基于斜向背散射偏振拉曼光谱的{100}c-Si面内应力分析

复杂应力状态下应力分量的解耦分析对半导体的设计和制造具有重要意义。本文开展了方法学研究,首先建立了{100}晶面族单晶硅面内应力分量解耦分析模型,基于该模型,通过改变入射光和散射光的几何构型和偏振构型,可得到单晶硅拉曼频移与应力分量的解析关系。在此基础上,提出了一种利用斜向背散射偏振拉曼光谱在不同倾角、偏振方向和样品旋转角度下开展原位拉曼探测实现应力分量解耦分析的实用技术。本文通过实验验证了该方法的可靠性和适用性。     

Untersuchungen zur Empfindlichkeit der β-Rückstreumethode bei der Messung dünner Auftragsschichten mit einem 11C-Spezialpräparat

Die Bestimmung dünner Auftragsschichten auf bewegten Trāgermaterialien mit der β-Rūckstreumethode hängt wesentlich von der Empfindlichkeit der Messung und der Dynamik des Prozesses ab.

In diesem Beitrag wird für spezielle Stoffe der Einfluβ der Trāgermaterialien bei Mehrschichtproblemen auf die Empfindlichkeit untersucht.     

激光陀螺中背向散射的研究

为了研究谐振腔形状变化对激光陀螺中背向散射的影响,基于矢量叠加理论,分析了激光陀螺背向散射源及其对总的背向散射的影响.根据背向散射对顺逆时针光的耦合作用,推导出了总的背向散射系数与顺逆时针旋转光光强的关系式.基于这一关系,设计实验,通过施加电压使谐振腔反射镜到不同位置来改变光腔形状变化,同时测量光强交流量的振幅,得到了总的背向散射系数的变化曲线.通过与仿真结果对比,验证了背向散射的矢量叠加理论.     

kHz激光器在武汉卫星观测站的测距实验

高重复频率激光器是kHz卫星激光测距系统的重要组成部分,提高激光发射频率可以有效地获得更多的观测数据,这是当今卫星激光测距领域的发展方向.针对武汉卫星观测站进行的kHz激光测距实验,介绍了kHz激光器的工作过程和原理,分析了影响高重复频率回波探测的因素.实验结果表明:对实验过程中所观测到的中低轨卫星,观测数据量提高了1...     

Structural and optical properties of waveguides in YbVO4 crystals formed by 3.0 MeV Cu-ions implantation

We report on the structural and optical characterization of waveguides formed in YbVO₄ crystals by Cu²⁺-ion implantation with an energy of 3.0 MeV and doses of 3.0×10¹⁴-1.0×10¹⁵ ions/cm². The damage properties are determined by RBS/Channeling measurements with the help of simulation code RUMP. The m-line method is used to characterize the dark-mode spectroscopy in the planar waveguides. According to the reconstructed refractive index profile of the waveguide cross section, a numerical simulation is carried out to investigate the confinement of the light in the waveguides based on the beam propagation method.     

Engineering of hydrophilic and plasmonic properties of Ag thin film by atom beam irradiation

Hydrophilic Ag nanostructures were synthesized by physical vapour deposition of 5 nm Ag thin films followed by irradiation with 1.5 keV Ar atoms. Optical absorbance measurements show a characteristic surface plasmon resonance absorption band in visible region. A blue-shift in absorbance from 532 to 450 nm is observed with increasing fluence from 1 × 10¹⁶ to 3 × 10¹⁶ atoms/cm². Atomic force microscopy was performed for the pristine and irradiated samples to study the surface morphology. The atom beam irradiation induced sputtering and surface diffusion lead to the formation of plasmonic surface. Rutherford backscattering spectroscopy of the pristine and irradiated film indicates that metal content in the film decreases with ion fluence, which is attributed to the sputtering of Ag by Ar atoms. The contact angle measurement demonstrates the possibility of engineering the hydrophilicity by atom beam irradiation.     

铒离子注入碳化硅的射程和退火行为研究

用300—500 keV能量的铒(Er)离子注入碳化硅(6H-SiC)晶体中,利用卢瑟福背散射技术研究了剂量为5×10¹⁵ cm^-2 的Er离子注入6H-SiC晶体的平均投影射程R_p和射程离散ΔR_p,将测出的实验值和TRIM软件得到的理论模拟值进行了比较,发现R_p的实验值与理论值符合较好,ΔR_p的实验值和理论值差别大一些 关键词： 离子注入 投影射程和射程离散 退火行为 卢瑟福背散射技术     

Study on the Range of Particles Size Measured by Backscattering Method in Visual‐infrared Incident Spectrum

For the measurement of particles size with backscattering method, the suitable range of particles size measurement have been presented by independent algorithm in Visual‐infrared incident spectrum. We defined the range according to the retrieved results based on the analysis and comparison to many kinds of R‐R distribution function. The simulation computation results showed that the particles size measurement range is from 0.05 μm to 18 μm with incident spectrum from 0.4 μm to 2 μm and different refractive index. The results retrieved were satisfied even if 1 % noise was added into the backscattering intensity.     

氧离子辐照二氧化钛单晶后的结构与磁性

氧离子辐照二氧化钛单晶可以诱发其铁磁性．辐照后在室温下也能观察到二氧化钛的铁磁性,且对温度依赖性较小．结合X射线衍射实验、卢瑟福背散射/沟道实验、拉曼散射实验谱、电子自旋共振实验谱、超导量子干涉仪实验、单位原子随沟道位移实验,测定了晶格的损伤随辐照流强的增加而增加．发现在氧离子辐照二氧化钛时出现了Ti³⁺替代氧空位(O_V)的缺陷复合体,即形成Ti³⁺-OV复合体．这种缺陷复合体导致了局部(TiO_6-x)的拉曼模式的伸展．说明了Ti³⁺结合一个未成对的3d电子是二氧化钛局部铁磁性的起源.     

水下激光探测系统的水体后向散射光计算与光学参数估计

针对水下激光探测系统的水体后向散射光的计算,给出了系统的光学几何结构,分析了不同距离处的激光光斑与接收视场区域的位置变化关系并进行了定量计算。依据光传输理论建立了水体后向散射光的计算模型,根据模型的算法步骤编写了计算机程序。结合水下激光探测系统的具体参数进行了实例计算,绘制了后向散射光信号波形,并与试验获取的信号波形对比分析,验证了算法的可行性和正确性。研究了使用实测后向散射光信号数据估计水体光学特性参数的方法,通过估算的参数重新绘制曲线并反向叠加在测量数据曲线上以抵消水体后向散射光对目标信号的影响从而能够提取目标信息。