Microstructure evolution and passivation quality of hydrogenated amorphous silicon oxide(a-SiOx:H) on〈100〉- and 〈111〉-orientated c-Si wafers

Hydrogenated amorphous silicon oxide(a-SiOx:H) is an attractive passivation material to suppress epitaxial growth and reduce the parasitic absorption loss in silicon heterojunction(SHJ) solar cells. In this paper, a-SiOx:H layers on different orientated c-Si substrates are fabricated. An optimal effective lifetime(τ(eff)) of 4743 μs and corresponding implied opencircuit voltage(iV(oc)) of 724 mV are obtained on〈100〉-orientated c-Si wafers. While τ(eff) of 2429 μs and iV_oc of 699 mV are achieved on 111-orientated substrate. The FTIR and XPS results indicate that the a-SiOx:H network consists of SiOx(Si-rich), Si–OH, Si–O–SiHx, SiO2 ≡ Si–Si, and O3 ≡ Si–Si. A passivation evolution mechanism is proposed to explain the different passivation results on different c-Si wafers. By modulating the a-SiOx:H layer, the planar silicon heterojunction solar cell can achieve an efficiency of 18.15%.     

免掺杂、非对称异质接触晶体硅太阳电池的研究进展

免掺杂、非对称异质接触的新型太阳电池由于近几年的飞速发展,理论转化效率已达到28%,具有较大的发展空间,引起了人们的重视.由于传统晶硅太阳电池产业存在生产设备成本高、原材料易燃易爆等诸多限制,市场对太阳电池产业低成本、绿色无污染的期待越来越高,极大地增加了免掺杂、非对称异质接触的新型太阳电池研究和开发的必要性.为了进一步加快免掺杂、非对称异质接触晶体硅太阳电池的研究进度,本文对其发展现状进行了综述,着重讨论了过渡金属氧化物(TMO)载流子选择性运输的基本原理、制备技术以及空穴传输层、电子传输层和钝化层对基于TMO构建的免掺杂、非对称异质接触(DASH)太阳电池性能的影响,以期对电池的工作机理、材料选择有更深刻的认识,为新型高效的DASH太阳电池制备提供指导.     

Sub-stochiometric MoOx by radio-frequency magnetron sputtering as hole-selective passivating contacts for silicon heterojunction solar cells

The silicon heterojunction (SHJ) solar cell has long been considered as one of the most promising candidates for the next-generation PV market. Transition metal oxides (TMOs) show good carrier selectivity when combined with c-Si solar cells. This has led to the rapid demonstration of the remarkable potential of TMOs (especially MoO_x) with high work function to replace the p-type a-Si:H emitting layer. MoO_x can induce a strong inversion layer on the interface of n-type c-Si, which is beneficial to the extraction and conduction of holes. In this paper, the radio-frequency (RF) magnetron sputtering is used to deposit MoO_x films. The optical, electrical and structural properties of MoO_x films are measured and analyzed, with focus on the inherent compositions and work function. Then the MoO_x films are applied into SHJ solar cells. When the MoO_x works as a buffer layer between ITO/p-a-Si:H interface in the reference SHJ solar cell, a conversion efficiency of 19.1% can be obtained. When the MoO_x is used as a hole transport layer (HTL), the device indicates a desirable conversion efficiency of 17.5%. To the best of our knowledge, this current efficiency is the highest one for the MoO_x film as HTL by RF sputtering.