X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

杨村烟煤快速液化反应性的研究

用共振搅拌反应器研究了杨村烟煤的高温快速液化。研究发现，在体系保持较高活性氢浓度时，适当提高反应温度，缩短反应时间——在短时间内达到较高的煤转化率,即高温快速液化是可行的。高温快速液化的最佳反应温度正是热重曲线反映的煤活泼热解温度范围的上限。从液化产物看，高温快速液化反应产物中苯可溶物占绝大多数，这对于煤液化产物的进一步利用非常有利。     

A Quick Color Test to Detect Lead Release From Glazed Ceramic and Enameled Metalware

Abstract

A color test is presented for the purpose of quickly identifying glazed ceramic and/or enameled metalware which releases excessive Pb. Citric acid solution on filter paper is used to extract Pb from the ware and a Pb-sensitive chromogen indicates the presence of Pb on the paper. The quick color test takes approximately 30 min and is useful for screening ware to determine the need for testing by the 24-h method of the Association of Official Analytical Chemists/American Society for Testing and Materials.     

表面增强拉曼光谱对西地那非类药物的快速检测

采用表面增强拉曼光谱(SERS)技术并结合简单的前处理流程,对保健品样品中11种西地那非类药物进行了非定向快速筛查研究.结果表明,11种西地那非类药物可根据结构分为5类,类别之间SERS谱图差异显著;类别内SERS谱图具有共性特征,特征峰相对强度差异明显.实际样品的检测中,西地那非类药物的最低检出浓度约为0.05 mg/kg;前处理和测试的总时长约为3~5 min,且与检测目标物和样品无关.本方法高灵敏度、快速和非定向检测的设计理念为快速检测保健品中违禁添加药物提供了新思路和新方法.     

Annealing effect on the structural and magnetic properties of nickel ferrite thin films

Nickel ferrite is a soft magnetic material with inverse spinel structure. Soft ferrite films are used in microwave devices, integrated planar circuits, etc., because of their high resistivity. In this work, thin films of nickel ferrite were deposited on Si (100) substrate by using pulsed laser deposition (PLD) technique. The thickness of the film was measured by surface profilometer and also by X‐ray reflectivity (XRR). The films were annealed at three different temperatures to observe the effect on the structural and magnetic properties of the film. The films were characterised by X‐ray diffraction (XRD), Raman spectroscopy and vibrating sample magnetometer (VSM) to study the structural and magnetic properties. Copyright © 2010 John Wiley & Sons, Ltd.     

Structural and magnetic study of swift heavy ion irradiated W/Fe multilayer structure

The present study reports the effect of swift heavy ion irradiation on structural and magnetic properties of sputtered W/Fe multilayer structure (MLS) having bilayer compositions of [W(10 Å)/Fe(20 Å)]_10BL. The MLS is irradiated by 120 MeV Au⁹⁺ ions of fluences 1×10¹³ and 4×10¹³ ions/cm². Techniques like X-ray reflectivity (XRR), cross-sectional transmission electron microscopy (X-TEM) and DC magnetization with a vibrating sample magnetometer (VSM) are used for structural and magnetic characterization of pristine and irradiated MLS. Analysis of XRR data using Parratt’s formalism shows a significant increase in W/Fe layer roughness. X-TEM studies reveal that intra-layer microstructure of Fe layers in MLS becomes nano-crystalline on irradiation. DC magnetization study shows that with spacer layer thickness interlayer coupling changes between ferromagnetic to antiferromagnetic.     

差分光学吸收光谱法研究卷烟主流烟气NO_2

利用差分光学吸收光谱(DOAS)仪对不同品牌卷烟主流烟气中的NO2进行连续、实时、在线测量,使用RM200型转盘式20孔道吸烟机,一次将20只卷烟顺序输送到吸烟转盘上,间隔3 S依次点火,并将卷烟烟气通入与之直接相连的总光程为31.5 m的怀特池,利用差分光学吸收光谱技术,町在6～7 min之内完成对整只卷烟的逐口测量.提高了测量结果的时间分辨率.抽吸开始时,怀特池气压被抽到5.2×104Pa,所有卷烟完成测量时,气压恢复到1.03×105Pa;抽吸结束后,怀特池中NO2的浓度在0.89 mg/m3和1.54 mg/m3之间.比较不同品牌的卷烟,主流烟气中NO2浓度有明显差别,特别是混和型卷烟比烤烟型高83%,该技术对卷烟烟气成分的快速检测提供了,一种简便的方法.     

自动快速燃烧－离子色谱测定铜精矿中的氟

建立了自动快速燃烧（AQF）－离子色谱联用测定铜精矿中氟的方法。将 AQF 的自动化特性和离子色谱的灵敏度高、准确性好的特点结合起来,能够实现操作过程的连续自动化。结果表明,线性范围内（1.0?50.0 μg )校准曲线相关系数 r >0. 999,氟的检出限为0.0004%。按照实验方法测定铜精矿样品中氟,结果的相对标准偏差（ RSD ,n =6)为2.14 % ?4.24 %。将实验方法用于铜精矿标准样品氟含量测定,测定值与认定值吻合较好;方法对照试验表明,实验方法对氟含量的测定值与国家标准 GB/T 3884. 12—2010的测定值基本一致。     

Correction method for the self‐absorption effects in fluorescence extended X‐ray absorption fine structure on multilayer samples

A novel correction method for self‐absorption effects is proposed for extended X‐ray absorption fine structure (EXAFS) detected in the fluorescence mode on multilayer samples. The effects of refraction and multiple reflection at the interfaces are fully considered in this correction method. The correction is performed in k‐space before any further data analysis, and it can be applied to single‐layer or multilayer samples with flat surfaces and without thickness limit when the model parameters for the samples are known. The validity of this method is verified by the fluorescence EXAFS data collected for a Cr/C multilayer sample measured at different experimental geometries.     

快速响应高压电源在KTP晶体极化反转中的应用研究

分析了KTP晶体电导率的特性,设计与研制出一种新型的高压脉冲放大器,可将任意信号发生器产生的信号线性放大,响应速度快,最高输出电压为4000V,最大输出电流为30mA,功率可达100W.用其在KTP晶体上进行多次极化反转实验,取得良好的实验结果.