarization.     

Mechanism of manganese (mono and di) telluride thin-film formation and properties

Mechanistic studies on the electrocrystallization of manganese telluride (MnTe) thin film are reported using aqueous acidic solution containing MnSO₄ and TeO₂. Tartaric acid was used for the inhibition of hydrated manganese oxide anodic growth at counter electrode. A detailed study on the mechanistic aspect of electrochemical growth of MnTe using cyclic voltametry is carried out. Conditions for electrochemical growth of manganese mono and di telluride thin films have been reported using cyclic voltammetric scans for Mn²⁺, Te⁴⁺ and combined Mn²⁺ and Te⁴⁺. X-ray diffraction showed the formation of polycrystalline MnTe films with cubic, hexagonal and orthorhombic mixed phases. MnTe film morphology was studied using scanning electron microscope. Susceptibility and electrical characterization supports the anti-ferromagnetic behavior of the as-deposited MnTe thin film.     

光学薄膜的等离子体离子镀的研究

根据薄膜沉积过程等离子体对光学薄膜膜蒸气分子或原子的作用，建立低压等离子体离子镀设备，并对常规光学薄膜、如硫化物、氧化物薄膜以及多层膜器件进行了系统的研究，对所制备薄膜样品的透射光谱、吸收、散射以及膜层的聚集密度等进行了全面的测试分析。实验研究表明，低压等离子体离子镀可大大提高常规光学薄膜的光机性能。     

碲化铋薄膜载能粒子相互作用的超快研究

碲化铋禁带宽度非常窄而具有高电导率和塞贝克系数,同时具有低热导率,成为已知室温下优值系数最高的热电材料。已有研究表明,纳米薄膜和超晶格是进一步提高材料热电性能的可行途径。因此超快研究碲化铋纳米薄膜中载能子间的相互作用过程对开发高性能热电材料有重要意义。本文采用飞秒激光泵浦-探测技术,实验研究了沉积在硅基底上厚度为100 nm碲化铋薄膜中各载能粒子的相互作用过程。通过改变延迟时间步长,分别观察到价带电子被光子激发跃迁至导带,激发电子在导带内与声子的能量弛豫及导带电子与空穴复合跃迁至价带,并将能量传递给声子导致声子温度升高的过程。此外,还观察到热应力产生的声波,并据此得到了碲化铋薄膜中纵波声速为2649 m s^-1。     

Ultrathin multilayer of Fe and Ge: structure and magnetic properties

Metal-semiconductor multilayers are interesting, artificial structures as prospective candidates for spin injection devices. A Fe–Ge multilayer sample with very thin individual layers (few crystallographic planes) has been deposited by sputtering on Si[1 0 0] substrate. We have characterized the structure of this multilayer sample using X-ray diffraction, X-ray reflectometry and neutron reflectometry. The magnetic moment density in the ferromagnetic Fe layer has been obtained by polarized neutron reflectometry and the bulk magnetic behavior of the thin film by SQUID magnetometer measurements. We found that the film is a soft ferromagnet at room temperature with a substantially reduced magnetic moment of the Fe atoms.     

Tunability and linewidth sharpening of plasmon resonances on a periodic gold nanowire array coupled to a thin textured silver film

We theoretically study the plasmon mode spectrum of a multilayer structure consisting of a periodic gold nanowire array and a spatially separated thin silver film with periodic slits. Results show that the plasmon mode spectrum of the multilayer structure depends sensitively on the relative lateral displacement of the Au nanowire array with respect to the textured silver film. This is due to the interaction between the localized surface plasmon (LSP) of the nanowire array and the plasmon modes, including the horizontal LSP and the antisymmetric short-range surface plasmon polariton (SPP), of the textured thin silver film. The strong coupling between the LSP and the antisymmetric short-range SPP results in a redshifted plasmon resonance with a significantly narrow linewidth and a large electromagnetic field enhancement. Moreover, the lateral displacement also has a great influence on the spacer layer controlled dipole-surface interaction. Therefore, this relative lateral displacement provides an efficient way to tune the optical properties of the multilayer structure, and this kind of highly tunable nanostructure can be used as a tunable plasmonic filter or a substrate for LSPs sensor.