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1.
针对VO2薄膜在微测辐射热计上的应用,采用射频反应溅射法,在室温下制备氧化钒薄膜;研究了氧分压对薄膜沉积速率、电学性质及成分的影响.通过调节氧分压,先获得成分接近VO2的非晶化薄膜,再在400℃空气中氧化退火,便可制得高电阻温度系数,低电阻率的VO2薄膜,电阻温度系数约为-4%/℃,薄膜方块电阻为R□为100—300kΩ;薄膜在室温下沉积,400℃下退火的制备方法与微机电加工(micro electromechanic
关键词:
二氧化钒
电阻温度系数
氧分压
射频反应溅射法 相似文献
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A fully coupled formulation combining reactive transport and an existing thermo-hydro-mechanical (THM) code is presented.
Special attention has been given to phenomena likely to be encountered in clay barriers used as part of containment systems
of nuclear waste. The types of processes considered include hydrolysis, complex formation, oxidation/reduction reactions,
acid/base reactions, precipitation/dissolution of minerals and cation exchange. Both kinetically-controlled and equilibrium-controlled
reactions have been incorporated. The total analytical concentrations (including precipitated minerals) are adopted as basic
transport variables and chemical equilibrium is achieved by minimizing Gibbs Free Energy. The formulation has been incorporated
in a general purpose computer code capable of performing numerical analysis of engineering problems. A validation exercise
concerning a laboratory experiment involving the heating and hydration of an expansive compacted clay is described. 相似文献
5.
利用原子力显微镜分析了ZnO薄膜在具有本征氧化层的Si(100)和Si(111)基片上的表面形貌 随沉积时间的演化. 通过对薄膜生长形貌的动力学标度表征,研究了射频反应磁控溅射条件 下,ZnO薄膜的成核过程及生长动力学行为. 研究发现,ZnO在基片表面的成核过程可分为初 期成核阶段、低速率成核阶段和二次成核阶段. 对于Si(100)基片,三个成核阶段的生长指 数分别为β1=1.04,β2=0.25±0.01,β3=0.74;对 于Si(11
关键词:
ZnO薄膜
磁控溅射
生长动力学
成核机制 相似文献
6.
The composition of thin perovskite films, especially the oxygen content, is a crucial parameter which influences many physical properties, such as conductivity and catalytic activity. Films produced by pulsed laser deposition are normally annealed in an oxygen atmosphere after deposition to achieve a desired oxygen content. In pulsed reactive crossed beam laser ablation, no annealing step is necessary, but a fundamental question regarding this deposition technique is still open: where does the oxygen in the films come from?There are three possibilities, i.e. from the target, from the gas background, or from the gas pulse. To answer this question two experiments were performed: 18O2 was used during the deposition process as background gas with 16O anions in the target and 16O2 gas pulse, and a 18O2 gas pulse with 16O from the target and background. These experiments revealed that the quantification of the oxygen origin is only possible, when no oxygen exchange occurs at the deposition temperature. The films are characterized after deposition by elastic recoil detection analysis (ERDA) to determine the 16O/18O ratio. Experiments with different oxidizing species in the gas pulse (N2O and O2) confirm that the oxidizing potential (N2O > O2) as well as the number of molecules are important. 相似文献
7.
反应离子镀光学薄膜的微观结构分析 总被引:2,自引:1,他引:1
用反应离子镀方法制备了TiO2单层膜及TiO2/SiO2多层膜,用透射电子显微镜分别观察了由反应离子镀方法及传统蒸镀法二种不同工艺制得的TiO2单层膜及TiO2/SiO2多层膜的断面结构,并对TiO2单层膜进行了喇曼分析和卢瑟福背散射分析。 相似文献
8.
9.
The solubility and diffusion coefficient of carbon dioxide in intermediate‐moisture starch–water mixtures were determined both experimentally and theoretically at elevated pressures up to 16 MPa at 50 °C. A high‐pressure decay sorption system was assembled to measure the equilibrium CO2 mass uptake by the starch–water system. The experimentally measured solubilities accounted for the estimated swollen volume by Sanchez–Lacombe equation of state (S‐L EOS) were found to increase almost linearly with pressure, yielding 4.0 g CO2/g starch–water system at 16 MPa. Moreover, CO2 solubilities above 5 MPa displayed a solubility increase, which was not contributed by the water fraction in the starch–water mixture. The solubilities, however, showed no dependence on the degree of gelatinization (DG) of starch. The diffusion coefficient of CO2 was found to increase with concentration of dissolved CO2, which is pressure‐dependent, and decrease with increasing DG in the range of 50–100%. A free‐volume‐based diffusion model proposed by Areerat was employed to predict the CO2 diffusivity in terms of pressure, temperature, and the concentration of dissolved CO2. S‐L EOS was once more used to determine the specific free volume of the mixture system. The predicted diffusion coefficients showed to correlate well with the measured values for all starch–water mixtures. © 2005 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 44: 607–621, 2006 相似文献
10.
为了考虑金属材料表面微凸结构对模具与工件接触区域上的非局部摩擦效应,在锥形模圆柱体超塑性挤压加工分析中,采用Oden等提出的非局部摩擦定律代替经典的库仑摩擦定律,利用主应力法或工程法建立了相应问题的积微分形式的力平衡方程.在简化的情况下,采用摄动法求得所论问题的近似解,并分析了影响应力的非局部效应的相关因素. 相似文献