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Fabrication and Characterization of Ni Thin Films Using Direct-Current Magnetron Sputtering 总被引:1,自引:0,他引:1 下载免费PDF全文
Ni films are deposited by using ultra high vacuum dc magnetron sputtering onto silicon substrates at room temperature, and the high-quality and high-density films are prepared. The parameters, such as thickness, density and surface roughness, are obtained by using small-angle x-ray diffraction (XRD) analyses with the Marquardt gradient-expansion algorithm. The deposition rate is calculated and the Ni single layer can be fabricated precisely. Based on the fitting results, we can find that the surface roughness of the Ni films is about 0.7nm, the densities of Ni films are around 97% and the deposition rate is 0.26nm/s. The roughness of the surface is also characterized by using an atomic force microscope (AFM). The changing trend of the surface roughness in the simulation of XRD is in good agreement with the AFM measurement. 相似文献
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硅元素对土壤中有效营养元素的影响 总被引:1,自引:0,他引:1
本文研究了硅元素对土壤中有效营养元素的影响。研究结果表明,该元素提高土壤对有效氮,钾的供给能力,调节铁锰比例和钙,锌,锰的供给。施硅量适当时,可使甘蔗增加产量和含糖分。 相似文献
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HE Meng LIU Guo-Zhen XIANG Wen-Feng Lü Hui-Bin JIN Kui-Juan ZHOU Yue-Liang YANG Guo-Zhen 《中国物理快报》2007,24(9):2671-2674
A series of amorphous and single-crystalline LaAlO3 (LAO) thin films are fabricated by laser molecular-beam epitaxy technique on Si substrates under various conditions of deposition. The structure stability of the LAO films annealed in high temperature and various ambients is studied by x-ray diffraction as well as high-resolution transmission electron microscopy. The results show that the epitaxial LAO films have very good stability, and the structures of amorphous LAO thin films depend strongly on the conditions of deposition and post-annealing. The results reveal that the formation of LAO composition during the deposition is very important for the structure stability of LAO thin films. 相似文献
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Focusing Properties of Fractal Zone Plates with Variable Lacunarity:Experimental Studies Based on Liquid Crystal on Silicon 下载免费PDF全文
The focusing properties of fractal zone plates (FZPs) with different structure parameters are studied experimentally. The axial irradiance of FZPs is deduced at n=4. The experimental results are in good agreement with the theoretical prediction. A method to fabricate FZPs with variable structure parameters is mentioned, and the liquid-crystal-on-silicon device is used to implement this experiment. The experimental results indicate that the focal depth of lower order FZPs is larger than that of higher order FZPs. 相似文献
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通过对硅元素发现历程的考证分析可知,17、18世纪随着科学实验的兴起以及元素观的发展,科学家以实践为基础,运用逻辑思维和直觉思维预见了硅元素的存在;19世纪随着电化学和分析化学的发展,科学家们成功制取无定形硅和晶体硅;20世纪30年代,硅同位素的发现使人们对硅元素的概念有了新认识。总之,随着科学思想的演进和科学方法的发展,硅元素概念的内涵也在不断发展变化。 相似文献
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Oxygen Precipitation within Denuded Zone Founded by Rapid Thermal Processing in Czochralski Silicon Wafers 下载免费PDF全文
Oxygen precipitation within the magic denuded zone (MDZ) founded by rapid thermal processing in Czochralski silicon (CZ-Si) wafers is investigated. After the standard MDZ process, the CZ-Si wafers are further subjected to two specific oxygen precipitation annealing, respectively. It is found that the MDZs in CZ-Si wafers shrunk notably because oxygen precipitation occurs within the MDZs. However, a width of substantial DZ still remains within the wafer. Therefore, it is believed that the outer region of the MDZs, which corresponds to the oxygen denuded zone formed in the course of rapid thermal process and high temperature annealing, is a substantial defect-free zone which acts as the active area for semiconductor devices. 相似文献
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半导体材料硅,在第三周期IVA族,核外有4个电子,具有较稳定的结构。简述了硅的发展应用史;从化学角度,对单质硅材料、二氧化硅材料、有机硅材料等几个典型材料的元素结构、制备工艺、反应机理和应用机理等方面进行详细分析;总结展望了硅元素未来的发展。 相似文献
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Geometry Parameter Optimization of Large Cross-Sectional S-Shaped Bent Rib Waveguides for Silicon Based Optical Switches 下载免费PDF全文
By using a genetic algorithm, geometry parameters of large cross-sectional S-bend rib waveguides are optimized aiming at the least total loss when the propagation loss is considered. Optimized results axe presented as an example of S-bend rib waveguides based on silicon-on-insulator (SOI) 4 × 4 optical switches. The value of 2 dB/cm is given to the propagation loss according to the experimental results. The simulation results indicate that the total loss drops from 1.0002rib down to 0.4375dB without considering a lateral offset. If the offset is adopted, the total loss reduces from 0.5463dB to 0.2365dB. In addition, the effect of the rib height ratio on the loss is analysed, and the optimal ratio is obtained to be 0.55. 相似文献