1.3 GHz单cell超导射频腔等离子体清洗放电研究(英文)

场致发射限制超导射频腔加速梯度增长。为了减少超导射频腔场致发射,在室温条件下,设计搭建了1.3GHz单cell超导射频腔等离子体清洗实验装置,开展等离子体清洗放电研究。使用CST软件模拟腔中的电磁场分布并且优化外部品质因数得到合适的放电条件。随着压强、前向功率和含氧量的变化,实验探讨了Ar/Ar-O₂放电的物理特征和电子激发温度的变化趋势。残余气体分析结果表明,Ar/O₂等离子体清洗能够消除腔体内表面的碳化物。Field emission limits the accelerating gradient increase in SRF cavities. In order to reduce field emission of SRF cavities, the plasma processing experimental setup of a 1.3 GHz single-cell SRF cavity is designed and built to carry out plasma processing discharge research at room temperature. The electromagnetic field distribution is simulated and the external quality factor is optimized to provide a suitable discharge condition using CST software. It is explored that the physical property of Ar/Ar-O₂ discharge and the variation trend of electron excitation temperature with the changes of pressure, forward power and O₂ content in experiment. The result of residual gas analysis indicates that Ar/O₂ plasma processing can eliminate the carbide of the inner surface of cavity.